Liquid ejection apparatus
    32.
    发明授权
    Liquid ejection apparatus 有权
    液体喷射装置

    公开(公告)号:US08851633B2

    公开(公告)日:2014-10-07

    申请号:US13362198

    申请日:2012-01-31

    CPC classification number: B41J2/14209 B41J2002/14491 B41J2202/08

    Abstract: A liquid ejection apparatus including: a head having: nozzles arranged in a nozzle-row direction; and ejection-energy applying portions; a drive IC for driving the ejection-energy applying portions; a control circuit board for controlling the drive IC; a wiring member on which the drive IC is mounted; and a support member for supporting the wiring member. The wiring member extends toward the control circuit board from a connection portion thereof connected to the ejection-energy applying portions, the wiring member having a first wiring portion extending in a first direction intersecting the nozzle-row direction and a second wiring portion extending in a second direction intersecting the first direction. The support member supports at least one of the first wiring portion and the second wiring portion, the at least one being located between the ejection-energy applying portions and the control circuit board.

    Abstract translation: 一种液体喷射装置,包括:头部,其具有:沿喷嘴行方向排列的喷嘴; 和喷射能量施加部分; 用于驱动喷射能量施加部分的驱动IC; 用于控制驱动IC的控制电路板; 其上安装有驱动IC的布线构件; 以及用于支撑所述配线构件的支撑构件。 配线部件从与喷射能量施加部连接的连接部向控制电路基板延伸,配线部件具有沿与喷嘴列方向交叉的第一方向延伸的第一配线部, 第二方向与第一方向相交。 支撑构件支撑第一布线部分和第二布线部分中的至少一个,至少一个位于喷射能量施加部分和控制电路板之间。

    Charged particle beam drawing apparatus and control method thereof
    33.
    发明授权
    Charged particle beam drawing apparatus and control method thereof 有权
    带电粒子束描绘装置及其控制方法

    公开(公告)号:US08466440B2

    公开(公告)日:2013-06-18

    申请号:US13163111

    申请日:2011-06-17

    Abstract: A charged particle beam drawing apparatus applies a predetermined dose of a charged particle beam for drawing patterns corresponding to figures included in a drawing data, in a whole of a drawing area of a workpiece, before a result of calculation of a fogging effect correction dose is obtained, wherein a proximity effect correction dose is incorporated in the predetermined dose, and the fogging effect correction dose is not incorporated in the predetermined dose, then, the charged particle beam drawing apparatus applies a predetermined dose of the charged particle beam for drawing the patterns which overlap the patterns drawn before the result of calculation of the fogging effect correction dose is obtained, in the whole of the drawing area of the workpiece, after the calculation of the fogging effect correction dose, wherein the proximity effect correction dose and the fogging effect correction dose are incorporated in the predetermined dose.

    Abstract translation: 带电粒子束描绘装置在雾化效应校正剂量的计算结果是在工件的整个绘图区域中之前,将预定剂量的带电粒子束用于绘制对应于包括在绘图数据中的图形的图案 得到的,其中以预定剂量并入接近效应校正剂量,并且雾化效应校正剂量不包含在预定剂量中,然后,带电粒子束描绘装置施加预定剂量的带电粒子束以绘制图案 在计算雾化效果校正剂量之前,在整个绘图区域中获得在雾化效果校正剂量的计算结果之前绘制的图案重叠,其中邻近效应校正剂量和起雾效果 校正剂量以预定剂量掺入。

    Method and apparatus for writing
    34.
    发明授权
    Method and apparatus for writing 有权
    写作方法和装置

    公开(公告)号:US08309283B2

    公开(公告)日:2012-11-13

    申请号:US12649846

    申请日:2009-12-30

    CPC classification number: G03F1/68 B82Y10/00 B82Y40/00 G21K1/025 H01J37/3174

    Abstract: A writing method includes calculating a proximity effect-corrected dose for correcting a proximity effect in charged particle beam writing, for each first mesh region made by virtually dividing a writing region of a target object into a plurality of first mesh regions of a first mesh size, calculating a fogging effect-corrected dose by using the proximity effect-corrected dose calculated and an area density in the first mesh size with respect to a part of a calculation region for calculating the fogging effect-corrected dose for correcting a fogging effect in the charged particle beam writing, and by using an area density in a second mesh size larger than the first mesh size with respect to a remaining part of the calculation region, synthesizing the fogging effect-corrected dose and the proximity effect-corrected dose for the each first mesh region, and writing a pattern on the target object by using a charged particle beam based on a synthesized correction dose.

    Abstract translation: 一种写入方法包括计算用于校正带电粒子束写入中的邻近效应的邻近效应校正剂量,对于通过将目标对象的写入区域虚拟地分成多个第一网格尺寸的第一网格区域而制成的每个第一网格区域 通过使用计算的邻近效应校正剂量和相对于计算区域的一部分的第一网格尺寸的面积密度来计算雾化效果校正剂量,以计算用于校正雾化效果的雾化效果校正剂量 带电粒子束写入,并且相对于计算区域的剩余部分使用相对于第一网格尺寸大的第二网格尺寸的面积密度,合成每个图像的雾化效果校正剂量和邻近效应校正剂量 第一网格区域,并且通过使用基于合成校正剂量的带电粒子束将目标物体上的图案写入。

    Evaporated fuel leakage detector for use in automotive vehicle
    35.
    发明授权
    Evaporated fuel leakage detector for use in automotive vehicle 有权
    用于汽车的蒸发燃油泄漏检测器

    公开(公告)号:US07472583B2

    公开(公告)日:2009-01-06

    申请号:US11496489

    申请日:2006-08-01

    CPC classification number: F02M25/0809 F02M25/0818 F02M2025/0845

    Abstract: A detector for detecting evaporated fuel leakage from a fuel tank is connected to the fuel tank through a canister for absorbing evaporated fuel. When an engine is not in operation, air in the fuel tank is sucked by a pump installed in the detector. If the pressure in the fuel tank decreases to a predetermined level, it is determined that the evaporated fuel leakage is within a permissible range. An orifice passage, formed in the detector, connecting a tank passage to a sensor passage communicating with a sensor chamber where a pressure sensor is disposed is slanted relative to the tank passage to shorten the passage distance up to the pressure sensor. Further, the orifice passage is connected to the sensor passage at an obtuse angle to reduce a pressure loss in the passages. Thus, the leakage of the evaporated fuel is surely detected while making the detector compact.

    Abstract translation: 用于检测来自燃料箱的蒸发燃料泄漏的检测器通过用于吸收蒸发燃料的罐连接到燃料箱。 当发动机不工作时,燃料箱中的空气被安装在检测器中的泵吸入。 如果燃料箱中的压力下降到预定水平,则确定蒸发燃料泄漏在容许范围内。 在检测器中形成的孔口通道将罐通道连接到与传感器室连通的传感器通道,其中设置有压力传感器的传感器通道相对于箱通道倾斜,以缩短通向压力传感器的通道距离。 此外,节流孔通道以钝角连接到传感器通道,以减少通道中的压力损失。 因此,当使检测器紧凑时,可靠地检测到蒸发燃料的泄漏。

    Position detecting system
    40.
    发明授权
    Position detecting system 失效
    位置检测系统

    公开(公告)号:US4589773A

    公开(公告)日:1986-05-20

    申请号:US333295

    申请日:1981-12-22

    CPC classification number: G01B11/026

    Abstract: A position detecting system suitable for the position control of the surface of a workpiece mounted in an electron beam exposure system is disclosed which includes an electrically-driven light source, a first optical system for focusing a light beam from the light source on a workpiece, a position-controlling table for mounting thereon the workpiece, a second optical system for focusing light reflected from the workpiece on a predetermined image surface, a photodetector having a light receiving surface arranged on the image surface, and a negative feedback amplifier for controlling the light source by the output of the photodetector.

    Abstract translation: 公开了适用于安装在电子束曝光系统中的工件的表面的位置控制的位置检测系统,其包括电驱动光源,用于将来自光源的光束聚焦在工件上的第一光学系统, 用于在其上安装工件的位置控制台,用于将从工件反射的光聚焦在预定图像表面上的第二光学系统,具有布置在图像表面上的光接收表面的光电检测器,以及用于控制光的负反馈放大器 通过光电检测器的输出源。

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