公开(公告)号：US07808021B2

公开(公告)日：2010-10-05

申请号：US12036907

申请日：2008-02-25

申请人： Jun Tamura

发明人： Jun Tamura

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L21/26586 ,  H01L29/0869 ,  H01L29/0886 ,  H01L29/4236 ,  H01L29/66704 ,  H01L29/66795 ,  H01L29/7824 ,  H01L29/7825

摘要： A lateral MOSFET according to the present invention has a trench gate structure having a cross sectional shape spreading toward an open end. The cross sectional shape is T-shape. The T-shaped cross section has a dimensional ratio of a width of a lower trench having a narrow width to a width of an upper trench having a wide width of 1:3, and a dimensional ratio of a depth of the lower trench to a depth of the upper trench of 1:1, the lower trench width having a same central axis as the upper trench width.

摘要翻译： 根据本发明的横向MOSFET具有向开口端扩展的横截面形状的沟槽栅极结构。 截面形状为T形。 T形横截面具有窄宽度的下沟槽的宽度与宽宽度为1:3的上沟槽的宽度的尺寸比，并且下沟槽的深度与 上沟槽的深度为1：1，下沟槽宽度具有与上沟槽宽度相同的中心轴。

公开(公告)号：US20090305480A1

公开(公告)日：2009-12-10

申请号：US12479137

申请日：2009-06-05

申请人： Reiko SASAHARA ,  Jun Tamura ,  Shigeru Tahara

发明人： Reiko SASAHARA ,  Jun Tamura ,  Shigeru Tahara

IPC分类号： H01L21/31

CPC分类号： H01L21/7682 ,  H01L21/0206 ,  H01L21/02068 ,  H01L21/3105 ,  H01L21/76814 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/76885

摘要： A method of manufacturing a semiconductor device, including an interlayer insulating layer having a dielectric constant of about 1, includes at least one of hydrophobically modifying an interlayer insulating film for insulating lines from each other, before forming air gaps in the interlayer insulating film, and hydrophobically modifying the lines, after forming the air gaps in the interlayer insulating film.

摘要翻译： 包括介电常数为约1的层间绝缘层的半导体器件的制造方法包括在形成层间绝缘膜中的气隙之前相互绝缘的疏水改性层间绝缘膜中的至少一种，以及 在层间绝缘膜中形成气隙之后，对线进行疏水改性。

公开(公告)号：US20070264919A1

公开(公告)日：2007-11-15

申请号：US11879413

申请日：2007-07-16

申请人： Toshihiro Kobayashi ,  Toshihiro Izumi ,  Jun Tamura ,  Takuya Nagamine ,  Takashi Arahata

发明人： Toshihiro Kobayashi ,  Toshihiro Izumi ,  Jun Tamura ,  Takuya Nagamine ,  Takashi Arahata

IPC分类号： B24D11/00

CPC分类号： B24B37/24

摘要： A polishing pad includes a main body having a polishing surface and a backing that is affixed to the back surface of the main body. The elasticity of the main body is within the range of 600 psi-16000 psi and preferably within the range of 1600 psi-16000 psi when a compressive pressure of 2 psi-16 psi is applied, and the thickness of the main body is within the range of 0.5 mm-3.0 mm. The elasticity of the backing is lower than that of the main body and exceeds 300 psi when a compressive pressure of 2 psi-16 psi is applied.

摘要翻译： 抛光垫包括具有抛光表面的主体和固定到主体背面的背衬。 当施加2psi-16psi的压缩压力时，主体的弹性在600psi-16000psi的范围内，优选在1600psi-16000psi的范围内，并且主体的厚度在 范围为0.5 mm-3.0 mm。 当施加2psi-16psi的压缩压力时，背衬的弹性低于主体的弹性并且超过300psi。

公开(公告)号：US20070077408A1

公开(公告)日：2007-04-05

申请号：US11542969

申请日：2006-10-03

申请人： Hiromitsu Okuyama ,  Mitsuru Saito ,  Jun Tamura

发明人： Hiromitsu Okuyama ,  Mitsuru Saito ,  Jun Tamura

IPC分类号： B32B3/26

CPC分类号： B32B5/18 ,  B32B3/26 ,  B32B5/20 ,  B32B27/065 ,  B32B27/36 ,  B32B2266/0278 ,  B32B2307/536 ,  B32B2432/00 ,  Y10T428/249953

摘要： A cleaning sheet has a foamed layer on the surface of a plastic base sheet with the thickness in the range of 25 μm or more and 125 μm or less. The foamed layer has average diameter of air bubbles in the range of 1 μm or more and 50 μm or less and preferably 30 μm or less, compressibility in the range of 3% or more and 7% or less, compression recovery ratio in the range of 40% or more and 60% or less, and the Shore D hardness in the range of 20 degrees or more and 30 degrees or less.

摘要翻译： 清洁片在塑料基片的表面上具有厚度在25μm以上至125μm以下的发泡层。 发泡层的平均气泡直径为1μm以上且50μm以下，优选为30μm以下，压缩率在3％以上且7％以下的范围，压缩回复率在该范围内 为40％以上且60％以下，肖氏D硬度为20度以上且30度以下的范围。

公开(公告)号：US20050184249A1

公开(公告)日：2005-08-25

申请号：US11043690

申请日：2005-01-26

申请人： Takayuki Suzuki ,  Nobuo Kudou ,  Jun Tamura

发明人： Takayuki Suzuki ,  Nobuo Kudou ,  Jun Tamura

IPC分类号： G01T1/28 ,  G01T7/00 ,  H01J43/00 ,  H01J43/12 ,  H01J43/24 ,  H01L21/027

CPC分类号： H01J43/246 ,  H01J43/12 ,  H01J2237/24435

摘要： A mass spectrometer detector having a coupling capacitor including an anode that is placed at a high potential of say −4.9 kV. An annular electrode is placed outside the anode. A voltage of say −5 kV is applied to the annular electrode. This reduces the potential difference between the anode and the annular electrode, mitigating the electric field. A peripheral electrode is mounted on the outer fringe of a dielectric body and stably held at a potential of say −2.5 kV, for example, by voltage-dividing resistors.

摘要翻译： 一种具有耦合电容器的质谱仪检测器，该耦合电容器包括放置在-4.9kV的高电位的阳极。 环形电极放置在阳极的外面。 对环形电极施加-5kV的电压。 这降低了阳极和环形电极之间的电位差，减轻了电场。 外围电极安装在电介质体的外边缘上，并且例如通过分压电阻器稳定地保持在例如-2.5kV的电位。

公开(公告)号：US4500134A

公开(公告)日：1985-02-19

申请号：US404693

申请日：1982-08-03

申请人： Kazuyoshi Kaneko ,  Jun Tamura

发明人： Kazuyoshi Kaneko ,  Jun Tamura

IPC分类号： A61G15/10 ,  A61C19/00 ,  A61G9/00 ,  A61G15/14 ,  A47B83/02

CPC分类号： A61G15/14

摘要： This disclosure relates to improvements in a dental treatment chair assembly including a unit table having various instruments attached thereto in combination with a unit arm mechanism. The assembly is so constructed that the unit arm mechanism is made slidable in the direction of the mechanism crossing (preferably at right angles with) the body axis of the chair. Such construction makes it possible to meet the convenience of both a doctor and a nurse in their operation of the instruments in dental treatment.

摘要翻译： 本公开涉及牙科治疗椅组件的改进，其包括具有与单元臂机构结合的各种仪器的单元台。 组件被构造成使得单元臂机构能够在机构的方向上滑动，该方向与椅子的主体轴线交叉（优选地与之成直角）。 这样的结构使得可以满足医生和护士在牙科治疗仪器操作中的便利性。

公开(公告)号：US09064742B2

公开(公告)日：2015-06-23

申请号：US14007760

申请日：2012-02-24

申请人： Jun Tamura

发明人： Jun Tamura

IPC分类号： H01L21/8238 ,  H01L27/12 ,  H01L21/762 ,  H01L21/84

CPC分类号： H01L29/0692 ,  H01L21/76283 ,  H01L21/84 ,  H01L27/1203 ,  H01L27/1207 ,  H01L29/0653 ,  H01L29/78

摘要： In a semiconductor device, a logic MOSFET and a switch MOSFET are formed in a high-resistance substrate. The logic MOSFET includes an epitaxial layer formed on the high-resistance substrate and a well layer formed on the epitaxial layer. The switch MOSFET includes a LOCOS oxide film formed on the high-resistance substrate, the LOCOS oxide film being sandwiched between trenches and thus having a mesa-shape in its upper part. The switch MOSFET further includes a buried oxide film and a SOI layer formed on the mesa-shape of the LOCOS oxide film. The upper surface of the mesa-shape of the LOCOS oxide film is positioned at the same height as the upper surface of the epitaxial layer.

摘要翻译： 在半导体器件中，在高电阻衬底中形成逻辑MOSFET和开关MOSFET。 逻辑MOSFET包括形成在高电阻衬底上的外延层和形成在外延层上的阱层。 开关MOSFET包括形成在高电阻基板上的LOCOS氧化物膜，LOCOS氧化物膜夹在沟槽之间，因此在其上部具有台面形状。 开关MOSFET还包括掩埋氧化物膜和形成在LOCOS氧化物膜的台面形状上的SOI层。 LOCOS氧化物膜的台面形状的上表面位于与外延层的上表面相同的高度。

公开(公告)号：US20110132873A1

公开(公告)日：2011-06-09

申请号：US12958877

申请日：2010-12-02

申请人： Hiroshi Tsujimoto ,  Makoto Kobayashi ,  Jun Tamura ,  Nobuhiro Wada

发明人： Hiroshi Tsujimoto ,  Makoto Kobayashi ,  Jun Tamura ,  Nobuhiro Wada

IPC分类号： H01L21/02 ,  B05C11/00 ,  C23F1/00 ,  C23C16/52

CPC分类号： G01B21/16 ,  H01J37/32091 ,  H01J37/32568 ,  H01L21/68742

摘要： A distance between electrodes can be accurately measured by using a lifter. A substrate processing apparatus includes an upper electrode 120 and a lower electrode 310 facing each other within a processing chamber 102; a lift pin 332 that is protrusible from and retractable below the lower electrode and lifts up a substrate mounted on the lower electrode to be separated from the lower electrode; a lifter 330 that elevates the lift pin up and down; and a controller 400 that elevates the lift pin upward and brings the lift pin into contact with the upper electrode by driving the lifter while the substrate is not mounted on the lower electrode and measures a distance between the electrodes based on a moving distance of the lifter.

摘要翻译： 可以通过使用升降器来精确地测量电极之间的距离。 基板处理装置包括在处理室102内彼此面对的上电极120和下电极310; 升降销332，其能够从下部电极下方伸出并收缩，并提升安装在下部电极上的与下部电极分离的基板; 升降器330，其升降销升降; 以及控制器400，其通过驱动升降器而将升降销向上升高并使提升销与上电极接触，同时基板未安装在下电极上并且基于升降器的移动距离来测量电极之间的距离 。

公开(公告)号：US20090092023A1

公开(公告)日：2009-04-09

申请号：US12241420

申请日：2008-09-30

申请人： Yuji Horie ,  Yasuyuki Yokota ,  Jun Tamura ,  Akihiro Sakamoto ,  Noriyuki Kumasaka

发明人： Yuji Horie ,  Yasuyuki Yokota ,  Jun Tamura ,  Akihiro Sakamoto ,  Noriyuki Kumasaka

IPC分类号： G11B23/50 ,  B05D3/00

CPC分类号： G11B23/505 ,  B08B1/02 ,  B08B7/0028 ,  B24D11/00

摘要： A cleaning tape has a base tape made of a synthetic resin and a cleaning layer formed on a surface of this base tape. The cleaning layer has a binding agent and a large number of spherical particles dispersed in the binding agent in a single particle layer. Such a cleaning tape is capable of removing very small unwanted protrusions and particles on the surface of a target object such as a magnetic hard disk without forming scratches.

摘要翻译： 清洁带具有由合成树脂制成的基带和形成在该基带的表面上的清洁层。 清洁层在单个颗粒层中具有粘合剂和分散在粘合剂中的大量球形颗粒。 这样的清洁带能够在没有形成划痕的情况下去除诸如磁性硬盘的目标物体表面上的非常小的不想要的突起和颗粒。

公开(公告)号：USD535917S1

公开(公告)日：2007-01-30

申请号：US29237394

申请日：2005-08-31

申请人： Jun Tamura

设计人： Jun Tamura