摘要:
An object to be processed which has silicon on its surface is loaded in a processing chamber. A plasma of a processing gas containing oxygen gas and nitrogen gas is generated in the processing chamber. The silicon on the surface of the object to be processed is oxidized by the plasma, thereby forming a silicon oxide film.
摘要:
To form a good quality silicon oxide film provided with both a superior Qbd characteristic and Rd characteristic, a wafer W is loaded into a plasma treatment apparatus where the surface of a silicon layer 501 of the wafer W is treated by plasma oxidation to form on the silicon layer 501 to a film thickness T1 a silicon oxide film 503. Next, the wafer W on which the silicon oxide film 503 is formed is transferred to a thermal oxidation treatment apparatus where the silicon oxide film 503 is treated by thermal oxidation to thereby form a silicon oxide film 505 having a target film thickness T2.
摘要:
A resin-coated metal sheet includes resin layers formed on both surfaces thereof and composed of a polyester as a main component, wherein the resin layer covering the inner surface of a container after the formation thereof has an interfacial free energy with water of 30 mN/m or more. The container formed from the resin-coated metal sheet exhibits an excellent content release property for contents with a high protein content.
摘要:
A light scanning type confocal microscope includes a light source unit that projects an excitation light beam, a scanning optical system that scans the excitation light beam, an objective lens that applies the excitation light beam to a sample, a separation optical element that separates the excitation light and detection light generated by the sample, a confocal detection unit that obtains a confocal effect, and a spectral detection device that spectrally detects the detection light. The spectral detection device has a spectroscopic element that spectrally separates the detection light, a light extracting unit that extracts light in a wavelength band from the light spectrally separated by the spectroscopic element, a detector that detects the light extracted by the light extracting unit, and a wavelength band shifting unit that shifts a wavelength band of light to be extracted by the light extracting unit.
摘要:
The laser scanning microscope comprises an objective focusing a laser beam on a sample, and takes fluorescence or reflected light from the sample, optical scanning means for scanning the laser beam on the sample two-dimensionally, an acousto-optic device, arranged on an optical path of a fluorescence or a reflected light, which selects and deflects only a light beam with the wavelength which corresponds to incident fluorescence or the reflected light and a frequency of the applied high frequency voltage, optical detection means for detecting a light beam through the acousto-optic device, and frequency scanning means for switching and setting a frequency of a high frequency voltage applied to the acousto-optic device.
摘要:
A metallic gasket to be interposed between a cylinder block and a cylinder head of an internal combustion engine. On this gasket is provided a embossment which surrounds an opening formed in this gasket along a smooth closed loop, and an inclination angle of an inner circumferential portion of the embossment is selected smaller than an inclination angle of an outer circumferential portion thereof. When the embossment is crushed by a fastening force generated by bolts, a deformation stress in the inner circumferential portion which is normally liable to become large, becomes nearly equal to a deformation stress in the outer circumferential portion, and accordingly, degradation of a sealing property and fatigue rupture caused by excessive deformation of the inner circumferential portion can be prevented.
摘要:
A plasma processing apparatus includes a microwave introduction device which introduces a microwave into a process chamber. The microwave introduction device includes a plurality of microwave transmitting plates which is fitted into a plurality of openings of a ceiling. The microwave transmitting plates are arranged on one virtual plane parallel to a mounting surface of a mounting table, with the microwave transmitting plates fitted into the respective openings. The microwave transmitting plates includes first to third microwave transmitting plates. The first to third microwave transmitting plates are arranged in such a manner that a distance between the center point of the first microwave transmitting window and the center point of the second microwave transmitting window becomes equal or approximately equal to a distance between the center point of the first microwave transmitting window and the center point of the third microwave transmitting window.
摘要:
A resin-coated metal sheet includes resin layers formed on both surfaces thereof and composed of a polyester as a main component, wherein the resin layer covering the inner surface of a container after the formation thereof has an interfacial free energy with water of 30 mN/m or more. The container formed from the resin-coated metal sheet exhibits an excellent content release property for contents with a high protein content.