APPARATUS AND METHOD FOR MANUFACTURING DISPLAY APPARATUS

    公开(公告)号:US20240368750A1

    公开(公告)日:2024-11-07

    申请号:US18779088

    申请日:2024-07-22

    Abstract: An apparatus for manufacturing a display apparatus includes a chamber configured to accommodate a first display substrate and a second display substrate therein, a deposition source positioned in the chamber and comprising a plurality of crucibles configured to move and supply at least two deposition materials to the first display substrate or the second display substrate, a mask assembly arranged between the first display substrate or the second display substrate and the deposition source, and a shutter portion arranged between the mask assembly and the deposition source and configured to control an amount of the at least two deposition materials supplied from the plurality of crucibles.

    Apparatus and method for manufacturing display apparatus

    公开(公告)号:US12077847B2

    公开(公告)日:2024-09-03

    申请号:US16354006

    申请日:2019-03-14

    CPC classification number: C23C14/243 C23C14/042

    Abstract: An apparatus for manufacturing a display apparatus includes a chamber configured to accommodate a first display substrate and a second display substrate therein, a deposition source positioned in the chamber and comprising a plurality of crucibles configured to move and supply at least two deposition materials to the first display substrate or the second display substrate, a mask assembly arranged between the first display substrate or the second display substrate and the deposition source, and a shutter portion arranged between the mask assembly and the deposition source and configured to control an amount of the at least two deposition materials supplied from the plurality of crucibles.

    Display apparatus and method of manufacturing the same

    公开(公告)号:US11849601B2

    公开(公告)日:2023-12-19

    申请号:US16719304

    申请日:2019-12-18

    CPC classification number: H10K50/8445 H10K59/87 H10K71/00 H10K59/12

    Abstract: A display apparatus includes a substrate, a display portion that includes a plurality of pixels disposed on the substrate, and an encapsulation portion that covers the display portion and includes a hybrid encapsulation layer that includes a plurality of inorganic layers and at least one organic layer that includes a plasma polymer. An end of the hybrid encapsulation layer includes a tip portion that includes an inorganic material and a multi-layered portion which extends from the tip portion toward a central portion of the substrate and in which the plurality of inorganic layers and the at least one organic layer are sequentially and alternately stacked, and a thickness of each of the inorganic layers and the organic layer decreases toward the tip portion.

    Apparatus and method of manufacturing display apparatus

    公开(公告)号:US11186908B2

    公开(公告)日:2021-11-30

    申请号:US16160757

    申请日:2018-10-15

    Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.

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