摘要:
A filter window for EUV lithography includes a pellicle, and a wire structure for supporting the pellicle. The pellicle includes a first layer that includes at least one of AlN, Ru, Ir, Au, SiN, Rh. The pellicle has a very low EUV absorption in combination with a minimal oxidation rate. The thickness of the pellicle may be between 30 nm and 100 nm. It can be easily checked that absorption of EUV radiation of such a thin pellicle is equal to known filter windows, i.e. about 50% at a wavelength of 13.5 nm wavelength, but the oxidation of the pellicle according to the invention is much smaller. The filter window can for example be used to separate a Projection Optics box and a wafer compartment of the apparatus or to shield a reticle from particle contamination.
摘要:
The invention relates to a substrate material for analyzing one or more fluid samples for the presence, amount or identity of one or more analytes in the samples, whereby the substrate material is adapted in that way that a flow of the sample or parts thereof in and/or with the substrate material is influenced and/or caused by phase transitions, preferably temperature-inducible phase transitions, in selected areas of the substrate material.
摘要:
An optical head (10) using a variable optical component (10), which component comprises bendable nano-elements (3) that can be switched between a bent and non-bent state by means of a driver-field applied between electrodes (1, 2). In the bent state the nano-elements absorb radiation and therefore adapt the radiation intensity distribution of the radiation beam passing the component.
摘要:
A display device is provided in which the electro-optical effect is created through bending of bendable elements, particularly nanowires or nanotubes. Arrays of bendable elements are provided in areas of the display with the light path. This is possible in that the bendable elements are transparent in the case where they are oriented substantially perpendicular to the substrate, but will absorb light if bent at an angle. Hereto, it is of importance that polarized light is used. The bendable elements are preferably separated from the electrodes through a layer of dielectric material, and are bent under the influence of an electric or magnetic field.
摘要:
An optical diffraction element (1) comprises a diffraction layer (4) which is divided into diffraction strips (6) alternating with intermediate strips (8). The diffraction strips comprise nano-elements (10) which are aligned in one direction and absorb radiation (b) which is linearly polarized in this direction. The diffraction element may be a linear or two-dimensional grating (1) or a Fresnel lens (160). The polarization-sensitive grating can be used in optical systems in which only radiation with a specific polarization direction should be diffracted, or in an optical record carrier to allow reading of an information structure with high spatial frequencies.
摘要:
A disk drive unit for a removable disk (D), in particular for use in mobile devices, comprises a spindle (1) driven by an electric motor (2) and supporting the disk (D) in its operating position. It further comprises one or two loading mechanisms (4A and 4B) to load mechanical energy into a storage mechanism (5) for storing the loaded energy. A release mechanism (6) is provided to release the stored energy stepwise to the spindle in order to assist during a plurality of start-ups of the disk rotation. The two loading mechanisms (4A and 4B) are adapted to load mechanical energy provided by the user during insertion of the disk and energy released during the deceleration of the rotation of the disk, respectively. The electrical power consumption of the disk drive unit is reduced by the storage of the mechanical energy and its stepwise release.
摘要:
A device manufacturing method is disclosed. The method includes patterning a beam of radiation with a patterning device, projecting the patterned beam of radiation onto a target portion of a substrate, supplying a chemical reagent to a chamber that holds the patterning device and/or the substrate, and removing water from the chamber with use of the chemical reagent.
摘要:
A lithographic apparatus contains an optical element, the surface of the optical element being modified to reduce the effects of reflectivity reduction by molecular contamination. The surface includes a self assembled monolayer.
摘要:
LED light source comprising a string of LED loads (LED1-LED4) supplied by a rectified mains voltage. The number of LED loads carrying current is increased as the momentary amplitude of the rectified mains voltage increases, and is decreased as the momentary amplitude of the rectified mains voltage decreases. The order in which the LED loads start carrying a current and the order in which the LED loads stop carrying a current is reversed for each half period of the mains.
摘要:
The present invention is related to a method for the production of cell sheets comprising at least two different cell types, said method comprising the steps of providing a continuous cell sheet which is disposed on a substrate comprising shape transition properties and/or alterable surface characteristics; exposing said continuous cell sheet to a releasing agent in a patterned fashion; washing the cell sheet after exposure to the releasing agent in order to remove cells which have been affected by the releasing agent, and repopulating the gaps remaining after the cells which have been affected by the releasing agent have been removed with a second cell type.