公开(公告)号：US20210305006A1

公开(公告)日：2021-09-30

申请号：US16828571

申请日：2020-03-24

Applicant: FEI Company

Inventor： Kun Liu ,  Steven J. Randolph

IPC: H01J37/075 ,  H01J37/28

Abstract: A charged particle beam source, such as for use in an electron microscope, can include an electrically conductive support member coupled to a base, a mounting member coupled to the support member and defining a bore, and an emitter member received in the bore and retained by a fixative material layer flowed around the emitter member in the bore.

公开(公告)号：US10741352B2

公开(公告)日：2020-08-11

申请号：US16474424

申请日：2017-12-15

Applicant: The University of British Columbia ,  The Board of Trustees of the Leland Stanford Junior University

Inventor： Alireza Nojeh ,  Mike H. C. Chang ,  Kais Dridi ,  George Albert Sawatzky ,  Reuben Levi Paul ,  R. Fabian W. Pease

IPC: H01J29/48 ,  H01J33/04 ,  H01J35/14 ,  H01J37/075 ,  H01J37/28

Abstract: An electron beam source is provided that includes a vessel forming a chamber, a cathode disposed within the chamber, the cathode comprising a low dimensional electrically conductive material having an anisotropic restricted thermal conductivity, an electrode disposed in the chamber, the electrode being connectable to a power source for applying a positive voltage to the electrode relative to the cathode for accelerating free electrons away from the cathode to form an electron beam when the cathode is illuminated by electromagnetic (EM) radiation such that the cathode thermionically emits free electrons, and an electron emission window in the chamber for passing a generated electron beam out of the chamber. An electron microscope that incorporates the electron beam source is also provided.

公开(公告)号：US20190096627A1

公开(公告)日：2019-03-28

申请号：US16096938

申请日：2017-02-28

Applicant: BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY

Inventor： Chong-Yu RUAN

IPC: H01J37/075 ,  H01J37/21 ,  H01J37/26 ,  H01J37/073 ,  H01J37/147 ,  H01J49/48

Abstract: An electron spectroscopy system and method are disclosed. In another aspect, an ultrabright and ultrafast angle-resolved electron spectroscopy system is provided. A further aspect of the present system employs an electron gun, a radio frequency cavity and multiple spectrometers. Yet another aspect uses spectrometers in an aligned manner to deflect and focus electrons emitted by the electron gun. Moreover, an ultrafast laser is coupled to an electron spectroscopy system. A bunch of monochromatic electrons have their energy compressed and reoriented in an additional aspect of the present system. A further aspect of the present electron spectroscopy system employs adaptive and/or adjustable optics to optimize both time and energy compression. Another aspect provides at least two RF lenses or cavities, one before a specimen and one after the specimen.

公开(公告)号：US10096447B1

公开(公告)日：2018-10-09

申请号：US15666666

申请日：2017-08-02

Applicant: KLA-Tencor Corporation

Inventor： Xinrong Jiang ,  Christopher Sears

IPC: H01J37/145 ,  H01J37/244 ,  H01J37/28 ,  H01J37/073 ,  H01J37/075 ,  G01N23/2251

Abstract: A magnetic gun lens and an electrostatic gun lens can be used in an electron beam apparatus and can help provide high resolutions for all usable electron beam currents in scanning electron microscope, review, and/or inspection uses. An extracted beam can be directed at a wafer through a beam limiting aperture using the magnetic gun lens. The electron beam also can pass through an electrostatic gun lens after the electron beam passes through the beam limiting aperture.

公开(公告)号：US20160005567A1

公开(公告)日：2016-01-07

申请号：US14851692

申请日：2015-09-11

Applicant: Lawrence Livermore National Security, LLC

Inventor： Bryan W. REED ,  William J. DEHOPE ,  Glenn HUETE ,  Thomas B. LAGRANGE ,  Richard M. SHUTTLESWORTH

IPC: H01J37/075 ,  H01J37/26 ,  H01J37/147

CPC classification number: H01J37/075 ,  H01J37/1472 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/15 ,  H01J2237/151 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2449 ,  H01J2237/24495

Abstract: An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.

Abstract translation: 公开了一种具有激光驱动光电阴极和任意波形发生器（AWG）激光系统（“激光”）的电子显微镜。 激光器产生预定脉冲持续时间和波形的时间上形状的激光脉冲串，并将激光脉冲引导到激光驱动的光电阴极以产生一系列电子脉冲。 图像传感器与偏转器子系统一起使用。 偏转器子系统布置在目标的下游，但是在图像传感器的上游，并且具有彼此垂直布置的两对板。 控制系统控制激光器和与激光器同步的多个切换部件，以独立地控制每个偏转板的激励。 这允许每个电子脉冲被引导到图像传感器的不同部分，并且被提供有独立设置的持续时间并且独立设置脉冲间隔。

公开(公告)号：US20150235800A1

公开(公告)日：2015-08-20

申请号：US14181321

申请日：2014-02-14

Applicant: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC

Inventor： Bryan W. REED ,  William J. DEHOPE ,  Glenn HUETE ,  Thomas B. LAGRANGE ,  Richard M. SHUTTLESWORTH

IPC: H01J37/075 ,  H01J37/147 ,  H01J37/26

CPC classification number: H01J37/075 ,  H01J37/1472 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/15 ,  H01J2237/151 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2449 ,  H01J2237/24495

Abstract: An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.

Abstract translation: 公开了一种具有激光驱动光电阴极和任意波形发生器（AWG）激光系统（“激光”）的电子显微镜。 激光器产生预定的脉冲持续时间和波形的时间激光脉冲串，并将激光脉冲引导到激光驱动的光电阴极以产生一系列电子脉冲。 图像传感器与偏转器子系统一起使用。 偏转器子系统布置在目标的下游，但是在图像传感器的上游，并且具有彼此垂直布置的两对板。 控制系统控制激光器和与激光器同步的多个切换部件，以独立地控制每个偏转板的激励。 这允许每个电子脉冲被引导到图像传感器的不同部分，并且被提供有独立设置的持续时间并且独立设置脉冲间隔。

公开(公告)号：US20150187541A1

公开(公告)日：2015-07-02

申请号：US14578525

申请日：2014-12-22

Applicant: MAPPER LITHOGRAPHY IP B.V

Inventor： Laura DINU-GÜRTLER ,  Eric Petrus HOGERVORST

IPC: H01J37/317 ,  H01J1/15 ,  H01J37/075

CPC classification number: H01J37/3174 ,  G03F7/70058 ,  H01J1/15 ,  H01J1/28 ,  H01J3/027 ,  H01J3/029 ,  H01J37/075 ,  H01J37/3177 ,  H01J2229/481 ,  H01J2237/061

Abstract: The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

Abstract translation: 本发明涉及一种阴极装置，其包括：热离子阴极，其包括具有用于发射电子的发射表面的发射部分和用于保持材料的储存器，其中所述材料在被加热时释放向发射扩散的功函数降低颗粒 以第一蒸发速率发射在发射表面; 聚焦电极，其包括用于聚焦从阴极的发射表面发射的电子的聚焦表面; 以及可调节热源，其被配置为将聚焦表面保持在防止在聚焦表面上降低颗粒的功函数积累的温度。

公开(公告)号：US5933440A

公开(公告)日：1999-08-03

申请号：US109739

申请日：1998-07-02

Applicant: Akira Endo ,  Masakazu Washio

Inventor： Akira Endo ,  Masakazu Washio

IPC: H01J35/06 ,  H01J3/02 ,  H01J37/075 ,  H01S3/098 ,  H01S3/115 ,  H01S3/117 ,  H01S3/139 ,  H05G2/00 ,  H01S3/10

CPC classification number: H01S3/139 ,  H01J3/021 ,  H01S3/1109

Abstract: A master radio-frequency signal output from a master oscillator is input to a frequency converter. The frequency converter generates and outputs a multiplied signal having a frequency higher than that of the master radio-frequency signal by using the master radio-frequency signal. A loss of light reciprocating in an optic resonator of a laser oscillator is controlled by both the master radio-frequency signal output from the master oscillator and the multiplied signal output from the frequency converter. It is possible to highly precisely synchronize a pulse laser beam and a radio-frequency signal.

Abstract translation: 从主振荡器输出的主射频信号被输入到变频器。 频率转换器通过使用主射频信号产生并输出具有高于主射频信号的频率的相乘信号。 在激光振荡器的光学谐振器中往复运动的光的损失由主振荡器输出的主射频信号和从变频器输出的相乘信号两者来控制。 可以高精度地同步脉冲激光束和射频信号。

公开(公告)号：US4803398A

公开(公告)日：1989-02-07

申请号：US881709

申请日：1986-07-03

Applicant: Reinhardt Kraft ,  Horst Ranke

Inventor： Reinhardt Kraft ,  Horst Ranke

IPC: C23C14/30 ,  H01J1/20 ,  H01J3/02 ,  H01J37/06 ,  H01J37/075

CPC classification number: H01J37/075 ,  H01J3/027

Abstract: An electron gun with one directly heatable initial cathode (2), one indirectly heatable second blocking cathode (3) and one focusing electrode (17). The focusing electrode (17) presents an initial centering region (18) and, by means of supporting braces, the blocking cathode (3) is fixed concentrically in a carrier ring (19) presenting a second centering region complementary to the first centering region (18). This permits the blocking cathode (3) to be introduced into the focusing electrode from the back by means of the carrier ring (19), and the carrier ring (19) is secured by means of a locking ring (24).

Abstract translation: 具有一个可直接加热的初始阴极（2），一个间接可加热的第二阻挡阴极（3）和一个聚焦电极（17）的电子枪。 聚焦电极（17）呈现初始定心区域（18），并且通过支撑撑杆将阻挡阴极（3）同心地固定在载体环（19）中，所述载体环（19）具有与第一定心区域互补的第二定心区域 18）。 这允许阻挡阴极（3）通过承载环（19）从背面引入聚焦电极，并且承载环（19）通过锁定环（24）固定。

公开(公告)号：US4346330A

公开(公告)日：1982-08-24

申请号：US140390

申请日：1980-04-14

Applicant: Chunghsin Lee ,  Peter E. Oettinger

Inventor： Chunghsin Lee ,  Peter E. Oettinger

IPC: H01J37/075 ,  H01J3/02 ,  H01J17/52 ,  H01J35/00 ,  H01J35/06 ,  H01J37/06 ,  H03K17/52 ,  H03K17/78 ,  H01J45/00

CPC classification number: H03K17/78 ,  H01J17/52 ,  H01J3/024 ,  H03K17/52

Abstract: Apparatus is disclosed for generating high density pulses of electrons thermionically. The apparatus includes a metallic target maintained within a low pressure cesium vapor atmosphere. A laser rapidly heats the cesiated target surface to a high temperature in a time short compared with the residence time of cesium atoms adsorbed on the target surface. This rapid surface heating in combination with the adsorbed cesium atoms emits copious quantities of electrons forming a high current density pulse.

Abstract translation: 公开了用于产生电子的高密度电子脉冲的装置。 该装置包括保持在低压铯蒸汽气氛中的金属靶。 与吸附在目标表面上的铯原子的停留时间相比，激光在短时间内快速地将澄清的目标表面加热到高温。 这种与吸附的铯原子组合的快速表面加热发射形成高电流密度脉冲的大量电子。