公开(公告)号：US5411895A

公开(公告)日：1995-05-02

申请号：US419403

申请日：1989-10-10

申请人： Tsung-Yuan Hsu

发明人： Tsung-Yuan Hsu

IPC分类号： G02F1/017 ,  H01L31/18

CPC分类号： B82Y20/00 ,  G02F1/017 ,  G02F2203/12

摘要： A method for fabricating a hybrid MQW spatial light modulator is described which comprises steps of depositing on a substrate in sequence a first layer to preselected thickness of n+ (or p+) semiconductor material, a second layer to preselected thickness of intrinsic semiconductor material and a third layer to preselected thickness of p+ (or n+) semiconductor material to form a modulator portion, applying a metallic layer defining a mirrored surface to the third layer of the modulator portion, providing a prefabricated silicon PIN detector having a layered structure including an intrinsic layer of preselected thickness sandwiched between an n+ layer and p+ layer of respective preselected thicknesses and joining the PIN detector to the mirrored surface using a conductive adhesive layer, selectively boring channels into the modulator portion to preselected depth into the PIN detector to form an array of a plurality of pixels on the modulator portion, filling the channels with light blocking material, and applying electrodes to the PIN detector and modulator portion.

摘要翻译： 描述了一种用于制造混合MQW空间光调制器的方法，其包括以下步骤：依次在衬底上沉积第一层至n +（或p +）半导体材料的预选厚度，第二层至本征半导体材料的预选厚度，以及第三层 层以预定的p +（或n +）半导体材料的厚度以形成调制器部分，将限定反射表面的金属层施加到调制器部分的第三层，提供预制硅PIN检测器，其具有分层结构，其包括本征层 预选厚度夹在相应预选厚度的n +层和p +层之间，并使用导电粘合剂层将PIN检测器连接到镜像表面，将通道选择性地钻入调制器部分中，以预选深度进入PIN检测器，以形成多个阵列 的调制器部分上的像素，用光块填充通道 并将PIN施加到PIN检测器和调制器部分。

公开(公告)号：US08593037B1

公开(公告)日：2013-11-26

申请号：US13434144

申请日：2012-03-29

申请人： Randall L. Kubena ,  Tsung-Yuan Hsu

发明人： Randall L. Kubena ,  Tsung-Yuan Hsu

IPC分类号： H01L41/053 ,  H01L41/047 ,  H01L41/107 ,  H01L41/113 ,  G01P3/26 ,  G01L7/00

CPC分类号： H04R17/00 ,  Y10T29/42 ,  Y10T29/49165 ,  Y10T29/49401

摘要： A quartz resonator flow cell has a piezoelectric quartz wafer with an electrode, pads, and interconnects disposed on a first side thereof. The piezoelectric quartz wafer has a second electrode disposed on a second side thereof, the second electrode opposing the first electrode. A substrate is provided having fluid ports therein and the piezoelectric quartz wafer is mounted to the substrate such that the second side thereof faces the substrate with a cavity being formed between the substrate and the wafer. The fluid ports in the substrate are aligned with the electrode on the second side of the piezoelectric quartz wafer which is in contact with the cavity.

摘要翻译： 石英谐振器流通池具有压电石英晶片，其具有设置在其第一侧上的电极，焊盘和互连。 压电石英晶片具有设置在其第二侧上的第二电极，第二电极与第一电极相对。 提供了一种衬底，其中具有流体端口，并且将压电石英晶片安装到衬底上，使得其第二面面对衬底，在衬底和晶片之间形成空腔。 衬底中的流体端口与压电石英晶片的与空腔接触的第二侧上的电极对齐。

公开(公告)号：US07956818B1

公开(公告)日：2011-06-07

申请号：US12211983

申请日：2008-09-17

申请人： Tsung-Yuan Hsu ,  James H Schaffner

发明人： Tsung-Yuan Hsu ,  James H Schaffner

IPC分类号： H01Q1/36

CPC分类号： H01Q13/203

摘要： An leaky coaxial cable antenna with high radiation efficiency and low insertion loss is described. The outer shield of the coaxial cable is constructed to facilitate energy transfer between the bifilar mode and the monofilar mode by constructing the outer conductor of a first conductive strip wrapped in a spiral about the dielectric and a plurality of second conductive strips wrapped in a counter spiral about the first but spaced serially along the length of the coaxial cable such that portions of the cable are wrapped by a single spiral and the other portions are wrapped by two spirals.

摘要翻译： 描述了具有高辐射效率和低插入损耗的泄漏同轴电缆天线。 同轴电缆的外屏蔽构造为通过构造围绕电介质缠绕成螺旋状的第一导电带的外导体和缠绕在反螺旋状的多个第二导电带来促进双相模式和单丝模式之间的能量传递 围绕第一但沿着同轴电缆的长度间隔开，使得电缆的一部分被单个螺旋缠绕，而另一部分被两个螺旋缠绕。

公开(公告)号：US07405641B1

公开(公告)日：2008-07-29

申请号：US11112925

申请日：2005-04-21

申请人： Tsung-Yuan Hsu ,  Adele Schmitz ,  David Chang ,  Robert Loo

发明人： Tsung-Yuan Hsu ,  Adele Schmitz ,  David Chang ,  Robert Loo

IPC分类号： H01H51/22

CPC分类号： H01H59/0009

摘要： A micro-electro-mechanical switch is described. The switch comprises a substrate, with a signal transmission portion and an activation portion attached with the substrate. The activation portion includes an armature activation electrode positioned above a substrate activation electrode. The signal transmission portion includes a metal contact extending from a conducting transmission line and through a bottom insulating layer of the signal transmission portion, thereby being exposed for electrical contact. A mechanical linkage connects the activation portion with the signal transmission portion so that the activation portion and the signal transmission portion move in concert. When an activation signal is applied along the activation portion, both the activation portion and the signal transmission portion are drawn toward the substrate to a substantially closed position, where the metal contact of the signal transmission portion electrically contacts a signal transmission electrode.

摘要翻译： 描述了微机电开关。 开关包括具有信号传输部分和与基板连接的激活部分的基板。 激活部分包括位于基板激活电极上方的电枢激活电极。 信号传输部分包括从导电传输线延伸并通过信号传输部分的底部绝缘层的金属接触，从而暴露于电接触。 机械连杆将激活部分与信号传输部分相连接，使得激活部分和信号传输部分一起移动。 当沿着激活部分施加激活信号时，激活部分和信号传输部分都朝向基板被拉到基本关闭的位置，其中信号传输部分的金属接点与信号传输电极电接触。

公开(公告)号：US20050173619A1

公开(公告)日：2005-08-11

申请号：US11028495

申请日：2004-12-30

申请人： Richard Berg ,  Tsung-Yuan Hsu

发明人： Richard Berg ,  Tsung-Yuan Hsu

IPC分类号： H01H1/00 ,  H01H47/24 ,  H01H59/00 ,  H01H67/22 ,  H01L31/00

CPC分类号： H01H1/0036 ,  H01H47/24 ,  H01H59/0009 ,  H01H67/22

摘要： An optically controlled mechanical device actuated by electrostatic forces. The device includes electrostatic plates disposed on opposing portions of the device to accumulate charge; conductors to conduct charge to the electrostatic plates from a bias supply; and a photoelectric element having a photoresistive element arranged to affect a quantity of charge reaching the electrostatic plates from the bias supply. The device is caused to actuate to one position when the photoresistive element is exposed to a first level of illumination, and to a another position when the photoresistive element is exposed to a different second level of illumination

摘要翻译： 由静电力驱动的光学控制的机械装置。 该装置包括设置在装置的相对部分上的静电板以积累电荷; 导体从偏压电源向静电板充电; 以及光电元件，其具有设置成影响从偏置电源到达静电板的电荷量的光致抗蚀剂元件。 当光致抗蚀剂元件暴露于第一级照明时，使该装置致动到一个位置，并且当光致抗蚀剂元件暴露于不同的第二级照度

公开(公告)号：US06847277B2

公开(公告)日：2005-01-25

申请号：US10844271

申请日：2004-05-11

申请人： Tsung-Yuan Hsu ,  Robert Loo ,  Adele Schmitz

发明人： Tsung-Yuan Hsu ,  Robert Loo ,  Adele Schmitz

IPC分类号： H01H1/06 ,  H01H1/20 ,  H01H59/00 ,  H01P1/12 ,  H04L12/56 ,  H01H51/22

CPC分类号： H01H59/0009 ,  H01G5/18 ,  H01G5/40 ,  H01H1/06 ,  H01H1/20 ,  H01P1/127

摘要： A torsion spring for an electro-mechanical switch is presented. The torsion spring comprises a set of tines including at least one tine extending from the free end of the armature of a switch. A terminus portion is rotatably suspended between the tines, and includes a conducting transmission line, at least a portion of which is exposed for electrical contact. The conducting transmission line has a length selected such that the exposed portion of the transmission line forms a circuit between the input and output of the micro-electro-mechanical switch when the micro-electro-mechanical switch is urged into a closed position, with the terminus portion rotating via the tines to form a conformal connection between the exposed portion of the conducting transmission line and the input and output of the switch, thus optimizing the electrical flow therebetween. The switch is also applied to MEMS devices.

摘要翻译： 提出了一种用于机电开关的扭簧。 扭转弹簧包括一组尖齿，其包括从开关的电枢的自由端延伸的至少一个齿。 末端部分可旋转地悬挂在尖齿之间，并且包括导电传输线，其至少一部分暴露以进行电接触。 导电传输线具有选定的长度，使得当微机电开关被迫进入关闭位置时，传输线的暴露部分形成微机电开关的输入和输出之间的电路， 通过齿旋转，以在导电传输线的暴露部分与开关的输入和输出之间形成共形连接，从而优化其间的电流。 该开关也适用于MEMS器件。

公开(公告)号：US06803559B2

公开(公告)日：2004-10-12

申请号：US10439624

申请日：2003-05-15

申请人： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Greg Tangonan ,  Juan F. Lam

发明人： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Greg Tangonan ,  Juan F. Lam

IPC分类号： G01J136

CPC分类号： H01H59/0009 ,  H01H1/0036 ,  H01H47/24 ,  H01H67/22

摘要： An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

摘要翻译： 描述了一种光学控制的微机电（MEM）开关，其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中，通过照亮开关的光电部分来改变为开关的启动提供的偏置电压，以使开关失效。 在替代实施例中，光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后，仅需要施加到开关的电压的适度变化，以使开关在光学控制下急剧地打开或闭合。

公开(公告)号：US06667245B2

公开(公告)日：2003-12-23

申请号：US10016894

申请日：2001-12-13

申请人： Lap-Wai Chow ,  Tsung-Yuan Hsu ,  Daniel J. Hyman ,  Robert Y. Loo ,  Paul Ouyang ,  James H. Schaffner ,  Adele Schmitz ,  Robert N. Schwartz

发明人： Lap-Wai Chow ,  Tsung-Yuan Hsu ,  Daniel J. Hyman ,  Robert Y. Loo ,  Paul Ouyang ,  James H. Schaffner ,  Adele Schmitz ,  Robert N. Schwartz

IPC分类号： H01L2100

CPC分类号： B81C1/00246 ,  B81B2201/014 ,  B81C2201/014 ,  B81C2203/0714 ,  B81C2203/0735 ,  H01H1/58 ,  H01H59/0009 ,  H01H2001/0057

摘要： A microelectromechanical (MEM) switch is fabricated inexpensively by using processing steps which are standard for fabricating multiple metal layer integrated circuits, such as CMOS. The exact steps may be adjusted to be compatible with the process of a particular foundry, resulting in a device which is both low cost and readily integrable with other circuits. The processing steps include making contacts for the MEM switch from metal plugs which are ordinarily used as vias to connect metal layers which are separated by a dielectric layer. Such contact vias are formed on either side of a sacrificial metallization area, and then the interconnect metallization is removed from between the contact vias, leaving them separated. Dielectric surrounding the contacts is etched back so that they protrude toward each other. Thus, when the contacts are moved toward each other by actuating the MEM switch, they connect firmly without obstruction. Tungsten is typically used to form vias in CMOS processes, and it makes an excellent contact material, but other via metals may also be employed as contacts. Interconnect metallization may be employed for other structural and interconnect needs of the MEM switch, and is preferably standard for the foundry and process used. Various metals and dielectric materials may be used to create the switches, but in a preferred embodiment the interconnect metal layers are aluminum and the dielectric material is SiO2, materials which are fully compatible with standard four-layer CMOS fabrication processes.

公开(公告)号：US06604425B1

公开(公告)日：2003-08-12

申请号：US09591113

申请日：2000-06-09

申请人： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Juan F. Lam

发明人： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Juan F. Lam

IPC分类号： G01L912

CPC分类号： G01L1/148 ,  G01L1/086

摘要： A method and apparatus for comparing a force to a signal, or comparing two signals, through mechanical movement of capacitive plates in a transducer. The transducer plates are separated by d, which in one embodiment is preferably a linear function of a pressure or force F. In that embodiment, application of a signal i(t+&tgr;) to the plates will cause a voltage representing a correlation between F and i to appear between the plates. In another embodiment, instead of an external mechanical force or pressure, an electrical signal V related to a signal S may drive the transducer plates to achieve a voltage indicating a correlation between S and the signal input i(t+&tgr;). Transducers to practice the invention may be microelectromechanical devices fabricated using integrated circuit techniques to permit small size and low cost.

摘要翻译： 一种用于通过传感器中的电容板的机械移动来比较力与信号或比较两个信号的方法和装置。 传感器板被d分开，在一个实施例中，传感器板优选地是压力或力F的线性函数。在该实施例中，将信号i（t +τ）施加到板将导致表示F 我出现在盘子之间。 在另一个实施例中，代替外部机械力或压力，与信号S相关的电信号V可以驱动换能器板以实现指示S与信号输入i（t +τ）之间的相关性的电压。 用于实践本发明的传感器可以是使用集成电路技术制造的微机电装置，以允许小尺寸和低成本。

公开(公告)号：US06310339B1

公开(公告)日：2001-10-30

申请号：US09429234

申请日：1999-10-28

申请人： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Greg Tangonan ,  Juan F. Lam

发明人： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Greg Tangonan ,  Juan F. Lam

IPC分类号： H01L3100

CPC分类号： H01H59/0009 ,  H01H1/0036 ,  H01H47/24 ,  H01H67/22

摘要： An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

摘要翻译： 描述了一种光学控制的微机电（MEM）开关，其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中，通过照亮开关的光电部分来改变为开关的启动提供的偏置电压，以使开关失效。 在替代实施例中，光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后，仅需要对开关施加的适当的电压变化使得开关在光学控制下急剧地打开或闭合。