公开(公告)号：US4322622A

公开(公告)日：1982-03-30

申请号：US136820

申请日：1980-04-03

申请人： Dominique Tronc

发明人： Dominique Tronc

IPC分类号： H01J3/02 ,  A61N5/10 ,  G21K1/093 ,  G21K5/04 ,  H01J3/26 ,  H01J49/20 ,  H05H7/00 ,  G21K1/08

CPC分类号： G21K1/093 ,  A61N5/10 ,  H01J49/20 ,  A61N2005/1089

摘要： An achromatic magnetic deflection device for deflecting by an angle .phi. between .pi. and 2.pi. a beam of charged accelerated particles having different momentum. This device comprises an electromagnet provided with pole pieces delimiting three contiguous sectors, the whole of these sectors, having an axis of symmetry XX, presenting flat input E and output S faces and common faces F.sub.1 and F.sub.2 in an arc of a circle, the position, the radius of curvature of these faces F.sub.1, F.sub.2 as well as the value of the magnetic induction in the sectors being chosen so that the different paths are substantially orthogonal both to faces F.sub.1, F.sub.2 and to axis XX.

摘要翻译： 一种消色差磁偏转装置，用于通过π和2π之间的角度phi偏转具有不同动量的带电加速颗粒束。 该装置包括电磁铁，其具有限定三个相邻扇区的极片，整个这些扇区具有对称轴线XX，呈平坦的输入E和输出S面以及共同的面F1和F2为圆弧，位置 ，这些面F1，F2的曲率半径以及扇区中的磁感应值被选择，使得不同的路径基本上与面F1，F2和轴线XX正交。

公开(公告)号：US3699332A

公开(公告)日：1972-10-17

申请号：US3699332D

申请日：1970-02-27

申请人： BELL & HOWELL CO

发明人： HULL CHARLES W ,  MCKINNEY CHARLES R

IPC分类号： H01F7/20 ,  H01J49/20 ,  H01J39/34

CPC分类号： H01J49/20 ,  H01F7/202

摘要： A magnetic mass spectrometer having a magnetic analyzing sector utilizing shaped magnet poles of a specific configuration so as to produce uniform magnetization of the pole material and constant flux distribution at all magnetic field strengths. The magnet poles are shaped such that the surfaces thereof conform to an exponential function. Magnetic shunts are located at a predetermined spacing from the entrance and exit end of the analyzing sector to locate the magnetic field boundary.

摘要翻译： 磁性质谱仪具有使用特定结构的成形磁极的磁分析扇区，以便在所有磁场强度下产生均匀磁化的磁极材料和恒定的磁通分布。 磁极的形状使其表面符合指数函数。 磁分路位于与分析扇区的入口和出口端预定的间隔处，以定位磁场边界。

公开(公告)号：US3681599A

公开(公告)日：1972-08-01

申请号：US3681599D

申请日：1969-10-22

申请人： KENJI TAKUMI ,  HISASHI YAMAMOTO ,  HIDETSUGU IKEGANI ,  HITACHI LTD ,  HIDETSUGU IKEGANI

发明人： TAKUMI KENJI ,  YAMAMOTO HISASHI ,  IKEGANI HIDETSUGU

IPC分类号： H01J49/20 ,  H01J49/30 ,  H01J49/46 ,  H01J39/34

CPC分类号： H01J49/20 ,  H01J49/30 ,  H01J49/46

摘要： A sector-type charged particle energy analyzer has a pair of mutually confronting sector-type magnetic poles and an incident opening through which charged particles to be analyzed are projected to the inner part of the analyzer from its outer part formed in the gap between the magnetic poles. The outer energizing coil is wound, within a gap between the pair of magnet poles, flatly expanded in a direction perpendicular to the symmetrical plane of the magnetic poles so as to render uniform the distribution of the magnetic field in the gap between the magnet poles, and, at the same time, this outer energizing coil is divided into upper and lower parts at the position of the incident opening to render it possible to increase as much as feasible the incident angle of the charged particles projected into the inner part of the anaylzer thereby increasing the analytical performance of the charged particle analyzer.

公开(公告)号：US2698905A

公开(公告)日：1955-01-04

申请号：US8325849

申请日：1949-03-24

申请人： GOUDSMIT SAMUEL A

发明人： GOUDSMIT SAMUEL A

IPC分类号： H01J49/40

CPC分类号： H01J49/408 ,  H01J49/20

公开(公告)号：US10037877B1

公开(公告)日：2018-07-31

申请号：US15637538

申请日：2017-06-29

申请人： Axcelis Technologies, Inc.

发明人： Bo H. Vanderberg ,  Edward C. Eisner

IPC分类号： A61N5/00 ,  H01J49/20 ,  H01J49/12 ,  H01J49/06

CPC分类号： H01J49/20 ,  H01J37/05 ,  H01J37/244 ,  H01J37/3171 ,  H01J49/061 ,  H01J49/126 ,  H01J49/30 ,  H01J2237/15

摘要： An ion implantation system has an ion source forming an ion beam. An mass analyzer defines and varies a mass analyzed beam along a beam path. A moveable mass resolving aperture assembly has a resolving aperture whose position is selectively varied in response to the variation of the beam path by the mass analyzer. A deflecting deceleration element positioned selectively deflects the beam path and selectively decelerate the mass analyzed beam. A controller selectively operates the ion implantation system in both a drift mode and decel mode. The controller passes the mass analyzed beam along a first path through the resolving aperture without deflection or deceleration in the drift mode and deflects and decelerates the beam along a second path in the decel mode. The position of the resolving aperture is selectively varied based on the variation in the beam path through the mass analyzer and the deflecting deceleration element.

公开(公告)号：US20180025898A1

公开(公告)日：2018-01-25

申请号：US15713416

申请日：2017-09-22

申请人： DH Technologies Development Pte. Ltd.

发明人： Robert Alois Grothe, JR.

IPC分类号： H01J49/40 ,  H01J49/20 ,  H01J49/02 ,  H01J49/00 ,  H01J49/22

CPC分类号： H01J49/40 ,  H01J49/0031 ,  H01J49/025 ,  H01J49/20 ,  H01J49/22

摘要： Systems and methods are provided for time-of-flight analysis of a continuous beam of ions by a detector array. A sample is ionized using an ion source to produce a continuous beam of ions. An electric field is applied to the continuous beam of ions using an accelerator to produce an accelerated beam of ions. A rotating magnetic and/or electric field is applied to the accelerated beam to separate ions with different mass-to-charge ratios over an area of a two-dimensional detector using a deflector located between the accelerator and the two-dimensional detector. An arrival time and a two-dimensional arrival position of each ion of the accelerated beam are recorded using the two-dimensional detector. Alternatively, an electric field that is periodic with time is applied in order to sweep the accelerated beam over a periodically repeating path on the two-dimensional rectangular detector.

公开(公告)号：US20170178881A1

公开(公告)日：2017-06-22

申请号：US15451856

申请日：2017-03-07

申请人： ATONARP INC.

发明人： Prakash Sreedhar MURTHY

IPC分类号： H01J49/00 ,  H01J49/06 ,  H01J49/10

CPC分类号： H01J49/0031 ,  H01J49/025 ,  H01J49/06 ,  H01J49/107 ,  H01J49/147 ,  H01J49/20 ,  H01J49/26 ,  H01J49/421

摘要： An analyzer (1) includes: an ionizer unit (10) that ionizes molecules to be analyzed; a filter unit (20) that selectively passes ions generated by the ionizer unit; and a detection unit (50) that detects ions that have passed the filter unit. The detection unit (50) includes a plurality of detection elements (51) disposed in a matrix, and the analyzer (1) further includes a first reconfiguration unit (83) that switches between detection patterns including detection elements to be enabled for detection out of the plurality of detection elements. The ionizer unit (10) includes a plurality of ion sources (11), and the analyzer (1) further includes a driving control unit (65) that switches the connections of the plurality of ion sources based on changes in characteristics of the ion sources.

公开(公告)号：US09401268B2

公开(公告)日：2016-07-26

申请号：US14760642

申请日：2014-01-07

申请人： Luxembourg Institute of Science And Technology (LIST)

发明人： Hung Quang Hoang ,  David Dowsett ,  Tom Wirtz

IPC分类号： H01J49/00 ,  H01J49/20 ,  H01J49/30

CPC分类号： H01J49/20 ,  H01J49/30

摘要： The present invention relates to a mass spectrometer device comprising a source of ions, an electrostatic sector, a non-scanning magnetic sector arranged downstream of the electrostatic sector, for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. A magnetic shunt is arranged in the drift space between the electrostatic sector and the magnetic sector. The proposed position of the magnetic shunt enhances the resolving power of the mass spectrometer device.

摘要翻译： 本发明涉及一种质谱仪装置，其包括离子源，静电扇区，布置在静电扇区下游的非扫描磁性扇区，用于根据其质荷比分离源于离子源的离子 ，和检测装置。 在静电扇区和磁性扇区之间的漂移空间中布置有磁分路。 磁分路的建议位置提高了质谱仪器的分辨率。

公开(公告)号：US20160126082A1

公开(公告)日：2016-05-05

申请号：US14876263

申请日：2015-10-06

申请人： NISSIN ION EQUIPMENT CO., LTD.

发明人： Junichi TATEMICHI ,  Shojiro DOHI ,  Ippei NISHIMURA

IPC分类号： H01J49/30 ,  H01J37/317 ,  H01J37/147 ,  H01J49/20

CPC分类号： H01J49/30 ,  H01J37/05 ,  H01J37/1472 ,  H01J37/3171 ,  H01J49/20 ,  H01J2237/055 ,  H01J2237/31701

摘要： A mass analyzing electromagnet is provided. The mass analyzing electromagnet includes an analysis tube having an internal zone formed as a passage for the ion beam; and a shield member mounted to an inner wall surface of the analyzing tube, a portion of the shield member intersecting with a direction perpendicular to a traveling direction of an ion beam and a mass-based separation direction of the ion beam so as to block a portion of the ion beam.

摘要翻译： 提供质量分析电磁铁。 质量分析电磁体包括分析管，其具有形成为用于离子束的通道的内部区域; 以及安装在所述分析管的内壁面的屏蔽部件，所述屏蔽部件的与所述离子束的行进方向垂直的方向与所述离子束的质量分离方向交叉的部分， 部分离子束。

公开(公告)号：US20150357175A1

公开(公告)日：2015-12-10

申请号：US14760639

申请日：2014-01-07

申请人： LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)

发明人： Hung Quang Hoang ,  David Dowsett ,  Tom Wirtz

IPC分类号： H01J49/28 ,  H01J49/20 ,  H01J49/02

CPC分类号： H01J49/28 ,  H01J49/025 ,  H01J49/20 ,  H01J49/30

摘要： The present invention relates to a compact and portable mass spectrometer device comprising a source of ions, a non-scanning magnetic sector for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. The magnetic sector comprises an ion entrance plane and at least two ion exit planes, which allow to optimize the resolving power of the mass spectrometer for specific mass-to charge ratio sub-ranges.

摘要翻译： 本发明涉及一种包括离子源的紧凑且便携的质谱仪装置，以及用于根据其质荷比分离源自离子源的离子的​​非扫描磁性扇区和检测装置。 磁性部分包括离子入射面和至少两个离子出射平面，其允许优化用于特定质量 - 电荷比子范围的质谱仪的分辨能力。