公开(公告)号：US07109501B2

公开(公告)日：2006-09-19

申请号：US10959508

申请日：2004-10-07

申请人： Osamu Nagano ,  Atsushi Ando

发明人： Osamu Nagano ,  Atsushi Ando

IPC分类号： H01J37/08 ,  H01J37/30 ,  A61N5/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3174

摘要： A charged particle beam lithography system includes: a charged particle beam source which generates a charged particle beam and irradiates a substrate therewith; an aperture in which has been formed a pattern of a shape corresponding to an arbitrary pattern to be drawn; an illuminator which adjusts the diameter of the charged particle beam and illuminates the aperture with the charged particle beam; a first deflector which deflects the charged particle beam by an electrical field to cause the charged particle beam to be incident on an arbitrary pattern, allowing the charged particle beam to pass through the aperture and be reflected back along the optical axis; a first demagnification optical projection system which demagnifies the aperture image of the charged particle beam which has passed through the aperture with the use of an electrical field or electromagnetic field; a second demagnification optical projection system which demagnifies the aperture image of the charged particle beam which has been demagnified by the first demagnification projection optical system, with the use of an electrical field or electromagnetic field to form an image on the substrate; and a beam diameter adjuster which adjusts the illuminator in such a manner that the beam diameter at crossovers of the charged particle beam, formed between the aperture and the first demagnification optical projection system and within the second demagnification optical projection system, is greater than the size of the pattern.

摘要翻译： 带电粒子束光刻系统包括：带电粒子束源，其产生带电粒子束并照射衬底; 已经形成了与要拉制的任意图案相对应的形状的图案的孔; 照明器，其调节带电粒子束的直径并用带电粒子束照射孔径; 第一偏转器，其通过电场使带电粒子束偏转，以使带电粒子束入射到任意图案上，允许带电粒子束通过孔径并沿光轴反射回; 第一缩小光学投影系统，其通过使用电场或电磁场来对通过所述孔径的带电粒子束的孔径图像进行缩小; 第二缩小光学投影系统，其通过使用电场或电磁场在所述基板上形成图像来对由所述第一缩尺投影光学系统进行了缩小的带电粒子束的孔径图像进行缩小; 以及光束直径调节器，其以这样的方式调节照明器，使得形成在孔和第一缩小光学投影系统之间并且在第二缩小光学投影系统内的带电粒子束的交叉处的光束直径大于尺寸 的模式。

公开(公告)号：US07076761B2

公开(公告)日：2006-07-11

申请号：US10642680

申请日：2003-08-19

申请人： Ryouichi Inanami ,  Atsushi Ando ,  Kazuhiro Nakai ,  Yoshikazu Ichioka

发明人： Ryouichi Inanami ,  Atsushi Ando ,  Kazuhiro Nakai ,  Yoshikazu Ichioka

IPC分类号： G06F17/50

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/20 ,  H01J37/3174

摘要： A method for creating charged-particle-beam exposure data containing a description of an exposure sequence of character patterns to perform exposure of a charged-particle-beam according to a character projection technique, comprising selecting first or second values as a parameter to transfer one character pattern and then transferring a subsequent character pattern, the first value regarding performance of a shaping deflector which deflects the charged particle beam so that the charged particle beam is applied to an arbitrarily character aperture formed in a CP aperture mask and a character beam having the shape of the character aperture is thereby created, and the second value regarding performance of an objective deflector which deflects the character beam so that the character beam is applied to an arbitrarily position of the deflection region of the specimen, and determining the exposure sequence of the character patterns in the deflection region in accordance with the selected parameter.

摘要翻译： 一种用于产生包含字符图案的曝光序列的描述的带电粒子束曝光数据的方法，用于根据字符投影技术执行带电粒子束的曝光，包括选择第一或第二值作为参数以传送一个 字符图案，然后传送后续字符图案，关于使带电粒子束偏转的成形偏转器的性能的第一值，使得带电粒子束被施加到形成在CP孔径掩模中的任意字符孔径和具有 由此产生字符孔径的形状，以及关于使字符光束偏转的目标偏转器的性能的第二值，使得字符光束被施加到样本的偏转区域的任意位置，并且确定 根据所选择的偏转区域中的字符图案 直径

公开(公告)号：US20060079336A1

公开(公告)日：2006-04-13

申请号：US11234199

申请日：2005-09-26

申请人： Atsushi Ando ,  Minoru Wakamatsu ,  Kazuyuki Ichikawa ,  Isashi Kashiwagi

发明人： Atsushi Ando ,  Minoru Wakamatsu ,  Kazuyuki Ichikawa ,  Isashi Kashiwagi

IPC分类号： F16D3/26

CPC分类号： F16D3/2055 ,  Y10S464/905

摘要： In a tripod-type constant velocity joint having an inner joint member, an outer joint member, and three roller units, the radius R1, outer width W1, and inner width W2 of the outer periphery cylindrical surface of each roller unit, and the radius R3 of the center hole of each roller unit are determined to satisfy the following two inequalities: 0.5Rtc(1/cos0.3Θ−1)+(R1−R3)μ

摘要翻译： 在具有内接头构件，外接头构件和三个滚子单元的三脚架式等速万向节中，每个滚子单元的外周圆柱面的半径R 1，外宽W1和内宽W 2， 确定每个辊单元的中心孔的半径R 3满足以下两个不等式：<？in-line-formula description =“In-line formula”end =“lead”？> 0.5Rtc（1 / cos0 .3 Theta-1）+（R1-R3）mu <？in-line-formula description =“In-line Formulas “end =”lead“？> 1.5Rtc（1-cos0.3theta）+（R1-R3）mu 其中Rtc ：通过内侧接头构件的三脚架球面的各个中心的圆的半径，Theta：外侧接头构件与内侧接头构件的最大接合角度，μ：三角架球面与三角架球面之间的摩擦系数 中心的墙面h 相应的辊单元的油。

公开(公告)号：US5612090A

公开(公告)日：1997-03-18

申请号：US467637

申请日：1995-06-06

申请人： Yasushi Fukui ,  Atsushi Ando ,  Yoshikazu Morita ,  Masanori Matsuno ,  Minoru Saito ,  Hideo Miyake ,  Masahiko Souda

发明人： Yasushi Fukui ,  Atsushi Ando ,  Yoshikazu Morita ,  Masanori Matsuno ,  Minoru Saito ,  Hideo Miyake ,  Masahiko Souda

IPC分类号： C23C14/08

CPC分类号： C23C14/081 ,  Y10T428/12535 ,  Y10T428/12549 ,  Y10T428/1259 ,  Y10T428/12611 ,  Y10T428/12667 ,  Y10T428/12736 ,  Y10T428/12757 ,  Y10T428/12764 ,  Y10T428/252 ,  Y10T428/256 ,  Y10T428/257

摘要： An iron-based heat-generating material excellent in oxidation resistance at an elevated temperature which comprises an iron-based alloy capable of generating heat by passing electricity therethrough and a coating of aluminum and oxygen formed on the surface of the alloy, the amount of the oxygen in the coating is less than the stoichiometric amount of oxygen in Al.sub.2 O.sub.3. The material can be prepared by vacuum evaporation of Al onto the surface of the iron-based alloy wherein an oxygen partial pressure in a vacuum gaseous atmosphere for the vacuum evaporation is adjusted so that there is formed on the surface of the alloy a coating consisting of aluminum and oxygen, the amount of the oxygen in the coating being less than the stoichiometric amount of oxygen in Al.sub.2 O.sub.3. When the material is heated in ambient or oxidizing atmosphere, an outermost layer of the coating is rapidly converted to Al.sub.2 O.sub.3.

公开(公告)号：US5388234A

公开(公告)日：1995-02-07

申请号：US77585

申请日：1993-06-17

申请人： Yuji Kanno ,  Masao Ito ,  Ken Tsurubayashi ,  Kazuaki Kurachi ,  Atsushi Ando

发明人： Yuji Kanno ,  Masao Ito ,  Ken Tsurubayashi ,  Kazuaki Kurachi ,  Atsushi Ando

IPC分类号： G06F7/02 ,  G06F17/30 ,  G06F11/30

CPC分类号： G06F17/30985 ,  G06F7/02 ,  G06F2207/025

摘要： A finite state automaton (FSA) text search apparatus converts each of successively received binary code numbers, representing successive characters of a text to be searched, into two portions. Two portions are extracted from a state number which is currently being read out from a first table memory, with one portion being combined with one of the input character portions and the combination used to select one of a set of 1st displacement numbers from a second table memory, while a second portion of the current state number and the other portion of the input character number similarly select one of a set of 2nd displacement numbers from a third table memory, and the entire current state number selects one of a set of base numbers from a fourth table memory. The selected 1st and 2nd displacement numbers are combined with the selected base number, and the result used to select the next state number from the first table memory. The overall memory capacity required is minimized, while achieving a high search speed.

摘要翻译： 有限状态自动机（FSA）文本搜索装置将连续接收的二进制代号中的每一个代表要搜索的文本的连续字符转换成两部分。 从当前正在从第一表存储器读出的状态号提取两部分，其中一部分与输入字符部分之一组合，以及用于从第二表中选择一组第一位移号的组合 存储器，而当前状态号码的第二部分和输入字符号码的另一部分类似地从第三表存储器中选择一组第二位移号码中的一个，并且整个当前状态号码选择一组基数 从第四个表记忆。 所选择的第一和第二位移号与选择的基数组合，并且用于从第一表存储器中选择下一个状态数的结果。 所需的总体内存容量最小化，同时实现了高搜索速度。

公开(公告)号：US09163311B2

公开(公告)日：2015-10-20

申请号：US13333137

申请日：2011-12-21

申请人： Harunari Hasegawa ,  Kippei Sugita ,  Atsushi Ando ,  Yoshiki Fukuhara ,  Makoto Takahashi

发明人： Harunari Hasegawa ,  Kippei Sugita ,  Atsushi Ando ,  Yoshiki Fukuhara ,  Makoto Takahashi

IPC分类号： C23C16/455 ,  C23C16/458 ,  C23F1/00 ,  H01L21/306 ,  C23C16/52 ,  C23C16/06 ,  C23C16/22

CPC分类号： C23C16/45578 ,  C23C16/455 ,  C23C16/45563 ,  C23C16/45576 ,  C23C16/458 ,  C23C16/4584 ,  C23C16/52

摘要： Provided is a film forming apparatus for forming a film on a substrate maintained within a film forming container by supplying a raw material gas to the substrate. The film forming container includes a substrate maintaining unit, a supply mechanism configured to include a supply pipe with supply holes formed thereon to supply a raw material gas to the interior of the film forming container through the supply holes, an exhaust mechanism configured to include an exhaust pipe with exhaust holes formed thereon to exhaust gas from the interior of the film forming container through the exhaust holes, and a controller configured to control the substrate maintaining unit, the supply mechanism, and the exhaust mechanism. The supply holes and the exhaust holes are formed to face each other with the substrate maintained in the substrate maintaining unit interposed therebetween.

摘要翻译： 本发明提供一种成膜装置，其通过向基板供给原料气体而在保持在成膜容器内的基板上形成膜。 成膜容器包括基板保持单元，供给机构，其构造成包括供给管，其上形成有供给孔，供给孔通过供给孔向成膜容器的内部供给原料气体;排气机构， 排气管，其上形成有排气孔，通过排气孔从成膜容器的内部排出气体;以及控制器，被配置为控制基板保持单元，供给机构和排气机构。 供给孔和排气孔形成为彼此面对，并且基板保持在基板保持单元之间。

公开(公告)号：US08540598B2

公开(公告)日：2013-09-24

申请号：US13074648

申请日：2011-03-29

申请人： Mayuko Wakida ,  Motoyasu Yamamori ,  Atsushi Ando ,  Kazuya Hattori ,  Hiromichi Ota ,  Yoshinobu Kato ,  Koji Nagumo ,  Tomohiro Honda

发明人： Mayuko Wakida ,  Motoyasu Yamamori ,  Atsushi Ando ,  Kazuya Hattori ,  Hiromichi Ota ,  Yoshinobu Kato ,  Koji Nagumo ,  Tomohiro Honda

IPC分类号： F16H23/00

CPC分类号： F16H1/32 ,  F16H2001/324 ,  F16H2001/325

摘要： A speed change gear includes: an internal gear member; an eccentric member; an oscillating member; a pair of first and second rotating members; and a pin that is supported at both ends by insertion holes of the first and second rotating members. The insertion hole and the insertion hole have the same diameter. The outside diameter of the other side end portion of the pin is smaller than the outside diameter of one side end portion of the pin such that the one side end portion is press-fitted in the corresponding insertion hole and the other side end portion is supported by the corresponding insertion hole.

摘要翻译： 变速齿轮包括：内齿轮构件; 偏心构件 摆动构件; 一对第一和第二旋转构件; 以及通过第一和第二旋转构件的插入孔在两端支撑的销。 插入孔和插入孔具有相同的直径。 销的另一侧端部的外径小于销的一个侧端部的外径，使得一侧端部压配合在相应的插入孔中，另一侧端部被支撑 通过相应的插孔。

公开(公告)号：US08029372B2

公开(公告)日：2011-10-04

申请号：US12277993

申请日：2008-11-25

申请人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

发明人： Atsushi Ando ,  Tomohiko Sato ,  Takumi Matsumoto ,  Takeo Yamamoto

IPC分类号： F16D3/205

CPC分类号： F16D3/205 ,  Y10S464/905

摘要： A constant velocity universal joint is provided, having a hollow outer joint member, an inner joint member, an outer roller including a cylindrical surface, an inner roller including a concave sphere, and plural leg shafts each including a convex sphere formed in a tip portion and engaging with the concave sphere, where the cylindrical surface of the outer roller satisfies the following: W1>PCR(1−cos θ)/2+μ3R3+μ2R1 W2>3PCR(1−cos θ)/2−μ3R3+μ2R1, where W1 indicates a length of the cylindrical surface from a center of the leg shaft and an intersection of the cylindrical surface and an upper side taper portion of the outer roller, W2 indicates a length of the cylindrical surface from the center of the leg shaft and an intersection of the cylindrical surface and a lower side taper portion of the outer roller, and θ indicates a maximum joint angle.

摘要翻译： 提供了一种等速万向接头，其具有中空的外接头构件，内接头构件，包括圆柱形表面的外滚子，包括凹球的内滚子和多个腿轴，每个腿轴包括形成在尖端部分中的凸球 并且与外滚子的圆柱面对应的凹球符合如下：W1> PCR（1-cos＆Thetas）/ 2 +μ3R3+μ2R1W2> 3PCR（1-cos＆amp; thetas）/ 2-μ3R3+ μ2R1，其中W1表示从腿部轴的中心起的圆柱形表面的长度以及圆柱形表面和外部辊的上侧锥形部分的交点，W2表示从腿部中心的圆柱形表面的长度 轴和圆筒表面与外辊的下侧锥形部分的交点，和＆ 表示最大关节角度。

公开(公告)号：US20110221293A1

公开(公告)日：2011-09-15

申请号：US13047084

申请日：2011-03-14

申请人： Yoshinobu KATOH ,  Yosuke Nishimura ,  Atsushi Ando

发明人： Yoshinobu KATOH ,  Yosuke Nishimura ,  Atsushi Ando

IPC分类号： H02K7/116

CPC分类号： H02K9/22 ,  H02K24/00

摘要： A housing is provided with a partition wall portion that partitions an inner space of the housing into an electric motor accommodating space and a speed reducer accommodating space. The partition wall portion fixes a gear that constitutes a speed reducer. In addition, the partition wall portion has a housing boss portion, and an inner stator is fixed to the housing boss portion. Thus, heat generated by the inner stator is dissipated to the outside through the housing boss portion and the partition wall portion.

摘要翻译： 壳体设置有将壳体的内部空间分隔成电动机容纳空间的分隔壁部分和减速器容纳空间。 分隔壁部分固定构成减速器的齿轮。 此外，分隔壁部分具有壳体凸起部分，并且内部定子固定到壳体凸起部分。 因此，由内部定子产生的热量通过壳体凸起部分和分隔壁部分消散到外部。

公开(公告)号：US20100049829A1

公开(公告)日：2010-02-25

申请号：US12610955

申请日：2009-11-02

申请人： Hisashi TAKAYAMA ,  Kyoko Kawaguchi ,  Yoshiaki Nakanishi ,  Osamu Sasaki ,  Atsushi Ando

发明人： Hisashi TAKAYAMA ,  Kyoko Kawaguchi ,  Yoshiaki Nakanishi ,  Osamu Sasaki ,  Atsushi Ando

IPC分类号： G06F15/16 ,  G06F3/01

CPC分类号： G07F7/0866 ,  G06Q20/04 ,  G06Q20/20 ,  G06Q20/32 ,  G06Q20/322 ,  G06Q20/327 ,  G06Q20/363 ,  G06Q30/06

摘要： The present invention provides mobile terminals with various types of services such as electronic commerce service, music delivery service, and position information service. User applications required for the electronic commerce service, music delivery service, and position information service are respectively configured as service objects each having a server facility, and further a local gateway is provided, whereby various types of services can be used through a browser.

摘要翻译： 本发明为移动终端提供各种类型的服务，例如电子商务服务，音乐传递服务和位置信息服务。 电子商务服务，音乐传送服务和位置信息服务所需的用户应用程序分别被配置为具有服务器设备的服务对象，并且还提供了本地网关，由此可以通过浏览器使用各种类型的服务。