公开(公告)号：US07245804B2

公开(公告)日：2007-07-17

申请号：US10857547

申请日：2004-06-01

申请人： Yuichi Teramura ,  Fusao Yamanaka ,  Yoji Okazaki

发明人： Yuichi Teramura ,  Fusao Yamanaka ,  Yoji Okazaki

IPC分类号： G02B6/26 ,  H01S3/16 ,  H01S5/00

CPC分类号： G03F7/70216 ,  G02B6/08 ,  G02B19/0014 ,  G02B19/0057 ,  G02B27/0994 ,  G03F7/70025 ,  H01S5/005 ,  H01S5/02216 ,  H01S5/02284 ,  H01S5/02292 ,  H01S5/4012 ,  H01S5/4025

摘要： In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: cladding thickness ⁢ ⁢ h ≤ ( emission ⁢ ⁢ light ⁢ ⁢ amount of ⁢ ⁢ one ⁢ ⁢ laser ⁢ ⁢ module ⁢ ⁢ W required intensity ⁢ ⁢ C × packing ratio ⁢ ⁢ P - core diameter ⁢ ⁢ t ) ÷ 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.

公开(公告)号：US20070078305A1

公开(公告)日：2007-04-05

申请号：US11540643

申请日：2006-10-02

申请人： Yuichi Teramura

发明人： Yuichi Teramura

IPC分类号： A61B1/00

CPC分类号： G01B9/02004 ,  A61B1/0008 ,  A61B1/00096 ,  A61B1/00165 ,  A61B1/00172 ,  A61B1/045 ,  A61B1/0615 ,  A61B5/0062 ,  A61B5/0066 ,  A61B5/0073 ,  G01B9/02003 ,  G01B9/02021 ,  G01B9/02044 ,  G01B9/0205 ,  G01B9/02091 ,  G02B23/2423 ,  G02B23/2453 ,  G02B23/2469

摘要： A support member and an optical fiber are disposed side by side inside a tubular outer envelope of an optical probe to extend in the longitudinal direction of the outer envelope. A light deflectors which deflects light emitted from the front end of the optical fiber in the circumferential direction of the outer envelope is provided and the light deflector is rotated in response rotation of the support member by a drive means such as a motor, whereby an optical probe which can deflect light emitted from the circumferential surface of the outer envelope in the circumferential direction of the outer envelope and is easy to make thinner and down its cost can be obtained.

摘要翻译： 支撑构件和光纤并排设置在光学探针的管状外封套内，以在外壳的纵向方向上延伸。 提供了使光纤前端在外壳的圆周方向上发出的光偏转的光偏转器，并且通过诸如电动机的驱动装置响应支撑构件的旋转来旋转光偏转器，由此光学 能够使外套的圆周方向发出的光偏转的探头，能够获得容易变薄的成本。

公开(公告)号：US08855750B2

公开(公告)日：2014-10-07

申请号：US13257573

申请日：2010-03-03

申请人： Yuichi Teramura

发明人： Yuichi Teramura

IPC分类号： A61B5/00 ,  G01B9/02 ,  A61B3/00 ,  A61B3/10 ,  G01N21/47

CPC分类号： G01B9/02069 ,  A61B3/00 ,  A61B3/1005 ,  A61B3/102 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/0084 ,  A61B5/7203 ,  A61B5/7264 ,  G01B9/02004 ,  G01B9/02085 ,  G01B9/02088 ,  G01B9/02091 ,  G01B2290/65 ,  G01N21/4795

摘要： An optical three-dimensional structure measuring device including: optical three-dimensional structure information storing device (91) for storing optical three-dimensional structure information; specific layer extracting device (121) for comparing information values of the optical three-dimensional structure information stored in the optical three-dimensional structure information storing device with a predetermined threshold and extracting, as a specific layer area of the measurement target, an area equal to or greater than a predetermined range where the information values of the optical three-dimensional structure information equal to or greater than the predetermined threshold continue; missing area extracting device (122) for extracting, as missing areas, areas where the information values of the optical three-dimensional structure information are smaller than the predetermined threshold in the specific layer area; missing area range calculating device (123) for calculating sizes of ranges of the missing areas; and region-of-interest classifying device (124) for comparing the sizes of the ranges of the missing areas with a plurality of predetermined range determination reference values and classifying the missing areas into a plurality of types of regions of interest.

摘要翻译： 一种光学三维结构测量装置，包括：用于存储光学三维结构信息的光学三维结构信息存储装置（91）; 特征层提取装置（121），用于将存储在光学三维结构信息存储装置中的光学三维结构信息的信息值与预定阈值进行比较，并提取作为测量对象的特定层面积的区域相等 达到或大于光学三维结构信息的信息值等于或大于预定阈值的预定范围; 丢失区域提取装置（122），用于将特定层区域中的光学三维结构信息的信息值小于预定阈值的区域提取为缺失区域; 缺少区域范围计算装置（123），用于计算缺失区域的范围的大小; 和区域感兴趣分类装置（124），用于将缺失区域的范围的大小与多个预定范围确定参考值进行比较，并将缺失区域分类为多种类型的感兴趣区域。

公开(公告)号：US07857758B2

公开(公告)日：2010-12-28

申请号：US11540643

申请日：2006-10-02

申请人： Yuichi Teramura

发明人： Yuichi Teramura

IPC分类号： A61B1/06 ,  A61B1/07

CPC分类号： G01B9/02004 ,  A61B1/0008 ,  A61B1/00096 ,  A61B1/00165 ,  A61B1/00172 ,  A61B1/045 ,  A61B1/0615 ,  A61B5/0062 ,  A61B5/0066 ,  A61B5/0073 ,  G01B9/02003 ,  G01B9/02021 ,  G01B9/02044 ,  G01B9/0205 ,  G01B9/02091 ,  G02B23/2423 ,  G02B23/2453 ,  G02B23/2469

摘要： A support member and an optical fiber are disposed side by side inside a tubular outer envelope of an optical probe to extend in the longitudinal direction of the outer envelope. A light deflectors which deflects light emitted from the front end of the optical fiber in the circumferential direction of the outer envelope is provided and the light deflector is rotated in response rotation of the support member by a drive means such as a motor, whereby an optical probe which can deflect light emitted from the circumferential surface of the outer envelope in the circumferential direction of the outer envelope and is easy to make thinner and down its cost can be obtained.

摘要翻译： 支撑构件和光纤并排设置在光学探针的管状外封套内，以在外壳的纵向方向上延伸。 提供了使光纤前端在外壳的圆周方向上发出的光偏转的光偏转器，并且通过诸如电动机的驱动装置响应支撑构件的旋转来旋转光偏转器，由此光学 能够使外套的圆周方向发出的光偏转的探头，能够获得容易变薄的成本。

公开(公告)号：US07551817B2

公开(公告)日：2009-06-23

申请号：US11730883

申请日：2007-04-04

申请人： Yuichi Teramura

发明人： Yuichi Teramura

IPC分类号： G02B6/26 ,  G02B6/34 ,  G01B11/02

CPC分类号： A61B5/6852 ,  A61B5/0066

摘要： An optical fiber is disposed in the direction of axis of the outer envelope inside a tubular outer envelope. Light emitted from the front end of the optical fiber is collected and projected on a body-to-be-scanned disposed externally of the outer envelope, and converged on the body-to-be-scanned. The outer envelope is filled with liquid so that the optical fiber is in the liquid.

摘要翻译： 光纤沿外管壳的轴线方向设置在管状外壳内。 从光纤前端发射的光被收集并投射在设置在外壳外部的被扫描体上，并会聚在待扫描的身体上。 外壳充满液体，使得光纤处于液体中。

公开(公告)号：US07539362B2

公开(公告)日：2009-05-26

申请号：US11602183

申请日：2006-11-21

申请人： Yuichi Teramura ,  Masami Hatori

发明人： Yuichi Teramura ,  Masami Hatori

IPC分类号： G02B6/00 ,  G02B6/12

CPC分类号： G01J3/4535 ,  A61B5/0059 ,  A61B5/0066 ,  G01N21/4795 ,  G01N21/954 ,  G01N2021/9548

摘要： An optical probe includes a tubular outer envelope and a optical fiber which extends in the longitudinal direction of the outer envelope inside the outer envelope. By fixing a light deflecting element to the optical fiber and rotating the optical fiber by a driver, the light deflecting element is rotated. A protective member which has a higher resistance to wear than the outer peripheral surface of the optical fiber is fixed to a part of the outer peripheral surface of the optical fiber in a position near the front end of the optical fiber and is borne for rotation by a bearing portion on the probe outer envelope.

摘要翻译： 光学探针包括管状外封套和在外封套内部沿外壳的纵向方向延伸的光纤。 通过将光偏转元件固定到光纤并通过驱动器旋转光纤，光偏转元件旋转。 具有比光纤的外周面更高的耐磨性的保护构件在靠近光纤前端的位置处被固定到光纤的外周面的一部分，并且被保持为旋转 探针外壳上的轴承部分。

公开(公告)号：US20080279235A1

公开(公告)日：2008-11-13

申请号：US11994396

申请日：2006-07-03

申请人： Yuichi Teramura

发明人： Yuichi Teramura

IPC分类号： H01S3/13

CPC分类号： H01S5/32341 ,  H01L2224/48091 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/0617 ,  H01S5/06808 ,  H01S5/0683 ,  H01S5/4012 ,  H01S5/4031 ,  H01S5/4075 ,  H01L2924/00014

摘要： Semiconductor lasers are driven such that high output laser beams are stably obtained without a long start up time. A method for driving semiconductor lasers by automatic current control or automatic power control with a constant current source involves the steps of: generating a pattern of drive current values for the semiconductor lasers, which is defined according to the amount of time which has elapsed since initiating driving thereof, that enables obtainment of substantially the same light output as a target light output by the automatic current control or the automatic power control; and varying the drive current of the semiconductor lasers in stepwise increments according to the pattern for a predetermined period of time from initiation of drive thereof A single pattern is used in common to drive the plurality of semiconductor lasers.

摘要翻译： 驱动半导体激光器，使得在没有长启动时间的情况下稳定地获得高输出激光束。 通过自动电流控制或通过恒定电流源进行的自动功率控制来驱动半导体激光器的方法包括以下步骤：产生半导体激光器的驱动电流值的模式，其根据从启动起经过的时间量来定义 其能够通过自动电流控制或自动电力控制获得与目标光输出大致相同的光输出; 并且根据该图案逐步增加半导体激光器的驱动电流，从其驱动开始起预定的一段时间。共同使用单个图案来驱动多个半导体激光器。

公开(公告)号：US20080137094A1

公开(公告)日：2008-06-12

申请号：US11951689

申请日：2007-12-06

申请人： Yuichi TERAMURA ,  Karin KUROIWA

发明人： Yuichi TERAMURA ,  Karin KUROIWA

IPC分类号： G01B9/02

CPC分类号： G01B9/02057 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02027 ,  G01B9/02069 ,  G01B9/02091 ,  G01B2290/45

摘要： An optical tomographic imaging apparatus capable of obtaining a high resolution tomographic image rapidly. Light beams swept in wavelength intermittently and repeatedly within first and second wavelength ranges respectively are outputted simultaneously from a light source unit. If the wavelength of either one of the light beams is within a fifth wavelength range, the other light beam is not outputted. The first or second wavelength range includes at least a portion of the fifth wavelength range. Each light beam is split into measuring and reference beams by a coupler. Wavelengths of reflected beams from a measuring object when the measuring beams are irradiated on the object and the reference beams are divided by a WDM coupler. The reflected beams and reference beams are combined by an optical coupler, and each interference beam produced thereby is detected with respect to each light beam as an interference signal.

摘要翻译： 一种能够快速获得高分辨率断层图像的光学层析成像装置。 从光源单元同时输出在第一和第二波长范围内间歇地和反复扫描的波长的光束。 如果光束中的任一个的波长在第五波长范围内，则不输出另一个光束。 第一或第二波长范围包括第五波长范围的至少一部分。 每个光束被耦合器分成测量和参考光束。 当测量光束照射在物体上时，来自测量对象的反射光束的波长和参考光束被WDM耦合器划分。 反射光束和参考光束通过光耦合器组合，并且由此产生的每个干涉光束相对于每个光束被检测为干扰信号。

公开(公告)号：US20070115477A1

公开(公告)日：2007-05-24

申请号：US11602183

申请日：2006-11-21

申请人： Yuichi Teramura ,  Masami Hatori

发明人： Yuichi Teramura ,  Masami Hatori

IPC分类号： G01B9/02

CPC分类号： G01J3/4535 ,  A61B5/0059 ,  A61B5/0066 ,  G01N21/4795 ,  G01N21/954 ,  G01N2021/9548

摘要： An optical probe includes a tubular outer envelope and a optical fiber which extends in the longitudinal direction of the outer envelope inside the outer envelope. By fixing a light deflecting element to the optical fiber and rotating the optical fiber by a driver, the light deflecting element is rotated. A protective member which has a higher resistance to wear than the outer peripheral surface of the optical fiber is fixed to a part of the outer peripheral surface of the optical fiber in a position near the front end of the optical fiber and is borne for rotation by a bearing portion on the probe outer envelope.

摘要翻译： 光学探针包括管状外封套和在外封套内部沿外壳的纵向方向延伸的光纤。 通过将光偏转元件固定到光纤并通过驱动器旋转光纤，光偏转元件旋转。 具有比光纤的外周面更高的耐磨性的保护构件在靠近光纤前端的位置处被固定到光纤的外周面的一部分，并且被保持为旋转 探针外壳上的轴承部分。

公开(公告)号：US07181105B2

公开(公告)日：2007-02-20

申请号：US10808587

申请日：2004-03-25

申请人： Yuichi Teramura ,  Yoji Okazaki

发明人： Yuichi Teramura ,  Yoji Okazaki

IPC分类号： G02B6/26 ,  H01S3/10

CPC分类号： G02B6/4206 ,  G02B6/4226

摘要： A combined-laser-light source includes: a plurality of semiconductor lasers; an optical fiber; and an optical system which converges a bundle of laser beams emitted from the plurality of semiconductor lasers, and makes the converged bundle of the laser beams enter the core of the optical fiber so that the laser beams are combined in the optical fiber when the laser beams pass through the optical fiber. The optical system is aligned with the optical fiber so that the converged bundle of the laser beams is incident on an area of an end face of the core when steady temperature control is performed on the combined-laser-light source, where the area is concentric with the end face of the core, and has a diameter equal to or smaller than half of the diameter of the core.

摘要翻译： 组合激光光源包括：多个半导体激光器; 光纤; 以及会聚从多个半导体激光器发射的一束激光束的光学系统，并且使得激光束的会聚束进入光纤的核心，使得激光束在光纤中被组合在激光束 通过光纤。 光学系统与光纤对准，使得当对组合激光光源进行稳定的温度控制时，激光束的会聚束入射到芯的端面的区域，其中该区域是同心的 具有芯的端面，并且具有等于或小于芯的直径的一半的直径。