公开(公告)号：US5788458A

公开(公告)日：1998-08-04

申请号：US500219

申请日：1995-07-10

申请人： Anthony C. Bonora ,  Michael A. Neads ,  Joshua T. Oen

发明人： Anthony C. Bonora ,  Michael A. Neads ,  Joshua T. Oen

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/137 ,  Y10S414/14

摘要： A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

公开(公告)号：US5570990A

公开(公告)日：1996-11-05

申请号：US147372

申请日：1993-11-05

申请人： Anthony C. Bonora ,  Bruce A. Richardson ,  Michael D. Brain ,  Edward J. Cortez ,  Barney H. Huang

发明人： Anthony C. Bonora ,  Bruce A. Richardson ,  Michael D. Brain ,  Edward J. Cortez ,  Barney H. Huang

IPC分类号： G03F7/20 ,  H01L21/677 ,  G06F15/50

CPC分类号： G03F7/70541 ,  G03F7/70741 ,  G03F7/7075 ,  H01L21/67775 ,  Y10S414/14

摘要： A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.

摘要翻译： 开发了用于机械协助SMIF集装箱运动的人造导向移动式装载机储料器。 辅助包括一个手推车，一个半电动运输臂，一个处理器和通讯装置。 使用手臂将一组容器放在购物车上。 推车被推到半导体处理工具，其中臂用于将容器运送到加工工具的端口和从处理工具的端口传送。 处理器和通信设备用于库存控制，并将容器引导到处理工具的端口。

公开(公告)号：US5547328A

公开(公告)日：1996-08-20

申请号：US299900

申请日：1994-09-01

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输的容器例如SMIF盒传送到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门本身在清洁容器内的环境之前被清除。

公开(公告)号：US5370491A

公开(公告)日：1994-12-06

申请号：US948148

申请日：1992-09-21

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677 ,  B65B1/04

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输容器（例如SMIF吊舱）转移到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门本身在清洁容器内的环境之前被清除。

公开(公告)号：US5169272A

公开(公告)日：1992-12-08

申请号：US607898

申请日：1990-11-01

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door iself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输的容器例如SMIF盒传送到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门在清洁容器内的环境之前被清除。

公开(公告)号：US5097421A

公开(公告)日：1992-03-17

申请号：US54212

申请日：1987-05-18

申请人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

发明人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

IPC分类号： B65G43/00 ,  G03F7/20 ,  G05B15/02 ,  H01L21/02 ,  H01L21/027 ,  H01L21/304 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67294 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991

摘要： Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

摘要翻译： 公开了一种系统，其安装有用于承载诸如半导体晶片的物品的可运输容器，该系统包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。

公开(公告)号：US4454096A

公开(公告)日：1984-06-12

申请号：US273910

申请日：1981-06-15

申请人： Robert E. Lorenzini ,  Anthony C. Bonora ,  Karl Lorenz

发明人： Robert E. Lorenzini ,  Anthony C. Bonora ,  Karl Lorenz

IPC分类号： C30B15/00 ,  C30B15/02 ,  C30B15/12

CPC分类号： C30B15/005 ,  C30B15/02 ,  Y10T117/1008 ,  Y10T117/1052 ,  Y10T117/1056

摘要： Several embodiments of a replenishment arrangement for furnishing molten semiconductor material to furnaces for growing monocrystalline boules are described. A replenishment crucible within which a melt of the material from which the boules are to be grown is communicated either intermittently or continuously with a plurality of growth furnaces.

摘要翻译： 描述了用于将熔融半导体材料提供给用于生长单晶晶粒的熔炉的补充装置的几个实施例。 一种补充坩埚，其中要生长毛坯的材料的熔体与多个生长炉间歇地或连续地连通。

公开(公告)号：US4194324A

公开(公告)日：1980-03-25

申请号：US869652

申请日：1978-01-16

申请人： Anthony C. Bonora ,  Karl Lorenz

发明人： Anthony C. Bonora ,  Karl Lorenz

IPC分类号： B24B41/06 ,  B24B29/00

CPC分类号： B24B37/30 ,  B24B41/068 ,  Y10T279/11

摘要： A carrier for semiconductor wafers to be polished is described, as well as mounting structure for securing the carrier within a polishing machine. The carrier is a relatively thick metal plate having on one of its faces, a sheet of material to which wafers can be adhered. An annular flange is on its opposite face to receive pressure loading from the polishing machine during the wafer polishing operation. Radially extending webs connect the annular flange with that area of the plate to distribute the pressure loading over substantially the full area of the plate opposed to the area on the opposite face on which wafers are to be adhered. An arrangement is included in the holder of the polishing machine for the carrier which applies a vacuum to the carrier to maintain the carrier selectively on the polishing machine, which arrangement releases the vacuum during the polishing operation and also enables simple intentional removal of the carrier. The carrier holder also enables the orientation of the carrier relative to the remainder of the polishing machine to be angularly tilted in such a manner that the leverage of any tangential force applied to wafers being polished is minimized.

摘要翻译： 描述用于待抛光的半导体晶片的载体，以及用于将载体固定在抛光机内的安装结构。 载体是在其一个表面上具有相对厚的金属板，可以粘合晶片的一片材料。 环形法兰在其相对的表面上，以在晶片抛光操作期间接收来自抛光机的压力负载。 径向延伸的腹板将环形凸缘与板的该区域连接，以将压力负载分布在与要粘附的晶片相对面上的区域相对的板的基本上整个区域上。 在用于载体的抛光机的保持器中包括一种布置，该载体对载体施加真空以将载体选择性地保持在抛光机上，该布置在抛光操作期间释放真空，并且还能够简单地有意地移除载体。 载体保持器还使得载体相对于抛光机的其余部分的取向角度倾斜，使得施加到被抛光的晶片上的任何切向力的作用最小化。

公开(公告)号：US09834378B2

公开(公告)日：2017-12-05

申请号：US11644240

申请日：2006-12-22

申请人： Anthony C. Bonora ,  Roger G. Hine ,  Theodore W. Rogers

发明人： Anthony C. Bonora ,  Roger G. Hine ,  Theodore W. Rogers

IPC分类号： H01L21/677 ,  B65G1/04 ,  B65G37/02

CPC分类号： B65G1/0407 ,  B65G37/02 ,  B65G2201/0297

摘要： A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.

公开(公告)号：US08882433B2

公开(公告)日：2014-11-11

申请号：US12780846

申请日：2010-05-14

申请人： Anthony C. Bonora ,  Richard H. Gould ,  Michael Krolak

发明人： Anthony C. Bonora ,  Richard H. Gould ,  Michael Krolak

IPC分类号： B65G1/133 ,  H01L21/677

CPC分类号： H01L21/67766 ,  B65G2201/0297 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14

摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop. Example configurations of the storage system can include one or more of stationary shelves, extended horizontal tracks for hoists, conveyors at the level of the storage system assembly, and a manual loading station. The hoist, with an extended horizontal track can therefore interface with the manual loading station.

摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以使得能够进行水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。 存储系统的示例配置可以包括一个或多个固定架，用于起重机的延伸水平轨道，存储系统组件的水平面处的输送机以及手动装载站。 具有延伸水平轨道的起重机因此可与手动装载站接口。