Abstract:
In a vacuum pressure control system constituted of a vacuum vessel, a vacuum pump sucking gas in the vacuum vessel, a vacuum proportional opening and closing valve disposed on a pipe connecting the vacuum vessel and the vacuum pump, the vacuum proportional opening and closing valve changing its opening to change the vacuum pressure in the vacuum vessel, a pressure sensor to measure the vacuum pressure in the vacuum vessel and a vacuum pressure control device to control the opening of the vacuum proportional opening and closing valve based on the output of the pressure sensor, the vacuum proportional opening and closing valve is provided with a valve seat, a valve member with a tapered surface in its outer periphery and a pilot valve, the valve member being movable along a center line of the valve seat to change a clearance area between the valve seat and the tapered surface, and the vacuum pressure control device controls a servo valve to change the pressure of air to be supplied to the pilot valve based on the output of the pressure sensor.
Abstract:
A tube connecting apparatus for grasping and heating to melt and alternately connect the cut ends of a plurality of tubes is disclosed. A first tube holder and a second tube holder for grasping the tubes are provided with a pair of clamps having holding portions for holding a plurality of tubes; each of the pair of clamps being moved into contact with, and away from, each other. One or both of the holding portions of the first tube holder and the second tube holder are formed of semi-circular separatable members and having a symmetry of rotation in relation to the center of the rotating axis, and have a grasping means for moving into contact with, and away from, the pair of clamps and have a rotating means for rotating the semi-circular holding portions of one or both of the first tube holder and the second tube holder.
Abstract:
A manifold comprising a supply port, an exhaust port and an output port in which two on-off valves or more different in the number of the output ports or output types are mounted on a manifold base, wherein the two on-off valves or more are mounted on the manifold base in the same direction, and the distance from the manifold base to the outside of the two on-off valves or more is constant.
Abstract:
A fluid pressure cylinder includes a cylinder body, a piston accommodated in the cylinder body to define first and second pressure chambers therein, means for supplying fluid to each chamber to reciprocate the piston between a first stroke end and a second stroke end, first and second bumper surfaces, an annular cushion retainer connected to the first bumper surface, and an elastomeric cushion for deforming and cushioning an impact produced when the piston reaches the first stroke end. The bumper surfaces approach each other when the piston reaches the first stroke end and separate from one another when the piston moves toward the second stroke end. The cushion has a shape corresponding generally to a hollow conical section. The cushion includes a base section retained by the cushion retainer and a buffer section joined to the base section. The buffer section has an outer surface for contacting the second bumper surface and an inner surface that faces the first bumper surface. The outer surface forms a circular seal with the second bumper surface when the piston approaches the first stroke end. The cushion is flexed such that the buffer section moves toward the first bumper surface. The buffer section moves away from the first bumper surface when the piston moves towards the second stroke end.
Abstract:
A dehumidifier which vaporizes water separated from gas is disclosed. Relatively hot and humid air is cooled and dehumidified by a refrigerating passageway. Water separated from the hot and humid air is drained into a drainage container via a draining pipe. A plurality of fins extending radially are provided on the outer periphery of a heat radiating portion, which is a portion of a refrigerating circuit. Capillary action of the fins enables the fins to absorb water collected in the drainage container. The water contacts the radiating portion where the water is heated and vaporized.
Abstract:
A gas supplying system for supplying a corrosive gas or the like to a semiconductor manufacturing apparatus or the like. A plurality of kinds of component gases are introduced into a chamber and mixed therein to form a desired supply gas. After supplying the desired supply gas, the chamber is evacuated and an inert gas is charged into the chamber to substitute a residual supply gas remaining in the chamber by the inert gas. The evacuation of the chamber and the charging of the inert gas into the chamber are repeated two or more times. Accordingly, the residual supply gas can be efficiently removed from the chamber and substituted by the inert gas.
Abstract:
A thread tensioning apparatus includes a pair of spaced arms that are simultaneously rotatable relative to supports to which the arms are mounted, a brush for catching threads and drawing out the threads from a thread beam, the brush being attached to the arms so as to be movable longitudinally of the arms and extending substantially perpendicularly to the arms, a movable member that is attached to each of the arms so as to be movable in the longitudinal direction of the arms, a comb that is attached to the movable member and extends substantially parallel to the drawing-out brush, a thread arranging brush that is rotatably attached to the movable member and extends substantially parallel to the comb, a pair of spaced clamp bars that are attached to the arms and extend substantially parallel to the drawing-out brush, and a pair of clamp members that are attached to the supports to cooperate with the clamp bars.
Abstract:
A thread separating apparatus separates an outermost thread from a large number of threads arranged substantially parallel and in close proximity to each other within one plane. The apparatus has a movable table that is movable in a direction which is parallel to the plane in which the threads are arranged and which is substantially perpendicular to the threads. A thread guide member and a thread separating device project from the movable table in the direction of movement of the movable table. The guide member has a slit in which threads are to be aligned. The thread separating device has a pair of separating members which can be opened and closed as desired to separate the outermost thread from the other threads. The movable table is further provided with a detector for detecting in a non-contact manner a diameter of thread which is to be separated, and a switch that is activated by the separated thread.