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    Method of forming a semiconductor device
    31.
    发明申请
    Method of forming a semiconductor device 有权
    形成半导体器件的方法

    公开(公告)号：US20070287299A1

    公开(公告)日：2007-12-13

    申请号：US11711781

    申请日：2007-02-28

    申请人： Doo-youl Lee ,  Suk-joo Lee ,  Yool Kang ,  Han-ku Cho ,  Chang-jin Kang ,  Jae-ok Yoo ,  Sung-chan Park

    发明人： Doo-youl Lee ,  Suk-joo Lee ,  Yool Kang ,  Han-ku Cho ,  Chang-jin Kang ,  Jae-ok Yoo ,  Sung-chan Park

    IPC分类号： H01L21/266

    CPC分类号： H01L21/0337

    摘要： A method of forming a semiconductor device includes forming a first mask pattern on a target layer, the first mask pattern exposing a first portion of the target layer, forming an intermediate material layer, including depositing an intermediate material layer film on a side of the first mask pattern and the first portion of the target layer, and thinning the intermediate material layer film to form the intermediate material layer, forming a second mask pattern that exposes a second portion of the intermediate material layer, removing the exposed second portion of the intermediate material layer to expose the target layer, and patterning the target layer using the first and second mask patterns as patterning masks.

    摘要翻译： 形成半导体器件的方法包括：在目标层上形成第一掩模图案，第一掩模图案暴露目标层的第一部分，形成中间材料层，包括在第一掩模图案的一侧上沉积中间材料层膜 掩模图案和目标层的第一部分，并且使中间材料层膜变薄以形成中间材料层，形成暴露中间材料层的第二部分的第二掩模图案，去除中间材料的暴露的第二部分 层以露出目标层，以及使用第一和第二掩模图案作为图案掩模来图案化目标层。

    Method of fabricating semiconductor device having capacitor
    33.
    发明授权
    Method of fabricating semiconductor device having capacitor 有权
    制造具有电容器的半导体器件的方法

    公开(公告)号：US07291531B2

    公开(公告)日：2007-11-06

    申请号：US11048995

    申请日：2005-02-02

    申请人： Sung-Il Cho ,  Seung-Young Son ,  Chang-Jin Kang ,  Kyeong-Koo Chi ,  Ji-Chul Shin

    发明人： Sung-Il Cho ,  Seung-Young Son ,  Chang-Jin Kang ,  Kyeong-Koo Chi ,  Ji-Chul Shin

    IPC分类号： H01L21/8242

    CPC分类号： H01L28/91 ,  H01L21/3142 ,  H01L21/31616 ,  H01L21/31645 ,  H01L21/32136 ,  H01L27/10855

    摘要： Methods are provided for fabricating semiconductor devices having capacitors, which prevent lower electrodes of the capacitors from breaking or collapsing and which provide increased capacitance of the capacitors. For instance, a method includes forming a first insulating layer on a semiconductor substrate, forming a first hole in the first insulating layer, forming a contact plug in the first hole, forming a second insulating layer having a landing pad, wherein the landing pad contacts an upper surface of the contact plug, forming an etch stop layer on the landing pad and the second insulating layer, forming a third insulating layer on the etch stop layer; forming a third hole through the third insulating layer and etch stop layer to expose the landing pad, selectively etching the exposed landing pad, forming a lower electrode on the selectively etched landing pad, and then forming a capacitor by forming a dielectric layer and an upper electrode on the lower electrode.

    摘要翻译： 提供了用于制造具有电容器的半导体器件的方法，其阻止电容器的下部电极断开或塌缩并且提供电容器的增加的电容。 例如，一种方法包括在半导体衬底上形成第一绝缘层，在第一绝缘层中形成第一孔，在第一孔中形成接触塞，形成具有着陆垫的第二绝缘层，其中， 接触插塞的上表面，在着陆焊盘和第二绝缘层上形成蚀刻停止层，在蚀刻停止层上形成第三绝缘层; 通过第三绝缘层和蚀刻停止层形成第三孔以暴露着陆焊盘，选择性地蚀刻暴露的着陆焊盘，在选择性蚀刻的焊盘上形成下电极，然后通过形成电介质层和上层 电极在下电极上。

    Optical pickup apparatus and optimal light spot focusing method
    35.
    发明授权
    Optical pickup apparatus and optimal light spot focusing method 有权
    光拾取装置和最佳光点聚焦法

    公开(公告)号：US07280458B2

    公开(公告)日：2007-10-09

    申请号：US10120786

    申请日：2002-04-12

    申请人： Yong-jae Lee ,  Sung-ro Go ,  Pyong-yong Seong ,  Chang-jin Yang ,  Gi-bong Song ,  Byung-in Ma ,  Jong-koog Lee

    发明人： Yong-jae Lee ,  Sung-ro Go ,  Pyong-yong Seong ,  Chang-jin Yang ,  Gi-bong Song ,  Byung-in Ma ,  Jong-koog Lee

    IPC分类号： G11B7/95

    CPC分类号： G11B7/131 ,  G11B7/00718 ,  G11B7/094 ,  G11B7/0941 ,  G11B7/0943 ,  G11B7/0946 ,  G11B7/0956 ,  G11B7/1275 ,  G11B7/1353 ,  G11B7/1367 ,  G11B7/139 ,  G11B7/13922 ,  G11B2007/0006

    摘要： An optical pickup apparatus includes a first light source to emit a first light beam having a predetermined wavelength, a first optical path changer to change a proceeding path of the first light beam, an objective lens to focus the first light beam on a recording medium, a diffraction member to divide the first light beam reflected by the recording medium into five light regions, the diffraction member having a first diffraction region having a wide width in a direction corresponding to a tangential direction of the recording medium and second through fifth diffraction regions sequentially arranged around the outside of the first diffraction region in a direction corresponding to a radial direction of the recording medium, and a first photodetector having first through fifth light receiving portions to receive the first light beam reflected by the recording medium.

    摘要翻译： 一种光拾取装置包括：发射具有预定波长的第一光束的第一光源;改变第一光束的行进路径的第一光路改变器;将第一光束聚焦在记录介质上的物镜; 衍射构件，用于将由记录介质反射的第一光束分成五个光区域，衍射构件具有在与记录介质的切线方向对应的方向上具有宽宽度的第一衍射区域和第二至第五衍射区域 在与所述记录介质的径向对应的方向上围绕所述第一衍射区域的外侧布置;以及第一光电检测器，具有第一至第五光接收部分，以接收由所述记录介质反射的所述第一光束。

    Semiconductor device having self-aligned contact plug and method for fabricating the same
    36.
    发明授权
    Semiconductor device having self-aligned contact plug and method for fabricating the same 有权
    具有自对准接触插塞的半导体器件及其制造方法

    公开(公告)号：US07256143B2

    公开(公告)日：2007-08-14

    申请号：US11058670

    申请日：2005-02-15

    申请人： Myeong-Cheol Kim ,  Chang-Jin Kang ,  Kyeong-Koo Chi ,  Seung-Young Son

    发明人： Myeong-Cheol Kim ,  Chang-Jin Kang ,  Kyeong-Koo Chi ,  Seung-Young Son

    IPC分类号： H01L21/31

    CPC分类号： H01L21/76831 ,  H01L21/76897 ,  H01L23/5226 ,  H01L27/10814 ,  H01L27/10855 ,  H01L2924/0002 ,  H01L2924/00

    摘要： Provided are a semiconductor device having a self-aligned contact plug and a method of fabricating the semiconductor device. The semiconductor device includes conductive patterns, a first interlayer insulating layer, a first spacer, a second interlayer insulating layer, and a contact plug. In each conductive pattern, a conductive layer and a capping layer are sequentially deposited on an insulating layer over a semiconductor substrate. The first interlayer insulating layer fills spaces between the conductive patterns and has a height such that when the first interlayer insulating layer is placed on the insulating layer, the first interlayer insulating layer is lower than a top surface of the capping layer but higher than a top surface of the conductive layer. The first spacer surrounds the outer surface of the capping layer on the first interlayer insulating layer. The second interlayer insulating layer covers the first interlayer insulating layer, the capping layer, and the first spacer and has a planarized top surface. The contact plug passes through the second interlayer insulating layer, the first interlayer insulating layer, and the insulating layer between the conductive patterns, is electrically connected to the semiconductor substrate, has an outerwall surrounded by a second spacer, and is self-aligned with the capping layer.

    摘要翻译： 提供一种具有自对准接触插塞的半导体器件和制造半导体器件的方法。 半导体器件包括导电图案，第一层间绝缘层，第一间隔物，第二层间绝缘层和接触塞。 在每个导电图案中，导电层和覆盖层依次沉积在半导体衬底上的绝缘层上。 第一层间绝缘层填充导电图案之间的空间，并且具有这样的高度，使得当第一层间绝缘层放置在绝缘层上时，第一层间绝缘层低于封盖层的顶表面，但高于顶部 导电层的表面。 第一间隔件包围第一层间绝缘层上的覆盖层的外表面。 第二层间绝缘层覆盖第一层间绝缘层，覆盖层和第一间隔物，并且具有平坦化的顶表面。 接触插塞穿过第二层间绝缘层，第一层间绝缘层和导电图案之间的绝缘层电连接到半导体衬底，具有由第二间隔物包围的外壁，并且与 盖层

    ADAPTIVE WRITING METHOD FOR HIGH-DENSITY OPTICAL RECORDING APPARATUS AND CIRCUIT THEREOF
    37.
    发明申请
    ADAPTIVE WRITING METHOD FOR HIGH-DENSITY OPTICAL RECORDING APPARATUS AND CIRCUIT THEREOF 有权
    适用于高密度光记录装置及其电路的自适应写入方法

    公开(公告)号：US20070153659A1

    公开(公告)日：2007-07-05

    申请号：US11685538

    申请日：2007-03-13

    申请人： Jin-gyo Seo ,  Seong-sin Joo ,  Du-seop Yoon ,  Myung-do Roh ,  Yong-jin Ahn ,  Seoung-soo Kim ,  Kyung-geun Lee ,  Myeong-ho Cho ,  Chang-jin Yang ,  Jong-kyu Kim ,  Sung-ro Ko ,  Tatsuhiro Ohtsuka

    发明人： Jin-gyo Seo ,  Seong-sin Joo ,  Du-seop Yoon ,  Myung-do Roh ,  Yong-jin Ahn ,  Seoung-soo Kim ,  Kyung-geun Lee ,  Myeong-ho Cho ,  Chang-jin Yang ,  Jong-kyu Kim ,  Sung-ro Ko ,  Tatsuhiro Ohtsuka

    IPC分类号： G11B7/0045

    CPC分类号： G11B7/00456 ,  G11B7/0062 ,  G11B7/00718 ,  G11B7/126 ,  G11B7/1267 ,  G11B20/10009

    摘要： An adaptive writing method of a high-density optical recording apparatus and a circuit thereof. The circuit includes a discriminator for discriminating a magnitude of a present mark of input NRZI data and magnitudes of leading and/or trailing spaces of the input NRZI data, a generator for controlling the waveform of a write pulse in accordance with the magnitude of the present mark of the input NRZI data and the magnitudes of the leading and/or trailing spaces of the input NRZI data to generate an adaptive write pulse, and a driver for driving a light source by converting the adaptive write pulse into a current signal in accordance with driving power levels for respective channels of the adaptive write pulse. The widths of the first and/or last pulses of the write pulse waveform are varied in accordance with the magnitude of the present mark of input NRZI data and the magnitude of the leading and/or trailing spaces, thereby minimizing jitter to enhance system reliability and performance.

    摘要翻译： 一种高密度光记录装置的自适应写入方法及其电路。 该电路包括鉴别器，用于鉴别输入NRZI数据的当前标记的大小和输入的NRZI数据的前导和/或尾部空间的大小，根据本发明的幅度控制写入脉冲的波形的发生器 输入NRZI数据的标记和输入NRZI数据的前导和/或尾部空间的大小以产生自适应写入脉冲;以及驱动器，用于通过将自适应写入脉冲转换为电流信号来驱动光源 驱动自适应写入脉冲的各个通道的功率电平。 写入脉冲波形的第一和/或最后脉冲的宽度根据输入NRZI数据的当前标记的大小和前导和/或尾随空格的大小而变化，从而最小化抖动以增强系统可靠性， 性能。

    Apparatus and method for controlling fan drive in computer system
    39.
    发明授权
    Apparatus and method for controlling fan drive in computer system 有权
    用于控制计算机系统中风扇驱动的装置和方法

    公开(公告)号：US07190142B2

    公开(公告)日：2007-03-13

    申请号：US10811850

    申请日：2004-03-30

    申请人： Chang Jin Ha

    发明人： Chang Jin Ha

    IPC分类号： G05B11/28 ,  G06F1/20

    CPC分类号： H05K7/20209 ,  G06F1/206 ,  Y02D10/16

    摘要： Embodiments of an apparatus and method can control a fan drive in a computer system. Such embodiments of apparatus and methods can alternately output a plurality of pulse width modulation (PWM) control signals at a predetermined time ratio and variably control a rotation speed of a cooling fan. The embodiments can use simple hardware based upon N-bit resolution in a PWM control signal generator included in the computer system for controlling the rotation speed of the cooling fan decreasing an internal temperature, such that the rotation speed of the cooling fan can be precisely and variably controlled, equally with the effect of an operation for controlling the fan drive using hardware based upon resolution of more than the N bits. Further, a physical configuration can be effectively simplified, and unnecessary power consumption can be reduced or prevented.

    摘要翻译： 装置和方法的实施例可以控制计算机系统中的风扇驱动器。 装置和方法的这种实施例可以以预定的时间比率交替地输出多个脉冲宽度调制（PWM）控制信号，并可变地控制冷却风扇的转速。 这些实施例可以在包括在计算机系统中的PWM控制信号发生器中使用基于N位分辨率的简单硬件来控制冷却风扇的转速降低内部温度，使得冷却风扇的转速可以精确地和 可变地控制，同样地基于使用基于大于N位的分辨率的硬件来控制风扇驱动器的操作的效果。 此外，可以有效地简化物理配置，并且可以减少或防止不必要的功率消耗。

    SMALL OBJECT MOVING ON PRINTED CIRCUIT BOARD
    40.
    发明申请
    SMALL OBJECT MOVING ON PRINTED CIRCUIT BOARD 审中-公开
    打印电路板上的小物体移动

    公开(公告)号：US20070023292A1

    公开(公告)日：2007-02-01

    申请号：US11460188

    申请日：2006-07-26

    申请人： Chang-Jin Kim ,  Jian Gong

    发明人： Chang-Jin Kim ,  Jian Gong

    IPC分类号： B03C5/02

    CPC分类号： F04B19/006 ,  B01F13/0076 ,  B01L3/502792 ,  B01L2300/0819 ,  B01L2300/089 ,  B01L2400/0421 ,  B01L2400/0424 ,  B01L2400/0427

    摘要： A printed circuit board based digital or droplet microfluidic system and method for producing such microfluidic system are disclosed. The digital microfluidic device comprises a printed circuit board having a substrate and a plurality of electrode pads disposed on the top surface of the substrate in a rectangular array. A via extends from each electrode pad through the substrate to other locations on the substrate . A dielectric layer is disposed on the electrode pads. Droplets may be manipulated using electrowetting principles and others by applying a voltage to the desired electrodes. Each electrode pad can be controlled directly and independently from the other electrode pads to modify the surface wettability of the dielectric layer in the vicinity of the electrode pad by applying a voltage to the desired electrode pad(s). In this way, droplets may be formed, moved, mixed, and/or divided or other small objects manipulated while in air or immersed in a liquid on the dielectric surface.

    摘要翻译： 公开了一种用于生产这种微流体系统的基于印刷电路板的数字或液滴微流体系统和方法。 数字微流体装置包括具有衬底的印刷电路板和以矩形阵列布置在衬底的顶表面上的多个电极焊盘。 通孔从每个电极焊盘穿过衬底延伸到衬底上的其它位置。 电介质层设置在电极焊盘上。 可以使用电润湿原理和其它步骤通过向期望的电极施加电压来操纵液滴。 每个电极焊盘可以直接和独立于其他电极焊盘进行控制，以通过向期望的电极焊盘施加电压来改变电极焊盘附近的电介质层的表面润湿性。 以这种方式，液滴可以被形成，移动，混合和/或分割，或者在空气中被操纵的其它小物体或浸在电介质表面上的液体中。