Abstract:
Embodiments of the invention provide methods for forming materials on a substrate used for metal gate and other applications. In one embodiment, a method includes forming a cobalt stack over a barrier layer disposed on a substrate by depositing a cobalt layer during a deposition process, exposing the cobalt layer to a plasma to form a plasma-treated cobalt layer during a plasma process, and repeating the cobalt deposition process and the plasma process to form the cobalt stack containing a plurality of plasma-treated cobalt layers. The method further includes exposing the cobalt stack to an oxygen source gas to form a cobalt oxide layer from an upper portion of the cobalt stack during a surface oxidation process and heating the remaining portion of the cobalt stack to a temperature within a range from about 300° C. to about 500° C. to form a crystalline cobalt film during a thermal annealing crystallization process.
Abstract:
Metal gate structures and methods for forming thereof are provided herein. In some embodiments, a method for forming a metal gate structure on a substrate having a feature formed in a high k dielectric layer may include depositing a first layer within the feature atop the dielectric layer; depositing a second layer comprising cobalt or nickel within the feature atop the first layer; and depositing a third layer comprising a metal within the feature atop the second layer to fill the feature, wherein at least one of the first or second layers forms a wetting layer to form a nucleation layer for a subsequently deposited layer, wherein one of the first, second, or third layers forms a work function layer, and wherein the third layer forms a gate electrode.
Abstract:
A fan includes an impeller and a motor. The impeller includes a hub and a plurality of blades. The hub has a top portion, a connection portion, and at least one airflow-guiding portion. The top portion is connected to the connection portion. The blades are disposed around the connection portion. The motor is disposed corresponding to the impeller and used to drive the impeller to rotate. The airflow-guiding portion is disposed between two adjacent blades.
Abstract:
A heat dissipation module assembled with a circuit board is disclosed. The heat dissipation module assembled comprises a fan and at least a heat sink. The fan comprises a frame and an impeller. The frame comprises a body and at least an extension, wherein the extension protrudes from at least a side of the body. The impeller is disposed in the body. The heat sink is coupled to the extension for dissipating heat produced from an electronic element disposed on the circuit board, wherein the heat sink is received in the extension and disposed on the electronic element.
Abstract:
A heat dissipation module is disclosed. The heat dissipation module includes fan and at least a heat sink. The fan includes a frame and an impeller. The frame includes a body and at least an extension. The extension protrudes from at least a side of the body. The extension or the body is connected with the circuit board. The impeller is disposed in the body. The heat sink is connected with the extension for dissipating heat produced from the electronic element.
Abstract:
The invention relates to an antibacterial sol-gel coating solution, a process for preparing the antibacterial sol-gel coating solution, an antibacterial article, and a process and an apparatus for producing the antibacterial article. Said antibacterial sol-gel coating solution comprises a. at least one substance selected from the group consisting of Ti or Si-containing compounds capable of hydrolyzing to form a base film; b. a regulating agent capable of regulating the hydrolysis rate of the Ti or Si-containing compounds; c. an organic solvent; d. water; and e. at least one soluble compound of antibacterial metal selected from the group consisting of Ag, Cu, Mg, Zn, Sn, Fe, Co, Ni, and Ce; wherein a, b and a portion of c are first mixed to form a solution I, d and the rest of c are then mixed and added into solution I to form a dispersion II, and then e is added into dispersion II to form the antibacterial sol-gel coating solution.
Abstract:
A heat dissipation fan includes a housing, a first rotor, a second rotor, a base and a plurality of static blades. The first rotor has a shaft and a plurality of rotor blades. The second rotor is coupled to the first rotor and has a plurality of rotor blades. The base is disposed in the housing for supporting the first and second rotors. The static blades are disposed between the housing and the base, wherein a rear portion of each static blade extends along an axial line of the heat dissipation fan for improving the working efficiency of the second rotor.
Abstract:
A heat dissipation apparatus. A fan frame includes an air inlet, an air outlet, a passage, and a curved expansion portion. The air inlet is opposite the air outlet. The passage is between the air inlet and the air outlet, guiding airflow from the air inlet to the air outlet. The curved expansion portion is radially and outwardly extended from an inner peripheral wall of the passage at the air inlet or air outlet. An impeller is disposed in the fan frame and includes a plurality of blades. Each blade is disposed in the passage and includes an extension end extending to the curved expansion portion.
Abstract:
A heat dissipation apparatus. A fan frame accommodates an impeller therein and includes an air inlet, an air outlet, and a passage for guiding airflow from the air inlet to the air outlet. An inner peripheral wall of the passage radially and outwardly extends a smooth curved expansion portion at the air outlet. The curved expansion portion includes a recess in which the airflow forms an airflow layer, stopping subsequent airflow from directly contacting the inner peripheral wall of the passage.
Abstract:
An axial flow fan. The axial flow fan includes an impeller, an annular structure, and a plurality of connecting elements. The impeller has a plurality of blades, arranged radially. Each blade has an outer periphery. The outer periphery has a top portion. The annular structure is attached to the top portion of the outer periphery of each blade. Each connecting element respectively connects each blade to the annular structure.