公开(公告)号：US06555477B1

公开(公告)日：2003-04-29

申请号：US10152939

申请日：2002-05-22

申请人： Chen-Fa Lu ,  Chin-Hsiung Ho ,  Mei-Ling Chen ,  Liang-Kun Huang

发明人： Chen-Fa Lu ,  Chin-Hsiung Ho ,  Mei-Ling Chen ,  Liang-Kun Huang

IPC分类号： H01L21302

CPC分类号： H01L21/7684 ,  H01L21/02071 ,  H01L21/3212

摘要： A method for preventing or reducing corrosion of copper containing semiconductor features during chemical mechanical polishing (CMP) including providing a semiconductor wafer polishing surface including a copper layer overlying a copper filled anisotropically etched feature; polishing the semiconductor wafer polishing surface according to a first CMP process to remove at least a portion the copper layer to reveal a portion of an underlying barrier/adhesion layer; polishing the semiconductor wafer polishing surface according to a second CMP process including applying a neutralizing solution; polishing the semiconductor wafer polishing surface according to a third CMP process including applying a copper corrosion inhibitor solution; and, polishing the semiconductor wafer polishing surface according to at least a fourth CMP process to remove a remaining portion of the underlying barrier/adhesion layer.

摘要翻译： 一种用于在化学机械抛光（CMP）期间防止或减少含铜半导体特征的腐蚀的方法，包括提供半导体晶片抛光表面，所述半导体晶片抛光表面包括覆盖铜填充的各向异性蚀刻特征的铜层; 根据第一CMP工艺抛光半导体晶片抛光表面以去除铜层的至少一部分以露出下面的阻挡/粘附层的一部分; 根据包括施加中和溶液的第二CMP工艺抛光半导体晶片抛光表面; 根据包括施加铜腐蚀抑制剂溶液的第三CMP工艺抛光半导体晶片抛光表面; 以及根据至少第四CMP工艺对所述半导体晶片抛光表面进行抛光以去除所述下面的阻挡/粘合层的剩余部分。

公开(公告)号：US08618626B2

公开(公告)日：2013-12-31

申请号：US12902402

申请日：2010-10-12

申请人： Kou-Liang Chao ,  Mei-Ling Chen ,  Tse-Chuan Su ,  Hung-Hsin Kuo

发明人： Kou-Liang Chao ,  Mei-Ling Chen ,  Tse-Chuan Su ,  Hung-Hsin Kuo

IPC分类号： H01L29/66

CPC分类号： H01L29/66143 ,  H01L21/2256 ,  H01L21/28537 ,  H01L29/0623 ,  H01L29/402 ,  H01L29/872

摘要： A trench Schottky rectifier device includes a substrate having a first conductivity type, a plurality of trenches formed in the substrate, and an insulating layer formed on sidewalls of the trenches. The trenches are filled with conductive structure. There is an electrode overlying the conductive structure and the substrate, and thus a Schottky contact forms between the electrode and the substrate. A plurality of embedded doped regions having a second conductivity type are formed in the substrate and located under the trenches. Each doped region and the substrate form a PN junction to pinch off current flowing toward the Schottky contact so as to suppress current leakage.

摘要翻译： 沟槽肖特基整流器件包括具有第一导电类型的衬底，在衬底中形成的多个沟槽，以及形成在沟槽的侧壁上的绝缘层。 沟槽填充有导电结构。 存在覆盖导电结构和衬底的电极，因此在电极和衬底之间形成肖特基接触。 在衬底中形成具有第二导电类型的多个嵌入式掺杂区域，并位于沟槽下方。 每个掺杂区域和衬底形成PN结以夹紧流向肖特基接触的电流，以便抑制电流泄漏。

公开(公告)号：US08378365B2

公开(公告)日：2013-02-19

申请号：US12559757

申请日：2009-09-15

申请人： Mei-Ling Chen ,  Wen-Chieh Wen ,  Haw-Woei Pan ,  Chao-Shun Chen

发明人： Mei-Ling Chen ,  Wen-Chieh Wen ,  Haw-Woei Pan ,  Chao-Shun Chen

IPC分类号： H01L33/00

CPC分类号： H01L33/58

摘要： A light emitting diode (LED) package including a carrier, at least one LED chip, and a light guide element is provided. The LED chip is disposed on the carrier. The light guide element including a light transmissive body, a light integration part, a reflective film, and a support part is disposed on the carrier and above the LED chip. The light integration part connected to the light transmissive body and disposed between the light transmissive body and the LED chip has a light incident surface facing the LED chip and at least one side. The side connects the light transmissive body and the light incident surface. The reflective film is disposed on the side. The support part leaning on the carrier is connected to the light transmissive body and surrounds the light integration part. The light transmissive body, the light integration part, and the support part are integrally formed.

摘要翻译： 提供了包括载体，至少一个LED芯片和导光元件的发光二极管（LED）封装。 LED芯片设置在载体上。 包括透光体，光积分部分，反射膜和支撑部分的导光元件设置在载体上并在LED芯片上方。 连接到透光体并且设置在透光体和LED芯片之间的光积分部分具有面向LED芯片和至少一个侧面的光入射表面。 侧面连接透光体和光入射面。 反射膜设置在一侧。 靠在载体上的支撑部分连接到透光体并且围绕光集成部分。 光透射体，光一体化部和支撑部一体形成。

公开(公告)号：US20120049287A1

公开(公告)日：2012-03-01

申请号：US13190918

申请日：2011-07-26

申请人： Mei-Ling Chen ,  Hung-Hsin Kuo ,  Kou-Liang Chao

发明人： Mei-Ling Chen ,  Hung-Hsin Kuo ,  Kou-Liang Chao

IPC分类号： H01L21/336 ,  H01L29/78

CPC分类号： H01L21/76224 ,  H01L21/761 ,  H01L29/6609 ,  H01L29/66136 ,  H01L29/66174 ,  H01L29/66477 ,  H01L29/80 ,  H01L29/861 ,  H01L29/94 ,  H01L2924/13091

摘要： A trench isolation metal-oxide-semiconductor (MOS) P-N junction diode device and a manufacturing method thereof are provided. The trench isolation MOS P-N junction diode device is a combination of an N-channel MOS structure and a lateral P-N junction diode, wherein a polysilicon-filled trench oxide layer is buried in the P-type structure to replace the majority of the P-type structure. As a consequence, the trench isolation MOS P-N junction diode device of the present invention has the benefits of the Schottky diode and the P-N junction diode. That is, the trench isolation MOS P-N junction diode device has rapid switching speed, low forward voltage drop, low reverse leakage current and short reverse recovery time.

摘要翻译： 提供了沟槽隔离金属氧化物半导体（MOS）P-N结二极管器件及其制造方法。 沟槽隔离MOS PN结二极管器件是N沟道MOS结构和横向PN结二极管的组合，其中多晶硅填充的沟槽氧化物层被埋在P型结构中以代替大部分P型 结构体。 因此，本发明的沟槽隔离MOS P-N结二极管器件具有肖特基二极管和P-N结二极管的优点。 也就是说，沟槽隔离MOS P-N结二极管器件具有快速的开关速度，低正向压降，低反向漏电流和短的反向恢复时间。

公开(公告)号：US20110084353A1

公开(公告)日：2011-04-14

申请号：US12902402

申请日：2010-10-12

申请人： Kou-Liang CHAO ,  Mei-Ling Chen ,  Tse-Chuan Su ,  Hung-Hsin Kuo

发明人： Kou-Liang CHAO ,  Mei-Ling Chen ,  Tse-Chuan Su ,  Hung-Hsin Kuo

IPC分类号： H01L29/47 ,  H01L21/329

CPC分类号： H01L29/66143 ,  H01L21/2256 ,  H01L21/28537 ,  H01L29/0623 ,  H01L29/402 ,  H01L29/872

摘要： A trench Schottky rectifier device includes a substrate having a first conductivity type, a plurality of trenches formed in the substrate, and an insulating layer formed on sidewalls of the trenches. The trenches are filled with conductive structure. There is an electrode overlying the conductive structure and the substrate, and thus a Schottky contact forms between the electrode and the substrate. A plurality of embedded doped regions having a second conductivity type are formed in the substrate and located under the trenches. Each doped region and the substrate form a PN junction to pinch off current flowing toward the Schottky contact so as to suppress current leakage.

摘要翻译： 沟槽肖特基整流器件包括具有第一导电类型的衬底，在衬底中形成的多个沟槽，以及形成在沟槽的侧壁上的绝缘层。 沟槽填充有导电结构。 存在覆盖导电结构和衬底的电极，因此在电极和衬底之间形成肖特基接触。 在衬底中形成具有第二导电类型的多个嵌入式掺杂区域，并位于沟槽下方。 每个掺杂区域和衬底形成PN结以夹紧流向肖特基接触的电流，以便抑制电流泄漏。

公开(公告)号：US20100308478A1

公开(公告)日：2010-12-09

申请号：US12477930

申请日：2009-06-04

申请人： Mei-Ling Chen ,  Ming-Chin Tsai

发明人： Mei-Ling Chen ,  Ming-Chin Tsai

IPC分类号： B01F3/04

CPC分类号： B01F3/04588 ,  B01F3/04609 ,  B01F3/04765 ,  B01F13/0049 ,  B01F15/00435 ,  B01F2015/00623 ,  B01F2015/00642

摘要： A cruising aerator includes a raft, a motor mounted on the raft, a shaft driven by the motor, a first impeller mounted on the shaft, a second impeller mounted on the shaft, and a common chamber. The cruising aerator further includes a sequential controller connected to the motor for controlling the motor to rotate clockwise or counterclockwise. The motor, the shaft and impellers are installed inside of the common chamber. The common chamber has a common inlet disposed under a water surface. A first outlet and a second outlet of the common chamber are arranged to face in opposite directions. The first impeller and second impeller are assembled to have opposite normal rotating directions to each other according to a rotating direction of the motor.

摘要翻译： 巡航曝气器包括筏，安装在筏上的马达，由马达驱动的轴，安装在轴上的第一叶轮，安装在轴上的第二叶轮和公共室。 巡航曝气器还包括连接到马达的顺序控制器，用于控制马达顺时针或逆时针旋转。 电动机，轴和叶轮安装在公共室内。 公共室具有设置在水面下的共同入口。 公共室的第一出口和第二出口布置成面向相反的方向。 第一叶轮和第二叶轮根据马达的旋转方向组装成彼此具有相反的正常旋转方向。

公开(公告)号：US20100155756A1

公开(公告)日：2010-06-24

申请号：US12559757

申请日：2009-09-15

申请人： Mei-Ling Chen ,  Wen-Chieh Wen ,  Haw-Woei Pan ,  Chao-Shun Chen

发明人： Mei-Ling Chen ,  Wen-Chieh Wen ,  Haw-Woei Pan ,  Chao-Shun Chen

IPC分类号： H01L33/00

CPC分类号： H01L33/58

摘要： A light emitting diode (LED) package including a carrier, at least one LED chip, and a light guide element is provided. The LED chip is disposed on the carrier. The light guide element including a light transmissive body, a light integration part, a reflective film, and a support part is disposed on the carrier and above the LED chip. The light integration part connected to the light transmissive body and disposed between the light transmissive body and the LED chip has a light incident surface facing the LED chip and at least one side. The side connects the light transmissive body and the light incident surface. The reflective film is disposed on the side. The support part leaning on the carrier is connected to the light transmissive body and surrounds the light integration part. The light transmissive body, the light integration part, and the support part are integrally formed.

摘要翻译： 提供了包括载体，至少一个LED芯片和导光元件的发光二极管（LED）封装。 LED芯片设置在载体上。 包括透光体，光积分部分，反射膜和支撑部分的导光元件设置在载体上并在LED芯片上方。 连接到透光体并且设置在透光体和LED芯片之间的光积分部分具有面向LED芯片和至少一个侧面的光入射表面。 该侧连接透光体和光入射面。 反射膜设置在一侧。 靠在载体上的支撑部分连接到透光体并且围绕光集成部分。 光透射体，光一体化部和支撑部一体形成。

公开(公告)号：US20090061201A1

公开(公告)日：2009-03-05

申请号：US11850466

申请日：2007-09-05

申请人： Mei-Ling Chen ,  Su-Jen Sung ,  Chien-Chung Huang

发明人： Mei-Ling Chen ,  Su-Jen Sung ,  Chien-Chung Huang

IPC分类号： C23C14/54 ,  B32B3/26

CPC分类号： C23C16/401 ,  C23C16/45557 ,  C23C16/46 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/02304 ,  H01L21/02362 ,  H01L21/31695 ,  Y10T428/249953

摘要： A fabrication method of an ultra low-k dielectric layer is provided. A deposition process is performed, under the control of a temperature varying program or a pressure varying program, by reacting a dielectric matrix to form porous low-k dielectric layers with a gradient density on a barrier layer over a substrate.

摘要翻译： 提供了一种超低k电介质层的制造方法。 在温度变化程序或压力变化程序的控制下，通过使介电基质反应以在衬底上的阻挡层上形成具有梯度密度的多孔低k电介质层来进行沉积工艺。

公开(公告)号：US20090009720A1

公开(公告)日：2009-01-08

申请号：US12036734

申请日：2008-02-25

申请人： Mei-Ling Chen ,  Chao-Shun Chen ,  Fu-Ming Chuang ,  S-Wei Chen ,  Cheng-Shun Liao

发明人： Mei-Ling Chen ,  Chao-Shun Chen ,  Fu-Ming Chuang ,  S-Wei Chen ,  Cheng-Shun Liao

IPC分类号： G02B27/28

CPC分类号： G02B27/283 ,  H04N9/3105 ,  H04N9/3161 ,  H04N9/3164

摘要： An optical engine including a beam splitting and combining system, which includes a first polarizing beam splitting (PBS) unit, a dichroic unit and a second PBS unit, is provided. A first color beam is reflected by the first PBS unit, is reflected by a first light valve, and passes through the first PBS unit sequentially. A second color beam passes through the first PBS unit, is reflected by a second light valve, and is reflected by the first PBS unit sequentially. The dichroic unit is disposed on an optical path of the first and second color beams. The second PBS unit is capable of allowing a third color beam to travel to a third light valve and allowing the third color beam reflected from the third light valve to travel to the dichroic unit. The dichroic unit is capable of combining the first, second and third color beams.

摘要翻译： 提供了包括分束和组合系统的光学引擎，其包括第一偏振分束（PBS）单元，二向色单元和第二PBS单元。 第一色光束被第一PBS单元反射，被第一光阀反射，并依次通过第一PBS单元。 第二色光束通过第一PBS单元，被第二光阀反射，并被第一PBS单元依次反射。 二向色单元设置在第一和第二色光束的光路上。 第二PBS单元能够允许第三颜色光束行进到第三光阀，并允许从第三光阀反射的第三色光束行进到二向色单元。 二向色单元能够组合第一，第二和第三颜色光束。

公开(公告)号：US20080316569A1

公开(公告)日：2008-12-25

申请号：US11954687

申请日：2007-12-12

申请人： Mei-Ling Chen ,  S-Wei Chen ,  Chao-Shun Chen ,  Hung-Cheng Lung ,  Chun-Fa Hsu ,  Cheng-Shun Liao

发明人： Mei-Ling Chen ,  S-Wei Chen ,  Chao-Shun Chen ,  Hung-Cheng Lung ,  Chun-Fa Hsu ,  Cheng-Shun Liao

IPC分类号： G02F1/00

CPC分类号： G02B26/008 ,  G02B6/0008 ,  G02B6/4298 ,  G02F1/133611 ,  G02F1/133621 ,  G02F2001/133622

摘要： An illumination system for providing an illumination beam to a light valve is provided. The illumination system includes a light source, a light integration rod, a color wheel, a first focusing unit and a second focusing unit. The light source is capable of generating the illumination beam, and the light integration rod is disposed on the transmission path of the illumination beam. The first focusing unit is disposed between the integration rod and the color wheel and is capable of focusing the illumination beam onto the color wheel. The second focusing unit is disposed between the color wheel and the light valve and is capable of focusing the illumination beam onto the light valve.

摘要翻译： 提供了一种用于向光阀提供照明光束的照明系统。 照明系统包括光源，光集成杆，色轮，第一聚焦单元和第二聚焦单元。 光源能够产生照明光束，并且光集成棒设置在照明光束的传输路径上。 第一聚焦单元设置在集成杆和色轮之间，并且能够将照明光束聚焦到色轮上。 第二聚焦单元设置在色轮和光阀之间，并且能够将照明光束聚焦到光阀上。