公开(公告)号：US5646348A

公开(公告)日：1997-07-08

申请号：US523401

申请日：1995-09-05

Applicant: Paul Greiff ,  Jerome B. Sohn

Inventor： Paul Greiff ,  Jerome B. Sohn

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01P15/00

CPC classification number: G01P15/131 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

Abstract: An electrostatically actuated micromechanical sensor having a guard band electrode for reducing the effect of transients associated with a dielectric substrate of the sensor. A proof mass, responsive to an input, is suspended over the substrate and one or more electrodes are disposed on the substrate in electrostatic communication with the proof mass to sense the input acceleration and/or to torque the proof mass back to a null position. A guard band electrode is disposed over the dielectric substrate in overlapping relationship with the electrodes and maintains the surface of the substrate at a reference potential, thereby shielding the proof mass from transients and enhancing the accuracy of the sensor. A dissolved wafer process for fabricating the micromechanical sensor is described in which the proof mass is defined by a boron doping step. An alternative fabrication technique is also described in which the proof mass is defined by an epitaxial layer.

Abstract translation: 一种具有保护带电极的静电致动微机械传感器，用于降低与传感器的电介质基板相关的瞬变的影响。 响应于输入的检测质量块悬挂在衬底上，并且一个或多个电极设置在衬底上，与校准物质静电连通以感测输入加速度和/或将校准质量块扭转回到零位置。 保护带电极以与电极重叠的关系设置在电介质基板上，并将基板的表面保持在参考电位，从而屏蔽了质量不受瞬态影响，并提高了传感器的精度。 描述了用于制造微机械传感器的溶解晶片工艺，其中检验质量由硼掺杂步骤限定。 还描述了另一种制造技术，其中证明质量由外延层限定。

公开(公告)号：US5535902A

公开(公告)日：1996-07-16

申请号：US445878

申请日：1995-05-22

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: B81B3/00 ,  G01C19/5712 ,  G01P15/08 ,  G01P15/125 ,  H01L21/00 ,  B44C1/22

CPC classification number: G01C19/5712 ,  B81B3/0051 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0242 ,  B81B2203/056 ,  B81B2203/058

Abstract: A gimballed vibrating wheel gyroscope for detecting rotational rates in inertial space. The gyroscope includes a support oriented in a first plane and a wheel assembly disposed over the support parallel to the first plane. The wheel assembly is adapted for vibrating rotationally at a predetermined frequency in the first plane and is responsive to rotational rates about a coplanar input axis for providing an output torque about a coplanar output axis. The gyroscope also includes a post assembly extending between the support and the wheel assembly for supporting the wheel assembly. The wheel assembly has an inner hub, an outer wheel, and spoke flexures extending between the inner hub and the outer wheel and being stiff along both the input and output axes. A flexure is incorporated in the post assembly between the support and the wheel assembly inner hub and is relatively flexible along the output axis and relatively stiff along the input axis. With this arrangement, the wheel assembly is gimballed on the support. More particularly, the post flexure flexes in response to the output torque; whereas, the spoke flexures allow for the rotational vibration in the first plane. Also provided is a single semiconductor crystal fabrication technique which allows for improved device manufacture.

公开(公告)号：US5505084A

公开(公告)日：1996-04-09

申请号：US212320

申请日：1994-03-14

Applicant: Paul Greiff ,  Burton Boxenhorn

Inventor： Paul Greiff ,  Burton Boxenhorn

IPC: G01C19/5719 ,  G01P9/04

CPC classification number: G01C19/5719 ,  G01P2015/0831

Abstract: A, micromechanical tuning fork gyroscope is fabricated from a unitary silicon substrate utilizing etch stop diffusions and selective anisotropic etching. A silicon structure is suspended over the selectively etched pit. The silicon structure includes at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally along an axis normal to the rotation sensitive axis. The lateral vibration of the first and second vibratable structures effects simultaneous vertical movement of at least a portion of the silicon structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. The vertical movement of the silicon structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.

Abstract translation: A，微机械音叉陀螺仪由采用蚀刻停止扩散和选择性各向异性蚀刻的单一硅衬底制造。 硅结构悬挂在选择性蚀刻的凹坑上。 硅结构至少包括第一和第二可振动结构。 每个可振动结构可激励以沿着垂直于旋转敏感轴的轴线横向振动。 第一和第二可振动结构的横向振动在陀螺仪围绕旋转敏感轴发生角旋转时，同时对硅结构的至少一部分进行垂直运动。 感测硅结构的垂直运动，并且产生与运动成比例的电压，以提供由陀螺仪检测的角速度的指示。

公开(公告)号：US5408877A

公开(公告)日：1995-04-25

申请号：US851913

申请日：1992-03-16

Applicant: Paul Greiff ,  Burton Boxenhorn

Inventor： Paul Greiff ,  Burton Boxenhorn

IPC: G01C19/5719 ,  G01P9/04

CPC classification number: G01C19/5719

Abstract: A double gimbal micromachined gyroscopic transducer is provided in a substrate having a pit extending downwardly from a top surface of the substrate. A gyroscopic transducer element suspended above the pit comprises an outer sense gimbal plate integral with the substrate, coupled to the substrate by a pair of flexible elements attached to opposite ends of the plate. The flexible elements are axially aligned to permit oscillatory motion about a sense axis passing through the flexible elements. The gyroscopic transducer further includes an inner drive gimbal plate integral with and interior to the sense gimbal plate. The drive gimbal plate is coupled to the sense gimbal plate by a second pair of flexible elements along an axis orthogonal to the first pair of flexible elements. The drive gimbal plate also includes a balanced mass generally centrally located on the drive gimbal plate. Also included are drive and sense electronics, for energizing the drive gimbal plate to oscillate about the drive axis, and for sensing any movement of the sense gimbal plate indicative of an angular rate about an input axis. The sense electronics includes a sense electrode disposed so as not to be in close proximity to and interfere with free oscillatory motion of the drive gimbal plate.

Abstract translation: 在具有从基板的顶表面向下延伸的凹坑的基板中提供双万向节微机械陀螺换能器。 悬浮在凹坑上方的陀螺换能器元件包括与基底成一体的外部感应万向板，通过附接到板的相对端的一对柔性元件与基底相连。 柔性元件被轴向对齐以允许围绕通过柔性元件的感测轴的振荡运动。 陀螺换能器还包括与感应平衡板一体并内部的内部驱动万向板。 驱动万向板通过第二对柔性元件沿正交于第一对柔性元件的轴线与感应万向板连接。 驱动万向板还包括通常位于驱动万向板上的平衡质量块。 还包括驱动和感测电子器件，用于激励驱动万向板围绕驱动轴线振荡，并且用于感测指示关于输入轴线的角速率的感测万向板的任何运动。 感测电子器件包括感测电极，其设置成不与驱动万向板的自由振荡运动紧密接触并干扰。

公开(公告)号：US5331852A

公开(公告)日：1994-07-26

申请号：US807726

申请日：1991-12-16

Applicant: Paul Greiff ,  Burton Boxenhorn

Inventor： Paul Greiff ,  Burton Boxenhorn

IPC: G01C19/5719 ,  G01P9/04 ,  G01P15/13

CPC classification number: G01C19/5719 ,  G01P2015/0831

Abstract: A method and apparatus for electromagnetically rebalancing a micromechanical transducer via a plurality of current carrying electrodes disposed beneath or above the transducer interacting with a current carrying conductor disposed on the transducer. In a first embodiment, the micromechanical transducer comprises a micromechanical accelerometer having electromagnetic rebalance of an asymmetric plate. In an alternative embodiment, the transducer comprises a micromechanical gyroscope having electromagnetic driving of an outer gimbal and electromagnetic rebalance of a sense gimbal.

Abstract translation: 一种用于经由布置在换能器下方或上方的多个载流电极电磁重新平衡微机械换能器的方法和装置，其与设置在换能器上的载流导体相互作用。 在第一实施例中，微机械换能器包括具有不对称板的电磁重新平衡的微机械加速度计。 在替代实施例中，换能器包括微机械陀螺仪，其具有感应万向架的外部万向节和电磁重新平衡的电磁驱动。

公开(公告)号：US07390962B2

公开(公告)日：2008-06-24

申请号：US10443414

申请日：2003-05-22

Applicant: Paul Greiff ,  Robert Stephen DiMatteo

Inventor： Paul Greiff ,  Robert Stephen DiMatteo

IPC: H01L31/058

CPC classification number: H02S10/30

Abstract: A method of making a micron gap thermal photovoltaic device wherein at least one standoff is formed on a photovoltaic substrate, a sacrificial layer is deposited on the photovoltaic substrate and about the standoff, an emitter is attached to the standoff and has a lower planar surface separated from the photovoltaic substrate by the sacrificial layer, and the sacrificial layer is removed to form a sub-micron gap between the photovoltaic substrate and the lower planar surface of the emitter.

Abstract translation: 一种制造微米间隙热光伏器件的方法，其中至少一个间隔形成在光伏基板上，牺牲层沉积在光伏基板上并且围绕隔板，发射极附接到支座并且具有分开的下平面 通过牺牲层从光伏基板移除，并且去除牺牲层以在光伏基板和发射极的下平面表面之间形成亚微米间隙。

公开(公告)号：US20080061918A1

公开(公告)日：2008-03-13

申请号：US11530069

申请日：2006-09-08

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: H01F5/00

CPC classification number: H01F41/046

Abstract: A process for fabricating elongated inductive components that have one or more conductors surrounded along their active length by a magnetic layer. A substrate is provided having one or more narrow, elongated deposition regions, each such region bordered on both elongated sides by elongated openings in the substrate, so that at least some of each such region is accessible along all sides. Conductors are provided on these regions. An insulator is deposited over the conductors. A magnetic layer is deposited over the insulator.

Abstract translation: 一种用于制造细长电感元件的方法，该电感元件具有一个或多个导体沿其有效长度被磁性层包围。 提供了具有一个或多个窄的细长沉积区域的基底，每个这样的区域在两个细长侧边界上通过基底中的细长开口，使得每个这样的区域中的至少一些可沿所有侧面进入。 这些地区提供导体。 绝缘体沉积在导体上。 磁性层沉积在绝缘体上。

公开(公告)号：US06990725B2

公开(公告)日：2006-01-31

申请号：US10265170

申请日：2002-10-04

Applicant: Mark D. Fontanella ,  Paul Greiff ,  Donato Cardarelli ,  Joseph G. Walsh

Inventor： Mark D. Fontanella ,  Paul Greiff ,  Donato Cardarelli ,  Joseph G. Walsh

IPC: H01F7/06

CPC classification number: H01F17/0006 ,  H01F17/06 ,  H01F41/046 ,  H01L27/08 ,  H01L28/10 ,  Y10T29/4902 ,  Y10T29/49069 ,  Y10T29/49071 ,  Y10T29/49073 ,  Y10T29/49124 ,  Y10T156/1052

Abstract: This invention relates to the fabrication of planar inductive components whereby the design in cross-section describes a conductor surrounded by magnetic material along the length of the conductor; an electrical insulator is placed between the conductor and the magnetic material. Cases also apply where more than one independent conductor is used. The planar form allows integration of inductive components with integrated circuits. These inductive components can be embedded in other materials. They can also be fabricated directly onto parts.

公开(公告)号：US20060016471A1

公开(公告)日：2006-01-26

申请号：US10895762

申请日：2004-07-21

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: H01L31/00 ,  H01L25/00

CPC classification number: H01L31/024 ,  H02S10/30

Abstract: A micron gap thermo-photo-voltaic device including a photovoltaic substrate, a heat source substrate, and a plurality of spacers separating the photovoltaic substrate from the heat source substrate by a submicron gap. Each spacer includes an elongated thin-walled structure disposed in a well formed in the heat source substrate and having a top surface less than a micron above the heat source substrate. Also disclosed are methods of making the spacers.

Abstract translation: 一种微米间隙热电装置，包括光伏基板，热源基板和多个间隔件，其通过亚微米间隙将光伏基板与热源基板隔离开。 每个间隔物包括细长的薄壁结构，其设置在形成于热源基底中的阱中，并具有在热源基底上方小于微米的顶表面。 还公开了制造间隔物的方法。

公开(公告)号：US20050239220A1

公开(公告)日：2005-10-27

申请号：US11113965

申请日：2005-04-25

Applicant: Charles Dauwalter ,  Donato Cardarelli ,  Paul Greiff

Inventor： Charles Dauwalter ,  Donato Cardarelli ,  Paul Greiff

IPC: G01C19/24 ,  G01P15/18 ,  H01L21/00 ,  H02K7/09 ,  H02K19/10

CPC classification number: H02K19/103 ,  G01C19/24 ,  G01P15/18 ,  H02K7/09 ,  Y10T29/4902 ,  Y10T29/49048 ,  Y10T29/49155 ,  Y10T29/49156 ,  Y10T29/49167

Abstract: A rate gyroscope and accelerometer multisensor, and a process for fabricating the device. The device has an inner magnetically-suspended spinning wheel rotor, with outer stator portions adjacent both faces of the rotor. In one embodiment of the process, three substrates of magnetic material are provided. A first substrate is used to form the portion comprising the rotor. The other two substrates are used to form the outer stator portions. A series of spaced concentric grooves are formed in the central region of both faces of the first substrate. Outside of the grooves on both faces of the first substrate a series of spaced spiral grooves are formed. A hole is placed at the center of the spiral grooves, and filled with magnetic material. A conductor is then deposited into the spiral grooves. A central wheel is formed, the wheel carrying the spaced concentric grooves and defining along its edge a series of spaced teeth. A series of spaced serpentine grooves are formed on one active face of each of the other two substrates. On the same face, a series of generally radial grooves are formed. A conductor is then deposited into the serpentine grooves, and a magnetic material is deposited into the generally radial grooves. The active faces of the two outer substrates are then bonded against the first substrate such that the outer end of each magnetic path overlays a filled hole in the first substrate, to create the stator of an axial air gap reluctance motor.

Abstract translation: 速率陀螺仪和加速度计多传感器，以及用于制造该装置的方法。 该装置具有内部磁悬浮的纺车轮转子，外部定子部分邻近转子的两个面。 在该方法的一个实施例中，提供了三个磁性材料的基片。 第一衬底用于形成包括转子的部分。 另外两个基板用于形成外部定子部分。 在第一基板的两个表面的中心区域中形成一系列间隔开的同心凹槽。 在第一基板的两个表面上的凹槽之外，形成一系列间隔开的螺旋槽。 在螺旋槽的中心放置一个孔，并填充有磁性材料。 然后将导体沉积到螺旋槽中。 形成中心轮，所述轮承载间隔开的同心凹槽并且沿其边缘限定一系列间隔开的齿。 在其他两个基板的每一个的一个有效面上形成一系列间隔的蛇形槽。 在同一面上形成一系列大致径向的凹槽。 然后将导体沉积到蛇形槽中，并且将磁性材料沉积到大致径向的凹槽中。 然后将两个外部基板的有效面接合在第一基板上，使得每个磁路的外端覆盖第一基板中的填充孔，以形成轴向气隙磁阻电动机的定子。