公开(公告)号：US10559531B2

公开(公告)日：2020-02-11

申请号：US16056806

申请日：2018-08-07

Applicant: Micron Technology, Inc.

Inventor： Zengtao T. Liu

IPC: H01L23/528 ,  H01L21/768 ,  H01L23/522 ,  H01L27/24 ,  H01L27/11582 ,  H01L49/02

Abstract: A method of forming conductive vias comprises forming a first via opening and a second via opening within a substrate. First conductive material of a first conductivity is formed into the first and second via openings. The first conductive material lines sidewalls and a base of the second via opening to less-than-fill the second via opening. Second conductive material is formed into the second via opening over the first conductive material in the second via opening. The second conductive material is of a second conductivity that is greater than the first conductivity. All conductive material within the first via opening forms a first conductive via defining a first maximum conductance elevationally through the first conductive via and all conductive material within the second via opening forms a second conductive via defining a second maximum conductance elevationally through the second conductive via that is greater than said first maximum conductance. Integrated circuit structure comprising conductive vias independent of method of manufacture are disclosed.

公开(公告)号：US10403359B2

公开(公告)日：2019-09-03

申请号：US15918662

申请日：2018-03-12

Applicant: Micron Technology, Inc.

Inventor： Amitava Majumdar ,  Rajesh Kamana ,  Hongmei Wang ,  Shawn D. Lyonsmith ,  Ervin T. Hill ,  Zengtao T. Liu ,  Marlon W. Hug

IPC: G11C13/04 ,  G11C29/02 ,  G11C13/00 ,  G11C7/00 ,  G11C29/50 ,  G11C29/56

Abstract: Methods, systems, and devices for non-contact electron beam probing techniques, including at one or more intermediate stages of fabrication, are described. One subset of first access lines may be grounded and coupled with one or more memory cells. A second subset of first access lines may be floating and coupled with one or more memory cells. A second access line may correspond to each first access line and may be configured to be coupled with the corresponding first access line, by way of one or more corresponding memory cells, when scanned with an electron beam. A leakage path may be determined by comparing an optical pattern generated in part by determining a brightness of each scanned access line and comparing the generated optical pattern with a second optical pattern.

公开(公告)号：US20190189689A1

公开(公告)日：2019-06-20

申请号：US16283645

申请日：2019-02-22

Applicant: Micron Technology, Inc.

Inventor： Zengtao T. Liu

IPC: H01L27/24 ,  H01L45/00 ,  G11C13/00

CPC classification number: H01L27/249 ,  G11C13/0002 ,  G11C13/0011 ,  G11C2213/71 ,  H01L27/2436 ,  H01L45/04 ,  H01L45/06 ,  H01L45/08 ,  H01L45/085 ,  H01L45/1226 ,  H01L45/1253 ,  H01L45/14 ,  H01L45/142 ,  H01L45/143 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/1675 ,  H01L45/1683

Abstract: An array of vertically stacked tiers of memory cells includes a plurality of horizontally oriented access lines within individual tiers of memory cells and a plurality of horizontally oriented global sense lines elevationally outward of the tiers. A plurality of select transistors is elevationally inward of the tiers. A plurality of pairs of local first and second vertical lines extends through the tiers. The local first vertical line within individual of the pairs is in conductive connection with one of the global sense lines and in conductive connection with one of the two source/drain regions of one of the select transistors. The local second vertical line within individual of the pairs is in conductive connection with another of the two source/drain regions of the one select transistor. Individual of the memory cells include a crossing one of the local second vertical lines and one of the horizontal access lines and programmable material there-between. Other aspects and implementations, including methods, are disclosed.

公开(公告)号：US20190189237A1

公开(公告)日：2019-06-20

申请号：US15849262

申请日：2017-12-20

Applicant: Micron Technology, Inc.

Inventor： Amitava Majumdar ,  Rajesh Kamana ,  Hongmei Wang ,  Shawn D. Lyonsmith ,  Ervin T. Hill ,  Zengtao T. Liu ,  Marlon W. Hug

IPC: G11C29/50 ,  G11C29/56 ,  H01L21/66 ,  G11C13/00 ,  H01L45/00 ,  H01L27/24

CPC classification number: G11C29/50004 ,  G11C13/0004 ,  G11C13/0026 ,  G11C13/0028 ,  G11C13/0069 ,  G11C29/50008 ,  G11C29/56 ,  G11C29/56008 ,  G11C29/56016 ,  G11C2013/0078 ,  G11C2029/0403 ,  G11C2029/5004 ,  G11C2029/5602 ,  G11C2213/71 ,  G11C2213/72 ,  H01L22/14 ,  H01L27/2427 ,  H01L27/2463 ,  H01L45/06 ,  H01L45/144 ,  H01L45/1608

Abstract: Methods, systems, and devices for non-contact measurement of memory cell threshold voltage, including at one or more intermediate stages of fabrication, are described. One access line may be grounded and coupled with one or more memory cells. Each of the one or more memory cells may be coupled with a corresponding floating access line. A floating access line may be scanned with an electron beam configured to set the floating access line to a particular surface voltage at the scanned bit line, and the threshold voltage of the corresponding memory cell may be determined based on whether setting the scanned bit line to the surface voltage causes a detectable amount current to flow through the corresponding memory cell.

公开(公告)号：US20190178969A1

公开(公告)日：2019-06-13

申请号：US16280588

申请日：2019-02-20

Applicant: Micron Technology, Inc.

Inventor： Zengtao T. Liu

IPC: G01R33/58 ,  G11C7/10 ,  G11C5/02 ,  H01L27/24 ,  H01L45/00 ,  G11C13/00 ,  G11C8/14 ,  G11C5/06 ,  G01R33/12

Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2 F2.

公开(公告)号：US09989616B2

公开(公告)日：2018-06-05

申请号：US15855939

申请日：2017-12-27

Applicant: Micron Technology, Inc.

Inventor： Zengtao T. Liu

IPC: G11C11/00 ,  G01R33/58 ,  G01R33/12 ,  G01R33/24

CPC classification number: G01R33/58 ,  G01R33/1284 ,  G01R33/24 ,  G11C5/025 ,  G11C5/063 ,  G11C7/1087 ,  G11C7/1093 ,  G11C8/14 ,  G11C13/0004 ,  G11C13/0026 ,  G11C13/003 ,  G11C2213/18 ,  G11C2213/71 ,  G11C2213/72 ,  G11C2213/77 ,  H01L27/2409 ,  H01L27/2427 ,  H01L27/2481 ,  H01L45/06 ,  H01L45/1226 ,  H01L45/1233 ,  H01L45/14 ,  H01L45/144

Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2F2.

公开(公告)号：US20180120405A1

公开(公告)日：2018-05-03

申请号：US15855939

申请日：2017-12-27

Applicant: Micron Technology, Inc.

Inventor： Zengtao T. Liu

IPC: G01R33/58 ,  G01R33/12 ,  G01R33/24

CPC classification number: G01R33/58 ,  G01R33/1284 ,  G01R33/24 ,  G11C5/025 ,  G11C5/063 ,  G11C7/1087 ,  G11C7/1093 ,  G11C8/14 ,  G11C13/0004 ,  G11C13/0026 ,  G11C13/003 ,  G11C2213/18 ,  G11C2213/71 ,  G11C2213/72 ,  G11C2213/77 ,  H01L27/2409 ,  H01L27/2427 ,  H01L27/2481 ,  H01L45/06 ,  H01L45/1226 ,  H01L45/1233 ,  H01L45/14 ,  H01L45/144

Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2F2.

公开(公告)号：US09887239B2

公开(公告)日：2018-02-06

申请号：US15639423

申请日：2017-06-30

Applicant: Micron Technology, Inc.

Inventor： Zengtao T. Liu

IPC: G11C11/00 ,  H01L27/24 ,  G11C13/00 ,  H01L45/00

CPC classification number: G01R33/58 ,  G01R33/1284 ,  G01R33/24 ,  G11C5/025 ,  G11C5/063 ,  G11C7/1087 ,  G11C7/1093 ,  G11C8/14 ,  G11C13/0004 ,  G11C13/0026 ,  G11C13/003 ,  G11C2213/18 ,  G11C2213/71 ,  G11C2213/72 ,  G11C2213/77 ,  H01L27/2409 ,  H01L27/2427 ,  H01L27/2481 ,  H01L45/06 ,  H01L45/1226 ,  H01L45/1233 ,  H01L45/14 ,  H01L45/144

Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2F2.

公开(公告)号：US20170278568A1

公开(公告)日：2017-09-28

申请号：US15620415

申请日：2017-06-12

Applicant: Micron Technology, Inc.

Inventor： Zengtao T. Liu ,  Kirk D. Prall

IPC: G11C13/00 ,  G11C8/08

Abstract: The apparatuses and methods described herein may operate to measure a voltage difference between a selected access line and a selected sense line associated with a selected cell of a plurality of memory cells of a memory array. The voltage difference may be compared with a reference voltage specified for a memory operation. A selection voltage(s) applied to the selected cell for the memory operation may be adjusted responsive to the comparison, such as to dynamically compensate for parasitic voltage drop.

公开(公告)号：US09697873B2

公开(公告)日：2017-07-04

申请号：US15220316

申请日：2016-07-26

Applicant: Micron Technology, Inc.

Inventor： Zengtao T. Liu

IPC: G11C11/00 ,  G11C5/02 ,  G11C5/06 ,  G11C8/14 ,  G11C13/00 ,  G11C7/10 ,  H01L27/24 ,  H01L45/00

CPC classification number: G01R33/58 ,  G01R33/1284 ,  G01R33/24 ,  G11C5/025 ,  G11C5/063 ,  G11C7/1087 ,  G11C7/1093 ,  G11C8/14 ,  G11C13/0004 ,  G11C13/0026 ,  G11C13/003 ,  G11C2213/18 ,  G11C2213/71 ,  G11C2213/72 ,  G11C2213/77 ,  H01L27/2409 ,  H01L27/2427 ,  H01L27/2481 ,  H01L45/06 ,  H01L45/1226 ,  H01L45/1233 ,  H01L45/14 ,  H01L45/144

Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2F2.