公开(公告)号：US4530030A

公开(公告)日：1985-07-16

申请号：US564212

申请日：1983-12-22

申请人： Wolfgang Woest ,  Rainer Silbermann ,  Frank Hegner

发明人： Wolfgang Woest ,  Rainer Silbermann ,  Frank Hegner

IPC分类号： G01N25/64 ,  G01N27/22 ,  H01G5/20

CPC分类号： G01N27/225 ,  Y10T29/435 ,  Y10T29/49169

摘要： A thin-film humidity sensor for measuring the absolute humidity having a base electrode, a moisture-sensitive dielectric layer and a top electrode is formed at the end face of an electrically insulating bushing body by the thin-film technique. The connecting conductors are led through the bushing body and terminate in contact areas which are ground plane and polished together with the end face of the bushing body. The metal layers forming the electrodes are so shaped on application, preferably by means of perforated masks, that they each cover the contact area of the associated connecting conductor and are electrically connected thereto. The bushing body is inserted into a sleeve of a highly alloyed nickel-molybdenum compound and connected thereto in pressure-resistant manner.

摘要翻译： 通过薄膜技术在电绝缘衬套主体的端面处形成用于测量具有基极，湿敏介电层和顶电极的绝对湿度的薄膜湿度传感器。 连接导体被引导穿过衬套主体并且终止于接地面并且与衬套主体的端面一起抛光的接触区域中。 形成电极的金属层在施加时是优选的，通过多孔掩模来形成，它们各自覆盖相关联的连接导体的接触区域并与之电连接。 衬套主体被插入到高度合金化的镍 - 钼化合物的套筒中并且以耐压的方式与其连接。

公开(公告)号：US07360428B2

公开(公告)日：2008-04-22

申请号：US10399398

申请日：2001-09-15

申请人： Karl-Heinz Banholzer ,  Karl Flögel ,  Frank Hegner ,  Bernd Rosskopf

发明人： Karl-Heinz Banholzer ,  Karl Flögel ,  Frank Hegner ,  Bernd Rosskopf

IPC分类号： G01L7/08

CPC分类号： G01L9/0075

摘要： The invention relates to a pressure measuring cell comprising a base body, a membrane that is connected to the base body, thus forming a measuring chamber. During operation, the membrane is subjected to a deflection which is dependent on a pressure that is to be measured. The cell also comprises a membrane bed, formed by a surface of the base body that faces the membrane, at least one electrode being mounted on said bed. Said electrode, together with a counter-electrode that is mounted on the membrane, forms a capacitor, whose capacitance represents a measurement for the deflection of the membrane. The measuring cell is characterized in that the electrode is electrically connected through the base body and that the measuring chamber has a smooth surface in the contact zone, said surface having a contact pin that is guided in a bore through the base body. The electrode is electrically connected by means of said pin for measuring the capacitance and the pin is soldered into the bore on the membrane side, using a solder. The contact pin, the solder and the membrane bed form a smooth surface.

摘要翻译： 本发明涉及一种压力测量单元，包括基体，与基体连接的膜，从而形成测量室。 在操作期间，膜受到取决于要测量的压力的偏转。 电池还包括由基体的面向膜的表面形成的膜床，至少一个电极安装在所述床上。 所述电极与安装在膜上的对电极一起形成电容器，其电容表示膜偏转的测量值。 测量单元的特征在于，电极通过基体电连接，并且测量室在接触区域中具有光滑的表面，所述表面具有在孔中通过基体引导的接触销。 电极通过所述引脚电连接以测量电容，并且使用焊料将引脚焊接到膜侧的孔中。 接触针，焊料和膜床形成光滑的表面。

公开(公告)号：US06770377B2

公开(公告)日：2004-08-03

申请号：US10170852

申请日：2002-06-12

申请人： Frank Hegner ,  Elke Maria Schmidt ,  Volker Güther ,  Anobecs Allo ,  Jürgen Breme ,  Heinz Müller ,  Jürgen Peter Turnsek

发明人： Frank Hegner ,  Elke Maria Schmidt ,  Volker Güther ,  Anobecs Allo ,  Jürgen Breme ,  Heinz Müller ,  Jürgen Peter Turnsek

IPC分类号： C22C1600

CPC分类号： B23K35/32 ,  B22F9/023 ,  C04B37/006 ,  C04B2237/122 ,  C04B2237/127 ,  C04B2237/343

摘要： The active brazing solder for brazing ceramic parts of alumina, particularly of high-purity alumina, contains a maximum of 12 wt. % Ti, a maximum of 8 wt. % Be, and less than 16.5 wt. % Fe, the remainder being Zr and any impurities that may be present. The active brazing solder has the following behaviour/features: Brazing temperature: lower than 1,000° C.; the brazed joint is high-vacuum-tight over a long period of time; the coefficient of thermal expansion of the active brazing alloy is substantially identical to that of the alumina ceramic in the entire temperature range covered during the brazing process; the strength of the brazed joint between the two ceramic parts is so high that under tensile loading, fracture will result not at the joint, but in the adjacent ceramic; the pressure resistance of the active brazing solder is greater than 2 GPa; the active brazing solder is very good processable into powders having particle sizes on the order of 10 &mgr;m.

摘要翻译： 用于钎焊氧化铝陶瓷部件，特别是高纯度氧化铝的活性钎焊焊料最多含有12wt。 ％Ti，最多8wt。 ％Be，小于16.5wt。 ％Fe，其余为Zr和可能存在的任何杂质。 活性钎焊焊料具有以下特点：钎焊温度低于1000℃。 钎焊接头长时间高真空密封; 活性钎焊合金的热膨胀系数在钎焊过程中覆盖的整个温度范围内基本上与氧化铝陶瓷的热膨胀系数相同; 两个陶瓷部件之间的钎焊接头的强度如此之高，以至于在拉伸载荷下，不会在接头处产生断裂，而是在相邻的陶瓷中产生断裂; 活性钎焊焊料的耐压大于2 GPa; 活性钎焊焊料可以非常好地加工成具有10um数量级的粒度的粉末。

公开(公告)号：US06578427B1

公开(公告)日：2003-06-17

申请号：US09592127

申请日：2000-06-12

申请人： Frank Hegner

发明人： Frank Hegner

IPC分类号： G01L912

CPC分类号： G01L19/0654 ,  G01L9/0075

摘要： This relative-pressure sensors has virtually no zero offset at relative humidities up to near the saturation limit. The sensor has a diaphragm (11) having a surface on which a electrode (13) is deposited and a substrate (12) having a bore (23) for guiding reference air from af first surface to an opposite surface. The first surface is polished and provided with at least an addional electrode (15). The substrate and the diaphragm are soldered or brazed together along the periphery by means of a spacer (20) to form a chamber which is covered from inside with a thin layer (24) of hydrophobic material that is introduced through the bore after the soldering or brazing.

摘要翻译： 该相对压力传感器在相对湿度达到饱和极限附近几乎没有零点偏移。 传感器具有隔膜（11），其上沉积有电极（13）的表面和具有用于将参考空气从第一表面引导到相反表面的孔（23）的基底（12）。 第一表面被抛光并且设置有至少一个附加电极（15）。 衬底和隔膜通过间隔件（20）沿着周边焊接或钎焊在一起，以形成从内部被覆有疏水材料的薄层（24）的室，其在焊接之后通过孔被引入， 钎焊

公开(公告)号：US06516670B2

公开(公告)日：2003-02-11

申请号：US09928506

申请日：2001-08-14

申请人： Frank Hegner ,  Karl Flögel ,  Karlheinz Banholzer ,  Bernd Rosskopf

发明人： Frank Hegner ,  Karl Flögel ,  Karlheinz Banholzer ,  Bernd Rosskopf

IPC分类号： G01L708

CPC分类号： G01L9/0075 ,  G01L19/0046

摘要： A pressure sensor is provided having a housing, a process connection which is connected to the housing and serves to feed a medium whose pressure (p) is to be measured to a membrane which his arranged in the housing, said membrane, in operation, undergoing a deflection which depends on the pressure (p) which is to be measured, which pressure sensor can have a seal made of a chemically highly resistant material and in which the membrane can consist either of ceramic or metal, which pressure sensor has a seal which seals a gap found between the housing and the process connection and/or the membrane, bears directly against the gap and covers the gap, and which is clamped between the housing and the membrane, and which pressure sensor has a spring which is two-legged in cross section, whose first and second legs enclose an acute angle, whose first leg has a leg surface which faces away from the second leg, rests on a supporting surface and is connected fixedly to the latter, and whose second leg has a leg surface which faces away from the first leg, bears in a planar manner against the seal and exerts a spring force on the seal, which spring force acts in the direction of the gap.

摘要翻译： 一种压力传感器，其具有一个外壳，一个连接到外壳上的过程连接件，用于将要测量的压力（p）的介质供给一个隔膜，该隔膜在壳体内运行， 取决于要测量的压力（p）的偏转，该压力传感器可以具有由耐化学性高的材料制成的密封件，并且其中膜可以由陶瓷或金属组成，该压力传感器具有密封件 密封在壳体和过程连接和/或膜之间发现的间隙，直接抵靠间隙并覆盖间隙，并且夹在壳体和膜之间，并且哪个压力传感器具有两腿的弹簧 在其横截面中，其第一和第二腿包围锐角，其第一腿具有面向远离第二腿的腿表面，搁置在支撑表面上并且固定地连接到支撑表面，并且其末端 腿部具有面向第一腿部的腿部表面，以平面方式抵靠密封件并且在密封件上施加弹簧力，弹簧力沿间隙的方向作用。

公开(公告)号：US06039918A

公开(公告)日：2000-03-21

申请号：US896481

申请日：1997-07-18

申请人： Frank Hegner ,  Elke Maria Schmidt ,  Volker Guther ,  Andreas Otto ,  Jurgen Breme ,  Heinz Muller ,  Jurgen Peter Turnsek

发明人： Frank Hegner ,  Elke Maria Schmidt ,  Volker Guther ,  Andreas Otto ,  Jurgen Breme ,  Heinz Muller ,  Jurgen Peter Turnsek

IPC分类号： B22F9/02 ,  B23K35/32 ,  C04B37/00 ,  C22C16/00

CPC分类号： B23K35/32 ,  B22F9/023 ,  C04B37/006 ,  C04B2237/122 ,  C04B2237/127 ,  C04B2237/343

摘要： The active brazing solder for brazing ceramic parts of alumina, particularly of high-purity alumina, contains a maximum of 12 wt. % Ti, a maximum of 8 wt. % Be, and less than 16.5 wt. % Fe, the remainder being Zr and any impurities that may be present. The active brazing solder has the following behaviour/features: Brazing temperature: lower than 1,000.degree. C.; the brazed joint is high-vacuum-tight over a long period of time; the coefficient of thermal expansion of the active brazing alloy is substantially identical to that of the alumina ceramic in the entire temperature range covered during the brazing process; the strength of the brazed joint between the two ceramic parts is so high that under tensile loading, fracture will result not at the joint, but in the adjacent ceramic; the pressure resistance of the active brazing solder is greater than 2 GPa; the active brazing solder is very good processable into powders having particle sizes on the order of 10 .mu.m.

摘要翻译： 用于钎焊氧化铝陶瓷部件，特别是高纯度氧化铝的活性钎焊焊料最多含有12wt。 ％Ti，最多8wt。 ％Be，小于16.5wt。 ％Fe，其余为Zr和可能存在的任何杂质。 活性钎焊焊料具有以下特点：钎焊温度低于1000℃。 钎焊接头长时间高真空密封; 活性钎焊合金的热膨胀系数在钎焊过程中覆盖的整个温度范围内基本上与氧化铝陶瓷的热膨胀系数相同; 两个陶瓷部件之间的钎焊接头的强度如此之高，以至于在拉伸载荷下，不会在接头处产生断裂，而是在相邻的陶瓷中产生断裂; 活性钎焊焊料的耐压大于2 GPa; 活性钎焊焊料对于粒径在10微米左右的粉末是非常好的可加工性的。

公开(公告)号：US5836063A

公开(公告)日：1998-11-17

申请号：US811708

申请日：1997-03-05

申请人： Frank Hegner ,  Lukas Klausmann

发明人： Frank Hegner ,  Lukas Klausmann

IPC分类号： G01L7/00 ,  G01L9/00 ,  G01L9/12 ,  G01L27/00 ,  H01G7/00

CPC分类号： G01L9/0075 ,  G01L27/005 ,  Y10T29/435

摘要： In this method for producing capacitive alumina-ceramic absolute pressure sensors sorted in high-precision zero-point long-term stability defect classes referred to a measured-value span c.sub.sp, the sensors are firstly produced conventionally: a substrate is provided with an annular first electrode and, at the center, a circular second electrode insulated from the first; a diaphragm is provided with a third electrode, and the substrate and diaphragm are joined tightly together in a vacuum by the mutually facing electrodes, at an outer edge through the interposition of an active brazing ring with the formation of a chamber, with the result that a pressure-dependent capacitance C.sub.p and a pressure-independent capacitance C.sub.r are produced. Then, using the equation c=(C.sub.p -C.sub.r)/C.sub.p =k.sub.1 (p-p.sub.0)+k.sub.0, at room temperature and under a vacuum (=p.fwdarw.0) a first zero value c.sub.n1 =-k.sub.1 p.sub.0 +k.sub.0 is determined by means of a capacitance zero-point measuring device having the zero-point measuring error F.sub.n. A second zero value c.sub.n2 =-k.sub.1 p.sub.0 '+k.sub.0 is determined for each sensor by means of the same measuring device after the sensors have been stored in a gas during a period t in such a way that the pressure and/or temperature of the gas was raised, or its molecular weight was lowered, with respect to normal atmospheric conditions. Then the difference .delta.c.sub.n between the first and second zero values .delta.c.sub.n =c.sub.n1 -c.sub.n2 =-k.sub.1 .delta.p.sub.0 is formed, and the value .delta.c.sub.n /c.sub.sp is compared with the value F.sub.n /c.sub.sp. It is also possible to make use analogously of the zero-point temperature coefficient.

摘要翻译： 在这种以高精度零点长期稳定性缺陷类别（称为测量值跨度csp）分类的电容式氧化铝 - 陶瓷绝对压力传感器的制造方法中，传感器首先按常规制造：基板设置有环状的第一 并且在中心处具有与第一电极绝缘的圆形第二电极; 隔膜设置有第三电极，并且基板和隔膜通过相互面对的电极在真空中紧密地连接在外边缘处，通过插入活性钎焊环形成室，结果是 产生压力依赖电容Cp和压力无关电容Cr。 然后，在室温和真空（= p-> 0）下使用等式c =（Cp-Cr）/ Cp = k1（p-p0）+ k0，确定第一零值cn1 = -k1p0 + k0 通过具有零点测量误差Fn的电容零点测量装置。 在传感器在时间t内以气体存储在气体中之后，通过相同的测量装置为每个传感器确定第二零值cn2 = -k1p0'+ k0，使得气体的压力和/或温度 相对于正常大气条件升高，或其分子量降低。 然后，形成第一和第二零值δcn = cn1-cn2 = -k1 delta p0之间的差值δn，并将值δcn / csp与值Fn / csp进行比较。 也可以类似于零点温度系数使用。

公开(公告)号：US5194697A

公开(公告)日：1993-03-16

申请号：US496460

申请日：1990-03-20

申请人： Frank Hegner ,  Thomas Klahn

发明人： Frank Hegner ,  Thomas Klahn

IPC分类号： G01L9/00 ,  H01G4/228 ,  H01J5/32 ,  H01J9/32 ,  H01R9/16 ,  H02G3/22 ,  H05K1/03 ,  H05K3/34 ,  H05K3/40

CPC分类号： G01L9/0075 ,  H01J5/32 ,  H01J9/32 ,  H05K3/4046 ,  H05K1/0306 ,  H05K2201/10303 ,  H05K3/3447

摘要： A mechanically heavily loadable and high-vacuum-tight feedthrough connection through a hole (2) of a high-temperature-resistant and vacuum-proof insulating part (1), particularly of ceramic, glass, or a single crystal, is disclosed which can be produced in a single high-temperature step and is thus inexpensive. It is designed as a terminal lead (4) covered with active solder and soldered into the hole, the terminal lead having a coefficient of thermal expansion less than that of the insulating part (1). The feedthrough connection is preferably used in a capacitive pressure sensor (10) having a diaphragm (11) and a substrate (12) which have spaced-apart, flat inner surfaces which are provided with at least one conductive layer (14, 15) for forming at least one capacitor and are electrically connected to the respective rear side via the feedthrough connection.

摘要翻译： 公开了通过耐高温和真空绝缘部件（1）的孔（2），特别是陶瓷，玻璃或单晶的机械重负载和高真空密封的馈通连接，其可以 在单个高温步骤中生产，因此便宜。 它被设计为用有源焊料覆盖并焊接到孔中的端子引线（4），端子引线的热膨胀系数小于绝缘部件（1）的热膨胀系数。 馈通连接优选用于具有隔膜（11）的电容式压力传感器（10）和具有间隔开的平坦内表面的基板（12），该内表面设置有至少一个导电层（14,15），用于 形成至少一个电容器，并且经由馈通连接电连接到相应的后侧。

公开(公告)号：US20110132097A1

公开(公告)日：2011-06-09

申请号：US13057487

申请日：2009-06-23

申请人： Frank Hegner ,  Andreas Roßberg ,  Frank Kastner ,  Henry Ludwig ,  Uta Oberbach

发明人： Frank Hegner ,  Andreas Roßberg ,  Frank Kastner ,  Henry Ludwig ,  Uta Oberbach

IPC分类号： G01L7/08 ,  B29B9/12

CPC分类号： G01L9/0075 ,  G01L9/0044 ,  Y10T29/49

摘要： A method for manufacturing an elastic deformation body made of an Al2O3 ceramic, according to which a highly pure alumina having at most 2000 ppm MgO, at most 200 ppm inorganic impurities, a specific surface of at least 10 m2/g, an average grain size of at most 0.3 μm is applied. With the alumina and additives, there is produced via aqueous processing a homogeneous mixture, from which a pressable spray granulate is produced, which is formed by means of a uniaxial pressing method to a homogeneous, green body, which is subjected to a sinter process. The resulting elastic deformation body has a bending fracture stress σc, whose distribution F(σc) is given by the Weibull parameters σ0≧800 MPa and m≧24, with an average grain size of the sintered material of no more than 2 μm, and wherein the sintered material of the deformation body has a density of not less than 3.98 g/cm3.

摘要翻译： 一种制造由Al 2 O 3陶瓷制成的弹性变形体的方法，根据该方法，具有至多2000ppm MgO，至多200ppm无机杂质，至少10m 2 / g比表面积的高纯度氧化铝，平均粒径 最多0.3μm。 使用氧化铝和添加剂，通过水性加工生产均匀的混合物，通过单轴压制方法制备可挤压的喷雾颗粒，该均匀的混合物经受烧结过程的均匀的生坯。 所得到的弹性变形体具有弯曲断裂应力σ，其分布F（＆sgr; c）由Weibull参数＆sgr;0≥800MPa和m≥24给出，烧结材料的平均晶粒尺寸为no 大于2μm，并且其中变形体的烧结材料具有不小于3.98g / cm 3的密度。

公开(公告)号：US5076147A

公开(公告)日：1991-12-31

申请号：US499615

申请日：1990-03-26

申请人： Frank Hegner ,  Manfred Frank

发明人： Frank Hegner ,  Manfred Frank

IPC分类号： G01L9/00 ,  G01L19/06

CPC分类号： G01L9/0075 ,  G01L19/0627

摘要： The pressure sensor consists of a substrate and a diaphragm joined together around the periphery so as to form a chamber. The surface of the diaphragm facing away from the substrate is exposed to a medium whose pressure is to be measured. To protect the diaphragm against corrosion or abrasion, the diaphragm surface exposed to the medium is covered with a layer of silicon carbide, preferably by chemical vapor deposition.

摘要翻译： 压力传感器由基板和隔膜围绕周边连接在一起形成一个室。 面对离开基板的隔膜的表面暴露于要测量其压力的介质。 为了防止隔膜受到腐蚀或磨损，暴露于介质的隔膜表面被碳化硅层覆盖，优选通过化学气相沉积。