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40 条记录 (耗时 0.042 秒)

    Sample separating apparatus and method, and substrate manufacturing method
    31.
    发明申请
    Sample separating apparatus and method, and substrate manufacturing method 失效
    样品分离装置和方法，以及基板制造方法

    公开(公告)号：US20050045274A1

    公开(公告)日：2005-03-03

    申请号：US10963483

    申请日：2004-10-12

    申请人： Kazutaka Yanagita ,  Kazuaki Ohmi ,  Kiyofumi Sakaguchi

    发明人： Kazutaka Yanagita ,  Kazuaki Ohmi ,  Kiyofumi Sakaguchi

    IPC分类号： G01N1/00 ,  H01L21/00 ,  B32B1/00

    CPC分类号： H01L21/67092 ,  Y10T29/49821 ,  Y10T83/364 ,  Y10T156/1137 ,  Y10T156/1939

    摘要： This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus (100) has a pair of substrate holding portions (270, 280). A bonded substrate stack (50) is sandwiched from upper and lower sides and horizontally held by the substrate holding portions (270, 280) and rotated. A jet is ejected from a nozzle (260) and injected into the porous layer of the bonded substrate stack (50), thereby separating the bonded substrate stack (50) into two substrates at the porous layer. Another separating apparatus (5000) has a pair of substrate holding portions (270, 280), a nozzle (260) of rejecting a fluid to the porous layer of a bonded substrate stack (50), and an abrupt operation prevention mechanism (4000) for preventing the lower substrate holding portion (280) from abruptly moving downward but allowing it to moderately move when separating the bonded substrate stack (50).

    摘要翻译： 本发明提供以高产率分离具有多孔层的键合衬底叠层的技术。 分离装置（100）具有一对基板保持部（270,280）。 键合衬底叠层（50）从上侧和下侧夹持并由衬底保持部分（270,280）水平保持并旋转。 喷嘴从喷嘴（260）喷射并注入到键合衬底叠层（50）的多孔层中，从而在多孔层处将键合衬底叠层（50）分离成两个衬底。 另一分离装置（5000）具有一对基板保持部（270,280），将粘合基板叠层（50）的多孔层排出流体的喷嘴（260）以及突然动作防止机构（4000） 用于防止下基板保持部分（280）突然向下移动但允许其在分离键合衬底叠片（50）时适度地移动。

    Process for forming an SOI substrate
    37.
    发明授权
    Process for forming an SOI substrate 失效
    用于形成SOI衬底的工艺

    公开(公告)号：US6140209A

    公开(公告)日：2000-10-31

    申请号：US45955

    申请日：1998-03-23

    申请人： Masaaki Iwane ,  Takao Yonehara ,  Kazuaki Ohmi

    发明人： Masaaki Iwane ,  Takao Yonehara ,  Kazuaki Ohmi

    IPC分类号： B26F3/12 ,  B32B43/00 ,  H01L21/20 ,  H01L21/203 ,  H01L21/205 ,  H01L21/30 ,  H01L21/304 ,  H01L21/3063 ,  H01L21/58 ,  H01L21/762 ,  H01L27/12 ,  H01L31/18

    CPC分类号： B32B43/00 ,  H01L21/2007 ,  H01L21/76259 ,  Y10S438/96 ,  Y10S438/974 ,  Y10S438/977

    摘要： A process for producing an SOI substrate is disclosed which is useful for saving resources and lowering production cost. Further, a process for producing a photoelectric conversion device such as a solar cell is disclosed which can successfully separate a substrate by a porous Si layer, does not require a strong adhesion between a substrate and a jig, and can save resources and lower production cost. In a substrate having a porous layer on a nonporous layer and further having on the porous layer a layer small in porosity, the nonporous layer and the layer small in porosity are separated by the porous layer to form a thin film. A metal wire is wound around a side surface of the substrate, and a current is made to flow into the metal wire to generate a heat from the metal wire and transfer the heat preferentially to the porous layer, thus conducting the separation. The separated substrate is used for producing an SOI substrate and the separated nonporous Si layer is reutilized in a process of producing an SOI substrate.

    摘要翻译： 公开了一种用于制造SOI衬底的方法，其用于节省资源并降低生产成本。 此外，公开了一种太阳能电池的光电转换装置的制造方法，其可以通过多孔Si层成功地分离基板，不需要基板和夹具之间的强粘合性，并且可以节省资源并降低生产成本 。 在无孔层上具有多孔层的基板中，在多孔层上还具有孔隙较小的层，无孔层和孔隙较小的层被多孔层隔开以形成薄膜。 金属线缠绕在基板的侧面上，使电流流入金属丝，从金属线产生热量，并将热量优先转移到多孔层，进行分离。 分离的衬底用于制造SOI衬底，并且在制造SOI衬底的工艺中分离的无孔Si层被再利用。