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31.发明授权Method for the electrical and/or mechanical interconnection of components of a microelectronic system 有权用于微电子系统的部件的电和/或机械互连的方法公开(公告)号：US06423938B1
公开(公告)日：2002-07-23
申请号：US09662984
申请日：2000-09-15
IPC分类号： H05B100
CPC分类号： H01L24/81 , H01L23/345 , H01L24/98 , H01L2224/05568 , H01L2224/05573 , H01L2224/16148 , H01L2224/81191 , H01L2224/81192 , H01L2224/81234 , H01L2224/81815 , H01L2924/00014 , H01L2924/01004 , H01L2924/01013 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/14 , H01L2924/19043 , H01L2224/05599
摘要： A method for the electrical and/or mechanical interconnection of components of a microelectronic system includes at least one first component and at least one second component to be connected, and at least one local Joule-effect micro-heater is incorporated in one of the first and second components at a respective soldering point therebetween. The method includes supplying electrical energy to the micro-heater to utilize the heat produced therefrom by the Joule effect to solder the first and second components at the respective soldering point.
摘要翻译： 用于微电子系统的部件的电和/或机械互连的方法包括至少一个第一部件和要连接的至少一个第二部件，并且至少一个局部焦耳效应微加热器被并入第一部件 和在它们之间的相应焊接点处的第二部件。 该方法包括向微加热器提供电能以利用焦耳效应产生的热量来在相应焊接点处焊接第一和第二部件。
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公开(公告)号：US5940700A
公开(公告)日：1999-08-17
申请号：US725590
申请日：1996-10-03
IPC分类号： H01L21/329 , H01L29/861 , H01L21/8234
CPC分类号： H01L29/66128 , H01L29/8611
摘要： A diode integrated on semiconductor material with BCD technology and of the type provided on a substrate having a first type of conductivity inside an isolation region having a second type of conductivity. The diode comprises also a buried anode region having a first type of conductivity and a cathode region having a second type of conductivity. The cathode region comprises an epitaxial layer located above the buried anode region and a highly doped region provided inside the epitaxial layer. The buried anode region comprises depressions opposite which is located the highly doped region with the depressions being achieved by the intersection of lateral diffusions of distinct and adjacent portions of the buried anode region.
摘要翻译： 集成在具有BCD技术的半导体材料上的二极管，并且具有在具有第二类导电性的隔离区域内具有第一类型导电性的基板上提供的类型的二极管。 二极管还包括具有第一类导电性的掩埋阳极区域和具有第二类导电性的阴极区域。 阴极区域包括位于掩埋阳极区域上方的外延层和设置在外延层内部的高掺杂区域。 掩埋阳极区域包括相对的凹陷，其位于高掺杂区域，凹陷通过掩埋阳极区域的不同相邻部分的横向扩散的交叉来实现。
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公开(公告)号：US09170183B2
公开(公告)日：2015-10-27
申请号：US13621176
申请日：2012-09-15
CPC分类号： B01L3/502715 , B01L2200/025 , B01L2200/027 , B01L2200/028 , B01L2200/0684 , B01L2300/0645 , B01L2300/087 , B01L2400/049 , G01N5/02 , G01N29/022 , G01N33/54366 , G01N33/5438 , G01N33/76 , G01N2035/00237
摘要： A device for detecting the concentration of biological materials, is formed in a body having a plurality of fluidic paths connectable to a multi-microbalance structure carrying a plurality of microbalances, each microbalance having a sensitive portion facing a reaction chamber. The body and the multi-microbalance structure are configured to be mechanically coupled together and each microbalance is configured to be coupled to a respective fluidic path. Each fluidic path includes an inlet, a duct and a liquid waste, each duct being configured to be coupled with a respective reaction chamber. The plurality of fluidic paths and microbalances form at least one first and one second reference cells and one first sample cell.
摘要翻译： 用于检测生物材料浓度的装置形成在具有可连接到多微量平衡结构的多个微量平衡结构的多个流体路径的主体中，每个微量天平具有面向反应室的敏感部分。 主体和多微平衡结构被配置为机械耦合在一起，并且每个微量天平被配置为耦合到相应的流体路径。 每个流体路径包括入口，管道和液体废物，每个管道被配置为与相应的反应室联接。 多个流体路径和微量平衡形成至少一个第一和第二参考单元和一个第一样品池。
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公开(公告)号：US07898267B2
公开(公告)日：2011-03-01
申请号：US12573027
申请日：2009-10-02
CPC分类号： H02N1/006
摘要： An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation.
摘要翻译： 静电微电机设置有固定基板，面向固定基板的移动基板和静电相互作用元件，其能够使移动基板相对于固定基板在移动方向上相对移动; 静电微型电动机还设置有电容位置感测结构，其被配置为能够在移动方向上感测移动衬底相对于固定衬底的相对位置。 电容式位置检测结构通过感测从移动基板的第一表面延伸的凹陷形成，并且通过第一感测电极，在给定的操作条件下面对感测压痕。
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35.发明授权Integrated chemical microreactor with large area channels and manufacturing process thereof 有权具有大面积通道的集成化学微反应器及其制造工艺公开(公告)号：US07732192B2
公开(公告)日：2010-06-08
申请号：US11743062
申请日：2007-05-01
IPC分类号： C12N1/10
CPC分类号： B01J19/0093 , B01J2219/00783 , B01J2219/00828 , Y10T436/114998
摘要： The microreactor has a body of semiconductor material; a large area buried channel extending in the body and having walls; a coating layer of insulating material coating the walls of the channel; a diaphragm extending on top of the body and upwardly closing the channel. The diaphragm is formed by a semiconductor layer completely encircling mask portions of insulating material.
摘要翻译： 微反应器具有半导体材料体; 一个大面积的埋藏通道延伸到身体并具有墙壁; 覆盖通道壁的绝缘材料的涂层; 一个在主体顶部延伸并向上关闭通道的隔膜。 隔膜由完全环绕绝缘材料的掩模部分的半导体层形成。
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公开(公告)号：US20100019617A1
公开(公告)日：2010-01-28
申请号：US12573027
申请日：2009-10-02
CPC分类号： H02N1/006
摘要： An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation.
摘要翻译： 静电微电机设置有固定基板，面向固定基板的移动基板和静电相互作用元件，其能够使移动基板相对于固定基板在移动方向上相对移动; 静电微型电动机还设置有电容位置感测结构，其被配置为能够在移动方向上感测移动衬底相对于固定衬底的相对位置。 电容式位置检测结构通过感测从移动基板的第一表面延伸的凹陷形成，并且通过第一感测电极，在给定的操作条件下面对感测压痕。
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37.发明申请公开(公告)号：US20080175531A1
公开(公告)日：2008-07-24
申请号：US12015199
申请日：2008-01-16
IPC分类号： G02B6/12
CPC分类号： G02B6/4214 , G02B6/12002 , G02B6/12004 , G02B6/136 , G02B2006/12104
摘要： The invention relates to a process for manufacturing an integrated optical device comprising the deposition on a support substrate of a multilayer being formed by first and second cladding layers in order to hold in a multilayer first region a waveguide core layer. The core is provided with an electromagnetic radiation (L) inlet/outlet port. Furthermore, the process provides for the formation of a regulation layer having a first etching speed associated therewith, which is distinguished from the etching speeds of the cladding layers. Subsequently to an etching of a multilayer second region, a cavity is obtained having a first wall which is inclined relative to the substrate at least partially extending in said first region and which is near said inlet/outlet port. Such etching removes portions of the regulation layer and the cladding layers at different speeds in order to result in the formation of the inclined wall.
摘要翻译： 本发明涉及一种用于制造集成光学器件的方法，其包括在第一和第二覆层形成的多层的支撑衬底上的沉积，以便在多层第一区域中保持波导芯层。 核心设有电磁辐射（L）入口/出口。 此外，该方法提供形成具有与其相关联的第一蚀刻速度的调节层，其与包覆层的蚀刻速度不同。 随后对多层第二区域的蚀刻，获得具有第一壁的空腔，所述第一壁相对于基板倾斜，所述第一壁在所述第一区域中至少部分地延伸并且在所述入口/出口附近。 这种蚀刻以不同的速度去除调节层和包覆层的部分，以便形成倾斜壁。
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38.发明授权Microfuel cell having anodic and cathodic microfluidic channels and related methods 有权具有阳极和阴极微流体通道的微燃料电池及相关方法公开(公告)号：US07029781B2
公开(公告)日：2006-04-18
申请号：US10348519
申请日：2003-01-21
CPC分类号： H01M8/241 , H01M4/8626 , H01M8/0247 , H01M8/1007 , H01M8/2404 , Y02P70/56
摘要： A microfuel cell includes a substrate and a plurality of spaced-apart PEM dividers extending outwardly to define anodic and cathodic microfluidic channels. An anodic catalyst/electrode lines at least a portion of the anodic microfluidic channels, and a cathodic catalyst/electrode lines at least a portion of the cathodic microfluidic channels. Each anodic and cathodic catalyst/electrode may extend beneath an adjacent portion of a PEM divider in some embodiments. Alternately, the microfuel cell may include a plurality of stacked substrates, in which a first substrate has first microfluidic fuel cell reactant channels. A PEM layer may be adjacent the first surface of the first substrate, an anodic catalyst/electrode layer may be adjacent one side of the PEM layer, and a cathodic catalyst/electrode layer may be adjacent an opposite side of the PEM layer. An adhesive layer may secure the first substrate to an adjacent substrate defining at least a second microfluidic fuel cell reactant channel.
摘要翻译： 微细脂肪电池包括衬底和向外延伸以限定阳极和阴极微流体通道的多个间隔开的PEM分配器。 阳极催化剂/电极排列至少一部分阳极微流体通道，阴极催化剂/电极管线至少部分阴极微流体通道。 在一些实施例中，每个阳极和阴极催化剂/电极可以在PEM分配器的相邻部分下方延伸。 或者，微细脂肪细胞可以包括多个堆叠的基底，其中第一基底具有第一微流体燃料电池反应物通道。 PEM层可以与第一基板的第一表面相邻，阳极催化剂/电极层可以邻近PEM层的一侧，并且阴极催化剂/电极层可以邻近PEM层的相对侧。 粘合剂层可以将第一基底固定到限定至少第二微流体燃料电池反应物通道的相邻基底。
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公开(公告)号：US06969637B2
公开(公告)日：2005-11-29
申请号：US10893021
申请日：2004-07-16
IPC分类号： H01L23/31 , H01L23/36 , H01L23/373 , H01L23/482 , H01L21/44 , H01L21/301 , H01L21/46 , H01L21/48 , H01L21/50
CPC分类号： H01L24/01 , H01L23/3157 , H01L23/36 , H01L23/3735 , H01L23/4827 , H01L2224/274 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/01079 , H01L2924/01082
摘要： The electronic device is formed in a die including a body of semiconductor material having a first face covered by a covering structure and a second face. An integral thermal spreader of metal is grown galvanically on the second face during the manufacture of a wafer, prior to cutting into dice. The covering structure comprises a passivation region and a protective region of opaque polyimide; the protective region and the passivation region are opened above the contact pads for the passage of leads.
摘要翻译： 电子器件形成在包括半导体材料体的模具中，该半导体材料体具有被覆盖结构覆盖的第一面和第二面。 在切割成骰子之前，在制造晶片期间，金属的整体散热器在第二面上电镀生长。 覆盖结构包括钝化区域和不透明聚酰亚胺的保护区域; 保护区域和钝化区域在接触焊盘上方打开以引导引线通过。
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40.发明授权Micromachined oscillating element, in particular a mirror for optical switches 有权微机械振荡元件，特别是光开关的反射镜公开(公告)号：US06927470B2
公开(公告)日：2005-08-09
申请号：US10606660
申请日：2003-06-25
申请人： Bruno Murari , Ubaldo Mastromatteo , Paolo Ferrari
发明人： Bruno Murari , Ubaldo Mastromatteo , Paolo Ferrari
IPC分类号： G02B26/00 , G02B27/09 , H01L31/0232 , H01L31/0328
CPC分类号： G02B27/0994
摘要： A micromachined device made of semiconductor material is formed by: a semiconductor body; an intermediate layer set on top of the semiconductor body; and a substrate, set on top of the intermediate layer. A cavity extends in the intermediate layer and is delimited laterally by bottom fixed regions, at the top by the substrate, and at the bottom by the semiconductor body. The bottom fixed regions form fixed electrodes, which extend in the intermediate layer towards the inside of the cavity. An oscillating element is formed in the substrate above the cavity and is separated from top fixed regions through trenches, which extend throughout the thickness of the substrate. The oscillating element is formed by an oscillating platform set above the cavity, and by mobile electrodes, which extend towards the top fixed regions in a staggered way with respect to the fixed electrodes. The fixed electrodes and mobile electrodes are thus comb-fingered in plan view but formed on different levels.
摘要翻译： 由半导体材料制成的微机械加工装置由半导体本体形成， 设置在半导体本体顶部的中间层; 以及设置在中间层顶部的基板。 空腔在中间层中延伸并且由底部固定区域在顶部限定，在顶部由衬底限定，并且在底部由半导体本体限定。 底部固定区域形成固定电极，其在中间层中延伸到空腔的内部。 振荡元件形成在空腔上方的衬底中，并且通过沟槽与顶部固定区域分离，其延伸贯穿衬底的厚度。 振荡元件由设置在空腔上方的振荡平台和通过相对于固定电极以交错方式朝着顶部固定区域延伸的移动电极形成。 因此，固定电极和移动电极在平面图中梳理，但形成在不同的水平上。
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