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公开(公告)号：US08778514B2
公开(公告)日：2014-07-15
申请号：US13797606
申请日：2013-03-12
Applicant: Intermolecular Inc.
Inventor： Minh Huu Le , Zhi-Wen Sun , Guowen Ding , Mohd Hassan , Sandeep Jaggi , Muhammad Imran , Jingyu Lao , Yiwei Lu , Richard Blacker
CPC classification number: C03C17/366 , C03C17/2453 , C03C17/36 , C03C17/3618 , C03C17/3642 , C23C14/08 , C23C28/32 , C23C28/345 , H01B3/10
Abstract: A transparent dielectric composition comprising tin, oxygen and one of aluminum or magnesium with preferably higher than 15% by weight of aluminum or magnesium offers improved thermal stability over tin oxide with respect to appearance and optical properties under high temperature processes. For example, upon a heat treatment at temperatures higher than 500 C, changes in color and index of refraction of the present transparent dielectric composition are noticeably less than those of tin oxide films of comparable thickness. The transparent dielectric composition can be used in high transmittance, low emissivity coated panels, providing thermal stability so that there are no significant changes in the coating optical and structural properties, such as visible transmission, IR reflectance, microscopic morphological properties, color appearance, and haze characteristics, of the as-coated and heated treated products.
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32.发明申请Barrier Layers for Silver Reflective Coatings and HPC Workflows for Rapid Screening of Materials for Such Barrier Layers 审中-公开银色反射涂层屏障层和HPC工作流程，用于快速筛选这种阻挡层的材料公开(公告)号：US20140178578A1
公开(公告)日：2014-06-26
申请号：US13727115
申请日：2012-12-26
Applicant: INTERMOLECULAR, INC.
Inventor： Guizhen Zhang , Jeremy Cheng , Guowen Ding , Minh Huu Le , Daniel Schweigert , Yu Wang
IPC: B05D5/06
CPC classification number: C23C14/352 , B01J19/0046 , B01J2219/0043 , B01J2219/00443 , B01J2219/00596 , B01J2219/00659 , B01J2219/0075 , C03C17/36 , C03C17/3644 , C03C17/3652 , C03C17/366 , C23C14/165 , C23C14/3492
Abstract: Provided is High Productivity Combinatorial (HPC) testing methodology of semiconductor substrates, each including multiple site isolated regions. The site isolated regions are used for testing different compositions and/or structures of barrier layers disposed over silver reflectors. The tested barrier layers may include all or at least two of nickel, chromium, titanium, and aluminum. In some embodiments, the barrier layers include oxygen. This combination allows using relative thin barrier layers (e.g., 5-30 Angstroms thick) that have high transparency yet provide sufficient protection to the silver reflector. The amount of nickel in a barrier layer may be 5-10% by weight, chromium −25-30%, titanium and aluminum −30%-35% each. The barrier layer may be co-sputtered in a reactive or inert-environment using one or more targets that include all four metals. An article may include multiple silver reflectors, each having its own barrier layer.
Abstract translation: 提供了半导体衬底的高生产率组合（HPC）测试方法，每个包括多个现场隔离区域。 位置隔离区域用于测试布置在银反射器上的阻挡层的不同组成和/或结构。 经测试的阻挡层可以包括镍，铬，钛和铝中的全部或至少两种。 在一些实施例中，阻挡层包括氧。 该组合允许使用具有高透明度的相对薄的阻挡层（例如5-30埃厚），同时为银反射器提供足够的保护。 阻挡层中的镍的量可以为5-10重量％，铬-25-30％，钛和铝各自为-30％-35％。 阻挡层可以在反应性或惰性环境中使用包括所有四种金属的一种或多种目标共溅射。 物品可以包括多个银反射器，每个具有其自己的阻挡层。
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33.发明申请Method and apparatus for temperature control to improve low emissivity coatings 审中-公开用于温度控制以改善低辐射率涂层的方法和装置公开(公告)号：US20140166472A1
公开(公告)日：2014-06-19
申请号：US13714767
申请日：2012-12-14
Applicant: INTERMOLECULAR INC.
Inventor： Guowen Ding , Brent Boyce , Mohd Fadzli Anwar Hassan , Minh Huu Le , Zhi-Wen Wen Sun , Yu Wang
IPC: C23C14/34
CPC classification number: C23C14/34 , C03C17/36 , C03C17/3618 , C03C17/3644 , C03C17/366 , C03C2217/732 , C23C14/024 , C23C14/185 , C23C14/541 , C23C14/562
Abstract: A method for making low emissivity panels, comprising cooling the article before or during sputter depositing a coating layer, such as a seed layer or an infrared reflective layer. The cooling process can improve the quality of the infrared reflective layer, which can lead to better transmittance in visible regime, block more heat transfer from the low emissivity panels, and potentially can reduce the requirements for other layers, so that the overall performance, such as durability, could be improved.
Abstract translation: 一种用于制造低辐射率面板的方法，包括在溅射沉积涂层之前或期间冷却制品，例如种子层或红外反射层。 冷却过程可以提高红外线反射层的质量，这可以在可见光区域产生更好的透光率，阻止来自低辐射面板的更多的热传递，并且潜在地可以减少对其他层的要求，使得整体性能如 作为耐久性，可以改进。
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公开(公告)号：US20130189526A1
公开(公告)日：2013-07-25
申请号：US13797606
申请日：2013-03-12
Applicant: Intermolecular Inc.
Inventor： Mohd Fadzli Anwar Hassan , Richard Blacker , Guowen Ding , Muhammad Imran , Jingyu Lao , Minh Huu Le , Yiwei Lu , Zhi-Wen Wen Sun
IPC: H01B3/10
CPC classification number: C03C17/366 , C03C17/2453 , C03C17/36 , C03C17/3618 , C03C17/3642 , C23C14/08 , C23C28/32 , C23C28/345 , H01B3/10
Abstract: A transparent dielectric composition comprising tin, oxygen and one of aluminum or magnesium with preferably higher than 15% by weight of aluminum or magnesium offers improved thermal stability over tin oxide with respect to appearance and optical properties under high temperature processes. For example, upon a heat treatment at temperatures higher than 500 C, changes in color and index of refraction of the present transparent dielectric composition are noticeably less than those of tin oxide films of comparable thickness. The transparent dielectric composition can be used in high transmittance, low emissivity coated panels, providing thermal stability so that there are no significant changes in the coating optical and structural properties, such as visible transmission, IR reflectance, microscopic morphological properties, color appearance, and haze characteristics, of the as-coated and heated treated products.
Abstract translation: 包含锡，氧和铝或镁中的一种优选高于15重量％的铝或镁的透明电介质组合物相对于在高温过程下的外观和光学性质提供了比氧化锡更好的热稳定性。 例如，当在高于500℃的温度下进行热处理时，本发明透明电介质组合物的颜色变化和折射率显着小于具有相当厚度的氧化锡膜的变化。 透明电介质组合物可用于高透光率，低发射率涂层面板，提供热稳定性，使得涂层的光学和结构性能如可见透射率，IR反射率，微观形态特性，颜色外观和 涂层和加热处理产品的雾度特性。
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35.发明授权公开(公告)号：US09518319B2
公开(公告)日：2016-12-13
申请号：US14203182
申请日：2014-03-10
Applicant: Intermolecular Inc. , Guardian Industries Corp.
Inventor： Guowen Ding , Jeremy Cheng , Tong Ju , Minh Huu Le , Daniel Schweigert , Zhi-Wen Sun , Yongli Xu , Guizhen Zhang
IPC: B32B15/04 , B32B17/06 , C23C14/08 , G02F1/09 , B29D11/00 , G02B5/26 , C03C17/36 , C23C14/14 , E06B9/24
CPC classification number: G02B5/208 , B29D11/00865 , C03C17/36 , C03C17/3626 , C03C17/3639 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C23/007 , C03C2217/43 , C03C2217/48 , C03C2218/154 , C23C14/083 , C23C14/085 , C23C14/14 , C23C14/22 , E06B9/24 , E06B2009/2417 , E06B2009/2464 , G02B5/26 , G02F1/091 , G02F2001/094 , Y10T428/24975 , Y10T428/265
Abstract: Disclosed herein are systems, methods, and apparatus for forming low emissivity panels. A first dielectric layer is disposed over a substrate and includes a bi-metal oxide having tin and bismuth or niobium. A seed layer is disposed directly on the first dielectric layer. A reflective layer including silver is disposed directly on the seed layer. A barrier layer is disposed above the reflective layer. The barrier layer includes one of a nickel chromium titanium aluminum alloy or a nickel chromium titanium aluminum oxide. The nickel chromium titanium aluminum alloy or the nickel chromium titanium aluminum oxide includes between about 5% and about 10% by weight nickel, between about 25% and about 30% by weight chromium, between about 30% and about 35% by weight titanium, and between about 30% and about 35% by weight aluminum.
Abstract translation: 本文公开了用于形成低发射率面板的系统，方法和装置。 第一电介质层设置在衬底上并且包括具有锡和铋或铌的双金属氧化物。 种子层直接设置在第一介电层上。 包括银的反射层直接设置在种子层上。 阻挡层设置在反射层上。 阻挡层包括镍铬钛铝合金或镍铬钛氧化铝中的一种。 镍铬钛铝合金或镍铬钛铝氧化物包括约5重量％至约10重量％的镍，约25重量％至约30重量％的铬，约30重量％至约35重量％的钛， 和约30重量％至约35重量％的铝。
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Patent Agency Ranking
36.发明授权Low-e panels with ternary metal oxide dielectric layer and method for forming the same 有权具有三元金属氧化物介电层的低e面板及其形成方法公开(公告)号：US09315414B2
公开(公告)日：2016-04-19
申请号：US14701053
申请日：2015-04-30
Applicant: Intermolecular Inc.
Inventor： Mohd Fadzli Anwar Hassan , Richard Blacker , Guowen Ding , Jingyu Lao , Minh Huu Le , Yiwei Lu , Minh Anh Nguyen , Zhi-Wen Sun
CPC classification number: C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C2217/21 , C03C2217/228 , C03C2217/23 , C03C2217/26 , C03C2217/281
Abstract: Embodiments provided herein describe a low-e panel and a method for forming a low-e panel. A transparent substrate is provided. A metal oxide layer is formed over the transparent substrate. The metal oxide layer includes a first element, a second element, and a third element. A reflective layer is formed over the transparent substrate. The first element may include tin or zinc. The second element and the third element may each include tin, zinc, antimony, silicon, strontium, titanium, niobium, zirconium, magnesium, aluminum, yttrium, lanthanum, hafnium, or bismuth. The metal oxide layer may also include nitrogen.
Abstract translation: 本文提供的实施例描述了低e面板和形成低e面板的方法。 提供透明基板。 在透明基板上形成金属氧化物层。 金属氧化物层包括第一元件，第二元件和第三元件。 在透明基板上形成反射层。 第一元素可以包括锡或锌。 第二元素和第三元素可以各自包括锡，锌，锑，硅，锶，钛，铌，锆，镁，铝，钇，镧，铪或铋。 金属氧化物层也可以包括氮。
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公开(公告)号：US09296651B2
公开(公告)日：2016-03-29
申请号：US14299341
申请日：2014-06-09
Inventor： Mohd Fadzli Anwar Hassan , Richard Blacker , Guowen Ding , Muhammad Imran , Jingyu Lao , Minh Huu Le , Yiwei Lu , Zhi-Wen Wen Sun
CPC classification number: C03C17/366 , C03C17/2453 , C03C17/36 , C03C17/3618 , C03C17/3642 , C23C14/08 , C23C28/32 , C23C28/345 , H01B3/10
Abstract: A transparent dielectric composition comprising tin, oxygen and one of aluminum or magnesium with preferably higher than 15% by weight of aluminum or magnesium offers improved thermal stability over tin oxide with respect to appearance and optical properties under high temperature processes. For example, upon a heat treatment at temperatures higher than 500 C, changes in color and index of refraction of the present transparent dielectric composition are noticeably less than those of tin oxide films of comparable thickness. The transparent dielectric composition can be used in high transmittance, low emissivity coated panels, providing thermal stability so that there are no significant changes in the coating optical and structural properties, such as visible transmission, IR reflectance, microscopic morphological properties, color appearance, and haze characteristics, of the as-coated and heated treated products.
Abstract translation: 包含锡，氧和铝或镁中的一种优选高于15重量％的铝或镁的透明电介质组合物相对于在高温过程下的外观和光学性质提供了比氧化锡更好的热稳定性。 例如，当在高于500℃的温度下进行热处理时，本发明透明电介质组合物的颜色变化和折射率显着小于具有相当厚度的氧化锡膜的变化。 透明电介质组合物可用于高透光率，低发射率涂层面板，提供热稳定性，使得涂层的光学和结构性能如可见透射率，IR反射率，微观形态特性，颜色外观和 涂层和加热处理产品的雾度特性。
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38.发明授权Barrier layers for silver reflective coatings and HPC workflows for rapid screening of materials for such barrier layers 有权用于银反射涂层的阻隔层和用于快速筛选这种阻挡层的材料的HPC工作流程公开(公告)号：US09127348B2
公开(公告)日：2015-09-08
申请号：US14574755
申请日：2014-12-18
Applicant: Intermolecular Inc.
Inventor： Guizhen Zhang , Jeremy Cheng , Guowen Ding , Minh Huu Le , Daniel Schweigert , Yu Wang
IPC: B32B15/04 , B32B17/06 , C23C14/08 , C23C14/22 , C03C17/36 , C23C14/14 , C23C14/00 , C23C14/04 , C23C14/34
CPC classification number: C23C14/22 , C03C17/36 , C03C17/3605 , C03C17/3618 , C03C17/3644 , C03C17/3652 , C03C17/366 , C03C17/3681 , C23C14/0036 , C23C14/042 , C23C14/14 , C23C14/34 , G02B1/12 , G02B1/14 , Y10T428/12542 , Y10T428/12549 , Y10T428/12611 , Y10T428/12778 , Y10T428/31678
Abstract: Provided is High Productivity Combinatorial (HPC) testing methodology of semiconductor substrates, each including multiple site isolated regions. The site isolated regions are used for testing different compositions and/or structures of barrier layers disposed over silver reflectors. The tested barrier layers may include all or at least two of nickel, chromium, titanium, and aluminum. In some embodiments, the barrier layers include oxygen. This combination allows using relative thin barrier layers (e.g., 5-30 Angstroms thick) that have high transparency yet provide sufficient protection to the silver reflector. The amount of nickel in a barrier layer may be 5-10% by weight, chromium—25-30%, titanium and aluminum—30%-35% each. The barrier layer may be co-sputtered in a reactive or inert-environment using one or more targets that include all four metals. An article may include multiple silver reflectors, each having its own barrier layer.
Abstract translation: 提供了半导体衬底的高生产率组合（HPC）测试方法，每个包括多个现场隔离区域。 位置隔离区域用于测试布置在银反射器上的阻挡层的不同组成和/或结构。 经测试的阻挡层可以包括镍，铬，钛和铝中的全部或至少两种。 在一些实施例中，阻挡层包括氧。 该组合允许使用具有高透明度的相对薄的阻挡层（例如5-30埃厚），同时为银反射器提供足够的保护。 阻挡层中的镍的量可以是5-10重量％，铬25-30％，钛和铝30％-35％。 阻挡层可以在反应性或惰性环境中使用包括所有四种金属的一种或多种目标共溅射。 物品可以包括多个银反射器，每个具有其自己的阻挡层。
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公开(公告)号：US20150191965A1
公开(公告)日：2015-07-09
申请号：US14662583
申请日：2015-03-19
Applicant: Intermolecular Inc.
Inventor： Guowen Ding , Brent Boyce , Tong Ju , Minh Huu Le , Phil Lingle , Daniel Schweigert , Yongli Xu , Guizhen Zhang
CPC classification number: E06B3/6715 , C03C17/36 , C03C17/3639 , C03C17/3644 , C03C17/366 , C03C17/3681 , Y10T428/24975 , Y10T428/265
Abstract: Embodiments provided herein describe low-e panels and methods for forming low-e panels. A transparent substrate is provided. A low-e stack is formed above the transparent substrate. Each of the layers of the low-e stack are formed to have a specific thickness to tune the performance characteristics of the low-e panel.
Abstract translation: 本文提供的实施例描述了用于形成低e板的低e板和方法。 提供透明基板。 在透明基板的上方形成低e堆叠。 低e叠层的每个层都形成为具有特定厚度以调节低e面板的性能特性。
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40.发明申请SYSTEMS, METHODS, AND APPARATUS FOR INTEGRATED GLASS UNITS HAVING ADJUSTABLE SOLAR HEAT GAINS 审中-公开具有可调节太阳能热增益的集成玻璃单元的系统，方法和装置公开(公告)号：US20150177583A1
公开(公告)日：2015-06-25
申请号：US14139441
申请日：2013-12-23
Applicant: Intermolecular Inc.
Inventor： Guowen Ding , Minh Huu Le
IPC: G02F1/153
CPC classification number: G02F1/153 , G02F1/133553
Abstract: Disclosed herein are systems, methods, and apparatus for forming windows that may include a substrate, a bottom dielectric layer formed over the substrate, and a reflective layer formed over the bottom dielectric layer. The windows may also include a conducting barrier layer formed over the reflective layer, an electrochromic layer formed over the conducting barrier layer, and an ion conductor layer formed over the electrochromic layer. The windows may further include an ion storage layer formed over the ion conductor layer and a conducting oxide layer formed over the ion storage layer. The electrochromic layer may be configured to change a transmissivity of the windows in response to a voltage being applied to the window. The windows may have an emissivity of between about 0.01 and 0.08.
Abstract translation: 本文公开了用于形成窗口的系统，方法和装置，其可以包括衬底，形成在衬底上的底部电介质层和形成在底部电介质层上的反射层。 窗口还可以包括在反射层上形成的导电阻挡层，形成在导电阻挡层上的电致变色层，以及形成在电致变色层上的离子导体层。 窗口还可以包括形成在离子导体层上的离子存储层和形成在离子存储层上的导电氧化物层。 电致变色层可以被配置为响应于施加到窗口的电压来改变窗户的透射率。 窗口的发射率可以在大约0.01和0.08之间。
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