Ion beam device
    41.
    发明授权
    Ion beam device 有权
    离子束装置

    公开(公告)号:US08779380B2

    公开(公告)日:2014-07-15

    申请号:US12995700

    申请日:2009-03-30

    IPC分类号: H01J27/00

    摘要: An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

    摘要翻译: 根据本发明的离子束装置包括气体离子源(1),其包括由发射极基座(64)支撑的发射极尖端(21),包括引出电极(24)的电离室(15) 构造成围绕发射器尖端(21),以及气体供应管(25)。 引出电极(24)的中心轴线与离​​子照射光系统的中心轴线(14A)重叠或平行,通过发射极尖端(21)和发射极基座 (64)相对于所述电离室(15)的中心轴线是可倾斜的。 因此,提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

    Cryopump
    42.
    发明授权
    Cryopump 失效
    CRYOPUMP

    公开(公告)号:US5083445A

    公开(公告)日:1992-01-28

    申请号:US466633

    申请日:1990-01-17

    IPC分类号: B01D8/00 F04B37/08

    摘要: A cryopump for effecting a cooling operation by a freezing medium such as liquid helium. A plurality of radiation-heat shield plates for protecting cryopanels against an external heat radiation are provided in opposed relation to a gas inlet of the cryopump. Particularly, a plurality of groups of such radiation-heat shield plates are provided in such a manner that the radiation-heat shield plates of each group are arranged in a multi-stage manner in registry with one another in the direction of the depth of the cryopump and are disposed in parallel relation to one another. Each of the cryopanels is disposed adjacent to a rear surface of respective radiation-heat shield plates facing away from the gas inlet. With this construction, the gas molecules reflected by those radiation-heat shield plates and by a rear wall of the cryopump, are less liable to reach the gas inlet, and tend to be condensed at an increased rate on those cryopanels.

    Cryogenic cooling apparatus
    43.
    发明授权
    Cryogenic cooling apparatus 失效
    低温冷却装置

    公开(公告)号:US4432216A

    公开(公告)日:1984-02-21

    申请号:US438464

    申请日:1982-11-02

    CPC分类号: F25B9/10 F25B2400/17

    摘要: A split type cryogenic cooling apparatus comprising a refrigerator which permits a working gas of a high pressure and an operating temperature to generate cold heat, a cryostat accommodating a vessel containing liquefied fraction of the working gas together with an object to be cooled and a plurality of shield plates surrounding the vessel and maintained at respective temperature levels, and a communicating pipe system providing a communication between the refrigerator and the cryostat and having a vacuum heat insulation. Two or more stages of heat exchangers are disposed in the cryostat with their colder ends held in thermal contact with the shield plates and the vessel of temperature levels corresponding thereto, to thereby suppress an introduction of external heat into the cryostat.

    摘要翻译: 一种分体式低温冷却装置,其特征在于,包括:冰箱,其允许高压和工作温度的工作气体产生冷热;低温恒温器,容纳包含所述工作气体的液化部分的容器以及待冷却物体;以及多个 屏蔽板围绕容器并维持在相应的温度水平,以及连通管系统,其提供冰箱和低温恒温器之间的连通并具有真空隔热。 两个或多个热交换器级设置在低温恒温器中,其较冷端保持与屏蔽板和对应于其的温度水平的容器热接触,从而抑制外部热量引入低温恒温器。

    Cryostat with liquefaction refrigerator
    44.
    发明授权
    Cryostat with liquefaction refrigerator 失效
    冷冻机用液化冰箱

    公开(公告)号:US5381666A

    公开(公告)日:1995-01-17

    申请号:US710123

    申请日:1991-06-04

    摘要: In a cryostat with a liquefaction refrigerator, an object to be cooled, as well as a low-temperature end of the liquefaction refrigerator for cooling the object to be cooled, is contained in a thermally-insulated vessel. The liquefaction refrigerator comprises a cooler and a refrigerator, and the cooler comprises, as main components, a heat exchanger and an expansion valve. The refrigerator includes a mechanically-operated cold-generating device. Within a vacuum vessel in the cryostat, the cooler and the refrigerator are thermally connected together by a releasable thermally-conductive member. Since the refrigerator and the cooler are separate from each other, they can be overhauled independently of each other, and the cooler can be of a compact and lightweight design. Therefore, there can be provided the cryostat which is low in running cost, and has an excellent cooling performance.

    摘要翻译: 在具有液化制冷机的低温恒温器中,将要冷却的物体以及用于冷却待冷却物体的液化制冷机的低温端包含在绝热容器中。 液化冰箱包括冷却器和冰箱,并且冷却器作为主要部件包括热交换器和膨胀阀。 冰箱包括机械操作的冷产生装置。 在低温恒温器内的真空容器中,冷却器和冰箱通过可释放的导热构件热连接在一起。 由于冰箱和冷却器彼此分开,所以它们可以彼此独立地进行大修,并且冷却器可以是紧凑且轻便的设计。 因此,可以提供低运行成本的低温恒温器,并且具有优异的冷却性能。

    Gas swing type refrigerator
    46.
    发明授权
    Gas swing type refrigerator 失效
    气体摇摆式冰箱

    公开(公告)号:US5152147A

    公开(公告)日:1992-10-06

    申请号:US606725

    申请日:1990-10-31

    IPC分类号: F25B9/00 F25B9/02 F25B9/10

    CPC分类号: F25B9/10 Y10S165/907

    摘要: A refrigerator having a pressurizing device, a coldness generating device for generating coldness by expanding a portion of operating fluid which has been pressurized by the pressurizing device and a fluid passage through which the operating fluid is, via a device to be cooled, again circulated to the pressurizing device after the residual portion of the operating fluid has been cooled by the coldness generating device. A regenerator type heat exchanger is disposed in the fluid passage through which the operating fluid passes, and a switch device switches the flow of the operating fluid in the fluid passage to the reverse direction at a predetermined time period.

    摘要翻译: 具有加压装置的冷藏库,通过将被加压装置加压的工作流体的一部分膨胀的冷却产生装置和通过冷却装置再次循环的工作流体的流体通路再次循环的冷冻发生装置 在工作流体的剩余部分之后的加压装置已经被冷却产生装置冷却。 再生器式热交换器设置在工作流体通过的流体通道中,并且开关装置在预定时间段内将流体通道中的工作流体的流动切换到相反方向。

    Ion beam device
    47.
    发明授权
    Ion beam device 有权
    离子束装置

    公开(公告)号:US08563944B2

    公开(公告)日:2013-10-22

    申请号:US13595588

    申请日:2012-08-27

    IPC分类号: H01J49/10 H01J37/28

    摘要: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.

    摘要翻译: 提供了一种具有气体电离电离离子源的离子束装置,其能够防止发射极尖端以非接触的方式振动。 气体电场离子源由用于产生离子的发射极尖端(21)组成; 发射极底座(64),用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极(24),其构造为围绕发射极尖端(21); 以及用于将气体供给到发射极尖端附近的气体供给管(25)。 发射极基座和真空容器彼此磁性相互作用。

    ION BEAM DEVICE
    48.
    发明申请
    ION BEAM DEVICE 有权
    离子束装置

    公开(公告)号:US20110266465A1

    公开(公告)日:2011-11-03

    申请号:US13144620

    申请日:2010-01-08

    IPC分类号: G01N23/00

    摘要: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.

    摘要翻译: 提供了一种具有气体电离电离离子源的离子束装置,其能够防止发射极尖端以非接触的方式振动。 气体电场离子源由用于产生离子的发射极尖端(21)组成; 发射极底座(64),用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极(24),其构造为围绕发射极尖端(21); 以及用于将气体供给到发射极尖端附近的气体供给管(25)。 发射极基座和真空容器彼此磁性相互作用。

    Reaction apparatus and mixing system
    49.
    发明授权
    Reaction apparatus and mixing system 失效
    反应装置和混合系统

    公开(公告)号:US07413713B2

    公开(公告)日:2008-08-19

    申请号:US10283215

    申请日:2002-10-30

    摘要: A reaction apparatus comprises a first supply flow channel having a fine flow channel cross sectional area for a liquid pressurized by a pressurizing device, a gas supply flow channel having a fine flow channel cross sectional area for supplying a gas, a two-phase flow channel having a fine flow channel cross sectional area in communication with a joined portion for the first supply flow channel and the second supply flow channel for flowing a gas/liquid two-phase fluid, a gas bubble reaction flow channel in communication with the exit of the gas/liquid two-phase channel and having a flow channel cross sectional area larger than that of the gas/liquid two-phase flow channel, and a liquid discharge flow channel for discharging the liquid in the gas bubble reaction flow channel. Therefore, in the reaction apparatus, a stable mixing ratio of a gas to a liquid can be obtained and the mixing speed of the gas to the liquid is increased.

    摘要翻译: 反应装置包括:第一供给流路,其具有用于由加压装置加压的液体的细流路截面积;气体供给流路,具有用于供给气体的细流路截面积;二相流路 具有与用于第一供给流动通道的接合部分和用于使气体/液体两相流体流动的第二供应流动通道的细流动通道横截面积,与气体/液体两相流体流动的气泡反应流动通道, 气体/液体两相通道,并且具有大于气/液二相流动通道的流动通道横截面积,以及用于排出气泡反应流动通道中的液体的液体排出流动通道。 因此,在反应装置中,可以获得气体与液体的稳定的混合比,并且气体与液体的混合速度提高。