Pole piece for high track density recording
    41.
    发明授权
    Pole piece for high track density recording 失效
    用于高轨道密度记录的极片

    公开(公告)号:US07193814B2

    公开(公告)日:2007-03-20

    申请号:US10780514

    申请日:2004-02-17

    IPC分类号: G11B5/127 H04R31/00

    摘要: For high track density recording, tighter reader and writer track width control are essential. This has been achieved by using a plated NiPd write gap which is self-aligned with a plated 23 KG pole material. Heat dissipation by the writer is thus improved since alumina has been replaced with nonmagnetic metal materials, such as Ru, leading to less pole tip protrusion which in turn leads to better writer track width control

    摘要翻译: 对于高轨道密度记录,更紧密的读写器轨道宽度控制是至关重要的。 这已经通过使用与电镀的23KG极材料自对准的镀NiPd写入间隙来实现。 因此,由于氧化铝被诸如Ru之类的非磁性金属材料所代替,导致作者的散热得到改善,导致较少的极尖突起,这又导致更好的写入器轨道宽度控制

    Method to make planarized GMR head for high track density
    43.
    发明授权
    Method to make planarized GMR head for high track density 有权
    用于制造高轨道密度的平面化GMR头的方法

    公开(公告)号:US07146711B2

    公开(公告)日:2006-12-12

    申请号:US10318455

    申请日:2002-12-13

    IPC分类号: G11B5/127 H04R31/00 G11B5/39

    摘要: A method for forming a planar GMR read-head having a narrow read gap, a narrow track-width and being well insulated from its lower shield. The method requires the formation of a planarized bottom magnetic shield in which concave regions, symmetrically disposed about a track-width region, are filled with a layer of dielectric to provide added insulation. The dielectric filled shield is planarized and an additional planar dielectric layer, a thin planar GMR sensor layer and a planar PMGI layer of uniform thickness is formed on it. A layer of photoresist is deposited on the PMGI layer and a bi-layer lift-off stencil of uniform height above the GMR layer and symmetric overhang regions is formed. The uniformity of the lift-off stencil, which is a result of the planarity of the layers on which it is formed, allows the deposition of conductive lead and biasing layers with controlled overspread.

    摘要翻译: 一种用于形成具有窄读取间隙,窄轨道宽度并且与其下屏蔽件良好绝缘的平面GMR读取头的方法。 该方法需要形成平面化的底部磁屏蔽,其中围绕磁道 - 宽度区域对称设置的凹区填充有电介质层以提供增加的绝缘。 介质填充的屏蔽层被平坦化,并且在其上形成附加的平面介电层,薄平面GMR传感器层和均匀厚度的平面PMGI层。 一层光致抗蚀剂沉积在PMGI层上,形成了高于GMR层和对称悬垂区域的均匀高度的双层剥离模版。 剥离模板的均匀性是由其形成的层的平面度的结果,允许导电引线和偏压层的沉积受到控制的超扩展。

    Short yoke length planar writer with low DC coil resistance
    45.
    发明授权
    Short yoke length planar writer with low DC coil resistance 有权
    具有低直流线圈电阻的短轭长度平面刻录机

    公开(公告)号:US07116518B2

    公开(公告)日:2006-10-03

    申请号:US10633105

    申请日:2003-08-01

    IPC分类号: G11B5/147

    摘要: Present processes used for planarizing a cavity filled with a coil and hard baked photoresist require that a significant amount of the thickness of the coils be removed. This increases the DC resistance of the coil. In the present invention a layer of alumina is deposited onto the surface of the excess photoresist, following which CMP is initiated. The presence of the alumina serves to stabilize the photoresist so that it does not delaminate. CMP is terminated as soon as the coils are exposed, allowing their full thickness to be retained and resulting in minimum DC resistance. Application of this process to the manufacture of a two coil planar magnetic write head is described.

    摘要翻译: 用于平坦化填充有线圈和硬烘烤光致抗蚀剂的空腔的现有方法需要去除大量的线圈厚度。 这增加了线圈的直流电阻。 在本发明中,一层氧化铝沉积在多余的光致抗蚀剂的表面上,随后开始CMP。 氧化铝的存在用于使光致抗蚀剂稳定,使其不分层。 一旦线圈被暴露,CMP就被终止,允许其保持其全部厚度并导致最小的直流电阻。 描述了该方法在制造双线圈平面磁性写入头上的应用。

    Method for making a perpendicular magnetic recording write head with a self aligned stitched write shield
    46.
    发明申请
    Method for making a perpendicular magnetic recording write head with a self aligned stitched write shield 失效
    一种具有自对准缝合写屏蔽的垂直磁记录写头的方法

    公开(公告)号:US20050259356A1

    公开(公告)日:2005-11-24

    申请号:US10849312

    申请日:2004-05-19

    IPC分类号: G11B5/127 G11B5/147 G11B5/31

    摘要: A perpendicular magnetic recording (PMR) head with single or double coil layers has a small write shield stitched onto a main write shield. The stitched shield allows the main write pole to produce a vertical write field with sharp vertical gradients that is reduced on both sides of the write pole so that adjacent track erasures are eliminated. From a fabrication point of view, both the main pole and the stitched shield are defined and formed using a single photolithographic process, a trim mask and CMP lapping process so that the main shield can be stitched onto a self-aligned main pole and stitched shield.

    摘要翻译: 具有单线圈或双线圈层的垂直磁记录(PMR)头具有缝合在主写屏蔽上的小写写屏蔽。 拼接屏蔽允许主写柱产生垂直写入场,其尖锐的垂直梯度在写入极的两侧减小,从而消除相邻的轨迹擦除。 从制造的角度来看,使用单一光刻工艺,修剪掩模和CMP研磨工艺来限定和形成主极和缝合屏蔽物,使得主屏蔽可以缝合到自对准的主极和缝合屏蔽 。

    Stitched shielded pole structure for a perpendicular magnetic recording write head
    47.
    发明申请
    Stitched shielded pole structure for a perpendicular magnetic recording write head 失效
    用于垂直磁记录写头的拼接屏蔽极结构

    公开(公告)号:US20050219746A1

    公开(公告)日:2005-10-06

    申请号:US10814077

    申请日:2004-03-31

    IPC分类号: G11B5/127 G11B5/147 G11B5/31

    摘要: A PMR write head has a stitched shield formation which results in a strong perpendicular write field with sharp vertical gradients. The shape of the stitched shield is determined by two design parameters, d=½(WSWSLE-WMPTE), and TSWS, where WSWSLE is the width of the leading edge of the stitched shield in the ABS plane, WMPTE is the width of the trailing edge of the main magnetic pole in the ABS plane and TSWS is the thickness of the stitched shield. By a proper choice of these parameters, the write field of the head is sharply limited in the cross-track direction, so that adjacent track erasures are eliminated.

    摘要翻译: PMR写头具有缝合的屏蔽结构,其形成具有尖锐垂直梯度的强垂直写入场。 缝合屏蔽的形状由两个设计参数d =½(W> SWSLE-> W> MP MP TE TE TE TE SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB and and and and and and and and) W SHSLE 是ABS平面中缝合屏蔽的前缘的宽度,W> MPTE 是ABS平面中主磁极的后缘的宽度 而T SWS 是缝合屏蔽的厚度。 通过这些参数的适当选择,头部的写入场在交叉轨道方向上被大大限制,从而消除了相邻的轨迹擦除。

    Pole piece for high track density recording
    48.
    发明申请
    Pole piece for high track density recording 失效
    用于高轨道密度记录的极片

    公开(公告)号:US20050180049A1

    公开(公告)日:2005-08-18

    申请号:US10780514

    申请日:2004-02-17

    IPC分类号: G11B5/147 G11B5/31

    摘要: For high track density recording, tighter reader and writer track width control are essential. This has been achieved by using a plated NiPd write gap which is self-aligned with a plated 23 KG pole material. Heat dissipation by the writer is thus improved since alumina has been replaced with nonmagnetic metal materials, such as Ru, leading to less pole tip protrusion which in turn leads to better writer track width control

    摘要翻译: 对于高轨道密度记录,更紧密的读写器轨道宽度控制是至关重要的。 这已经通过使用与电镀的23KG极材料自对准的镀NiPd写入间隙来实现。 因此,由于氧化铝被诸如Ru之类的非磁性金属材料所代替,导致作者的散热得到改善,导致较少的极尖突起,这又导致更好的写入器轨道宽度控制

    Perpendicular magnetic pole structure and process
    49.
    发明申请
    Perpendicular magnetic pole structure and process 有权
    垂直磁极结构及工艺

    公开(公告)号:US20050177996A1

    公开(公告)日:2005-08-18

    申请号:US10781168

    申请日:2004-02-18

    IPC分类号: G11B5/31 G11B5/127 G11B5/147

    摘要: For PMR (Perpendicular Magnetic Recording) design, one of the major technology problems is the use of CMP to fabricate the pole structure. If the device is under-polished there is a danger of leaving behind a magnetic shorting layer while if it is over-polished there may be damage to the main pole. This problem has been overcome by surrounding the main pole, write gap, stitched write head pillar with a layer of CMP etch stop material which, using optical inspection alone, allows CMP (performed under a first set of conditions) to be terminated just as the stitched write head gets exposed. This is followed by a second CMP step (performed under a second set of conditions) for further fine trimming of the stitched head, as needed.

    摘要翻译: 对于PMR(垂直磁记录)设计,主要的技术问题之一是使用CMP制造极结构。 如果设备磨光不足,则会有留下磁性短路层的危险,而如果超磨光,则可能会损坏主极。 通过使用CMP蚀刻停止材料层围绕主极,写入间隙,缝合写头柱来克服这个问题,其使用光学检查单独允许CMP(在第一组条件下执行)被终止,就像 拼接写头被曝光。 接下来是第二CMP步骤(在第二组条件下执行),以根据需要进一步精细修剪缝合的头部。