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    Electron gun
    1.
    发明申请
    Electron gun 审中-公开
    电子枪

    公开(公告)号：US20060091776A1

    公开(公告)日：2006-05-04

    申请号：US11251786

    申请日：2005-10-18

    申请人： Takatsugu Munehiro ,  Akira Chiba

    发明人： Takatsugu Munehiro ,  Akira Chiba

    IPC分类号： H01J1/20

    CPC分类号： H01J23/065 ,  H01J3/024 ,  H01J2225/14

    摘要： A disk-shaped cathode pellet is installed and secured by a retainer onto a heater cap that incorporates a heater. The part of this retainer that covers the periphery of the electron emission surface of the cathode pellet functions as a portion of a Wehnelt electrode. Alternatively, the retainer is formed such that the average angle of the surface with respect to the outermost shell of the electron beam matches the Pierce angle such that the part of this retainer that covers the periphery of the electron emission surface of the cathode pellet functions as a Wehnelt electrode.

    摘要翻译： 盘形阴极颗粒通过保持器安装并固定到加热器盖上，该加热器盖包括加热器。 覆盖阴极粒子的电子发射表面周边的该保持器的部分用作Wehnelt电极的一部分。 或者，保持器形成为使得表面相对于电子束的最外壳的平均角度与Pierce角度匹配，使得覆盖阴极丸粒的电子发射表面的周边的该保持器的部分用作 一个Wehnelt电极。

    Laser based electron beam gun
    2.
    发明授权
    Laser based electron beam gun 有权
    基于激光的电子束枪

    公开(公告)号：US06781300B1

    公开(公告)日：2004-08-24

    申请号：US09369522

    申请日：1999-08-06

    申请人： Ralf Klaus Edinger

    发明人： Ralf Klaus Edinger

    IPC分类号： H01J6304

    CPC分类号： H01J3/024 ,  H01J1/135

    摘要： This invention relates to electron guns, each comprising of an indirectly heated cathode, a gate electrode and an anode, for generating electron beams of various shapes and power that are preferably used to machine workpieces. Thus cathodes can be used with various geometric designs. Thus cathodes of the most varied geometrical shapes can be used. Along with band cathodes and band cathodes with bodies attached to them, massive cathodes such as bolt-type cathodes can also be applied. Using massive bodies results in a longer service life of the cathode as compared to band cathodes. Another benefit is that the service life of the heat source for the cathode is identical to the service life of the laser used. It is particularly advantageous to place the laser outside the housing, which ensures a very long service life of this source of heat. At the same time, the solution according to the invention is distinguished by an indirect temperature measurement of the cathode. This allows the radiation property to be controlled and improved. There is thus a type of compensation for the effects of the craters that may occur on the emission surface of the cathode.

    摘要翻译： 本发明涉及电子枪，每个电子枪包括间接加热的阴极，栅电极和阳极，用于产生用于加工工件的各种形状和功率的电子束。 因此，阴极可以用于各种几何设计。 因此，可以使用最差的几何形状的阴极。 随着具有连接到它们的体的带阴极和带阴极，也可以应用诸如螺栓型阴极的大量阴极。 与带阴极相比，使用大块体导致阴极的使用寿命更长。 另一个好处是阴极热源的使用寿命与使用的激光器的使用寿命相同。 将激光放置在壳体外部是特别有利的，这确保了该热源的非常长的使用寿命。 同时，根据本发明的解决方案通过阴极的间接温度测量来区分。 这允许控制和改善辐射特性。 因此，对于可能在阴极的发射表面上可能发生的凹坑的影响，存在一种类型的补偿。

    AN ELECTRON GUN CATHODE MOUNT
    6.
    发明公开
    AN ELECTRON GUN CATHODE MOUNT 审中-公开

    公开(公告)号：US20240128042A1

    公开(公告)日：2024-04-18

    申请号：US18547556

    申请日：2022-02-22

    申请人： TWI Limited

    发明人： Colin RIBTON

    IPC分类号： H01J37/065 ,  H01J1/18 ,  H01J1/88 ,  H01J3/02

    CPC分类号： H01J37/065 ,  H01J1/18 ,  H01J1/88 ,  H01J3/024 ,  H01J2201/19 ,  H01J2203/02

    摘要： The present invention relates to an electron gun cathode mount adapted at one end to secure a thermionic cathode and at the other end to be connected to an attachment member, wherein the electron gun cathode mount is structured so as to be capable of, when in use, reducing heat transfer from the thermionic cathode to the attachment member, and the material forming the electron gun cathode mount has a thermal conductivity of less than 10 Wm−1K−1 at the operating temperature of the thermionic cathode in a direction from the thermionic cathode to the attachment member. The present invention also relates to an electron gun assembly having the electron gun cathode mount installed therein.

    INSPECTION APPARATUS
    7.
    发明申请
    INSPECTION APPARATUS 有权
    检查装置

    公开(公告)号：US20140319345A1

    公开(公告)日：2014-10-30

    申请号：US14258607

    申请日：2014-04-22

    申请人： EBARA CORPORATION

    发明人： Masahiro HATAKEYAMA ,  Yasushi TOMA ,  Shoji YOSHIKAWA ,  Kiwamu TSUKAMOTO

    IPC分类号： H01J37/28

    CPC分类号： H01J37/22 ,  G01N23/2251 ,  G01N2223/204 ,  G01N2223/611 ,  H01J3/024 ,  H01J37/075 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/2448 ,  H01J2237/2806

    摘要： An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The primary optical system includes a photoelectron generator having a photoelectronic surface. The base material of the photoelectronic surface is made of material having a higher thermal conductivity than the thermal conductivity of quartz.

    摘要翻译： 检查装置包括：用于产生任何带电粒子和电磁波作为光束的光束产生装置; 主光学系统，其将光束引导到保持在工作室中的检查对象中，并用该光束照射检查对象; 第二光学系统，其检测从检查对象发生的次级带电粒子; 以及基于检测到的二次带电粒子形成图像的图像处理系统。 主光学系统包括具有光电子表面的光电子发生器。 光电子表面的基材由具有比石英热导率更高的导热性的材料制成。

    Electron gun and electron beam exposure device
    9.
    发明授权
    Electron gun and electron beam exposure device 失效
    电子枪和电子束曝光装置

    公开(公告)号：US06707240B1

    公开(公告)日：2004-03-16

    申请号：US09890959

    申请日：2001-09-28

    申请人： Mamoru Nakasuji ,  Kazuya Okamoto

    发明人： Mamoru Nakasuji ,  Kazuya Okamoto

    IPC分类号： H01J115

    CPC分类号： H01J3/024 ,  H01J37/075 ,  H01J2237/3175

    摘要： An electron gun includes a plate-like main cathode 77 having an electron emitting surface 79 and a sub-cathode 81 provided toward the rear surface of the main cathode to heat the main cathode 77 by imparting an electron bombardment. The sub-cathode 81 is constituted of filaments 83 and 85 coiled in a double helix structure and the diameter of the sub-cathode 81 is larger than the diameter of the main cathode 77. As a result, the temperature at the peripheral area of the electron emitting surface 79 can be set higher than the temperature at the center, to achieve an electron beam with a uniform intensity distribution.

    摘要翻译： 电子枪包括具有电子发射表面79的板状主阴极77和朝向主阴极的后表面设置的副阴极81，以通过施加电子轰击来加热主阴极77。 副阴极81由以双螺旋结构卷绕的细丝83和85构成，并且副阴极81的直径大于主阴极77的直径。因此， 电子发射表面79可以被设置为高于中心处的温度，以实现具有均匀强度分布的电子束。

    Optical coupling to gated photocathodes
    10.
    发明授权
    Optical coupling to gated photocathodes 失效
    光耦合到门控光电阴极

    公开(公告)号：US06399934B1

    公开(公告)日：2002-06-04

    申请号：US09642525

    申请日：2000-08-18

    申请人： Jeffrey S. Sullivan ,  Steven Coyle ,  Andres Fernandez ,  Marian Mankos

    发明人： Jeffrey S. Sullivan ,  Steven Coyle ,  Andres Fernandez ,  Marian Mankos

    IPC分类号： H01J4014

    CPC分类号： H01J3/024 ,  H01J37/073

    摘要： An electron source is disclosed in which control signals having transition times less than about 10 nanoseconds and electrically isolated from a gated photocathode control an electron beam supplied by the gated photocathode. In one embodiment, the electron source includes a transmissive substrate, a photoemitter on the substrate, a gate insulator on the photoemitter, a gate electrode on the gate insulator, a housing enclosing the photoemitter and the gate electrode, a light source located outside the housing, and a detector located in the housing to receive light from the light source. The detector is electrically coupled to control a voltage applied to one of the gate electrode or the photoemitter.

    摘要翻译： 公开了一种电子源，其中具有小于约10纳秒的转换时间和与门控光电阴极电隔离的控制信号控制由门控光电阴极提供的电子束。 在一个实施例中，电子源包括透射衬底，衬底上的光发射器，光发射器上的栅极绝缘体，栅极绝缘体上的栅极电极，封装光电发生器和栅电极的壳体，位于壳体外部的光源 以及位于壳体中的用于接收来自光源的光的检测器。 检测器电耦合以控制施加到栅极电极或光电发射器之一的电压。