公开(公告)号：US5093149A

公开(公告)日：1992-03-03

申请号：US520988

申请日：1990-05-07

Applicant: Joachim Doehler ,  Stephen J. Hudgens ,  Stanford R. Ovshinsky ,  Lester R. Peedin ,  Jeffrey M. Krisko

Inventor： Joachim Doehler ,  Stephen J. Hudgens ,  Stanford R. Ovshinsky ,  Lester R. Peedin ,  Jeffrey M. Krisko

IPC: C23C16/44 ,  C23C16/452 ,  C23C16/455

CPC classification number: C23C16/4551 ,  C23C16/452 ,  C23C16/455 ,  C23C16/45514

Abstract: A method of depositing high quality thin film at a high rate of deposition through the formation of a high flux of activated precursor species of a precursor deposition gas by employing a substantial pressure differential between the pressure adjacent the aperture in a conduit from which said precursor deposition gas is introduced into the interior of a vacuumized enclosure and the background pressure which exits in said enclosure. As the precursor deposition gas is introduced into said enclosure, a high density plume of said activated precursor species are formed therefrom due to an electromagnetic field established in an activation region adjacent said aperture. The pressure differential is sufficient to cause those activated precursor species to be deposited upon a remotely positioned substrate. In order to obtain a sufficient pressure differential, it is preferred that the flow of the precursor deposition gas reaches transonic velocity. And in order to obtain a high quality thin film, it is preferred that the plume of activated precursor species is spaced from the substrate; without structural or electrical confinement, a distance from the activation region greater than the mean free path of undesired activated precursor species and within the mean free path of desired species.

Abstract translation: 一种沉积高质量薄膜的方法，该方法是通过在邻近导管孔之间的压力之间产生相当大的压力差，形成高通量的活化前体物质的前体沉积气体， 气体被引入真空封壳的内部，并且在所述外壳中离开的背景压力。 当前体沉积气体被引入所述外壳中时，由于在邻近所述孔的激活区域中建立的电磁场，所以形成所述活化的前体物质的高密度羽流。 压力差足以使这些活化的前体物质沉积在远距离定位的基底上。 为了获得足够的压差，优选前体沉积气体的流量达到跨音速。 并且为了获得高质量的薄膜，优选活化的前体物质的羽流与基底间隔开; 没有结构或电气限制，距离激活区域的距离大于不期望的活化的前体物质的平均自由程和在所需物种的平均自由程中。

公开(公告)号：US4729341A

公开(公告)日：1988-03-08

申请号：US934365

申请日：1986-11-24

Applicant: Eugene W. Fournier ,  Erik J. Bjornard ,  Annette G. Johncock ,  Joachim Doehler

Inventor： Eugene W. Fournier ,  Erik J. Bjornard ,  Annette G. Johncock ,  Joachim Doehler

IPC: C23C16/50 ,  C23C16/54 ,  C23C16/48

CPC classification number: C23C16/54 ,  C23C16/50

Abstract: There are disclosed a method and apparatus for depositing a layer of material onto the outer surfaces of a plurality of cylindrical members. The cylindrical members are arranged to form a substantially closed loop with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of adjacent members being closely spaced apart to form an inner chamber which is substantially closed. Adjacent cylindrical members form narrow passages which communicate with the inner chamber. At least one reaction gas is introduced into the inner chamber through at least one of the narrow passages and a plasma is formed from the at least one reaction gas within the inner chamber to deposit the layer of material onto the outer surfaces of the cylindrical members. The plasma can be formed by using either microwave energy or radio frequency energy. More particularly disclosed is a method and apparatus for making electrophotographic drums.

Abstract translation: 公开了一种用于在多个圆柱形构件的外表面上沉积材料层的方法和装置。 圆柱形构件被布置成形成基本上闭合的环，其纵轴线基本上平行地布置，并且相邻构件的外表面紧密间隔开以形成基本封闭的内室。 相邻的圆柱形构件形成与内腔连通的窄通道。 至少一个反应气体通过至少一个窄通道引入内室，并且从内室内的至少一个反应气体形成等离子体，以将材料层沉积到圆柱形构件的外表面上。 等离子体可以通过使用微波能量或射频能量来形成。 更具体地公开了一种用于制造电子照相鼓的方法和装置。

公开(公告)号：US4626447A

公开(公告)日：1986-12-02

申请号：US713354

申请日：1985-03-18

Applicant: Joachim Doehler ,  Masatsugu Izu

Inventor： Joachim Doehler ,  Masatsugu Izu

IPC: C23C16/50 ,  C23C16/517 ,  C23C16/54 ,  H01J37/32 ,  C23C13/08

CPC classification number: H01J37/32623 ,  C23C16/517 ,  C23C16/54 ,  H01J37/32697 ,  H01J37/3277

Abstract: Apparatus for and a method of confining the ionized plasma developed during the glow discharge deposition of thin film semiconductor alloy material to preselected portions of the plasma region so as to prevent etching and deposit only uniform, nonhomogeneous semiconductor alloy material.

Abstract translation: 将在薄膜半导体合金材料的辉光放电沉积期间产生的电离等离子体限制在等离子体区域的预选部分的装置和方法，以防止蚀刻和沉积仅均匀的非均匀半导体合金材料。

公开(公告)号：US4608943A

公开(公告)日：1986-09-02

申请号：US664453

申请日：1984-10-24

Applicant: Joachim Doehler ,  Masatsugu Izu

Inventor： Joachim Doehler ,  Masatsugu Izu

IPC: H01L31/04 ,  C23C16/04 ,  C23C16/54 ,  H01J37/32 ,  H01L21/205 ,  C23C16/50

CPC classification number: H01J37/32009 ,  C23C16/042 ,  C23C16/545 ,  H01J37/3244

Abstract: An improved cathode assembly specifically designed to provide for the uniform, localized profiling of dopant or other alterant elements into the host matrix of a semiconductor alloy material which is continuously and uniformly deposited onto a moving substrate by a glow discharge deposition process.

Abstract translation: 一种改进的阴极组件，其特别设计用于通过辉光放电沉积工艺将掺杂剂或其它改变元件均匀地局部化成半导体合金材料的主体基质，该半导体合金材料的主体基质连续且均匀地沉积到移动的衬底上。

公开(公告)号：US4515107A

公开(公告)日：1985-05-07

申请号：US441280

申请日：1982-11-12

Applicant: Eugene Fournier ,  Joachim Doehler

Inventor： Eugene Fournier ,  Joachim Doehler

IPC: H01L31/04 ,  C23C16/511 ,  H01J37/32 ,  H01L21/205 ,  H01L31/20 ,  C23C13/10

CPC classification number: H01J37/3222 ,  C23C16/511 ,  H01J37/32192 ,  H01J37/3277 ,  H01L31/206 ,  H01J2237/3325 ,  Y02E10/50 ,  Y02P70/521

Abstract: An apparatus for manufacturing photovoltaic devices of the type including a plurality of layers of semiconductor materials deposited onto a substrate includes a plurality of deposition chambers, each chamber arranged to deposit a respective one of the layers of semiconductor materials onto the substrate as the substrate is advanced therethrough. At least one of the deposition chambers is coupled to a source of microwave energy to form a microwave energy excited glow discharge plasma within the at least one deposition chamber for depositing at least one of the layers of semiconductor material onto the substrate from the microwave energy excited glow discharge plasma within the at least one deposition chamber.Also disclosed is an assembly for depositing a material onto a substrate from a microwave energy excited plasma. The assembly includes a deposition chamber, a source of microwave energy, and an antenna extending into the chamber and coupled to the microwave energy source. The antenna includes an outer sheath formed from a conductive material, an inner conductor extending within and electrically insulated from the outer sheath, and a slot within the outer sheath. The assembly also includes a new and improved feed-through for the antenna permitting the antenna to extend into the chamber while establishing a vacuum seal between the chamber and the antenna.

Abstract translation: 一种用于制造包括沉积在衬底上的多层半导体材料的类型的光伏器件的装置包括多个沉积室，每个腔室被布置成当衬底前进时将各个半导体材料层沉积到衬底上 通过。 沉积室中的至少一个耦合到微波能量源，以在至少一个沉积室内形成微波能量激发的辉光放电等离子体，用于将微波能量激发的半导体材料层中的至少一层沉积到衬底上 在所述至少一个沉积室内的辉光放电等离子体。 还公开了一种用于从微波能量激发的等离子体将材料沉积到衬底上的组件。 组件包括沉积室，微波能量源和延伸到室中并耦合到微波能量源的天线。 天线包括由导电材料形成的外护套，在外护套内延伸并与外护套电绝缘的内导体，以及外护套内的槽。 组件还包括用于天线的新的和改进的馈通，其允许天线延伸到腔室中，同时在腔室和天线之间建立真空密封。

公开(公告)号：US4478173A

公开(公告)日：1984-10-23

申请号：US486136

申请日：1983-04-18

Applicant: Joachim Doehler

Inventor： Joachim Doehler

IPC: C23C16/52 ,  G01N21/62 ,  C23C13/08

CPC classification number: C23C16/52 ,  G01N21/62

Abstract: A method of and apparatus for accurately sensing and reproducibly controlling the intensity of electromagnetic energy in the decomposition region of a deposition chamber. The apparatus includes a detector adapted to (1) monitor the level of radiation emitted from the decomposition region and (2) provide an output signal indicative of said level. The invention further includes circuitry for (1) comparing the signal from the detector with a reference signal indicative of a preselected level of energy, and (2) generating a correction signal indicative of the actual level of energy in the decomposition region relative to the preselected level of energy. According to the method of this invention, the correction signal may be utilized to regulate the source of electromagnetic energy so that the preselected level of electromagnetic energy within the decomposition region is kept constant despite fluctuations in other operating parameters.

Abstract translation: 一种用于在沉积室的分解区域中精确地感测和再现地控制电磁能强度的方法和装置。 该装置包括检测器，其适于（1）监测从分解区域发射的辐射水平，以及（2）提供指示所述水平的输出信号。 本发明还包括用于（1）将来自检测器的信号与指示预选能级的参考信号进行比较的电路，以及（2）产生指示分解区域中相对于预选的能量的实际电平的校正信号 能量水平。 根据本发明的方法，可以利用校正信号来调节电磁能量的来源，使得尽管其他操作参数的波动，分解区域内的预定电平的电磁能量也保持恒定。