Wafer level package for surface acoustic wave device and fabrication method thereof
    43.
    发明申请
    Wafer level package for surface acoustic wave device and fabrication method thereof 有权
    用于表面声波器件的晶片级封装及其制造方法

    公开(公告)号:US20070176250A1

    公开(公告)日:2007-08-02

    申请号:US11447969

    申请日:2006-06-07

    Abstract: A wafer level package for a surface acoustic wave (SAW) device and a fabrication method thereof. The SAW device wafer level package includes a SAW device in which a SAW element is formed on a top surface of a device wafer, a cap wafer which is bonded with a top surface of the SAW device and has a viahole penetrating the cap wafer, and a conductive member to fill a part of the viahole. The viahole has a first via portion and a second via portion, the first via portion has a gradually smaller diameter from a bottom surface of the cap wafer until a certain depth, and the second via portion has a gradually greater diameter from the first via portion until a top surface of the cap wafer.

    Abstract translation: 一种用于表面声波(SAW)器件的晶片级封装及其制造方法。 SAW器件晶片级封装包括SAW器件,其中SAW元件形成在器件晶片的顶表面上,盖晶片与SAW器件的顶表面结合并具有穿透盖晶片的通孔,以及 用于填充通孔的一部分的导电构件。 通孔具有第一通孔部分和第二通孔部分,第一通孔部分具有从盖子晶片的底表面到一定深度的逐渐变小的直径,并且第二通孔部分具有从第一通孔部分 直到盖晶片的顶表面。

    Fabrication method of packaging substrate and packaging method using the packaging substrate
    47.
    发明申请
    Fabrication method of packaging substrate and packaging method using the packaging substrate 有权
    包装基材的包装方法和封装方法

    公开(公告)号:US20060094158A1

    公开(公告)日:2006-05-04

    申请号:US11240771

    申请日:2005-10-03

    CPC classification number: B81C1/00301 Y10T29/49117

    Abstract: A fabrication method of a packaging substrate includes the steps of: forming a recess by etching a predetermined area of a lower surface of a substrate; depositing a seed layer on an upper surface of the substrate; in the recess, etching predetermined area(s) of the lower surface of the substrate and forming at least one via hole that reaches the seed layer; and plating the inside of the via hole by using the seed layer, and forming electrode(s) for electrically coupling the upper and lower parts of the substrate. First and second pads coupled to the electrode(s) may be formed on the upper and lower parts of the substrate, respectively. Thus, using the second pads as bonding materials, the packaging process becomes easier, which resultantly simplifies the fabrication process of the packaging substrate and the packaging process.

    Abstract translation: 包装基板的制造方法包括以下步骤:通过蚀刻基板的下表面的预定区域来形成凹部; 在基板的上表面上沉积种子层; 在所述凹部中蚀刻所述基板的下表面的预定区域并形成到达所述籽晶层的至少一个通孔; 并且通过使用晶种层对通孔的内部进行电镀,以及形成用于电耦合衬底的上部和下部的电极。 分别连接到电极的第一和第二焊盘分别形成在衬底的上部和下部。 因此,使用第二焊盘作为粘合材料,封装过程变得更容易,从而简化了封装衬底的制造过程和封装过程。

    Low-loss inductor device and fabrication method thereof
    48.
    发明申请
    Low-loss inductor device and fabrication method thereof 审中-公开
    低损耗电感器件及其制造方法

    公开(公告)号:US20060017539A1

    公开(公告)日:2006-01-26

    申请号:US11184999

    申请日:2005-07-20

    Abstract: An inductor device having an improved quality factor is provided. To obtain the improved quality factor, the inductor device includes a substrate etched away at predetermined intervals; first and second inductors formed on the top and bottom of the substrate, respectively; and first and second protection packages for shielding the first and second inductors, respectively, from outside. The first and second inductors are formed in a symmetrical structure with respect to the substrate, and the inductor device further includes connection parts for electrically connecting the first and second inductors. Further, the inductor device has air gaps between the substrate, first inductor, and second inductor in order for the first and second inductors to be exposed in the air, and the first protection package has an electrode layer formed thereon at predetermined positions to supply electric currents to the inductor device.

    Abstract translation: 提供了具有改进的品质因数的电感器件。 为了获得改进的品质因数,电感器件包括以预定间隔蚀刻掉的衬底; 分别形成在基板的顶部和底部的第一和第二电感器; 以及分别从外部屏蔽第一和第二电感器的第一和第二保护封装。 第一和第二电感器相对于衬底形成对称的结构,并且电感器件还包括用于电连接第一和第二电感器的连接部件。 此外,电感器件在衬底,第一电感器和第二电感器之间具有空气间隙,以便使第一和第二电感器暴露在空气中,并且第一保护封装具有在预定位置形成在其上的电极层以供应电 电流到电感器件。

    Vibration type MEMS switch and fabricating method thereof

    公开(公告)号:US20060017125A1

    公开(公告)日:2006-01-26

    申请号:US11182775

    申请日:2005-07-18

    CPC classification number: H01H59/0009 H01H2059/0036 H01H2059/0063

    Abstract: A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.

    Gyro-sensor comprising a plurality of component units, and fabricating method thereof
    50.
    发明申请
    Gyro-sensor comprising a plurality of component units, and fabricating method thereof 有权
    包括多个部件单元的陀螺传感器及其制造方法

    公开(公告)号:US20050262941A1

    公开(公告)日:2005-12-01

    申请号:US11141054

    申请日:2005-06-01

    CPC classification number: B81C1/0023 B81B2207/07 G01C19/56 H01L2224/16225

    Abstract: Provided are a gyro-sensor including a plurality of component units and a method of fabricating the gyro-sensor. The gyro-sensor includes: a substrate; a micro electro mechanical system structure including a surface including a predetermined area in which a cavity is formed and connected to an upper surface of the substrate to output a vibration signal proportional to an external rotation force; and a circuit unit positioned in the cavity, converting the vibration signal into a predetermined electric signal proportional to a circular angular velocity, and outputting the predetermined electric signal.

    Abstract translation: 提供了包括多个部件单元的陀螺仪传感器和制造陀螺仪传感器的方法。 陀螺传感器包括:基板; 微电子机械系统结构,其包括包括形成空腔的预定区域的表面并且连接到所述基板的上表面以输出与外部旋转力成比例的振动信号; 以及位于所述空腔中的电路单元,将所述振动信号转换为与圆形角速度成比例的预定电信号,并输出所述预定电信号。

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