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公开(公告)号：US07737307B2
公开(公告)日：2010-06-15
申请号：US11890375
申请日：2007-08-06
IPC分类号： C07C43/11
CPC分类号： C07C43/126 , C07C43/137 , C08G65/337 , C08L71/02 , C11D1/004 , C11D1/722
摘要： A compound comprising Formula I, or a mixture thereof, Rf—OCFHCF2O—[CH2CH2O]x—[C3H7O]y-A Formula I wherein Rf is CnF2n+1, n is 1 to about 6, x is a mixture of positive integers and is 4 or greater, y is 0 to about 4, provided that the ratio of y to x is equal to or less than 0.25, A is RfOCHFCF2 or CmH2m+1, and m is 1 to about 24 and its use in lowering surface tension and imparting improved surface effects is disclosed.
摘要翻译： 包含式I或其混合物的化合物Rf-OCFHCF 2 O - [CH 2 CH 2 O] x - [C 3 H 7 O] y A式I其中R f为C n F 2n + 1，n为1至约6，x为正整数的混合物，为4 或更大，y为0至约4，条件是y与x的比例等于或小于0.25，A为RfOCHFCF2或CmH2m + 1，m为1至约24，并且其用于降低表面张力和赋予 公开了改善的表面效果。
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公开(公告)号：US20090292094A1
公开(公告)日：2009-11-26
申请号：US12124287
申请日：2008-05-21
IPC分类号： C08F214/18
CPC分类号： C08F214/26
摘要： Amorphous copolymers comprising 50-80 mole percent of monomer units derived from tetrafluoroethylene and 20 to 50 mole percent of monomer units derived from 1,2,3,3,3-pentafluoropropylene are provided.
摘要翻译： 提供包含50-80摩尔％的衍生自四氟乙烯的单体单元和20至50摩尔％的衍生自1,2,3,3,3-五氟丙烯的单体单元的无定形共聚物。
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公开(公告)号：US20090043133A1
公开(公告)日：2009-02-12
申请号：US11890375
申请日：2007-08-06
IPC分类号： C07C409/00
CPC分类号： C07C43/126 , C07C43/137 , C08G65/337 , C08L71/02 , C11D1/004 , C11D1/722
摘要： A compound comprising Formula I, or a mixture thereof, Rf—OCFHCF2O—[CH2CH2O]x—[C3H7O]y-A Formula I wherein Rf is CnF2n+1, n is 1 to about 6, x is a mixture of positive integers and is 4 or greater, y is 0 to about 4, provided that the ratio of y to x is equal to or less than 0.25, A is RfOCHFCF2 or CmH2m+1, and m is 0 to about 24 and its use in lowering surface tension and imparting improved surface effects is disclosed.
摘要翻译： 包含式I或其混合物的化合物<？在线公式描述=“在线式”末端=“铅”→Rf-OCFHCF 2 O- [CH 2 CH 2 O] x - [C 3 H 7 O] y A式I < in-line-formula description =“In-line Formulas”end =“tail”？>其中Rf为CnF2n + 1，n为1至约6，x为正整数的混合物，为4或更大，y为0 至约4，条件是y与x的比例等于或小于0.25，A为RfOCHFCF2或CmH2m + 1，m为0至约24，并且其用于降低表面张力并赋予改善的表面效果。
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公开(公告)号：US07399887B1
公开(公告)日：2008-07-15
申请号：US11890374
申请日：2007-08-06
IPC分类号： C07C321/00 , C07C323/00 , C07C381/00
摘要： A compound comprising Formula I, or a mixture thereof, wherein Y is a bond or CmH2m−p(OA)p wherein m is 0 to 4, and p is 0 or 1, X′ is X or H, X is CH2CH2OA, CH(CH2OA)2, C(CH2OA)3, or X and X′ combine to form (CH2CH2)2NCH2CH2OA or (CH2CH2)2O, provided that when X and X′ combine to form (CH2CH2)2O then Y is CH2CH(OA)CH2, A is CF2CFHO—Rf or H, Rf is CnF2n+1 wherein n is an integer of 1 to about 6, M is a cation having a charge equal to a, and a is a positive integer equal to 1 or 2, provided that at least one of X, X′, or Y contains A equal to CF2CFHO—Rf, and its use in lowering surface tension and imparting improved surface effects.
摘要翻译： 包含式I或其混合物的化合物，其中Y是键或C m H 2 m-p（OA）p p其中m 为0〜4，p为0或1，X'为X或H，X为CH 2 CH 2 OA，CH（CH 2） C（CH 2 OA）3，或X和X'结合形成（CH 2）2， 2/2个2或2个或2个或更多个（CH 2）2 其中X和X'组合形成（CH 2 CH 2 CH 2）2 O， ）2 O，则Y是CH 2 CH（OA）CH 2，A是CF 2 CO 2 -OR 2 或H，R f是C n H 2n + 1，其中n是1至约的整数 如图6所示，M是电荷等于a的阳离子，a是等于1或2的正整数，条件是X，X'或Y中的至少一个包含等于CF 2 CFHO-R f的A， / SUB>，其用于降低表面张力并赋予改善的表面效果。
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45.发明授权Fluorinated polymers useful as photoresists, and processes for microlithography 失效用作光致抗蚀剂的氟化聚合物，以及微光刻法公开(公告)号：US07312287B2
公开(公告)日：2007-12-25
申请号：US10523490
申请日：2003-08-19
IPC分类号： C08F120/22
CPC分类号： C08F232/00 , C08F8/12 , C08F214/18 , C08F214/26 , C08F220/24 , C08F220/26 , C08F232/08 , C08F2800/20 , G03F7/0046 , G03F7/0395
摘要： This invention provides a fluorine-containing copolymer having a repeat unit derived from at least one fluorinated olefin and a repeat unit derived from at least one polycyclic ethylenically unsaturated monomer having pendant hydroxyl or esterified hydroxyl groups, and optionally other repeat units, typically derived from an acrylate. These polymers have high transparency at short wavelengths such as 193 nm and 157 nm, and provide good plasma etch resistance and adhesive properties. Also provided are photoresist compositions and substrates coated therewith.
摘要翻译： 本发明提供了含有至少一种氟化烯烃的重复单元和衍生自至少一种具有羟基或酯化羟基的多环烯属不饱和单体的重复单元的含氟共聚物，以及任选的其它重复单元，通常衍生自 丙烯酸酯。 这些聚合物在短波长如193nm和157nm处具有高透明度，并且提供良好的等离子体耐蚀刻性和粘合性。 还提供了光刻胶组合物和其上涂覆的基材。
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公开(公告)号：US07297398B2
公开(公告)日：2007-11-20
申请号：US10355202
申请日：2003-01-30
申请人： Andrew Edward Feiring , Satoko Iwato , Mureo Kaku , Takahasi Tatsuhiro , Ronald Earl Uschold , Robert Clayton Wheland
发明人： Andrew Edward Feiring , Satoko Iwato , Mureo Kaku , Takahasi Tatsuhiro , Ronald Earl Uschold , Robert Clayton Wheland
CPC分类号： C09D127/12 , C08F214/18 , C08F214/26 , C08F214/28 , C08J7/04 , C08J7/047 , C08J2427/00 , C08L2205/02 , C09D127/16 , C09D127/18 , C09D127/20 , C09D131/04 , Y10T428/265 , Y10T428/31504 , Y10T428/31507 , Y10T428/3154 , Y10T428/31786 , Y10T428/31935 , C08L2666/04
摘要： A one or two layer coating system has been developed for plastic substrates. The one coating system low reflective layer consists of a fluorinated copolymer having the formula: VF2/TFE/HFP, VF2/HFP or VF2/TFE/PMVE. In the two coating system, the upper coating layer consists of TFE/HFP, VF2/TFE/HFP, or TFE/Perfluorodioxole, and the lower coating layer consists of VF2/TFE/HFP, VF/TFE/HFP, VAc/TFE/HFIB, or TFE graft to PVOH.
摘要翻译： 已经开发了用于塑料基材的一层或两层涂层系统。 一个涂层系统低反射层由具有下式的VF2 / TFE / HFP，VF2 / HFP或VF2 / TFE / PMVE的氟化共聚物组成。 在两个涂层系统中，上涂层由TFE / HFP，VF 2 / TFE / HFP或TFE /全氟二恶唑组成，下涂层由VF 2组成 > / TFE / HFP，VF / TFE / HFP，VAc / TFE / HFIB或TFE移植至PVOH。
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公开(公告)号：US07217495B2
公开(公告)日：2007-05-15
申请号：US10888222
申请日：2004-07-09
CPC分类号： C08F214/18 , C08F214/186 , G03F7/0045 , G03F7/0046 , G03F7/038 , G03F7/039 , G03F7/0395 , Y10S430/108
摘要： Fluorinated polymers, photoresists and associated processes for microlithography are described. These polymers and photoresists are comprised of a fluoroalcohol functional group which simultaneously imparts high ultraviolet (UV) transparency and developability in basic media to these materials. The materials of this invention have high UV transparency, particularly at short wavelengths, e.g., 157 nm, which makes them highly useful for lithography at these short wavelengths.
摘要翻译： 描述了用于微光刻的氟化聚合物，光致抗蚀剂和相关工艺。 这些聚合物和光致抗蚀剂由氟代醇官能团构成，其同时赋予这些材料在基本介质中高的紫外（UV）透明度和显影性。 本发明的材料具有高的UV透明度，特别是在短波长例如157nm处，这使得它们在这些短波长下非常适用于光刻。
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公开(公告)号：US07022457B2
公开(公告)日：2006-04-04
申请号：US10669492
申请日：2003-09-24
CPC分类号： G03F7/0395 , G03F7/0046 , G03F7/0397 , Y10S430/106 , Y10S430/108 , Y10S430/111 , Y10S430/115
摘要： The present invention pertains to photoimaging and the use of photoresists (positive-working and/or negative-working) for imaging in the production of semiconductor devices. The present invention also pertains to novel hydroxy ester-containing polymer compositions that are useful as base resins in resists and potentially in many other applications.
摘要翻译： 本发明涉及在制造半导体器件中的光成像和光致抗蚀剂（正性和/或负性）用于成像的用途。 本发明还涉及可用作抗蚀剂中的潜在的许多其它应用中的基础树脂的新型含羟基酯的聚合物组合物。
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公开(公告)号：US06486280B1
公开(公告)日：2002-11-26
申请号：US09615975
申请日：2000-07-14
申请人： Colin Anolick , Viacheslav Alexandrovich Petrov , Bruce Edmund Smart , Charles Winfield Stewart , Robert Clayton Wheland , William Brown Farnham , Andrew Edward Feiring , Weiming Qiu
发明人： Colin Anolick , Viacheslav Alexandrovich Petrov , Bruce Edmund Smart , Charles Winfield Stewart , Robert Clayton Wheland , William Brown Farnham , Andrew Edward Feiring , Weiming Qiu
IPC分类号： C08F1418
CPC分类号： C07C313/20 , C07C317/04 , C07C317/18 , C08F214/18 , C08F214/22 , C08F214/26 , C08F214/265 , C08F214/28 , C08L23/02 , C08L27/18 , C09D127/18 , C09D127/20 , C08L2666/04
摘要： Disclosed herein are novel amorphous tetrafluoroethylene-hexafluoropropylene (TFE-HFP) dipolymers, and other copolymers containing TFE, HFP and a third monomer, many of which are more random than previous amorphous TFE-HFP copolymers, as well as a novel high productivity continuous process for making these polymers. The polymers are particularly useful in the form of coatings, films and encapsulants.
摘要翻译： 本文公开了新型无定形四氟乙烯 - 六氟丙烯（TFE-HFP）二元聚合物，以及含有TFE，HFP和第三单体的其它共聚物，其中许多比以前的无定形TFE-HFP共聚物更随机，以及新颖的高生产率连续方法 用于制备这些聚合物。 聚合物特别可用于涂料，薄膜和密封剂的形式。
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50.发明授权Halogenated hydrocarbon refrigerant compositions containing polymeric oil-return agents 失效含有聚合物回油剂的卤化烃制冷剂组合物公开(公告)号：US06299792B1
公开(公告)日：2001-10-09
申请号：US09231847
申请日：1999-01-15
申请人： Andrew Edward Feiring , Lois Lo-I Lin , Barbara Haviland Minor , Glenn Scott Shealy , Hans O. Spauschus
发明人： Andrew Edward Feiring , Lois Lo-I Lin , Barbara Haviland Minor , Glenn Scott Shealy , Hans O. Spauschus
IPC分类号： C09K504
CPC分类号： C10M171/008 , C09K5/045 , C09K2205/122 , C09K2205/22 , C09K2205/24 , C10M2203/02 , C10M2203/022 , C10M2203/024 , C10M2203/04 , C10M2205/04 , C10M2209/04 , C10M2209/06 , C10M2209/062 , C10M2209/082 , C10M2209/084 , C10M2211/022 , C10M2211/06 , C10M2213/00 , C10M2213/04 , C10M2213/06 , C10M2221/02 , C10M2229/041 , C10N2240/00 , C10N2240/22 , C10N2240/30 , C10N2240/50 , C10N2240/52 , C10N2240/54 , C10N2240/56 , C10N2240/58 , C10N2240/60 , C10N2240/66
摘要： Refrigerant compositions containing polymeric oil-return agents which solubilize or disperse mineral and synthetic oil lubricants with hydrofluorocarbon and hydrofluorocarbon/hydrochlorofluorocarbon-based refrigerants are disclosed. These polymeric oil-return agents, such as copolymers of fluorinated and non-fluorinated methacrylates, as a small proportion of an overall refrigerant composition, permit efficient return of mineral and synthetic oil lubricants from non-compressor zones back to a compressor zone in a refrigeration system operating with hydrofluorocarbon and hydrofluorocarbon/hydrochlorofluorocarbon-based refrigerants.
摘要翻译： 公开了含有用氢氟烃和氢氟氟烃/氢氯氟烃类制冷剂溶解或分散矿物油和合成油润滑剂的聚合物回油剂的制冷剂组合物。 这些聚合回油剂，例如氟化和非氟化甲基丙烯酸酯的共聚物，作为总体制冷剂组合物的一小部分，允许矿物和合成油润滑剂从非压缩机区域有效地返回到制冷中的压缩机区域 使用氢氟碳化合物和氢氟碳氟烃/氢氯氟烃制冷剂的系统。
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