摘要:
Provided are a material for forming a resist protecting film which is for use in a liquid immersion lithography process and which is formed on a resist film, wherein the material has the following properties of: being transparent with respect to exposure light; having substantially no compatibility with a liquid for liquid immersion lithography; and causing no mixing with the resist film, a composite film comprising a protective film formed from the material and a resist film, and a method for forming a resist pattern using them. These can prevent both the resist film and the liquid used from changing in properties during the liquid immersion lithography, so that a resist pattern with high resolution can be formed using the liquid immersion lithography.
摘要:
A non-volatile memory semiconductor device includes a first insulation layer, two diffusion regions, a memory gate oxide layer, a first control gate, a second insulation layer, a floating gate of polysilicon, a third insulation layer and a second control gate. The first insulation layer is formed on a semiconductor substrate. The two diffusion regions are formed on a surface of the substrate. The memory gate oxide layer is formed over the two diffusion regions on the substrate. The first control gate including a diffusion region is formed on the surface of the substrate. The second insulation layer is formed on the first control gate. The floating gate of polysilicon is formed over the memory gate oxide layer, the first insulation layer, and the second insulation layer. The third insulation layer is formed on the floating gate. The second control gate is disposed on the floating gate.
摘要:
A communication apparatus for a handicapped person, includes a plurality of first key switches for inputting character input data in a general input mode, a single second key switch for inputting character input data in a second key input mode, a character input device for inputting the character input data in the general input mode inputted by operating the plurality of first key switches or in the single key input mode inputted by operating the single second key switch, a character output device for outputting at least character output data which corresponds to the character input data inputted by the character input device, a mode selector for selecting the character input data input in the general input mode by the character input device or the character input data input in the single key input mode by the character input device, and a controller for controlling the operation of the character input device, the character output device, and the input mode selector.
摘要:
A logic circuit associated with a scan path circuit includes at least one clock controller and at least one scan flipflop. The clock controller includes a first control gate receiving a clock signal and a scan mode signal and configured to maintain its output at a fixed value when the scan mode signal is active, a second control gate receiving an output of the first control gate and a first test clock signal for generating a first enable signal, and a third control gate receiving an output of the second control gate and a second test clock signal for generating a second enable signal. The scan flipflop includes a selector having a pair of inputs receiving a data input signal and a scan input signal, respectively, and also having a selection input receiving the scan mode signal so that when the scan mode signal is active, the scan input signal is selected, and when the scan mode signal is inactive, the data input signal is selected. A first latch circuit receives an output of the selector at its data input and the first enable signal at its enable terminal. A second latch circuit receives an output of the first latch circuit at its data input and the second enable signal at its enable terminal.
摘要:
In a semiconductor integrated circuit device having cells comprising circuit elements including MISFETs, and a multi-layer wiring structure, wirings of a first layer connected to semiconductor regions of the MISFETs (source and drain regions) are formed almost in the entire area over the regions to shunt the regions. Power supply wiring are formed of second layer wirings. First layer wirings and the semiconductor regions are connected through a plurality of contact holes. The power supply wirings are formed to cover at least part of the semiconductor regions. In accordance with another aspect, macro-cells are formed by basic cells, including a plurality of MISFETs with the direction of gate length aligned in a first direction, regularly arranged in the first direction and in a second intersecting direction. The MISFETs in each basic cell are interconnected by a first-layer signal wiring, basic cells adjacently arranged in the second direction are interconnected by a first-layer signal wiring extending in the second direction, and basic cells adjacently arranged in the first direction are interconnected by a second-layer signal wiring extending in the first direction. The MISFETs in basic cells adjacently arranged in the first direction receive power from a second-layer power wiring located in the same layer of the second-layer signal wiring and extended in the same first direction. A fourth-layer power supply wiring and a fourth-layer signal wiring, both extending in the first direction, are also provided.
摘要:
An apparatus is provided for the production of a porous preform of SiO.sub.2 used in the manufacture of optical fiber wherein damage to the preform caused by falling clusters of SiO.sub.2 or GeO.sub.2 formed on the wall of the deposition chamber is eliminated. In accordance with the invention, a conductive shielding member is provided inside the wall defining the deposition chamber. This shielding member eliminates an electrostatic field produced on the wall by charging, therefore preventing the adherence of fine particles thereto.
摘要:
An improved error-correction type semiconductor memory device operates at high speed. The memory is provided with a pair of row address buffers which can operate independently, and when error correcting operation is performed for the data related to the address contents of one of the buffers, the access operation of the data cell array is conducted by the other of the buffers, thereby enabling the memory device to simultaneously carry out parts of the operation of successive read-out operations.
摘要:
In a flash device arranged to determine the aperture value of a photo-taking lens according to the measured level of a reflection light obtained by preliminary flashing and to control main flashing according to a light control level corresponding to the aperture value, when a light diffusing panel is arranged in front of a main flashing part for a wider flash illuminating angle, another light diffusing panel which gives an equal light reducing effect is also arranged for a preliminary flashing part. The light quantity of preliminary flashing is thus reduced in proportion to the degree of reduction in the light quantity of main flashing, so that the aperture value set by preliminary flashing and the light controllable range of main flashing for photographing can be made to be always in agreement with each other.
摘要:
An apparatus for treatment of rubber and plastic wastes, comprising in series an extruder for heating and melting rubber and plastic wastes to extrude the molten wastes, a decomposing section for heating the molten wastes to prepare decomposed products while optionally separating residues therefrom, a dry-distilling section for gasifying the decomposed products by dry-distillation, and a cooling section for cooling the dry-distilled products to separate gaseous materials from liquid materials.
摘要:
A state output apparatus includes a power storage device information acquirer configured to acquire power storage device information including a voltage and a current of a power storage device; an integrated current amount calculator configured to calculate an integrated current amount supplied to the power storage device during a period in which the voltage changes from a first voltage to a second voltage between a discharge end voltage and a charge end voltage by charging the power storage device; an integrated current amount comparer configured to compare the calculated integrated current amount with a reference integrated current amount stored in a storage device; and a state outputter configured to output a result of the comparison as information indicating a state of the power storage device.