公开(公告)号：US08829654B2

公开(公告)日：2014-09-09

申请号：US14078799

申请日：2013-11-13

Applicant: Broadcom Corporation

Inventor： Sam Ziqun Zhao ,  Rezaur Rahman Khan

IPC: H01L29/40 ,  H01L23/02 ,  H01L23/48 ,  H01L23/52 ,  H01L21/48 ,  H01L23/522 ,  H01L23/538 ,  H01L23/498 ,  H01L23/00 ,  H01L25/065

CPC classification number: H01L23/481 ,  H01L21/4857 ,  H01L23/14 ,  H01L23/145 ,  H01L23/147 ,  H01L23/49506 ,  H01L23/49575 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49827 ,  H01L23/49833 ,  H01L23/5226 ,  H01L23/5384 ,  H01L23/5385 ,  H01L23/5389 ,  H01L24/16 ,  H01L24/17 ,  H01L24/32 ,  H01L24/97 ,  H01L25/00 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/105 ,  H01L2224/1403 ,  H01L2224/14181 ,  H01L2224/14183 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/16235 ,  H01L2224/17181 ,  H01L2224/30183 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2225/06541 ,  H01L2225/06572 ,  H01L2225/1023 ,  H01L2225/1058 ,  H01L2924/1515 ,  H01L2924/15153 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/15321 ,  H01L2924/15331 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00

Abstract: The present application discloses various implementations of a semiconductor package including an organic substrate and one or more interposers having through-semiconductor vias (TSVs). Such a semiconductor package may include a contiguous organic substrate having a lower substrate segment including first and second pluralities of lower interconnect pads, the second plurality of lower interconnect pads being disposed in an opening of the lower substrate segment. The contiguous organic substrate may also include an upper substrate segment having an upper width and including first and second pluralities of upper interconnect pads. In addition, the semiconductor package may include at least one interposer having TSVs for electrically connecting the first and second pluralities of lower interconnect pads to the first and second pluralities of upper interconnect pads. The interposer has an interposer width less than the upper width of the upper substrate segment.

Abstract translation: 本申请公开了包括有机衬底和具有贯通半导体通孔（TSV）的一个或多个中介层的半导体封装的各种实施方式。 这种半导体封装可以包括具有包括第一和第二多个下部互连焊盘的下部衬底区段的连续有机衬底，第二多个下部互连焊盘设置在下部衬底段的开口中。 连续的有机衬底还可以包括具有上部宽度并包括第一和第二多个上部互连焊盘的上部衬底区段。 此外，半导体封装可以包括具有TSV的至少一个插入器，用于将第一和第二多个下部互连焊盘电连接到第一和第二多个上部互连焊盘。 插入器具有小于上基板段的上宽度的插入器宽度。

公开(公告)号：US20140061946A1

公开(公告)日：2014-03-06

申请号：US14079571

申请日：2013-11-13

Applicant: Broadcom Corporation

Inventor： Sam Ziqun Zhao ,  Rezaur Rahman Khan

IPC: H01L23/14 ,  H01L25/00

CPC classification number: H01L23/481 ,  H01L21/4857 ,  H01L23/14 ,  H01L23/145 ,  H01L23/147 ,  H01L23/49506 ,  H01L23/49575 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49827 ,  H01L23/49833 ,  H01L23/5226 ,  H01L23/5384 ,  H01L23/5385 ,  H01L23/5389 ,  H01L24/16 ,  H01L24/17 ,  H01L24/32 ,  H01L24/97 ,  H01L25/00 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/105 ,  H01L2224/1403 ,  H01L2224/14181 ,  H01L2224/14183 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/16235 ,  H01L2224/17181 ,  H01L2224/30183 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2225/06541 ,  H01L2225/06572 ,  H01L2225/1023 ,  H01L2225/1058 ,  H01L2924/1515 ,  H01L2924/15153 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/15321 ,  H01L2924/15331 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00

Abstract: The present application discloses various implementations of a semiconductor package including an organic substrate and one or more interposers having through-semiconductor vias (TSVs). Such a semiconductor package may include a contiguous organic substrate having a lower substrate segment including first and second pluralities of lower interconnect pads, the second plurality of lower interconnect pads being disposed in an opening of the lower substrate segment. The contiguous organic substrate may also include an upper substrate segment having an upper width and including first and second pluralities of upper interconnect pads. In addition, the semiconductor package may include at least one interposer having TSVs for electrically connecting the first and second pluralities of lower interconnect pads to the first and second pluralities of upper interconnect pads. The interposer has an interposer width less than the upper width of the upper substrate segment.

Abstract translation: 本申请公开了包括有机衬底和具有贯通半导体通孔（TSV）的一个或多个中介层的半导体封装的各种实施方式。 这种半导体封装可以包括具有包括第一和第二多个下部互连焊盘的下部衬底区段的连续有机衬底，第二多个下部互连焊盘设置在下部衬底段的开口中。 连续的有机衬底还可以包括具有上部宽度并包括第一和第二多个上部互连焊盘的上部衬底区段。 此外，半导体封装可以包括具有TSV的至少一个插入器，用于将第一和第二多个下部互连焊盘电连接到第一和第二多个上部互连焊盘。 插入器具有小于上基板段的上宽度的插入器宽度。

公开(公告)号：US08664772B2

公开(公告)日：2014-03-04

申请号：US14051817

申请日：2013-10-11

Applicant: Broadcom Corporation

Inventor： Rezaur Rahman Khan ,  Sam Ziqun Zhao

IPC: H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L23/02

CPC classification number: H01L23/481 ,  H01L23/12 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/49833 ,  H01L24/16 ,  H01L24/17 ,  H01L24/32 ,  H01L25/105 ,  H01L2224/1403 ,  H01L2224/14181 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/16235 ,  H01L2224/17181 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2225/1023 ,  H01L2225/1058 ,  H01L2924/15311 ,  H01L2924/15321 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00

Abstract: An interface substrate is disclosed which includes an interposer having through-semiconductor vias. An upper and a lower organic substrate are further built around the interposer. The disclosed interface substrate enables the continued use of low cost and widely deployed organic substrates for semiconductor packages while providing several advantages. The separation of the organic substrate into upper and lower substrates enables the cost effective matching of fabrication equipment. By providing an opening in one of the organic substrates, one or more semiconductor dies may be attached to exposed interconnect pads coupled to through-semiconductor vias of the interposer, enabling the use of flip chips with high-density microbump arrays and the accommodation of dies with varied bump pitches. By providing the opening specifically in the upper organic substrate, a package-on-package structure with optimized height may also be provided.

Abstract translation: 公开了一种界面衬底，其包括具有贯通半导体通孔的插入件。 进一步围绕插入件构建上部和下部有机衬底。 所公开的接口衬底能够持续使用低成本且广泛部署的用于半导体封装的有机衬底，同时提供若干优点。 将有机基底分离成上下基板能够实现制造设备的成本有效匹配。 通过在一个有机衬底中设置一个开口，一个或多个半导体管芯可以附着到与插入器的通孔半导体连接的暴露的互连焊盘上，使得能够使用具有高密度微型阵列的倒装芯片和模具 具有不同的凸起间距。 通过在上部有机衬底中提供开口，还可以提供具有优化的高度的封装封装结构。