公开(公告)号：US06732054B2

公开(公告)日：2004-05-04

申请号：US10301326

申请日：2002-11-21

Applicant: Haskell Vincent Hart

Inventor： Haskell Vincent Hart

IPC: H01J3728

CPC classification number: G01N23/207

Abstract: A relational database is built and used for the identification of single crystals by electron diffraction. Selected area electron diffraction (SAED) patterns (a lattice net of spots) produced in an electron diffractometer or a transmission electron microscope (TEM) are matched against database patterns calculated from reduced unit cells of known materials. The effects of double diffraction on electron diffraction patterns are fully incorporated into the database by rigorous calculation.

Abstract translation: 建立了关系数据库，用于通过电子衍射识别单晶。 在电子衍射仪或透射电子显微镜（TEM）中产生的选定区域电子衍射（SAED）图案（斑点的网格网）与从已知材料的还原单位晶胞计算的数据库图案相匹配。 通过严格的计算将双衍射对电子衍射图的影响完全并入数据库。

公开(公告)号：US06667477B2

公开(公告)日：2003-12-23

申请号：US10204643

申请日：2002-08-20

Applicant: Krzysztof Grzelakowski

Inventor： Krzysztof Grzelakowski

IPC: H01J3728

CPC classification number: H01J37/285

Abstract: In a SEM it is desirable, in given circumstances, to acquire an image of the sample (14) by means of Auger electrons extracted from the sample and traveling back through the bore of the objective lens (8) in the direction opposing the direction of the primary beam. It is know to separate extracted electrons from the primary beam by positioning Wien filters (32, 34) in front of the objective lens (8), the filters being energized in such a way that they do not cause deflection of the primary beam but do not deflect the secondary electrons. This technique cannot be used for Auger electrons, considering their high energy and hence much stronger fields in the Wien filters, thus causing substantial imaging aberrations in the primary beam.

Abstract translation: 在SEM中，在给定的情况下，期望通过从样品中提取的俄歇电子获取样品（14）的图像，并沿与物镜（8）的孔相反的方向 主梁。 通过将维恩滤波器（32,34）定位在物镜（8）之前，分离提取的电子与主光束的分离，滤光器被激励，使得它们不会引起主光束的偏转，但是 不使二次电子偏转。 考虑到它们的高能量，因此Wien滤波器中的场强很大，因此这种技术不能用于俄歇电子，从而导致主光束中的大量成像像差。

公开(公告)号：US06627888B2

公开(公告)日：2003-09-30

申请号：US09792721

申请日：2001-02-23

Applicant: Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

Inventor： Satoru Yamaguchi ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

IPC: H01J3728

CPC classification number: H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract translation: 本发明的目的是提供一种用于减少检查定位或输入操作的过程的扫描电子显微镜，从而以高精度高功能运行。为了实现上述目的，本发明提供一种扫描电子显微镜，其具有 用于基于预先登记的图案来识别期望位置的功能，其包括用于设置关于图案种类的信息的装置，构成图案的多个部分之间的间隔和构成图案的部分的尺寸的装置，以及用于 基于由相关装置获得的信息，形成由多个部分组成的图案图像。

公开(公告)号：US06541771B2

公开(公告)日：2003-04-01

申请号：US09759284

申请日：2001-01-16

Applicant: Yuko Iwabuchi ,  Mitsugu Sato

Inventor： Yuko Iwabuchi ,  Mitsugu Sato

IPC: H01J3728

CPC classification number: H01J37/28

Abstract: A secondary electron signal obtained from a specimen when the specimen is scanned with an electron beam is detected by a detector and a specimen image is displayed on a first display screen area of an image display unit on the basis of the detected signal. The specimen image is stored, as an image for observation position designation, in a storage unit together with a position of the image. A plurality of images at different positions on the specimen may be used as the image to be stored. One of the stored images is selected and read and displayed on a second display screen area. When a part of interest on the displayed image for observation position designation is selected, the specimen is horizontally moved so that a position of the part of interest may be positioned at the center of the first display screen area and an enlarged image of the part of interest may be displayed on the first display screen area. This facilitates view field search outside a view field range.

Abstract translation: 基于检测信号，通过检测器检测样本被电子束扫描时从样本获得的二次电子信号，并且将样本图像显示在图像显示单元的第一显示屏幕区域上。 标本图像作为观察位置指定的图像与图像的位置一起存储在存储单元中。 样本上不同位置的多个图像可以用作要存储的图像。 存储的图像之一被选择并读取并显示在第二显示屏幕区域上。 当选择用于观察位置指定的显示图像上的感兴趣部分时，将样本水平移动，使得感兴趣部分的位置可以位于第一显示屏幕区域的中心，并且部分的放大图像 可以在第一显示屏幕区域上显示兴趣。 这有助于视图字段范围外的视图字段搜索。

公开(公告)号：US06452178B2

公开(公告)日：2002-09-17

申请号：US09883184

申请日：2001-06-19

Applicant: Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Katsuya Sugiyama ,  Atsuko Takafuji ,  Hiroshi Toyama

Inventor： Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Katsuya Sugiyama ,  Atsuko Takafuji ,  Hiroshi Toyama

IPC: H01J3728

CPC classification number: H01J37/28 ,  G01N23/20 ,  G01N23/2251 ,  G03F7/7065 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/04 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/04756 ,  H01J2237/20221 ,  H01J2237/2444 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01J2237/31766

Abstract: Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer. The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.

Abstract translation: 通过提供新颖的检查方法和采用这种新方法的检测装置，本发明通过使用电子束的本发明解决了常规检查方法中遇到的问题和采用该方法的传统装置，该方法能够提高扫描样本的速度 作为半导体晶片。本发明提供的检测新颖方法包括以下步骤：产生电子束; 通过使用物镜将生成的电子束会聚在样品上; 使用会聚电子束扫描样品; 扫描期间连续移动样品; 检测在样本和物镜之间的位置处从样本发出的带电粒子，并将检测到的带电粒子转换成电信号; 存储由电信号传送的图像信息; 通过使用所存储的图像信息将图像与另一图像进行比较; 并检测样本的缺陷。

公开(公告)号：US06444981B1

公开(公告)日：2002-09-03

申请号：US09427000

申请日：1999-10-26

Applicant: Hideo Todokoro ,  Sho Takami ,  Makoto Ezumi

Inventor： Hideo Todokoro ,  Sho Takami ,  Makoto Ezumi

IPC: H01J3728

CPC classification number: H01J37/28 ,  H01J2237/047

Abstract: A scanning electron microscope using the retarding method and the boosting method includes a sample holder for holding a sample on the sample holder; a shield electrode arranged between an object lens and the sample, in which an aperture for passing said primary electron beam is formed; a negative-voltage applying circuit for applying a negative voltage to the sample holder and the shield electrode; an acceleration tube located in an electron-beam passing hole in the object lens, provided to pass a primary electron beam, for further accelerating the primary electron beam; and a control electrode located between the acceleration tube and the sample, in which an aperture whose size is smaller than the aperture formed in said shield electrode is provided to pass the primary electron beam, a positive voltage in the positive direction to the negative voltage being applied to the control electrode, superimposed on the negative voltage.

公开(公告)号：US06249000B1

公开(公告)日：2001-06-19

申请号：US09128181

申请日：1998-08-03

Applicant: Hiroshi Muramatsu ,  Eisuke Tomita

Inventor： Hiroshi Muramatsu ,  Eisuke Tomita

IPC: H01J3728

CPC classification number: G01Q60/38 ,  G01Q20/02 ,  Y10S977/873

Abstract: A scanning probe microscope comprises a cantilever probe disposable proximate a surface of a sample and having a first resonance frequency. A three-dimensional fine movement element scans the cantilever probe and the surface of the sample relative to one another two-dimensionally. A sensor cantilever detects displacement of the cantilever probe during relative scanning movement between the cantilever probe and the surface of the sample. The sensor cantilever has a second resonance frequency different from the first resonance frequency and is disposed spaced apart but within touching distance from the cantilever probe so that displacement of the cantilever probe is transmitted to the sensor cantilever by contact between the sensor cantilever and the cantilever probe.1

Abstract translation: 扫描探针显微镜包括靠近样品表面并具有第一共振频率的悬臂式探针。 三维细微运动元件相对于彼此相对于彼此扫描悬臂探针和样品表面。 传感器悬臂在悬臂探头和样品表面之间的相对扫描运动期间检测悬臂探头的位移。 传感器悬臂具有与第一共振频率不同的第二共振频率，并且与悬臂探头间隔开距离接触距离，使悬臂探头的位移通过传感器悬臂与悬臂探头之间的接触传递到传感器悬臂 .1

公开(公告)号：US06225628B1

公开(公告)日：2001-05-01

申请号：US08987308

申请日：1997-12-09

Applicant: Yuko Iwabuchi ,  Mitsugu Sato

Inventor： Yuko Iwabuchi ,  Mitsugu Sato

IPC: H01J3728

CPC classification number: H01J37/28

Abstract: A secondary electron signal obtained from a specimen when the specimen is scanned with an electron beam is detected by a detector and a specimen image is displayed on a first display screen area of an image display unit on the basis of the detected signal. The specimen image is stored, as an image for observation position designation, in a storage unit together with a position of the image. A plurality of images at different positions on the specimen may be used as the image to be stored. One of the stored images is selected and read and displayed on a second display screen area. When a part of interest on the displayed image for observation position designation is selected, the specimen is horizontally moved so that a position of the part of interest may be positioned at the center of the first display screen area and an enlarged image of the part of interest may be displayed on the first display screen area. This facilitates view field search outside a view field range.

Abstract translation: 基于检测信号，通过检测器检测样本被电子束扫描时从样本获得的二次电子信号，并且将样本图像显示在图像显示单元的第一显示屏幕区域上。 标本图像作为观察位置指定的图像与图像的位置一起存储在存储单元中。 样本上不同位置的多个图像可以用作要存储的图像。 存储的图像之一被选择并读取并显示在第二显示屏幕区域上。 当选择用于观察位置指定的显示图像上的感兴趣部分时，将样本水平移动，使得感兴趣部分的位置可以位于第一显示屏幕区域的中心，并且部分的放大图像 可以在第一显示屏幕区域上显示兴趣。 这有助于视图字段范围外的视图字段搜索。

公开(公告)号：US06172365B2

公开(公告)日：2001-01-09

申请号：US09437313

申请日：1999-11-10

Applicant: Takashi Hiroi ,  Maki Tanaka ,  Masahiro Watanabe ,  Asahiro Kuni ,  Yukio Matsuyama ,  Yuji Takagi ,  Hiroyuki Shinada ,  Mari Nozoe ,  Aritoshi Sugimoto

Inventor： Takashi Hiroi ,  Maki Tanaka ,  Masahiro Watanabe ,  Asahiro Kuni ,  Yukio Matsuyama ,  Yuji Takagi ,  Hiroyuki Shinada ,  Mari Nozoe ,  Aritoshi Sugimoto

IPC: H01J3728

CPC classification number: H01J37/28 ,  H01J2237/2817

Abstract: An electron beam inspection method including the steps of irradiating an electron beam to an object to be inspected, detecting at least one of a secondary electron and a reflected electron emanated from the object by the irradiation of the electron beam, and obtaining an image of the object from the detected electron. The method further includes the steps of controlling an electric field in a neighborhood of the object for filtering the at least one of the secondary and reflected electron emanated from the object so as to control the contrast of the image, detecting at least one of the secondary and reflected electron emanated from the object which passes through the electric field in the neighborhood of the object by the irradiation of the electron beam, and conducting inspection or measurement of the object on the basis of a detected signal of the detection in the controlled electric field.

Abstract translation: 一种电子束检查方法，包括以下步骤：将电子束照射到待检查对象，通过电子束的照射检测从物体发射的二次电子和反射电子中的至少一种，并获得 物体来自被检测的电子。 该方法还包括以下步骤：控制物体附近的电场，以对从物体发出的次级和反射电子中的至少一种进行过滤，以便控制图像的对比度，检测二次 以及通过电子束的照射而在物体附近通过电场发射的反射电子，并且根据检测到的受控电场的检测信号进行物体的检查或测量 。