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    Ion trap
    2.
    发明授权
    Ion trap 有权
    离子阱

    公开(公告)号：US08975581B2

    公开(公告)日：2015-03-10

    申请号：US14346007

    申请日：2012-09-20

    申请人： The University of Sussex

    发明人： Jose Luis Verdu Galiana

    IPC分类号： H01J49/20 ,  H01J49/00

    CPC分类号： H01J49/20 ,  B82Y10/00 ,  H01J49/0018 ,  H01J49/0031 ,  H01J49/38 ,  H01J49/422

    摘要： An ion trap comprising: a first array of magnetic elements arranged to generate a first magnetic field with a degree of homogeneity; and an array of electrodes arranged to generate an electrostatic field including a turning point in electrical potential at a location where the magnetic field has a substantially maximum degree of homogeneity; wherein the array of electrodes is planar and parallel to the direction of the magnetic field at the location; and wherein a primary first magnetic element is arranged to generate a first component of the first magnetic field and other first magnetic elements are arranged to generate compensating components of the first magnetic field that reduce the gradient, the curvature and higher order derivatives of the first component of the first magnetic field at the location where the first magnetic field has the substantially maximum degree of homogeneity.

    摘要翻译： 一种离子阱，包括：第一磁性元件阵列，被布置成产生具有均匀度的第一磁场; 以及布置成产生静电场的电极阵列，其包括在磁场具有基本上最大程度的均匀性的位置处的电位的转折点; 其中所述电极阵列是平面的并且平行于所述位置处的所述磁场的方向; 并且其中主要第一磁性元件被布置成产生第一磁场的第一分量，并且其他第一磁性元件被布置成产生第一磁场的补偿分量，其减小第一分量的梯度，曲率和高阶导数 在第一磁场具有基本上最大程度的均匀性的位置处的第一磁场。

    Electron Cooling System and Method for Increasing the Phase Space Intensity and Overall Intensity of Ion Beams in Multiple Overlap Regions
    3.
    发明申请
    Electron Cooling System and Method for Increasing the Phase Space Intensity and Overall Intensity of Ion Beams in Multiple Overlap Regions 有权
    电子冷却系统和增加多重重叠区域离子束的相空间强度和总强度的方法

    公开(公告)号：US20110215236A1

    公开(公告)日：2011-09-08

    申请号：US12716477

    申请日：2010-03-03

    申请人： Delbert J. Larson

    发明人： Delbert J. Larson

    IPC分类号： H01J49/20

    CPC分类号： H01J49/20

    摘要： An electron cooling system and method for increasing the phase space intensity and overall intensity of ion beams in multiple overlap regions, including a vacuum chamber to allow a single electron beam to be merged and separated with multiple ion beams, an electron supply device including a cathode to generate the electron beam, an electron collector device including a collection plate to collect the electron beam, multiple magnetic field generation devices to guide the electrons on their desired trajectories, and multiple electrodes to set the velocity of the electron beam independently in each overlap region. By overlapping the electron and ion beams, thermal energy is transferred from the ion beams to the electron beam, which allows an increase in the phase space density and overall density of the ion beams. Advantageously, the electron cooling system uses multiple magnetic field generation devices to guide the electrons into and out of multiple, separate, ion beam overlap regions, allowing the single electron beam to cool an ion beam in more than one overlap region. Advantageously, the electron cooling system uses electrodes to control the mean electron beam velocity in each overlap region, allowing for mitigation of electron beam emittance growth caused by scattering that occurs exterior to the overlap regions. Advantageously, the electrodes used to control the mean electron beam velocity in each overlap region allow for a single electron beam to achieve different velocities to match different desired ion beam velocities in the multiple overlap regions.

    摘要翻译： 一种用于增加多个重叠区域中的离子束的相位空间强度和整体强度的电子冷却系统和方法，所述多个重叠区域包括真空室，以允许单个电子束被多个离子束合并和分离，包括阴极的电子供给装置 为了产生电子束，包括收集电子束的收集板的电子收集器装置，用于将电子引导到其所需轨迹上的多个磁场产生装置以及在每个重叠区域中独立地设置电子束的速度的多个电极 。 通过重叠电子和离子束，热能从离子束传递到电子束，这允许增加离子束的相空间密度和总体密度。 有利地，电子冷却系统使用多个磁场产生装置来引导电子进入和离开多个分离的离子束重叠区域，允许单个电子束在多于一个重叠区域中冷却离子束。 有利地，电子冷却系统使用电极来控制每个重叠区域中的平均电子束速度，从而允许缓解由重叠区域外部发生的散射引起的电子束发射增长。 有利地，用于控制每个重叠区域中的平均电子束速度的电极允许单个电子束实现不同的速度以匹配多个重叠区域中的不同期望的离子束速度。

    Toroidal charged particle deflector with high mechanical stability and accuracy
    4.
    发明授权
    Toroidal charged particle deflector with high mechanical stability and accuracy 有权
    环形带电粒子偏转器具有高机械稳定性和精度

    公开(公告)号：US06153885A

    公开(公告)日：2000-11-28

    申请号：US324899

    申请日：1999-06-03

    申请人： Rodney Arthur Kendall

    发明人： Rodney Arthur Kendall

    IPC分类号： G03F7/20 ,  H01J37/147 ,  H01J37/305 ,  H01J49/20 ,  H01L21/027

    CPC分类号： H01J49/20

    摘要： A semiconductor manufacturing tool for charged particle lithography systems such as an EBPS comprises a magnetic deflector with a hub comprising a cylinder mounted on flange. The hub has an opening for a particle beam. Grooves on the surface of the flange at the base of the cylinder and slots in the edge of the cylinder support several deflection coil vanes. Each of the vanes is formed of substrate comprising a thin plate which has a left surface and a right surface. Complementary electrical coils are wound as a planar spirals on the left surface and on the right surface of the vanes with a via connection through the plate interconnecting the coils. The series connected, spiral coils are patterned as mirror images so that the magnetic fields from the coils are additive. To accommodate vanes carrying large currents, the plate is quartz and complementary copper conductor spirals are bonded to the sides of the quartz plate.

    摘要翻译： 用于带电粒子光刻系统（例如EBPS）的半导体制造工具包括具有包括安装在凸缘上的圆筒的轮毂的磁偏转器。 轮毂具有用于粒子束的开口。 在圆柱体底部的法兰表面上的凹槽和圆柱体边缘中的槽支撑多个偏转线圈叶片。 每个叶片由包括具有左表面和右表面的薄板的基板形成。 互补电线圈在叶片的左表面和右表面上作为平面螺旋缠绕，通过连接线圈的板的通孔连接。 串联连接，螺旋线圈被图案化为镜像，使得来自线圈的磁场是相加的。 为了容纳承载大电流的叶片，板是石英，互补的铜导体螺旋结合到石英板的侧面。

    Ion and electron beam steering and focussing system
    6.
    发明授权
    Ion and electron beam steering and focussing system 失效
    离子和电子束转向和聚焦系统

    公开(公告)号：US4672615A

    公开(公告)日：1987-06-09

    申请号：US515242

    申请日：1983-07-19

    申请人： John C. Kelly ,  Glenn W. Kentwell

    发明人： John C. Kelly ,  Glenn W. Kentwell

    IPC分类号： H01J37/147 ,  G21K1/093 ,  H01J3/14 ,  H01J35/00 ,  H01J49/20 ,  H01S3/09 ,  H05H7/00 ,  H01S3/00

    CPC分类号： H01J37/14 ,  G21K1/093 ,  H01J3/14 ,  H01J35/00 ,  H01J49/20 ,  H01S3/0903 ,  H05H7/00 ,  H01J2237/31701

    摘要： An ion or electron beam is steered or focussed by a circular magnetic field produced by passing a large electrical current through a straight conducting wire, the magnetic field being co-axial with the wire. Annular beams of charged particles coaxial with the straight wire can be focussed onto a circular spot or, depending upon the entry radius of the annular beam and the magnetic field strength, can be induced to follow a looping trajectory. The effect of the steering or focussing system can be enhanced by the provision of a cylindrical conductor which is co-axial with the straight conducting wire such that the particle beam passes between the wire and the cylindrical conductor. The beam steering or focussing systems is applicable to the fields of beam current density intensification, ion implantation, ion separation and free electron lasers.

    摘要翻译： 离子或电子束被通过使大电流通过直线导线产生的圆形磁场而被引导或聚焦，该磁场与电线同轴。 与直线同轴的带电粒子的环状光束可以聚焦到圆形点上，或者根据环形光束的入射半径和磁场强度可以被诱导跟随循环轨迹。 转向或聚焦系统的作用可以通过提供与直线导线同轴的圆柱形导体来增强，使得粒子束通过导线和圆柱形导体之间。 光束转向或聚焦系统适用于束流密度增强，离子注入，离子分离和自由电子激光等领域。

    Magnetic mass spectrometer with shaped, uniformly saturating magnetic poles
    7.
    发明授权
    Magnetic mass spectrometer with shaped, uniformly saturating magnetic poles 失效
    具有形状，均匀饱和磁铁的磁性质谱仪

    公开(公告)号：US3787790A

    公开(公告)日：1974-01-22

    申请号：US3787790D

    申请日：1972-07-17

    申请人： BELL & HOWELL CO

    发明人： HULL C ,  MCKINNEY C

    IPC分类号： H01F7/20 ,  H01J49/20 ,  H01F7/00

    CPC分类号： H01J49/20 ,  H01F7/202

    摘要： A magnetic mass spectrometer having a magnetic analyzing sector utilizing shaped magnet poles of a specific configuration so as to produce uniform magnetization of the pole material and constant flux distribution at all magnetic field strengths. The magnet poles are shaped such that the surfaces thereof conform to an exponential function. Magnetic shunts are located at a predetermined spacing from the entrance and exit end of the analyzing sector to locate the magnetic field boundary.

    摘要翻译： 磁性质谱仪具有使用特定结构的成形磁极的磁分析扇区，以便在所有磁场强度下产生均匀磁化的磁极材料和恒定的磁通分布。 磁极的形状使其表面符合指数函数。 磁分路位于与分析扇区的入口和出口端预定的间隔处，以定位磁场边界。