Substrate processing method
    32.
    发明授权
    Substrate processing method 失效
    基板加工方法

    公开(公告)号:US06921554B2

    公开(公告)日:2005-07-26

    申请号:US10164696

    申请日:2002-06-10

    摘要: Process gas supply/stop operations are intermittently performed. As the hydrophobic process progresses, the temperature of a gas contract portion of a wafer lowers. While the hydrophobic process stops, the temperature of the gas contact portion of the wafer rises to the original temperature. Thereafter, the hydrophobic process resumes. Thus, while the temperature of the gas contact portion of wafer is suppressed from largely lowering, the hydrophobic process can be performed. Thus, non-uniformity of the hydrophobic process on the front surface of the wafer is reduced.

    摘要翻译: 间歇地执行过程气体供应/停止操作。 随着疏水过程的进行,晶片的气体收缩部分的温度降低。 当疏水过程停止时,晶片的气体接触部分的温度升高到原始温度。 此后,疏水过程恢复。 因此,当抑制晶片的气体接触部分的温度大大降低时,可以进行疏水处理。 因此,晶片前表面上的疏水过程的不均匀性降低。

    Heat treatment unit, cooling unit and cooling treatment method
    34.
    发明授权
    Heat treatment unit, cooling unit and cooling treatment method 有权
    热处理单元,冷却单元和冷却处理方法

    公开(公告)号:US06686571B2

    公开(公告)日:2004-02-03

    申请号:US10237781

    申请日:2002-09-10

    IPC分类号: H05B102

    摘要: A substrate cooling unit comprises a cooling plate on which the substrate is placed, a cooling temperature adjusting element which adjusts the cooling plate to a predetermined temperature, a temperature controller which controls a temperature of the cooling temperature adjusting element according to a transfer function, a temperature sensor attached to the cooling plate, and a control parameter changing section which changes at least any one setting of a proportional operation coefficient, integral time or derivative time among control parameters in the transfer function based on a temperature of the cooling plate detected by the temperature sensor after the substrate that is an object to be cooled is placed on the cooling plate.

    摘要翻译: 基板冷却单元包括其上放置基板的冷却板,将冷却板调节到预定温度的冷却温度调节元件,根据传递函数来控制冷却温度调节元件的温度的温度控制器, 温度传感器,其安装在冷却板上,以及控制参数变更部,其基于由所述冷却板检测出的所述冷却板的温度,在所述传递函数中的控制参数中的至少任一个比例运算系数,积分时间或微分时间的设定中进行变更 将作为被冷却对象的基板后的温度传感器放置在冷却板上。

    Apparatus for eliminating impurities by ozone generated in space above substrate surface and film forming method and system therewith
    35.
    发明授权
    Apparatus for eliminating impurities by ozone generated in space above substrate surface and film forming method and system therewith 有权
    用于消除在衬底表面上空间产生的臭氧的杂质的装置以及其成膜方法和系统

    公开(公告)号:US06465055B2

    公开(公告)日:2002-10-15

    申请号:US09742536

    申请日:2000-12-22

    申请人: Koji Harada

    发明人: Koji Harada

    IPC分类号: B05D306

    CPC分类号: H01L21/67115 H01L21/67028

    摘要: In this impurity eliminating apparatus, a mounting stand on which a wafer is mounted and a casing which confronts the mounting stand are provided in a container. A lower face of the casing consists of quartz glass. Inside the casing, an irradiating body for irradiating ultraviolet rays toward the wafer on the mounting stand is provided. The casing is full of inactive gas atmosphere supplied from an inactive gas supply pipe. The atmosphere above the wafer is exhausted from one side by an exhauster. Following the treatment by the impurity eliminating apparatus with the above structure, coating treatment with a treatment solution for forming a SOG film is performed. Thus, organic substances on the surface of the wafer is eliminated to form the SOG film.

    摘要翻译: 在该杂质消除装置中,在容器中设置有安装有晶片的安装台和面对安装台的壳体。 外壳的下表面由石英玻璃组成。 在壳体内设置用于向安装台上的晶片照射紫外线的照射体。 外壳充满从惰性气体供应管供应的惰性气体气氛。 晶片上方的气氛通过排气器从一侧排出。 在用具有上述结构的杂质消除装置处理之后,进行用于形成SOG膜的处理溶液的涂覆处理。 因此,消除晶片表面上的有机物质以形成SOG膜。

    Substrate processing method and substrate processing unit

    公开(公告)号:US06402844B1

    公开(公告)日:2002-06-11

    申请号:US09391408

    申请日:1999-09-08

    IPC分类号: C23C1600

    摘要: Process gas supply/stop operations are intermittently performed. As the hydrophobic process progresses, the temperature of a gas contract portion of a wafer lowers. While the hydrophobic process stops, the temperature of the gas contact portion of the wafer rises to the original temperature. Thereafter, the hydrophobic process resumes. Thus, while the temperature of the gas contact portion of wafer is suppressed from largely lowering, the hydrophobic process can be performed. Thus, non-uniformity of the hydrophobic process on the front surface of the wafer is reduced.

    Heat and cooling treatment apparatus and substrate processing system
    37.
    发明授权
    Heat and cooling treatment apparatus and substrate processing system 失效
    热和冷却处理装置和基板处理系统

    公开(公告)号:US06402508B2

    公开(公告)日:2002-06-11

    申请号:US09729714

    申请日:2000-12-06

    IPC分类号: F27D312

    CPC分类号: H01L21/67178 H01L21/67109

    摘要: The present invention is an apparatus for performing heat and cooling treatments for a substrate includes: a heating table for mounting the substrate thereon to perform the heat treatment for the substrate; a cooling table for mounting the substrate thereon to perform the cooling treatment for the substrate; a waiting table for allowing the substrate to wait; a carrying mechanism for carrying the substrate between the heating table, the cooling table, and the waiting table; and airflow formation means for forming airflow in a space in which the heating table, the cooling table, and the waiting table are arranged.

    摘要翻译: 本发明是一种用于对基板进行加热和冷却处理的装置,包括:加热台,用于将基板安装在其上以对基板进行热处理; 用于将基板安装在其上以对基板执行冷却处理的冷却台; 用于允许衬底等待的等待表; 用于在加热台,冷却台和等待台之间承载基板的承载机构; 以及用于在其中布置有加热台,冷却台和等待台的空间中形成气流的气流形成装置。

    Starter having optical speed sensor on clutch outer periphery
    40.
    发明授权
    Starter having optical speed sensor on clutch outer periphery 有权
    起动器在离合器外周上具有光学速度传感器

    公开(公告)号:US09203287B2

    公开(公告)日:2015-12-01

    申请号:US13574743

    申请日:2010-08-25

    摘要: Starter for vehicle-use engine which can detect a rotational speed signal in a stable manner even when a clutch cover is mounted on an outer periphery of a clutch outer of a one-way clutch. The starter D for a vehicle-use engine which transmits a rotational drive force of a stator to a ring gear of a crankshaft by a pinion of the starter includes: a one-way clutch which is arranged between the pinion and an armature shaft of the stator; and a rotational speed detection device which detects a rotational speed of the pinion. A part to be detected for a rotational speed is formed of through holes formed on a circumference of the clutch cover, and a circular circumferential groove formed on an outer peripheral surface of a clutch outer along the circumference on which the through holes are formed.

    摘要翻译: 即使在离合器盖安装在单向离合器的离合器外侧的外周上的情况下,也能够稳定地检测转速信号的车用起动器。 用于通过起动机的小齿轮将定子的旋转驱动力传递到曲轴的环形齿轮的车辆用发动机的起动器D包括:单向离合器,其布置在小齿轮和电动机的电枢轴之间 定子; 以及检测小齿轮的转速的转速检测装置。 检测转速的部分由形成在离合器盖的圆周上的通孔和形成在离合器外侧的外周面上形成有通孔的圆周方向槽形成。