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41.发明授权
公开(公告)号：US5228666A
公开(公告)日：1993-07-20
申请号：US797626
申请日：1991-11-25
申请人： Donald J. Drake , Almon P. Fisher
发明人： Donald J. Drake , Almon P. Fisher
IPC分类号： H04N1/028 , B41J25/304 , H01L25/04 , H01L25/075 , H04N1/03 , H04N1/19
CPC分类号： H04N1/03 , B41J25/304 , H01L25/042 , H01L25/0753 , H01L2924/0002 , H04N2201/0241 , H04N2201/02495
摘要： A fixture for fabricating a full width scanning or imaging array from a plurality of relatively short subunits which provides immunity from vertical misalignment of the subunits caused by particle contamination. This is accomplished by providing a clearance slot in the fixture horizontal reference edge to minimize the reference edge and subunit contact area and to provide a space for the contaminating particles to accumulate so that they will not interfere with the precision placement and vertical alignment of the subunits on the fixture.
摘要翻译： 一种用于从多个相对较短的亚基制造全幅扫描或成像阵列的固定装置，其提供了由颗粒污染引起的对亚基的垂直未对准的免疫力。 这通过在夹具水平参考边缘中设置间隙槽来实现，以使参考边缘和亚单位接触面积最小化，并为污染颗粒积聚提供一个空间，以使其不会干扰子单元的精确放置和垂直对准 在夹具上。
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42.发明授权
公开(公告)号：US4985710A
公开(公告)日：1991-01-15
申请号：US442641
申请日：1989-11-29
CPC分类号： B41J2/1623 , B41J2/155 , B41J2/1603 , B41J2/1626 , B41J2/1632 , Y10T156/1052
摘要： A "roofshooter" pagewidth printhead for use in a thermal ink jet printing device is fabricated by forming a plurality of subunits, each being produced by bonding a heater substrate having an architecture including an array of heater elements and an etched ink feed slot to a secondary substrate having a series of spaced feed hole openings to form a combined substrate in which said series of spaced feed hole openings communicates with said ink feed slot, and dicing said combined substrates through said ink feed slot to form a subunit. An array of butted subunits having a length equal to one pagewidth is formed by butting one of said subunits against an adjacent subunit. The array of butted subunits is bonded to a pagewidth support substrate. The secondary substrate provides an integral support structure for maintaining the alignment of the heater plate which, if diced through the feed hole without the secondary substrate, would separate into individual pieces, thereby complicating the alignment and assembly process.
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公开(公告)号：US4975143A
公开(公告)日：1990-12-04
申请号：US440211
申请日：1989-11-22
CPC分类号： H01L21/68 , H01L2224/16 , H01L2924/01014 , H01L2924/10253 , Y10T156/1092 , Y10T156/1744
摘要： The vacuum hold down alignment substrate is formed as an array of precisely aligned alignment substrate subunits. Each subunit is formed with an alignment pattern formed in a photo-patternable or electroformable material. When the plurality of alignment substrate subunits are formed into an array to produce the alignment substrate, the alignment patterns are aligned to receive corresponding patterns in discrete subunit devices which are aligned into an array on the alignment substrate.
摘要翻译： 真空压紧对准基板形成为精确对准的对准衬底子单元的阵列。 每个子单元形成有形成在可光图案化或可电铸材料中的对准图案。 当多个对准衬底子单元形成为阵列以产生对准衬底时，对准图案对齐以在离散子单元器件中接收对准到对准衬底上的阵列中的对应图案。
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公开(公告)号：US4899181A
公开(公告)日：1990-02-06
申请号：US303620
申请日：1989-01-30
CPC分类号： B41J2/1642 , B41J2/1604 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635
摘要： An improved thermal ink jet printhead and method of fabrication thereof is disclosed of the type formed by the mating and bonding of first and second substrates. The first substrate is silicon with {100} crystal plane surfaces and has anisotropically etched in one surface thereof a linear series of separate through recesses and a plurality of parallel, elongated ink channels grooves. The second substrate has a plurality of heating elements and addressing electrodes patterned on one surface thereof. The through recesses serve as a segmented ink reservoir with each segment having an ink inlet, and the elongated ink channel grooves having one end adjacent the segmented reservoir and the opposite end open to serve as ink droplet emitting nozzles. Each segment of the segmented reservoir is isolated from each other by dividing walls. The dividing walls strengthen the printhead, and the separate through recesses reduce the effects of angular misalignment between mask and first substrate crystal planes. In the preferred embodiment, a thick film insulative layer is sandwiched between the first and second substrates and patterned to form recesses therein to provide the means for placing the segmented reservoir into communication with the ink channel grooves. To produce a multicolor printing printhead, the thick film layer is patterned to form a linear series of recesses, each substantially equal in length to an associated one of the reservoir segments, so that each reservoir segment may have a different colored ink supplied thereto that cannot mix with the ink of the other reservoir segments.
摘要翻译： 公开了一种改进的热喷墨打印头及其制造方法，其通过第一和第二基板的配合和结合而形成。 第一衬底是具有{100}晶面表面的硅，并且在其一个表面中具有各向异性蚀刻线性系列的分离的通孔和多个平行的细长的墨水槽。 第二基板具有在其一个表面上图案化的多个加热元件和寻址电极。 贯通凹部用作分段墨水储存器，每个分段具有墨水入口，并且细长的墨水通道凹槽具有与分段的储存器相邻的一端，并且相对的端部打开以用作墨滴喷射。 分段储存器的每个段通过分隔壁彼此隔离。 分隔壁加强了打印头，并且单独的通孔减少了掩模和第一基板晶体平面之间的角度偏移的影响。 在优选实施例中，厚膜绝缘层被夹在第一和第二基板之间并被图案化以在其中形成凹槽，以提供用于将分段的储存器放置成与墨水通道槽连通的装置。 为了生产多色打印打印头，将厚膜层图案化以形成线性系列的凹槽，每个凹槽的长度与相关联的储存器段之间的长度基本上相等，使得每个储存器段可以具有供给其的不同颜色的墨水，不能 与其他水库段的油墨混合。
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公开(公告)号：US4864329A
公开(公告)日：1989-09-05
申请号：US247819
申请日：1988-09-22
CPC分类号： B41J2/1629 , B41J2/1601 , B41J2/1623 , B41J2/1625 , B41J2/1628 , B41J2/1631 , B41J2/1637 , B41J2/17563 , B41J2002/14403
摘要： Relatively small fluid handling devices having a filter bonded on the surface containing the fluid inlets. An example of such a device is a thermal ink jet printhead. A substantially flat filter is placed at the ink inlet to the printhead by a fabrication process which laminates a wafer sized filter to the aligned and bonded wafers containing a plurality of printheads. The individual printheads are obtained by a sectioning operation, which cuts through the two or more bonded wafers and the filter. The filter may be a woven mesh screen or, preferably, an electroformed screen with a predetermined pore size. Since the filter covers one entire side of the printhead, the relatively large contact area prevents delamination and enables convenient leak-free sealing. The filter prevents the entrance of contaminants into the relatively large inlets of the printhead at an early stage of assembly and packaging.
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公开(公告)号：US4822755A
公开(公告)日：1989-04-18
申请号：US185600
申请日：1988-04-25
IPC分类号： H01L21/302 , B41J2/16 , H01L21/301 , H01L21/306 , H01L29/06 , H01L21/00 , H01L21/02 , H01L21/72 , H01L21/98
CPC分类号： B41J2/1628 , B41J2/1601 , B41J2/1623 , B41J2/1629 , B41J2/1642 , H01L21/30604 , B41J2202/13 , H01L29/0657 , Y10S438/928
摘要： A method for separating chips formed on a silicon substrate is provided which uses a combination of reactive ion etching techniques combined with orientation etching to yield integrated chips having edges which can be more precisely butted together to form large area arrays.
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公开(公告)号：USRE32572E
公开(公告)日：1988-01-05
申请号：US947020
申请日：1986-12-29
IPC分类号： B41J2/16
CPC分类号： B41J2/1623 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1635 , B41J2/1642
摘要： Several fabricating processes for ink jet printheads are disclosed, each printhead being composed of two parts aligned and bonded together. One part is a substantially flat substrate which contains on the surface thereof a lineal array of heating elements and addressing electrodes, and the second part is a substrate having at least one recess anisotropically etched therein to serve as an ink supply manifold when the two parts are bonded together. A lineal array of parallel grooves are formed in the second part, so that one end of the grooves communicate with the manifold recess an the other ends are open for use as an ink droplet expelling nozzles. Many printheads can be made simultaneously by producing a plurality of sets of heating elements array with their addressing electrodes on a silicon wafer and by placing alignment marks thereon at predetermined locations. A corresponding plurality of sets of channels and associated manifolds are produced in a second silicon wafer and, in one embodiment, alignment openings are etched thereon at predetermined locations. The two wafers are aligned via the alignment openings and alignment marks, then bonded together and diced into many separate printheads. A number of printheads can be fixedly mounted in a pagewidth configuration which confronts a moving recording medium for pagewidth printing or individual printheads may be adapted for carriage type ink jet printing.
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公开(公告)号：US08567911B2
公开(公告)日：2013-10-29
申请号：US12763423
申请日：2010-04-20
申请人： Peter J. Nystrom , Donald J. Drake
发明人： Peter J. Nystrom , Donald J. Drake
CPC分类号： B41J2/14233 , B41J2/155 , B41J2202/19 , B41J2202/20
摘要： A print module and a method of forming the same, the print module including a substrate, an ink jet die, and an interposer between the substrate and the ink jet die. The substrate includes an ink channel and an air vent, and the die includes a plurality of ink apertures. The interposer includes etched openings therein of a truncated pyramid shape; the openings of the interposer reconfiguring the ink channel and air vent passages between the substrate and die to allow for greater tolerance in alignment and manufacture of the print head module.
摘要翻译： 打印模块及其形成方法，所述打印模块包括基板，喷墨模头和所述基板与所述喷墨模具之间的插入件。 基板包括油墨通道和通气口，并且模具包括多个油墨孔。 插入器包括其中具有截头棱锥形状的蚀刻开口; 插入器的开口重新配置墨水通道和在基板和模具之间的排气通道，以允许在打印头模块的对准和制造中具有更大的公差。
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49.发明授权公开(公告)号：US07980671B2
公开(公告)日：2011-07-19
申请号：US11447275
申请日：2006-06-06
申请人： Peter J. Nystrom , Donald J. Drake , Peter M. Gulvin , Joseph A. DeGroot , Jun Ma , Nancy Y. Jia , Andrew W. Hays
发明人： Peter J. Nystrom , Donald J. Drake , Peter M. Gulvin , Joseph A. DeGroot , Jun Ma , Nancy Y. Jia , Andrew W. Hays
IPC分类号： B41J2/06
CPC分类号： B41J2/16 , B41J2/14 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2002/043 , B81B3/001 , B81B2201/052 , B81B2203/053 , H02N1/006
摘要： The present application is directed to electrostatic actuators, and methods of making electrostatic actuators. In one embodiment, an electrostatic actuator of the present application comprises a first electrode and a second electrode. The second electrode is positioned in proximity to the first electrode so as to provide a gap between the first electrode and the second electrode. The first electrode is capable of being deflected toward the second electrode. A dielectric structure comprising a dielectric landing post is positioned in the gap between the first electrode and the second electrode, the dielectric structure extending over a greater surface of the gap than the landing post. The landing post protrudes out into the gap so as to limit the minimum contact spacing between the first electrode and the second electrode.
摘要翻译： 本申请涉及静电致动器以及制造静电致动器的方法。 在一个实施例中，本申请的静电致动器包括第一电极和第二电极。 第二电极位于第一电极附近，以便在第一电极和第二电极之间提供间隙。 第一电极能够朝向第二电极偏转。 包括电介质着陆柱的电介质结构位于第一电极和第二电极之间的间隙中，电介质结构在间隙的更大表面上延伸超过着陆柱。 着陆柱突出到间隙中，以限制第一电极和第二电极之间的最小接触间距。
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50.发明申请公开(公告)号：US20070279457A1
公开(公告)日：2007-12-06
申请号：US11447275
申请日：2006-06-06
申请人： Peter J. Nystrom , Donald J. Drake , Peter M. Gulvin , Joseph A. DeGroot , Jun Ma , Nancy Y. Jia , Andrew W. Hays
发明人： Peter J. Nystrom , Donald J. Drake , Peter M. Gulvin , Joseph A. DeGroot , Jun Ma , Nancy Y. Jia , Andrew W. Hays
IPC分类号： B41J2/06
CPC分类号： B41J2/16 , B41J2/14 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2002/043 , B81B3/001 , B81B2201/052 , B81B2203/053 , H02N1/006
摘要： The present application is directed to electrostatic actuators, and methods of making electrostatic actuators. In one embodiment, an electrostatic actuator of the present application comprises a first electrode and a second electrode. The second electrode is positioned in proximity to the first electrode so as to provide a gap between the first electrode and the second electrode. The first electrode is capable of being deflected toward the second electrode. A dielectric structure comprising a dielectric landing post is positioned in the gap between the first electrode and the second electrode, the dielectric structure extending over a greater surface of the gap than the landing post. The landing post protrudes out into the gap so as to limit the minimum contact spacing between the first electrode and the second electrode.
摘要翻译： 本申请涉及静电致动器以及制造静电致动器的方法。 在一个实施例中，本申请的静电致动器包括第一电极和第二电极。 第二电极位于第一电极附近，以便在第一电极和第二电极之间提供间隙。 第一电极能够朝向第二电极偏转。 包括电介质着陆柱的电介质结构位于第一电极和第二电极之间的间隙中，电介质结构在间隙的更大表面上延伸超过着陆柱。 着陆柱突出到间隙中，以限制第一电极和第二电极之间的最小接触间距。
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