Filter window, lithographic projection apparatus, filter window manufacturing method, device manufacturing method and device manufactured thereby
    31.
    发明授权
    Filter window, lithographic projection apparatus, filter window manufacturing method, device manufacturing method and device manufactured thereby 有权
    滤光镜,光刻投影装置,滤光片制造方法,装置制造方法和由此制造的装置

    公开(公告)号:US07456932B2

    公开(公告)日:2008-11-25

    申请号:US10887329

    申请日:2004-07-09

    IPC分类号: G03B27/32 G03B27/54

    摘要: A filter window for EUV lithography includes a pellicle, and a wire structure for supporting the pellicle. The pellicle includes a first layer that includes at least one of AlN, Ru, Ir, Au, SiN, Rh. The pellicle has a very low EUV absorption in combination with a minimal oxidation rate. The thickness of the pellicle may be between 30 nm and 100 nm. It can be easily checked that absorption of EUV radiation of such a thin pellicle is equal to known filter windows, i.e. about 50% at a wavelength of 13.5 nm wavelength, but the oxidation of the pellicle according to the invention is much smaller. The filter window can for example be used to separate a Projection Optics box and a wafer compartment of the apparatus or to shield a reticle from particle contamination.

    摘要翻译: 用于EUV光刻的滤光镜包括防护薄膜组件和用于支撑防护薄膜的线结构。 防护薄膜组件包括包含AlN,Ru,Ir,Au,SiN,Rh中的至少一种的第一层。 防护薄膜组件具有非常低的EUV吸收,同时具有最小的氧化速率。 防护薄膜的厚度可以在30nm和100nm之间。 可以容易地检查这种薄膜的EUV辐射的吸收等于已知的滤光器窗口,即波长13.5nm波长的约50%,但是根据本发明的防护薄膜组件的氧化要小得多。 过滤器窗口可以例如用于分离投影光学盒和装置的晶片隔室或屏蔽掩模版与颗粒污染。

    Optical Head with a Variable Optical Component
    33.
    发明申请
    Optical Head with a Variable Optical Component 审中-公开
    具有可变光学元件的光学头

    公开(公告)号:US20080062824A1

    公开(公告)日:2008-03-13

    申请号:US11571535

    申请日:2005-06-22

    IPC分类号: G11B7/00

    摘要: An optical head (10) using a variable optical component (10), which component comprises bendable nano-elements (3) that can be switched between a bent and non-bent state by means of a driver-field applied between electrodes (1, 2). In the bent state the nano-elements absorb radiation and therefore adapt the radiation intensity distribution of the radiation beam passing the component.

    摘要翻译: 一种使用可变光学部件(10)的光学头(10),该部件包括可弯曲的纳米元件(3),其可以通过施加在电极(1, 2)。 在弯曲状态下,纳米元件吸收辐射,因此适应通过部件的辐射束的辐射强度分布。

    System comprising an electronic device and method of operating a system
    34.
    发明申请
    System comprising an electronic device and method of operating a system 审中-公开
    包括电子设备和操作系统的方法的系统

    公开(公告)号:US20070109837A1

    公开(公告)日:2007-05-17

    申请号:US10559056

    申请日:2004-06-02

    IPC分类号: G11C11/00

    CPC分类号: G02F1/00 G09F9/372

    摘要: A display device is provided in which the electro-optical effect is created through bending of bendable elements, particularly nanowires or nanotubes. Arrays of bendable elements are provided in areas of the display with the light path. This is possible in that the bendable elements are transparent in the case where they are oriented substantially perpendicular to the substrate, but will absorb light if bent at an angle. Hereto, it is of importance that polarized light is used. The bendable elements are preferably separated from the electrodes through a layer of dielectric material, and are bent under the influence of an electric or magnetic field.

    摘要翻译: 提供了一种显示装置,其中通过弯曲可弯曲元件,特别是纳米线或纳米管产生电光效应。 在具有光路的显示器的区域中设置可弯曲元件的阵列。 这是可能的,因为可弯曲元件在它们基本上垂直于基板定向的情况下是透明的,但是如果以一定角度弯曲则吸收光。 至此,使用偏振光是很重要的。 可弯曲元件优选地通过电介质材料与电极分离,并且在电场或磁场的影响下弯曲。

    Optical diffraction element
    35.
    发明申请
    Optical diffraction element 失效
    光学衍射元件

    公开(公告)号:US20060279843A1

    公开(公告)日:2006-12-14

    申请号:US10561861

    申请日:2004-07-05

    IPC分类号: G02B27/42

    摘要: An optical diffraction element (1) comprises a diffraction layer (4) which is divided into diffraction strips (6) alternating with intermediate strips (8). The diffraction strips comprise nano-elements (10) which are aligned in one direction and absorb radiation (b) which is linearly polarized in this direction. The diffraction element may be a linear or two-dimensional grating (1) or a Fresnel lens (160). The polarization-sensitive grating can be used in optical systems in which only radiation with a specific polarization direction should be diffracted, or in an optical record carrier to allow reading of an information structure with high spatial frequencies.

    摘要翻译: 光学衍射元件(1)包括衍射层(4),其被分成与中间条带(8)交替的衍射条(6)。 衍射条包括在一个方向上排列并吸收沿该方向线性偏振的辐射(b)的纳米元件(10)。 衍射元件可以是线性或二维光栅(1)或菲涅尔透镜(160)。 偏振敏感光栅可以用于其中仅具有特定偏振方向的辐射应该被衍射的光学系统中,或者在光学记录载体中用于允许读取具有高空间频率的信息结构。

    Disk drive unit having reduced electrical power consumption
    36.
    发明申请
    Disk drive unit having reduced electrical power consumption 审中-公开
    磁盘驱动单元具有降低的电力消耗

    公开(公告)号:US20060256468A1

    公开(公告)日:2006-11-16

    申请号:US10546400

    申请日:2004-02-12

    IPC分类号: G11B5/016

    CPC分类号: G11B19/20 G11B25/043

    摘要: A disk drive unit for a removable disk (D), in particular for use in mobile devices, comprises a spindle (1) driven by an electric motor (2) and supporting the disk (D) in its operating position. It further comprises one or two loading mechanisms (4A and 4B) to load mechanical energy into a storage mechanism (5) for storing the loaded energy. A release mechanism (6) is provided to release the stored energy stepwise to the spindle in order to assist during a plurality of start-ups of the disk rotation. The two loading mechanisms (4A and 4B) are adapted to load mechanical energy provided by the user during insertion of the disk and energy released during the deceleration of the rotation of the disk, respectively. The electrical power consumption of the disk drive unit is reduced by the storage of the mechanical energy and its stepwise release.

    摘要翻译: 用于可移动盘(D)的磁盘驱动器单元(D)特别用于移动设备中,包括由电动机(2)驱动并将盘(D)支撑在其操作位置的主轴(1)。 它还包括一个或两个加载机构(4A和4B),以将机械能装载到用于存储所加载的能量的存储机构(5)中。 提供释放机构(6)以逐步释放存储的能量到主轴,以便在盘旋转的多次启动期间进行协助。 两个装载机构(4A和4B)分别适用于在盘的插入期间分别由用户提供的机械能和在盘的旋转减速期间释放的能量。 通过存储机械能及其逐步释放来减少磁盘驱动单元的电力消耗。

    LED light source
    39.
    发明授权
    LED light source 有权
    LED光源

    公开(公告)号:US09313847B2

    公开(公告)日:2016-04-12

    申请号:US14007492

    申请日:2012-03-28

    IPC分类号: H05B33/08

    CPC分类号: H05B33/083 H05B33/0809

    摘要: LED light source comprising a string of LED loads (LED1-LED4) supplied by a rectified mains voltage. The number of LED loads carrying current is increased as the momentary amplitude of the rectified mains voltage increases, and is decreased as the momentary amplitude of the rectified mains voltage decreases. The order in which the LED loads start carrying a current and the order in which the LED loads stop carrying a current is reversed for each half period of the mains.

    摘要翻译: LED光源包括由整流电源电压提供的一串LED负载(LED1-LED4)。 负载电流的LED负载的数量随着整流电源电压的瞬时幅度的增加而增加,并且随着整流电源电压的瞬时幅度的减小而减小。 LED负载开始承载电流的顺序以及LED负载停止承载电流的顺序在主电源的每个半周期都相反。

    Patterned cell sheets and a method for production of the same
    40.
    发明授权
    Patterned cell sheets and a method for production of the same 有权
    图案化电池片及其制造方法

    公开(公告)号:US09267109B2

    公开(公告)日:2016-02-23

    申请号:US12746767

    申请日:2008-12-05

    IPC分类号: C12N5/00

    摘要: The present invention is related to a method for the production of cell sheets comprising at least two different cell types, said method comprising the steps of providing a continuous cell sheet which is disposed on a substrate comprising shape transition properties and/or alterable surface characteristics; exposing said continuous cell sheet to a releasing agent in a patterned fashion; washing the cell sheet after exposure to the releasing agent in order to remove cells which have been affected by the releasing agent, and repopulating the gaps remaining after the cells which have been affected by the releasing agent have been removed with a second cell type.

    摘要翻译: 本发明涉及生产包含至少两种不同细胞类型的细胞片的方法,所述方法包括以下步骤:提供设置在包含形状转变特性和/或可变表面特性的基底上的连续细胞片; 以图案方式将所述连续细胞片暴露于脱模剂; 在暴露于脱模剂之后洗涤细胞片以除去已经被脱模剂影响的细胞,并且在第二细胞类型已经去除了已经被脱模剂影响的细胞之后剩余的间隙。