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    THREE-DIMENSIONAL FORCE INPUT CONTROL DEVICE AND FABRICATION
    31.
    发明申请
    THREE-DIMENSIONAL FORCE INPUT CONTROL DEVICE AND FABRICATION 有权
    三维力输入控制装置和制造

    公开(公告)号：US20100317139A1

    公开(公告)日：2010-12-16

    申请号：US12852419

    申请日：2010-08-06

    Applicant: Vladimir Vaganov

    Inventor： Vladimir Vaganov

    IPC: H01L21/30

    CPC classification number: H01L21/30 ,  G01L1/044 ,  G01L5/162 ,  G01L5/223 ,  G06F3/0338 ,  H01L2224/16225 ,  H01L2924/10158 ,  H01L2924/181 ,  H01L2924/00012

    Abstract: The present invention provides three-dimensional force input control devices for use in sensing vector forces and converting them into electronic signals for processing, and methods of fabricating three-dimensional force input control devices for sensing vector forces and converting them into electronic signals for processing. In some embodiments, methods of fabricating provide a semiconductor substrate having a side one and a side two; fabricate stress-sensitive IC components and signal processing IC on side one of the substrate; fabricate closed trenches on side two of the substrate, the trenches forming boundaries defining elastic elements, frame areas, and rigid islands, and remove additional substrate material from side two of the substrate in the frame area leaving the dimension of the rigid island protruding outward from side two.

    Abstract translation: 本发明提供用于感测矢量力并将其转换成用于处理的电子信号的三维力输入控制装置，以及用于感测矢量力并将其转换成电子信号进行处理的三维力输入控制装置的制造方法。 在一些实施例中，制造方法提供具有侧面和侧面的半导体衬底; 在基板的一侧制造应力敏感IC元件和信号处理IC; 在衬底的两侧制造闭合的沟槽，沟槽形成限定弹性元件，框架区域和刚性岛的边界，并从框架区域中的衬底的侧面两侧移除另外的衬底材料，留下刚性岛的尺寸向外突出 边二。

    SELF-ACTIVATED NANOSCALE PIEZOELECTRIC MOTION SENSOR
    32.
    发明申请
    SELF-ACTIVATED NANOSCALE PIEZOELECTRIC MOTION SENSOR 审中-公开
    自激纳米压电运动传感器

    公开(公告)号：US20090179523A1

    公开(公告)日：2009-07-16

    申请号：US12413470

    申请日：2009-03-27

    Applicant: Zhong L. Wang ,  Zhou Jun

    Inventor： Zhong L. Wang ,  Zhou Jun

    IPC: G01L1/16 ,  H01L41/22

    CPC classification number: H01L41/1132 ,  B82Y10/00 ,  G01L1/044 ,  G01L1/16 ,  G06K9/00973 ,  H01L41/313 ,  Y10T29/42

    Abstract: A strain sensor for measuring strain in a surface of an object includes an insulating flexible substrate, a first conductive contact, a second conductive contact and a piezoelectric nanowire. The insulating flexible substrate is coupled to the object. The first conductive contact and the second conductive contact are mounted on the insulating substrate. The piezoelectric nanowire is electrically coupled to the first conductive contact and the second conductive contact. The piezoelectric nanowire is subject to strain when the surface of the object is subject to strain, thereby creating a voltage differential therebetween. A trigger sensor includes a substrate, a piezoelectric nanowire and a conductive contact. The piezoelectric nanowire extends from the substrate. The conductive contact is disposed in relation to the piezoelectric nanowire so that a voltage differential between the substrate and the conductive contact when the substrate moves with the predetermined acceleration.

    Abstract translation: 用于测量物体表面中的应变的应变传感器包括绝缘柔性基板，第一导电接触件，第二导电接触件和压电纳米线。 绝缘柔性基板与物体连接。 第一导电接触件和第二导电接触件安装在绝缘基板上。 压电纳米线电耦合到第一导电接触和第二导电接触。 当物体的表面经受应变时，压电纳米线经受应变，由此在其间产生电压差。 触发传感器包括衬底，压电纳米线和导电触点。 压电纳米线从衬底延伸。 导电接触件相对于压电纳米线设置，使得当衬底以预定的加速度移动时，衬底和导电接触件之间的电压差。

    FLOW VELOCITY DETECTOR AND INK-JET PRINTER
    33.
    发明申请
    FLOW VELOCITY DETECTOR AND INK-JET PRINTER 有权
    流速检测器和喷墨打印机

    公开(公告)号：US20090168047A1

    公开(公告)日：2009-07-02

    申请号：US12341729

    申请日：2008-12-22

    Applicant: HIROTO SUGAHARA

    Inventor： HIROTO SUGAHARA

    IPC: G01P3/36 ,  B41J29/393

    CPC classification number: G01F1/28 ,  B41J2/175 ,  G01L1/044 ,  G01L1/24 ,  G01L1/26

    Abstract: A flow velocity detector for detecting a flow velocity of a fluid flowing through a flow passage is provided, the flow velocity detector including a flow passage-forming section which defines the flow passage; a stress light-emitting section which is arranged at the flow passage-forming section to receive a stress having a magnitude depending on the flow velocity of the fluid and which emits a light of which amount corresponds to a change of the received stress; and a light-receiving sensor which receives the light emitted by the stress light-emitting section. The flow velocity of the fluid is detected based on an amount of the light received by the light-receiving sensor to generate a detection signal. Accordingly, the structure is simple and small-sized, and the flow velocity of the fluid can be detected at low cost.

    Abstract translation: 提供了一种用于检测流过流路的流体的流速的流速检测器，所述流速检测器包括限定所述流路的流路形成部; 应力发光部，其布置在所述流路形成部处，以接收具有取决于流体的流速的大小的应力，并且发射与所述接收应力的变化相对应的光量的光; 以及受光传感器，其接收由应力发光部发出的光。 基于由光接收传感器接收的光的量来检测流体的流速，以产生检测信号。 因此，结构简单，体积小，可以低成本地检测流体的流速。

    Measurement method and device for the measurement of a path covered
    34.
    发明授权
    Measurement method and device for the measurement of a path covered 有权
    用于测量覆盖路径的测量方法和设备

    公开(公告)号：US07401506B2

    公开(公告)日：2008-07-22

    申请号：US10558577

    申请日：2004-05-28

    Applicant: Peter Kunow ,  Klaus Biester

    Inventor： Peter Kunow ,  Klaus Biester

    IPC: G01L1/04

    CPC classification number: G01L1/044 ,  G01B5/30 ,  G01B7/18 ,  G01D5/16 ,  G01L1/042 ,  G01L1/046

    Abstract: With a measurement method and a measurement device for the measurement of a path covered by a first object (1) in relation to a second object (2), a measurement body (3) is deformed by a relative movement of the objects and at least a first deformation sensor (4) assigned to the measurement body (3) converts the measurement body (3) deformation into a measurement signal. The measurement signal is converted by an evaluation device (20) into information on the path covered. In order to increase the precision and measurement speed in a way that is simple structurally and saves space, the measurement signal is emitted when an area of the measurement body (3) is stretched along the longitudinal axis (6) of the measurement body (3) and a further area is compressed along the longitudinal axis (6) of the measurement body (3).

    Abstract translation: 通过测量方法和用于测量由第一物体（1）相对于第二物体（2）覆盖的路径的测量装置，测量体（3）通过物体的相对运动而变形，并且至少 分配给测量体（3）的第一变形传感器（4）将测量体（3）的变形转换为测量信号。 测量信号由评估装置（20）转换成关于所覆盖路径的信息。 为了以结构简单的方式提高精度和测量速度并节省空间，当测量体（3）的区域沿着测量体（3）的纵向轴线（6）被拉伸时，测量信号被发射 ），并且另外的区域沿测量体（3）的纵向轴线（6）被压缩。

    Piezo-TFT cantilever MEMS
    35.
    发明授权
    Piezo-TFT cantilever MEMS 有权
    压电薄膜悬臂MEMS

    公开(公告)号：US07253488B2

    公开(公告)日：2007-08-07

    申请号：US11031320

    申请日：2005-01-05

    Applicant: Changqing Zhan ,  Michael Barrett Wolfson ,  John W. Hartzell

    Inventor： Changqing Zhan ,  Michael Barrett Wolfson ,  John W. Hartzell

    IPC: H01L27/14

    CPC classification number: B81B3/0021 ,  B81B2201/0292 ,  B81B2203/0118 ,  B81C1/00246 ,  B81C2203/075 ,  C30B1/02 ,  C30B29/00 ,  G01L1/044 ,  G01L9/0042 ,  G01P15/0802 ,  G01P15/124 ,  G01P2015/0828 ,  H01L27/12 ,  H01L29/66757 ,  H04R17/02 ,  H04R31/006

    Abstract: A piezo-TFT cantilever microelectromechanical system (MEMS) and associated fabrication processes are provided. The method comprises: providing a substrate, such as glass for example; forming thin-films overlying the substrate; forming a thin-film cantilever beam; and simultaneously forming a TFT within the cantilever beam. The TFT is can be formed least partially overlying a cantilever beam top surface, at least partially overlying a cantilever beam bottom surface, or embedded within the cantilever beam. In one example, forming thin-films on the substrate includes: selectively forming a first layer with a first stress level; selectively forming a first active Si region overlying the first layer; and selectively forming a second layer overlying the first layer with a second stress level. The thin-film cantilever beam is formed from the first and second layers, while the TFT source/drain (S/D) and channel regions are formed from the first active Si region.

    Abstract translation: 提供了压电TFT悬臂微机电系统（MEMS）及相关制造工艺。 该方法包括：提供例如玻璃等基板; 形成覆盖衬底的薄膜; 形成薄膜悬臂梁; 并且同时在悬臂梁内形成TFT。 TFT可以形成为最少部分地覆盖在悬臂梁顶表面上，至少部分地覆盖悬臂梁底表面或嵌入在悬臂梁内。 在一个示例中，在衬底上形成薄膜包括：选择性地形成具有第一应力水平的第一层; 选择性地形成覆盖在第一层上的第一有源Si区; 以及以第二应力水平选择性地形成覆盖所述第一层的第二层。 薄膜悬臂梁由第一和第二层形成，而TFT源极/漏极（S / D）和沟道区域由第一有源Si区形成。

    Weighing apparatus
    38.
    发明授权
    Weighing apparatus 失效
    称重设备

    公开(公告)号：US4014396A

    公开(公告)日：1977-03-29

    申请号：US600899

    申请日：1975-07-31

    Applicant: Ernst Lohmann ,  Hans-Joachim Sacht

    Inventor： Ernst Lohmann ,  Hans-Joachim Sacht

    IPC: G01G3/02 ,  G01G3/08 ,  G01L1/04 ,  G01G23/14 ,  G01G23/26

    CPC classification number: G01G3/02 ,  G01G3/08 ,  G01L1/042 ,  G01L1/044

    Abstract: Apparatus for weighing goods or articles which includes a movement and indication assembly having a movement means and an indication means driven by the movement means wherein the movement means exhibits hysteresis between weighing operations involving increasing and decreasing weights of goods, a weighing platform on which the goods or articles are received for the weighing operations, a bar linkage mechanism between the weighing platform and the movement means, and a counterforce means connected to the bar linkage mechanism. An extension member is provided in the bar linkage mechanism to eliminate the hysteresis effect in the movement means to reflect greater accuracy in the indication means.

    Abstract translation: 用于称重货物或物品的装置，其包括具有移动装置和由所述移动装置驱动的指示装置的移动和指示组件，其中所述移动装置在涉及货物重量的增加和减少的称重操作之间呈现滞后; 或用于称重操作的物品，称重平台和移动装置之间的连杆机构，以及连接到连杆机构的反力装置。 延伸构件设置在杆连杆机构中以消除移动装置中的滞后效应，以反映指示装置中的更高精度。

    Load cell
    39.
    发明授权
    Load cell 失效
    称重传感器

    公开(公告)号：US3837222A

    公开(公告)日：1974-09-24

    申请号：US28077272

    申请日：1972-08-15

    Applicant: SANDS MEASUREMENT CORP

    Inventor： RASKIN S

    IPC: G01G3/14 ,  G01G5/00 ,  G01G7/02 ,  G01G9/00 ,  G01L1/04 ,  G01L1/22

    CPC classification number: G01G5/003 ,  G01G3/1402 ,  G01G3/1404 ,  G01G7/02 ,  G01G9/005 ,  G01L1/044 ,  G01L1/2231

    Abstract: A load cell of the beam type having a planar operator member having a pair of parallel longitudinal slots defining a central beam member and a pair of parallel bearing members spaced outwardly of the beam member, the outer ends of the bearing members and of the beam member being integral with one another, the operator member having a pair of laterally outwardly extending support members positionable on a horizontal laterally spaced surface of a support block, the load or force to be measured being applied to the central portion of the beam member which is provided with strain measuring means such as strain gages at locations of flexure of the beam member. The support block may have a pair of transversely extending narrow edges underlying the central portions of the bearing members for preventing torsional movement of the bearing members as the load is applied to the beam member. A modified form of the load cell has an operator member whose support members extend parallel to and longitudinally of the bearing members and are secured thereto by transverse connector members, the support members being secured at opposite ends to horizontal support surfaces of a support block, the connector members and the bearing members engaging transverse narrow edges of the support block whereby the support members may be prestresssed upwardly at their midpoints.

    Abstract translation: 梁型的测力传感器具有平面操作器构件，该平面操作器构件具有限定中心梁构件的一对平行纵向狭槽和与梁构件向外间隔开的一对平行的轴承构件，轴承构件的外端和梁构件 操作者构件具有一对侧向向外延伸的支撑构件，其可定位在支撑块的水平横向间隔开的表面上，待测量的载荷或力被施加到所述梁构件的中心部分 具有应变测量装置，例如在梁构件的挠曲位置处的应变计。 支撑块可以具有在轴承构件的中心部分下方的一对横向延伸的窄边缘，用于当负载施加到梁构件时用于防止轴承构件的扭转运动。

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