BIAXIAL RESONANT MICROELECTROMECHANICAL MIRROR STRUCTURE WITH PIEZOELECTRIC ACTUATION HAVING IMPROVED CHARACTERISTICS

    公开(公告)号:US20200301130A1

    公开(公告)日:2020-09-24

    申请号:US16827282

    申请日:2020-03-23

    Abstract: A microelectromechanical structure includes a body of semiconductor material having a fixed frame internally defining a cavity, a mobile mass elastically suspended in the cavity and movable with a first resonant movement about a first rotation axis and with a second resonant movement about a second rotation axis, orthogonal to the first axis. First and second pairs of supporting elements, extending in cantilever fashion in the cavity, are rigidly coupled to the frame, and are piezoelectrically deformable to cause rotation of the mobile mass about the first and second rotation axes. First and second pairs of elastic-coupling elements are elastically coupled between the mobile mass and the first and the second pairs of supporting elements. The first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and second pairs.

    VOLTAGE REGULATOR CIRCUIT AND CORRESPONDING METHOD

    公开(公告)号:US20200285259A1

    公开(公告)日:2020-09-10

    申请号:US16804994

    申请日:2020-02-28

    Abstract: A voltage regulator circuit includes a first voltage regulator having a first output voltage selection pin set and producing a first output voltage based on a first digital signal received at the first output voltage selection pin set, and a second voltage regulator having a second output voltage selection pin set and producing a second output voltage based on a second digital signal received at the second output voltage selection pin set. The first and second voltage regulators are operable in a voltage tracking mode with the output voltage of the second voltage regulator tracking the output voltage of the first voltage regulator when digital signals received at the selection pin sets have a same value. An overvoltage sensor detects overvoltage events at the first voltage regulator. Control circuitry selectively avoids operation in voltage tracking mode as a result of an overvoltage event detected at the first voltage regulator.

    Piezoelectric micro-electro-mechanical actuator device, movable in the plane

    公开(公告)号:US10770643B2

    公开(公告)日:2020-09-08

    申请号:US15638195

    申请日:2017-06-29

    Abstract: A MEMS actuator device of a piezoelectric type formed on a substrate, with a base unit including a base beam element having a main extension in a extension plane and a thickness in a thickness direction perpendicular to the extension plane, smaller than the main extension. A piezoelectric region extends over the beam element. An anchor region is rigid to the base beam element and to the substrate. A base constraint structure is connected to one end of the base beam element and is configured to allow a deformation of the base beam element in the extension plane and substantially reduce a deformation of the base beam element in the thickness direction.

    MEMS tri-axial accelerometer with one or more decoupling elements

    公开(公告)号:US10768199B2

    公开(公告)日:2020-09-08

    申请号:US15639524

    申请日:2017-06-30

    Abstract: A MEMS tri-axial accelerometer is provided with a sensing structure having: a single inertial mass, with a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis and internally defining a first window that traverses it throughout a thickness thereof along a vertical axis orthogonal to the horizontal plane; and a suspension structure, arranged within the window for elastically coupling the inertial mass to a single anchorage element, which is fixed with respect to a substrate and arranged within the window, so that the inertial mass is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component. In particular, the suspension structure has at least one first decoupling element for decoupling at least one of the first, second, and third sensing movements from the remaining sensing movements.

    Method of producing a device for adiabatic coupling between waveguide arrays, corresponding device, and system

    公开(公告)号:US10761279B2

    公开(公告)日:2020-09-01

    申请号:US16428428

    申请日:2019-05-31

    Abstract: A method includes providing a semiconductor body comprising a surface with a recessed portion therein. The recessed portion includes a bottom surface. Optical waveguide cores in a first array of optical waveguide cores extend side-by-side at the bottom surface. The method further includes providing a second array of optical waveguide cores over the first array of optical waveguide cores. Optical waveguide cores in the second array of optical waveguide cores extend side-by-side. Each optical waveguide core in the second array of optical waveguide cores is in an adiabatic coupling relationship with a corresponding optical waveguide core in the first array of optical waveguide cores. The method also includes applying an optical waveguide cladding material over the second array of optical waveguide cores.

    Compensation and calibration for a low power bio-impedance measurement device

    公开(公告)号:US10758152B2

    公开(公告)日:2020-09-01

    申请号:US16429254

    申请日:2019-06-03

    Abstract: A method and apparatus for compensating and calibrating a bio-impedance measurement device are provided. In the method and apparatus, a memory stores a plurality of compensation parameters and a first detection channel receives a first detection signal, compensates the first detection signal using a first compensation parameter of the plurality of compensation parameters. In the method and apparatus, a second detection channel receives a second detection signal and a third detection signal and compensates the second and third detection signals using second and third compensation parameters of the plurality of compensation parameters and the compensated first detection signal. The impedance measurement device generates a first output signal representative of a first impedance measurement and a second output signal representative of a second impedance measurement based on the compensated first, second and third detection signals.

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