公开(公告)号：US5989998A

公开(公告)日：1999-11-23

申请号：US919271

申请日：1997-08-28

申请人： Gaku Sugahara ,  Nobuo Aoi ,  Koji Arai ,  Kazuyuki Sawada

发明人： Gaku Sugahara ,  Nobuo Aoi ,  Koji Arai ,  Kazuyuki Sawada

IPC分类号： C23C16/26 ,  C23C16/30 ,  C23C16/40 ,  H01L21/3105 ,  H01L21/312 ,  H01L21/314 ,  H01L21/316 ,  H01L21/768 ,  H01L21/4763

CPC分类号： H01L21/02126 ,  C23C16/26 ,  C23C16/30 ,  C23C16/401 ,  H01L21/0212 ,  H01L21/02131 ,  H01L21/02205 ,  H01L21/02211 ,  H01L21/02214 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/3122 ,  H01L21/3127 ,  H01L21/314 ,  H01L21/31608 ,  H01L21/31612 ,  H01L21/31629 ,  H01L21/31633 ,  H01L21/76801 ,  H01L21/76807 ,  H01L21/31051 ,  H01L21/31058

摘要： A material containing, as a main component, an organic silicon compound represented by the following general formula:R.sup.1.sub.x Si(OR.sup.2).sub.4-x(where R.sup.1 is a phenyl group or a vinyl group; R.sup.2 is an alkyl group; and x is an integer of 1 to 3) is caused to undergo plasma polymerization or react with an oxidizing agent to form an interlayer insulating film composed of a silicon oxide film containing an organic component. As the organic silicon compound where R.sup.1 is a phenyl group, there can be listed phenyltrimethoxysilane or diphenyldimethoxysilane. As the organic silicon compound where R.sup.1 is a vinyl group, there can be listed vinyltrimethoxysilane or divinyldimethoxysilane.

摘要翻译： 作为主成分的含有以下通式表示的有机硅化合物的材料：R1xSi（OR2）4-x（其中R1为苯基或乙烯基; R2为烷基; x为整数） 1〜3）进行等离子体聚合或与氧化剂反应，形成由含有有机成分的氧化硅膜构成的层间绝缘膜。 作为R 1为苯基的有机硅化合物，可以列举苯基三甲氧基硅烷或二苯基二甲氧基硅烷。 作为R 1为乙烯基的有机硅化合物，可列举乙烯基三甲氧基硅烷或二乙烯基二甲氧基硅烷。