公开(公告)号：US07088423B2

公开(公告)日：2006-08-08

申请号：US10945652

申请日：2004-09-21

申请人： Kazuya Akiyama ,  Kenji Kamei ,  Kazuya Ono

发明人： Kazuya Akiyama ,  Kenji Kamei ,  Kazuya Ono

IPC分类号： G03B27/42 ,  G03B27/54

CPC分类号： G03F7/2028

摘要： An edge exposing apparatus includes a photo detector and a lighting time measuring circuit for detecting a decrease in performance of light source units. The lighting time measuring circuit detects a ready state ((stabilization of luminous intensity) of the light source units, for example by measuring a lighting time for a startup (switch-on) of the light source units. When the measuring circuit detects a preset lighting time, or when the photo detector detects a luminous intensity below a preset value, the light source units are determined to have lowered performance, and are switched off. When a decrease in performance of one unit is detected, a replacement light source unit is started while continuing edge exposure with one or more other light source unit(s). When a ready state is detected, the edge exposure with the one light source unit is terminated (switch-off), and edge exposure is performed with the replacement light source unit.

摘要翻译： 边缘曝光装置包括光检测器和用于检测光源单元的性能降低的点亮时间测量电路。 照明时间测量电路例如通过测量光源单元的启动（接通）的点亮时间来检测光源单元的准备状态（发光强度的稳定），当测量电路检测到预设 照明时间，或者当光检测器检测到低于预设值的发光强度时，光源单元被确定为具有降低的性能并被关闭，当检测到一个单元的性能降低时，替换光源单元 在使用一个或多个其他光源单元进行持续边缘曝光时开始，当检测到就绪状态时，一个光源单元的边缘曝光被终止（关闭），并且利用替换光进行边缘曝光 源单位。

公开(公告)号：US06927838B2

公开(公告)日：2005-08-09

申请号：US09796332

申请日：2001-02-27

申请人： Kazuya Ono ,  Douglas C. Watson ,  Andrew Hazelton

发明人： Kazuya Ono ,  Douglas C. Watson ,  Andrew Hazelton

IPC分类号： G03F7/20 ,  G03B27/42

CPC分类号： G03F7/70733 ,  G03F7/70716 ,  G03F7/70725

摘要： A stage assembly (10) for independently moving and positioning a first device (26A) and a second device (26A) in an operation area (25) is provided herein. The stage assembly (10) includes a stage base (12), a first stage (14), a first mover assembly (15), a second stage (16), and a second mover assembly (18). The first mover assembly (15) moves the first stage (14) and the first device (26A) into the operational area (25) and the second mover assembly (18) moves the second stage (16) and the second device (26B) into the operational area (25). The present stage assembly (10) reduces and minimizes the amount of reaction forces and disturbances that are transferred between the stages (14), (16). This improves the positioning performance of the stage assembly (10). Further, for an exposure apparatus (30), this allows for more accurate positioning of two semiconductor wafers (28) relative to a reticle (32) or some other reference.

摘要翻译： 本文提供了用于在操作区域（25）中独立地移动和定位第一装置（26A）和第二装置（26A）的级组件（10）。 舞台组件（10）包括舞台基座（12），第一舞台（14），第一推动组件（15），第二舞台（16）和第二推动器组件（18）。 第一移动器组件（15）将第一级（14）和第一装置（26A）移动到操作区域（25）中，并且第二移动器组件（18）移动第二级（16）和第二装置（26） B）进入操作区域（25）。 本阶段组件（10）减少并最小化在阶段（14），（16）之间传递的反作用力和干扰的量。 这提高了台架组件（10）的定位性能。 此外，对于曝光装置（30），这允许两个半导体晶片（28）相对于掩模版（32）或某些其它参考物更精确地定位。

公开(公告)号：US20050062951A1

公开(公告)日：2005-03-24

申请号：US10945652

申请日：2004-09-21

申请人： Kazuya Akiyama ,  Kenji Kamei ,  Kazuya Ono

发明人： Kazuya Akiyama ,  Kenji Kamei ,  Kazuya Ono

IPC分类号： G03F7/20 ,  G03B27/42 ,  H01L21/027

CPC分类号： G03F7/2028

摘要： An edge exposing apparatus includes a photo detector and a lighting time measuring circuit for detecting a decrease in performance of light source units. The same lighting time measuring circuit has a function to detect a ready state (i.e. stabilization of luminous intensity) of the light source units capable of performing edge exposure. When the lighting time measuring circuit detects a lighting time having reached a preset value, or when the photo detector detects a luminous intensity below a preset value, the light source units are determined to have lowered in performance, and are switched off. The lighting time measuring circuit measures a lighting time from a startup (switch-on) of the light source units, and when the lighting time reaches a preset value, the light source units are determined to have attained the ready state and edge exposure is started with the light source units. When a decrease in performance is detected, one light source unit is started while continuing edge exposure with the other light source unit. When a ready state is detected, the edge exposure with the light source unit is terminated (switch-off), and edge exposure is performed with the light source unit having attained the ready state.

摘要翻译： 边缘曝光装置包括光检测器和用于检测光源单元的性能降低的点亮时间测量电路。 相同的发光时间测量电路具有检测能够进行边缘曝光的光源单元的就绪状态（即，稳定发光强度）的功能。 当点亮时间测量电路检测到达到预设值的点亮时间时，或者当光检测器检测到低于预设值的发光强度时，光源单元被确定为具有降低的性能并被关闭。 照明时间测量电路测量来自光源单元的启动（接通）的点亮时间，并且当点亮时间达到预设值时，确定光源单元已经达到就绪状态并且开始边缘曝光 与光源单位。 当检测到性能下降时，一个光源单元在与另一个光源单元持续边缘曝光的同时启动。 当检测到就绪状态时，光源单元的边缘曝光被终止（关闭），并且在光源单元已经达到就绪状态的情况下执行边缘曝光。

公开(公告)号：US06666002B1

公开(公告)日：2003-12-23

申请号：US10019681

申请日：2002-04-22

申请人： Yuzo Otsuka ,  Kazuya Ono

发明人： Yuzo Otsuka ,  Kazuya Ono

IPC分类号： B65B920

CPC分类号： B65B9/2049 ,  B29C65/3656 ,  B29C65/368 ,  B29C65/7451 ,  B29C65/7897 ,  B29C66/1122 ,  B29C66/4312 ,  B29C66/71 ,  B29C66/72321 ,  B29C66/72328 ,  B29C66/7234 ,  B29C66/81427 ,  B29C66/81431 ,  B29C66/83543 ,  B29C66/8491 ,  B29L2031/7166 ,  B65B9/2035 ,  B65B9/213 ,  B65B51/306 ,  B65B55/103 ,  B65B55/24 ,  B29K2023/06

摘要： A filling machine for producing containers containing liquid food product includes a series of rollers for forming a web-shaped packaging material into a tubular packaging material, a filling tube for introducing a liquid food product into the tubular packaging material while the tubular packaging material is being conveyed downwardly, a heat sealing bar providing with a heating mechanism and engageable with a cutting bar to produce a seal area forming a transverse seal across the tubular packaging material below a level of the liquid food product, and a cutter provided on the cutting bar to cut the tubular packaging material in the seal zone to form a preformed container containing the liquid food product. At least one nozzle is positioned to direct a sterilizing flushing liquid towards the outside surface of the tubular packaging material and/or the cutter. The flushing liquid advantageously cleans and sterilizes the outer surface of the tubular packaging material, and is able to flow downwardly to wash and sterilize the sealing bar and the cutter. Also, the flushing liquid can cool the packaging material after the formation of the transverse seal and so the plastic or resin material of the packaging material is relatively rapidly hardened. It is thus less likely that the plastic or resin material will be stained or soiled. As a result, the appearance of the packaging material is improved.

摘要翻译： 一种用于生产容纳液体食品的容器的灌装机包括一系列用于将网状包装材料形成管状包装材料的辊子，用于将管状包装材料中的液体食品引入管状包装材料的填充管，同时管状包装材料为 向下传送的热封条，提供加热机构并与切割杆接合以产生密封区域的密封条，该密封区域在液体食品的水平面下方跨越管状包装材料形成横向密封，以及设置在切割杆上的切割器 在密封区域中切割管状包装材料以形成容纳液体食品的预成型容器。 定位至少一个喷嘴以将灭菌冲洗液引向管状包装材料和/或切割器的外表面。 冲洗液有利地清洁和消毒管状包装材料的外表面，并且能够向下流动以对密封条和切割器进行清洗和消毒。 此外，冲洗液体可以在形成横向密封件之后冷却包装材料，因此包装材料的塑料或树脂材料相对快速地硬化。 因此塑料或树脂材料不太可能被污染或污染。 结果，改善了包装材料的外观。

公开(公告)号：US06259174B1

公开(公告)日：2001-07-10

申请号：US09505295

申请日：2000-02-16

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： H02K4100

CPC分类号： H02K41/0354 ,  G03F7/70758 ,  H02K7/09 ,  H02K2201/18 ,  H02N15/00

摘要： A positioning apparatus positions a movable body 6 on which a wafer W (object to be positioned) is mounted, and includes; a magnetism generation body 8 incorporated in the movable body 6, a magnetic member 10, 15A, 15B, 16 formed so as to have the magnetism generation body 8 therebetween, and a drive unit 11 disposed between the magnetism generation body 8 and the magnetic member 10, for driving the magnetism generation body 8, and the movable body 6 is positioned by means of the magnetic member 10 etc. and the drive unit 11. The positioning apparatus can position a movable body (object to be positioned) at a high speed and with high precision, and is suitable for use for example with an exposure apparatus or the like for positioning a wafer at high precision.

摘要翻译： 定位装置定位其上安装有晶片W（被定位对象物）的可移动体6，并且包括： 结合在可移动体6中的磁生成体8，形成为具有磁性生成体8的磁性构件10,15A，15B，16以及配置在磁性体8与磁性体之间的驱动单元11 如图10所示，用于驱动磁发生体8，并且可移动体6通过磁性构件10等和驱动单元11定位。定位装置可以高速定位可移动体（被定位对象） 并且高精度地适用于例如用于以高精度定位晶片的曝光装置等。

公开(公告)号：US5722539A

公开(公告)日：1998-03-03

申请号：US696620

申请日：1996-08-14

申请人： Tadakatsu Ikenoya ,  Kazuya Ono

发明人： Tadakatsu Ikenoya ,  Kazuya Ono

IPC分类号： B65D5/40 ,  B29D22/00 ,  B31B1/74 ,  B32B27/08 ,  B65B51/00 ,  B65D5/42 ,  B65D5/56 ,  B65D65/40 ,  B65D85/72 ,  B65D3/22

CPC分类号： B65D5/563 ,  B31B1/00 ,  B32B27/08 ,  B65D5/4279 ,  B31B2201/621

摘要： A packaging container having an enhanced sealing performance includes a packaging material, an outside strip and a strip tape. The opposite side edges of the packaging material are overlapped with each other so that the outermost layer and the innermost layer of the packaging material face each other. The outside strip is interposed between the outermost layer and the innermost layer and is fused and joined with these layers so that a longitudinal sealing portion is formed. The outside strip has an outside layer and an inside layer. The strip tape is placed on the inner surface of the packaging container along the sealing portion, and is joined thereto by heat fusion. The innermost layer of the packaging material and the outside layer of the outside strip are made of a non-olefin flavor-retaining resin, and the outermost layer of the packaging material and the inside layer of the outside strip are made of a polyolefin resin. Since portions to be joined at the longitudinal sealing portion are both polyolefin, an enhanced sealing performance can be obtained.

公开(公告)号：US5418265A

公开(公告)日：1995-05-23

申请号：US170995

申请日：1993-12-21

申请人： Kunimitsu Matsuzaki ,  Kazuya Ono ,  Seitaro Iwamoto ,  Mikio Osa ,  Takeshi Watanabe

发明人： Kunimitsu Matsuzaki ,  Kazuya Ono ,  Seitaro Iwamoto ,  Mikio Osa ,  Takeshi Watanabe

IPC分类号： C08G59/42 ,  C08G59/00 ,  C08K3/00 ,  C08L63/00 ,  C09D5/03 ,  C09D5/46 ,  C09D163/00

CPC分类号： C09D163/00 ,  Y10S525/934

摘要： A powder coating composition useful for fixation of rotor and stator windings is disclosed, which includes100 parts by weight of an epoxy resin;5-35 parts by weight of an acid anhydride;2-30 parts by weight of a phenol resin;0.05-5 parts by weight of a curing accelerator; and130-270 parts by weight of an inorganic filler consisting of 99.7-87.0% by weight of a first filler component having an average particle size of 0.5-100 .mu.m and 0.3-13.0% by weight of a second filler component having an average particle size of 0.1 .mu.m or less.

摘要翻译： 公开了一种用于固定转子和定子绕组的粉末涂料组合物，其包括100重量份的环氧树脂; 5-35重量份的酸酐; 2-30重量份酚醛树脂; 0.05-5重量份固化促进剂; 和130-270重量份的由99.7-87.0重量％的平均粒径为0.5-100μm的第一填料组分和0.3-13.0重量％的具有平均粒径的第二填料组分组成的无机填料 粒径为0.1μm以下。

公开(公告)号：US08928856B2

公开(公告)日：2015-01-06

申请号：US12654631

申请日：2009-12-28

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： G03B27/42 ,  G03F7/20

CPC分类号： G03F7/706 ,  G03F7/70266 ,  G03F7/70341 ,  G03F7/70591 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70825 ,  G03F7/7085

摘要： An exposure apparatus for forming a predetermined pattern on a substrate by using exposure light, includes a stage apparatus which is movable with respect to an optical axis of the exposure light; a light-transmissive member provided at the stage apparatus, wherein a liquid is supplied on an upper surface of the light-transmissive member; and a measurement device which is settable below the light-transmissive member when measurement using the measurement device is performed. Leakage or entrance of a liquid used for exposure into an optical measurement device such as a wavefront aberration measurement device can be prevented, thereby enabling preferable optical adjustment such as imaging performance or optical characteristics.

摘要翻译： 通过使用曝光光在基板上形成规定图案的曝光装置，具备能够相对于曝光光的光轴移动的平台装置， 设置在舞台装置处的透光构件，其中在所述透光构件的上表面上提供液体; 以及当使用测量装置进行测量时，可以在透光构件下方设置的测量装置。 可以防止用于曝光到诸如波前像差测量装置的光学测量装置中的液体的泄漏或入口，从而实现诸如成像性能或光学特性的优选的光学调节。

公开(公告)号：US08120751B2

公开(公告)日：2012-02-21

申请号：US12585498

申请日：2009-09-16

申请人： Kazuya Ono ,  Yuichi Shibazaki

发明人： Kazuya Ono ,  Yuichi Shibazaki

IPC分类号： G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70341 ,  G03F7/70833

摘要： An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.

摘要翻译： 曝光装置用液体填充投影光学系统和基板之间的空间，并将图案图案投影到基板上以露出基板。 投影光学系统具有包括与液体接触的光学部件的第一组和与第一组不同的第二组。 第一组通过隔振装置由第一支撑构件支撑。

公开(公告)号：US20100007865A1

公开(公告)日：2010-01-14

申请号：US12585498

申请日：2009-09-16

申请人： Kazuya Ono ,  Yuichi Shibazaki

发明人： Kazuya Ono ,  Yuichi Shibazaki

IPC分类号： G03B27/42

CPC分类号： G03F7/70341 ,  G03F7/70833

摘要： An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.

摘要翻译： 曝光装置用液体填充投影光学系统和基板之间的空间，并将图案图案投影到基板上以露出基板。 投影光学系统具有包括与液体接触的光学部件的第一组和与第一组不同的第二组。 第一组通过隔振装置由第一支撑构件支撑。