Magnetoresistive effect composite head
    31.
    发明授权
    Magnetoresistive effect composite head 失效
    磁阻效应复合头

    公开(公告)号:US6154345A

    公开(公告)日:2000-11-28

    申请号:US55125

    申请日:1998-04-06

    IPC分类号: G11B5/31 G11B5/265 G11B5/39

    摘要: An ID head is formed after a MR head is formed. An upper shield far from a substrate is a first magnetic pole. A nonmagnetic insulator existing through a magnetic gap on the first magnetic pole determines zero throat height, thereby specifying a recording track width of less than 2 .mu.m. The ID head comprises a front end portion of a second magnetic pole, which is exposed to ABS and partly rides over the nonmagnetic insulator, a nonmagnetic insulator for burying a step by the front end portion, a coil which is formed on the nonmagnetic insulator and covered with a nonmagnetic insulator, and a main body portion of the second magnetic pole formed so as to ride over the coil and front end portion. As a result, it is possible to solved various problems of the ID head in which the front end portion of the second magnetic pole is formed first to realize a narrow track width.

    摘要翻译: 在形成MR头之后形成ID头。 远离基板的上屏蔽件是第一磁极。 通过第一磁极上的磁隙存在的非磁性绝缘体确定零喉部高度,从而指定小于2μm的记录轨道宽度。 ID头包括暴露于ABS并部分地越过非磁性绝缘体的第二磁极的前端部分,用于由前端部分掩埋台阶的非磁性绝缘体,形成在非磁性绝缘体上的线圈和 覆盖有非磁性绝缘体,第二磁极的主体部分形成为绕过线圈和前端部分。 结果,可以解决首先形成第二磁极的前端部以实现窄轨道宽度的ID头的各种问题。

    MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME
    32.
    发明申请
    MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME 审中-公开
    移动结构和光扫描镜使用它

    公开(公告)号:US20110188104A1

    公开(公告)日:2011-08-04

    申请号:US13001197

    申请日:2009-06-25

    IPC分类号: G02B26/10 H02N1/00 F16C11/04

    摘要: In a semiconductor mechanical structure, hinges may not be broken even when a mechanical shock is applied from outside, and thus, crashworthy is enhanced. A light scanning mirror includes a moving plate, a twin hinges constituting an axis of swing motion of the moving plate wherein an end of each hinge is connected to both ends of the moving plate, a stationary frame which is disposed to surround peripheries of the moving plate and supports another end of each of the twin hinges, and stoppers formed on the stationary frame. When the moving plate displaces in a lateral direction, the stopper contacts a side end portion of a recess of the moving plate, so that the displacement of the moving plate in the lateral direction is restrained. Thereby, the breakage of the hinges is prevented even when the mechanical shock is applied from outside.

    摘要翻译: 在半导体机械结构中,即使当从外部施加机械冲击时,铰链也不会断裂,因此提高了耐撞击性。 光扫描镜包括移动板,构成移动板的摆动轴线的双铰链,其中每个铰链的端部连接到移动板的两端;固定框架,设置成围绕移动板的周边 并且支撑每个双铰链的另一端,以及形成在固定框架上的止动件。 当移动板在横向方向上移动时,止动件接触移动板的凹部的侧端部,从而抑制移动板在横向方向上的位移。 因此,即使从外部施加机械冲击,也能够防止铰链的破损。

    MOVING STRUCTURE AND MICRO-MIRROR DEVICE USING THE SAME
    33.
    发明申请
    MOVING STRUCTURE AND MICRO-MIRROR DEVICE USING THE SAME 有权
    移动结构和使用相同的微镜器件

    公开(公告)号:US20110170157A1

    公开(公告)日:2011-07-14

    申请号:US13001217

    申请日:2009-06-24

    IPC分类号: G02B26/10 E05D3/10

    摘要: In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.

    摘要翻译: 在移动结构中,通过增强张力刚度或弯曲刚度,同时抑制铰链单元的扭转刚度,增加移动板的摆动运动的稳定性。 具有蜂巢部分的梯形铰链单元由双支撑杆和跨接在双支撑杆之间的横梁形成,以便可旋转地支撑移动板。 在铰链单元的蜂窝部分限制铰链单元的扭转刚性的同时增加张力刚度或抗弯刚度。

    Data output processor and method of manufacturing a semiconductor device
    36.
    发明授权
    Data output processor and method of manufacturing a semiconductor device 失效
    数据输出处理器及制造半导体器件的方法

    公开(公告)号:US07050881B2

    公开(公告)日:2006-05-23

    申请号:US11007265

    申请日:2004-12-09

    申请人: Hiroaki Tachibana

    发明人: Hiroaki Tachibana

    IPC分类号: G06F19/00

    CPC分类号: H01L21/76877 H01L21/2885

    摘要: A data output processor is employed when forming a conductive pattern on a layer formed with a plurality of recesses by filling the plurality of recesses with a conductive material by an electrolytic plating. The data output processor includes a parameter input receiving unit which receives a proportion of a recess with a width not exceeding a first reference width in the layer with respect to that layer, an arithmetic processor which calculates an integrated current amount necessary for filling the plurality of recesses with the conductive material in accordance with the proportion, and an output unit which outputs the integrated current amount.

    摘要翻译: 当通过电解电镀用导电材料填充多个凹槽来在形成有多个凹槽的层上形成导电图案时采用数据输出处理器。 数据输出处理器包括参数输入接收单元,该参数输入接收单元接收该层中相对于该层的宽度不超过第一参考宽度的凹部的一部分,运算处理器,其计算填充多个 根据比例的导电材料的凹部和输出积分电流量的输出单元。

    Detector for detecting contact resistance anomaly of cathode electrode in electroplating machine
    37.
    发明授权
    Detector for detecting contact resistance anomaly of cathode electrode in electroplating machine 失效
    检测电镀机阴极电极接触电阻异常检测器

    公开(公告)号:US06597182B1

    公开(公告)日:2003-07-22

    申请号:US09562899

    申请日:2000-05-02

    申请人: Hiroaki Tachibana

    发明人: Hiroaki Tachibana

    IPC分类号: G01R2700

    摘要: In an electroplating machine having a number of cathode electrodes which are simultaneously brought into contact with a silicon wafer to be electroplated in a semiconductor device fabricating process, a detector for detecting a contact resistance anomaly in a number of cathode electrodes includes a testing wafer which is formed of a circular silicon wafer and which has a number of metal film strips formed on one surface of the circular silicon wafer, separately from each other, so that the number of cathode electrodes can be individually brought into contact with the number of metal film strips, respectively. When the cathode electrodes are individually brought into contact with the metal film strips, respectively, a measuring tool is used to measure a contact resistance between each of the number of cathode electrodes and a corresponding one of the number of metal film strips.

    摘要翻译: 在半导体器件制造工序中,具有同时与待电镀的硅晶片接触的多个阴极的电镀机中,检测多个阴极电极的接触电阻异常的检测器, 由圆形硅晶片形成,并且在圆形硅晶片的一个表面上分开形成有多个金属膜条,使得阴极电极的数量可以分别与多个金属膜条接触 , 分别。 当分别使阴极电极与金属膜条接触时,使用测量工具来测量阴极数量中的每一个与金属膜条的相应数量之间的接触电阻。