公开(公告)号：US09395531B2

公开(公告)日：2016-07-19

申请号：US13782527

申请日：2013-03-06

Applicant: Silicon Light Machines Corporation

Inventor： Michael Yeung

IPC: G09G3/34 ,  G02B26/00 ,  G02B26/08 ,  G09G3/20

CPC classification number: G02B26/00 ,  G02B26/0808 ,  G09G3/2011 ,  G09G3/3473 ,  G09G2300/0426 ,  G09G2310/0272

Abstract: A spatial light modulator (SLM) module and methods of designing, manufacturing and using the same are provided. In one embodiment, the SLM module comprises a diffractive, diffractive SLM formed on a substrate, the SLM including a plurality of pixels each including a plurality of electrostatically deflectable actuators, and a driver including a number of drive channels each coupled to one of the plurality of electrostatically deflectable actuators. Each of the drive channels include at least one internal digital-to-analog converter (DAC) integrally formed on the same substrate as the SLM. In one embodiment, the DAC is a multi-slope charge integrating DAC. In other embodiments, the driver includes circuitry to test each of the drive channels, and a spare drive channel that can be switched in to replace a defective drive channel.

Abstract translation: 提供了空间光调制器（SLM）模块及其设计，制造和使用的方法。 在一个实施例中，SLM模块包括形成在衬底上的衍射衍射SLM，SLM包括多个像素，每个像素包括多个可静电偏转的致动器，以及驱动器，其包括多个驱动通道，每个驱动通道耦合到多个 的静电偏转致动器。 每个驱动通道包括与SLM一体形成在同一衬底上的至少一个内部数模转换器（DAC）。 在一个实施例中，DAC是多斜率电荷积分DAC。 在其他实施例中，驱动器包括用于测试每个驱动通道的电路和可以被切换以替换有缺陷的驱动通道的备用驱动通道。

公开(公告)号：US20160085067A1

公开(公告)日：2016-03-24

申请号：US14673276

申请日：2015-03-30

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Alexander Payne ,  James Hunter ,  Lars Eng

IPC: G02B26/08 ,  B23K26/06

CPC classification number: G02B26/0841 ,  B23K26/0643 ,  G02B5/0825

Abstract: Laser-based material processing systems including a Micro-Electromechanical System devices (MEMs) based reflective, optical modulator with dielectric mirrors for high power handling and methods of manufacturing and using the same are described. Generally, the system includes a workpiece support, a laser, a workpiece support, a laser, a MEMs based reflective, optical modulator to modulate a beam generated by the laser; and imaging optics to direct modulated light from the optical modulator onto a workpiece on the workpiece support. The optical modulator includes a number of surfaces with dielectric mirrors formed thereon to modulate the beam generated by the laser. Other embodiments are also described.

Abstract translation: 描述了基于激光的材料处理系统，其包括基于微机电系统装置（MEM）的反射式，具有用于高功率处理的电介质反射镜的光学调制器以及制造和使用它们的方法。 通常，该系统包括工件支撑件，激光器，工件支撑件，激光器，基于MEM的反射型光学调制器以调制由激光器产生的光束; 以及成像光学器件，用于将来自光学调制器的调制光引导到工件支撑件上的工件上。 光调制器包括多个表面，其上形成有电介质镜，以调制由激光产生的光束。 还描述了其它实施例。

公开(公告)号：US20030208753A1

公开(公告)日：2003-11-06

申请号：US09832738

申请日：2001-04-10

Applicant: Silicon Light Machines

Inventor： Robert W. Corrigan ,  Paul A. Alioshin

IPC: H04N007/167 ,  H04L009/00

CPC classification number: H04N21/42623 ,  H04N5/7416 ,  H04N7/163 ,  H04N7/1675 ,  H04N9/3111 ,  H04N9/3129 ,  H04N9/3155 ,  H04N9/3161 ,  H04N21/41415 ,  H04N21/4405

Abstract: A method, system, and display apparatus, for securely transmitting and displaying visual data, are disclosed. The method of securely transmitting and displaying the visual data includes encrypting the visual data, transporting encrypted visual data to a display apparatus, decrypting the encrypted visual data within the display apparatus, and displaying the visual data as a visual image. The step of decrypting the visual data includes maintaining an electronic version of the visual data within circuit elements that are substantially inaccessible. The system for securely transmitting and displaying the visual data includes an encryption apparatus, means for transporting the encrypted visual data, and the display apparatus. The display apparatus includes circuit elements that are substantially inaccessible. The circuit elements include a decryption circuit for decrypting the encrypted visual data, which forms the visual data within the display apparatus. The circuit elements also include a display circuit for displaying the visual data as a visual image. The circuit elements are configured such that an electronic version of the visual data is maintained within the circuit elements.

Abstract translation: 公开了用于安全地发送和显示视觉数据的方法，系统和显示装置。 安全地发送和显示视觉数据的方法包括加密视觉数据，将加密的可视数据传送到显示装置，解密显示装置内的加密视觉数据，以及将视觉数据显示为视觉图像。 对视觉数据进行解密的步骤包括将基本上不可访问的电路元件内的视觉数据的电子版本维护起来。 用于安全地发送和显示视觉数据的系统包括加密装置，用于传送加密的可视数据的装置和显示装置。 显示装置包括实质上不可访问的电路元件。 电路元件包括用于解密加密的可视数据的解密电路，其在显示装置内形成视觉数据。 电路元件还包括用于将视觉数据显示为视觉图像的显示电路。 电路元件被配置为使得电子版本的视觉数据保持在电路元件内。

公开(公告)号：US20250026633A1

公开(公告)日：2025-01-23

申请号：US18636165

申请日：2024-04-15

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Olav Solgaard ,  Stephen Hamann ,  Alexander Payne ,  Lars Eng ,  James Hunter ,  Tianbo Liu

IPC: B81B7/02

Abstract: An optical system including a dual-layer microelectromechanical systems (MEMS) device, and methods of fabricating and operating the same are disclosed. Generally, the MEMS device includes a substrate having an upper surface; a top modulating layer including a number of light modulating micro-ribbons, each micro-ribbon supported above and separated from the upper surface of the substrate by spring structures in at least one lower actuating layer; and a mechanism for moving one or more of the micro-ribbons relative to the upper surface and/or each other. The spring structures are operable to enable the light modulating micro-ribbons to move continuously and vertically relative to the upper surface of the substrate while maintaining the micro-ribbons substantially parallel to one another and the upper surface of the substrate. The micro-ribbons can be reflective, transmissive, partially reflective/transmissive, and the device is operable to modulate a phase and/or amplitude of light incident thereon.

公开(公告)号：US11958738B2

公开(公告)日：2024-04-16

申请号：US17872777

申请日：2022-07-25

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Olav Solgaard ,  Stephen Hamann ,  Alexander Payne ,  Lars Eng ,  James Hunter ,  Tianbo Liu

IPC: B81B7/02 ,  G02B26/08

CPC classification number: B81B7/02 ,  B81B2201/047 ,  B81B2203/0127 ,  B81B2203/0163 ,  B81B2203/0353 ,  B81B2203/04 ,  B81B2203/051 ,  B81B2207/05 ,  B81B2207/096

Abstract: An optical system including a dual-layer microelectromechanical systems (MEMS) device, and methods of fabricating and operating the same are disclosed. Generally, the MEMS device includes a substrate having an upper surface; a top modulating layer including a number of light modulating micro-ribbons, each micro-ribbon supported above and separated from the upper surface of the substrate by spring structures in at least one lower actuating layer; and a mechanism for moving one or more of the micro-ribbons relative to the upper surface and/or each other. The spring structures are operable to enable the light modulating micro-ribbons to move continuously and vertically relative to the upper surface of the substrate while maintaining the micro-ribbons substantially parallel to one another and the upper surface of the substrate. The micro-ribbons can be reflective, transmissive, partially reflective/transmissive, and the device is operable to modulate a phase and/or amplitude of light incident thereon.

公开(公告)号：US11662571B2

公开(公告)日：2023-05-30

申请号：US16996346

申请日：2020-08-18

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Alexander Payne ,  James Hunter ,  Lars Eng

IPC: G02B26/08 ,  G01S7/481 ,  G02B27/00 ,  G02B26/10

CPC classification number: G02B26/0841 ,  G01S7/4817 ,  G02B26/10 ,  G02B27/0087

Abstract: A capacitive micro-electromechanical system (MEMS) structure or device and methods of making and operating the same are described. Generally, the MEMS device provides a large stroke while maintaining good damping, enabling fast beam steering and large scan angles. In one embodiment, the capacitive MEMS device includes a bottom electrode formed over a substrate; an electrically permeable damping structure formed over the bottom electrode, the electrically permeable damping structure including a first air-gap and a dielectric layer suspended above and separated from the bottom electrode by the first air-gap; and a plurality of movable members suspended above the damping structure and separated therefrom by a second air-gap, each of the plurality of movable members including a top electrode and being configured to deflect towards the bottom electrode by electrostatic force. Other embodiments are also described.

公开(公告)号：US20220260687A1

公开(公告)日：2022-08-18

申请号：US17670274

申请日：2022-02-11

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Stephen Hamann ,  Olav Solgaard

IPC: G01S7/481 ,  G02B27/09 ,  G02F1/29 ,  G06T7/80

Abstract: Optical systems including Microelectromechanical System devices (MEMS) phased-arrays and methods for operating the same to improve contrast are provided. Generally, the system includes a light source, illumination optics, and MEMS phased-arrays operable to receive a light-beam from the illumination optics and to project light onto a far-field scene and to steer an area of illumination over the far-field scene by modulating phases of at least some light of the light-beam received from the illumination optics. The illumination optics are operable to illuminate the MEMS-phased arrays with a light-beam having a Gaussian-profile to minimize side-lobes with respect to a main-lobe in an emission profile of light reflected from the far field scene in response to the projected light. In some embodiments the system is or is included in a Light Detection and Ranging system.

公开(公告)号：US20220252866A1

公开(公告)日：2022-08-11

申请号：US17591834

申请日：2022-02-03

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Alexander Payne ,  Gregory Jacob

IPC: G02B26/08 ,  G02B26/02

Abstract: Microelectromechanical systems (MEMS) based spatial light modulators (SLMs) enclosed in a package filled with a gas to enhance the reliability and lifetime of the SLM, and methods for operating the same in various applications are described. Generally, the SLM includes a number of MEMS modulators, each including a number of light reflective surfaces, at least one light reflective surface coupled to an electrostatically deflectable element suspended above a substrate, and each adapted to reflect and modulate a light beam incident thereon. The package enclosing the SLM includes an optically transparent cover through which the reflective surfaces are exposed to the light beam, and a cavity is filled a low molar mass fill gas having an atomic number of two or less and a thermal conductivity of greater than 100 mW/(m·K). The SLM can include electrostatically deflectable ribbons suspended over a substrate, or a linear array of two-dimensional MEMS modulators.

公开(公告)号：US20220250188A1

公开(公告)日：2022-08-11

申请号：US17591884

申请日：2022-02-03

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Gregory Jacob ,  Stephen Hamann ,  Alexander Payne ,  Lars Eng ,  James Hunter

IPC: B23K26/064 ,  B81B3/00

Abstract: A laser marking system including a spatial light modulator (SLM) with a multi-pixel, linear array of is microelectromechanical systems (MEMS) based diffractors, and methods of operating the same are disclosed. Generally, the system includes, in addition to the SLM, a laser operable to illuminate the SLM; imaging optics operable to focus a substantially linear swath of modulated light onto a surface of a workpiece, the linear swath including light from multiple pixels of the SLM, and a controller operable to control the SLM, laser and imaging optics to mark the surface of the workpiece to record a two-dimensional image thereon. In one embodiment, the diffractors include a number of electrostatically deflectable ribbons suspended over a substrate. In another, each diffractor is two-dimensional including an electrostatically deflectable first reflective operable to brought into optical interference with light reflected from a second reflective surface on a faceplate, or an adjacent diffractor.

公开(公告)号：US20210072531A1

公开(公告)日：2021-03-11

申请号：US17001477

申请日：2020-08-24

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Yuki Ashida ,  Stephen Hamann ,  Olav Solgaard ,  Alexander Payne ,  Lars Eng ,  James Hunter

IPC: G02B26/08 ,  G02B5/18 ,  B81B7/02 ,  B81B7/00 ,  B81B3/00 ,  G01S7/481

Abstract: An optical scanner including micro-electromechanical system phased-arrays suitable for use in a LiDAR system, and methods of operating the same are described. Generally, the scanner includes an optical transmitter having first phased-arrays to receive light from a light source, form a swath of illumination in a far field scene and to modulate phases of the light to sweep or steer the swath over the scene in two-dimensions (2D). An optical receiver in the scanner includes second phased-arrays to receive light from the far field scene and direct at least some of the light onto a detector. The second phased-arrays are configured to de-scan the received light by directing light reflected from the far field scene onto the detector while rejecting background light. In one embodiment the second phased-arrays direct light from a slice of the far field scene onto a 1D detector array.