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公开(公告)号：US07368859B2
公开(公告)日：2008-05-06
申请号：US11413104
申请日：2006-04-28
申请人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
发明人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
IPC分类号： H01L41/047
CPC分类号： H03H9/173 , H03H3/04 , H03H9/132 , H03H9/174 , H03H2003/0428 , H03H2003/0457
摘要： A piezoelectric thin-film resonator includes a lower electrode provided on a substrate, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film. A membrane region is defined by a region where the upper electrode and the lower electrode overlap each other to sandwich the piezoelectric thin film therebetween and has an elliptical shape, and the lower electrode is also provided at an outer side of the membrane region in a region in which neither an extraction electrode of the upper electrode nor an extraction electrode of the lower electrode is provided.
摘要翻译： 压电薄膜谐振器包括设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极。 膜区域由上电极和下电极彼此重叠的区域限定，以夹在其间的压电薄膜并具有椭圆形状，并且下电极也设置在膜区域的外侧，区域 其中不设置上电极的引出电极和下电极的引出电极。
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公开(公告)号：US07498717B2
公开(公告)日：2009-03-03
申请号：US11092979
申请日：2005-03-30
申请人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
发明人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
IPC分类号： H01L41/09
CPC分类号： H03H3/04 , H03H9/02094 , H03H9/02149 , H03H9/174 , H03H9/564 , H03H9/568 , H03H2003/023 , H03H2003/0428
摘要： A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Δf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.
摘要翻译： 谐振器包括设置在基板的主表面上的压电薄膜，设置在压电薄膜的第一表面上的第一电极膜，设置在压电薄膜的第二表面上的第二电极膜， 频率调节膜，其设置在所述第一和第二电极膜中的一个上，所述频率调节膜包括膜层叠体，所述膜层叠体包括设置在所述第一和第二电极膜中的所述一个上的第一调节膜，以及设置在所述第一调节膜上的第二调节膜 。 第一调节膜用于Deltaf调节，第二调节膜用于校正过滤器制造过程中产生的频率偏差。 因此，可以精确地控制多个谐振器连接的滤波器的中心频率。
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公开(公告)号：US20050218754A1
公开(公告)日：2005-10-06
申请号：US11092979
申请日：2005-03-30
申请人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
发明人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
IPC分类号： H01L41/09 , H01L41/187 , H01L41/22 , H01L41/253 , H03H3/02 , H03H3/04 , H03H9/02 , H03H9/17 , H03H9/56 , H03H9/58 , H03H9/70 , H01L41/08
CPC分类号： H03H3/04 , H03H9/02094 , H03H9/02149 , H03H9/174 , H03H9/564 , H03H9/568 , H03H2003/023 , H03H2003/0428
摘要： A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Δf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.
摘要翻译： 谐振器包括设置在基板的主表面上的压电薄膜，设置在压电薄膜的第一表面上的第一电极膜，设置在压电薄膜的第二表面上的第二电极膜， 频率调节膜，其设置在所述第一和第二电极膜中的一个上，所述频率调节膜包括膜层叠体，所述膜层叠体包括设置在所述第一和第二电极膜中的所述一个上的第一调节膜，以及设置在所述第一调节膜上的第二调节膜 。 第一调节膜用于Deltaf调节，第二调节膜用于校正过滤器制造过程中产生的频率偏差。 因此，可以精确地控制多个谐振器连接的滤波器的中心频率。
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公开(公告)号：US07884527B2
公开(公告)日：2011-02-08
申请号：US11259347
申请日：2005-10-27
申请人： Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
IPC分类号： H01L41/047
CPC分类号： H03H9/02149 , H03H9/02118 , H03H9/132 , H03H9/174 , H03H2003/0428
摘要： A piezoelectric thin-film resonator includes: a substrate; a lower electrode that is formed on the substrate; a piezoelectric film that is formed on the lower electrode and the substrate; and an upper electrode that is formed on the piezoelectric film, with the piezoelectric film being partially interposed between the lower electrode and the upper electrode facing each other. In this piezoelectric thin-film resonator, at least a part of the outer periphery of the piezoelectric film interposed between the lower electrode and the upper electrode overlaps the outer periphery of the region formed by the upper electrode and the lower electrode facing each other.
摘要翻译： 压电薄膜谐振器包括：基板; 形成在基板上的下电极; 形成在下电极和基板上的压电膜; 以及形成在所述压电膜上的上电极，所述压电膜被部分插入在所述下电极和所述上电极彼此面对之间。 在该压电薄膜谐振器中，夹在下电极和上电极之间的压电薄膜的外周的至少一部分与由上电极和下电极相对的区域的外周重叠。
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公开(公告)号：US07786649B2
公开(公告)日：2010-08-31
申请号：US11790530
申请日：2007-04-26
申请人： Tokihiro Nishihara , Shinji Taniguchi , Masafumi Iwaki , Tsuyoshi Yokoyama , Takeshi Sakashita , Masanori Ueda , Yasuyuki Saitou
发明人： Tokihiro Nishihara , Shinji Taniguchi , Masafumi Iwaki , Tsuyoshi Yokoyama , Takeshi Sakashita , Masanori Ueda , Yasuyuki Saitou
IPC分类号： H01L41/04
摘要： A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.
摘要翻译： 滤波器包括具有基板，由基板支撑的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状，使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。
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公开(公告)号：US07579761B2
公开(公告)日：2009-08-25
申请号：US11430184
申请日：2006-05-09
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
IPC分类号： H01L41/047
摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on the piezoelectric film. In the piezoelectric thin-film resonator, the upper electrode has a greater film thickness than the lower electrode.
摘要翻译： 压电薄膜谐振器包括：形成在基板上的下电极; 形成在下电极上的压电膜; 以及形成在压电膜上的上电极。 在压电薄膜谐振器中，上电极具有比下电极更大的膜厚度。
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公开(公告)号：US07498899B2
公开(公告)日：2009-03-03
申请号：US11236861
申请日：2005-09-28
申请人： Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
发明人： Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
CPC分类号： H03H9/564 , H03H7/18 , H03H7/46 , H03H9/0571 , H03H9/706
摘要： A duplexer includes: first and second filters including film bulk acoustic resonators (FBARs) arranged in a ladder form; first and second integrated-passive devices (IPDs) provided between a common terminal and the first and second filters; and a substrate on which the first and second filters and the first and second IPDs are mounted. The substrate includes conductive patterns that realize inductances connected between the first and second filters and ground. The first and second IPDs includes inductors connected to the first and second filters.
摘要翻译： 双工器包括：第一和第二滤波器，包括以梯形布置的薄膜体声共振器（FBAR）; 提供在公共端子与第一和第二滤波器之间的第一和第二集成无源器件（IPD）; 以及其上安装有第一和第二滤光器以及第一和第二IPD的基板。 衬底包括实现连接在第一和第二滤波器和地之间的电感的导电图案。 第一和第二IPD包括连接到第一和第二滤波器的电感器。
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公开(公告)号：US07432631B2
公开(公告)日：2008-10-07
申请号：US11138893
申请日：2005-05-27
申请人： Shinji Taniguchi , Tokihiro Nishihara , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
发明人： Shinji Taniguchi , Tokihiro Nishihara , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
摘要： A piezoelectric thin-film resonator includes a device substrate and a laminated body provided on the device substrate and composed of a lower electrode, an upper electrode and a piezoelectric film sandwiched between the lower and upper electrodes. The laminated body has a membrane portion in which the upper and lower electrodes overlap with each other through the piezoelectric film, and a gap has a dome shape being formed between the device substrate and the lower electrode and located below the membrane portion.
摘要翻译： 压电薄膜谐振器包括器件基板和设置在器件基板上并由夹在下电极和上电极之间的下电极，上电极和压电薄膜组成的层叠体。 层叠体具有通过压电膜彼此重叠的上部电极和下部电极的膜部，并且在该器件基板和下部电极之间形成有位于该膜部下方的间隙。
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公开(公告)号：US20070252662A1
公开(公告)日：2007-11-01
申请号：US11790530
申请日：2007-04-26
申请人： Tokihiro Nishihara , Shinji Taniguchi , Masafumi Iwaki , Tsuyoshi Yokoyama , Takeshi Sakashita , Masanori Ueda , Yasuyuki Saitou
发明人： Tokihiro Nishihara , Shinji Taniguchi , Masafumi Iwaki , Tsuyoshi Yokoyama , Takeshi Sakashita , Masanori Ueda , Yasuyuki Saitou
摘要： A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.
摘要翻译： 滤波器包括具有基板，由基板支撑的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状，使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。
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公开(公告)号：US20070252476A1
公开(公告)日：2007-11-01
申请号：US11790806
申请日：2007-04-27
申请人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
发明人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
IPC分类号： H01L41/00 , H01L41/047
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film so as to have a portion that overlaps the lower electrode across the piezoelectric film. At least a part of an outer end of the piezoelectric film is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film.
摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极，以便具有与下电极重叠的部分跨越压电 电影。 压电薄膜的外端部的至少一部分进一步位于上下电极跨越压电薄膜的相对区域的外端。
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