Semiconductor device and semiconductor device manufacturing method
    43.
    发明授权
    Semiconductor device and semiconductor device manufacturing method 失效
    半导体器件和半导体器件制造方法

    公开(公告)号:US06600189B1

    公开(公告)日:2003-07-29

    申请号:US09598379

    申请日:2000-06-21

    IPC分类号: H01L27108

    摘要: A semiconductor device includes a semiconductor substrate having a trench on a surface thereof and an embedding member embedding the interior of the trench therewith. While the section of the trench when cut by a first plane perpendicular to the direction of the depth of the trench is defined as a first section and the section of the trench when cut by a second plane perpendicular to the direction of the depth of the trench and closer to the bottom of the trench than the first plane is defined as a second section, the area of the first section is smaller than that of the second section and a minimum radius of curvature of the first section is smaller than a minimum radius of curvature of the second section. As a result, it is possible to lessen the concentration of the electric field into the bottom of the trench.

    摘要翻译: 半导体器件包括在其表面上具有沟槽的半导体衬底和嵌入沟槽内部的嵌入构件。 虽然当垂直于沟槽深度方向的第一平面切割沟槽的部分被定义为第一部分,并且当垂直于沟槽深度方向的第二平面切割沟槽的部分时 并且比所述第一平面更靠近所述沟槽的底部被限定为第二部分,所述第一部分的面积小于所述第二部分的面积,并且所述第一部分的最小曲率半径小于所述第一部分的最小半径 第二部分的曲率。 结果,可以减小进入沟槽底部的电场的浓度。

    Semiconductor device
    45.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US08013398B2

    公开(公告)日:2011-09-06

    申请号:US12056909

    申请日:2008-03-27

    IPC分类号: H01L29/78

    摘要: A semiconductor device includes a first pMISFET region having an Si channel, a second pMISFET region having an Si channel and an nMISFET region having an Si channel. First SiGe layers which apply first compression strain to the Si channel are embedded and formed in the first pMISFET region to sandwich the Si channel thereof and second SiGe layers which apply second compression strain different from the first compression strain to the Si channel are embedded and formed in the second pMISFET region to sandwich the Si channel thereof.

    摘要翻译: 半导体器件包括具有Si沟道的第一pMISFET区,具有Si沟道的第二pMISFET区和具有Si沟道的nMISFET区。 将第一压缩应变施加到Si沟道的第一SiGe层嵌入并形成在第一pMISFET区域中以夹持其Si沟道,并且将施加与第一压缩应变不同的第二压缩应变的第二SiGe层嵌入并形成 在第二pMISFET区域夹持其Si通道。

    Semiconductor device
    46.
    再颁专利
    Semiconductor device 有权
    半导体器件

    公开(公告)号:USRE45462E1

    公开(公告)日:2015-04-14

    申请号:US13569604

    申请日:2012-08-08

    IPC分类号: H01L29/78 H01L29/772

    摘要: A semiconductor device includes a first pMISFET region having an Si channel, a second pMISFET region having an Si channel and an nMISFET region having an Si channel. First SiGe layers which apply first compression strain to the Si channel are embedded and formed in the first pMISFET region to sandwich the Si channel thereof and second SiGe layers which apply second compression strain different from the first compression strain to the Si channel are embedded and formed in the second pMISFET region to sandwich the Si channel thereof.

    摘要翻译: 半导体器件包括具有Si沟道的第一pMISFET区,具有Si沟道的第二pMISFET区和具有Si沟道的nMISFET区。 将第一压缩应变施加到Si沟道的第一SiGe层嵌入并形成在第一pMISFET区域中以夹持其Si沟道,并且将施加与第一压缩应变不同的第二压缩应变的第二SiGe层嵌入并形成 在第二pMISFET区域夹持其Si通道。

    Manufacturing method of a semiconductor device
    47.
    发明授权
    Manufacturing method of a semiconductor device 有权
    半导体器件的制造方法

    公开(公告)号:US08124472B2

    公开(公告)日:2012-02-28

    申请号:US13205950

    申请日:2011-08-09

    IPC分类号: H01L29/78

    摘要: A semiconductor device includes a first pMISFET region having an Si channel, a second pMISFET region having an Si channel and an nMISFET region having an Si channel. First SiGe layers which apply first compression strain to the Si channel are embedded and formed in the first pMISFET region to sandwich the Si channel thereof and second SiGe layers which apply second compression strain different from the first compression strain to the Si channel are embedded and formed in the second pMISFET region to sandwich the Si channel thereof.

    摘要翻译: 半导体器件包括具有Si沟道的第一pMISFET区,具有Si沟道的第二pMISFET区和具有Si沟道的nMISFET区。 将第一压缩应变施加到Si沟道的第一SiGe层嵌入并形成在第一pMISFET区域中以夹持其Si沟道,并且将施加与第一压缩应变不同的第二压缩应变的第二SiGe层嵌入并形成 在第二pMISFET区域夹持其Si通道。

    SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    48.
    发明申请
    SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF 有权
    半导体器件及其制造方法

    公开(公告)号:US20110294271A1

    公开(公告)日:2011-12-01

    申请号:US13205950

    申请日:2011-08-09

    IPC分类号: H01L21/8238

    摘要: A semiconductor device includes a first pMISFET region having an Si channel, a second pMISFET region having an Si channel and an nMISFET region having an Si channel. First SiGe layers which apply first compression strain to the Si channel are embedded and formed in the first pMISFET region to sandwich the Si channel thereof and second SiGe layers which apply second compression strain different from the first compression strain to the Si channel are embedded and formed in the second pMISFET region to sandwich the Si channel thereof.

    摘要翻译: 半导体器件包括具有Si沟道的第一pMISFET区,具有Si沟道的第二pMISFET区和具有Si沟道的nMISFET区。 将第一压缩应变施加到Si沟道的第一SiGe层嵌入并形成在第一pMISFET区域中以夹持其Si沟道,并且将施加与第一压缩应变不同的第二压缩应变的第二SiGe层嵌入并形成 在第二pMISFET区域夹持其Si通道。

    SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    49.
    发明申请
    SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF 有权
    半导体器件及其制造方法

    公开(公告)号:US20080237732A1

    公开(公告)日:2008-10-02

    申请号:US12056909

    申请日:2008-03-27

    IPC分类号: H01L29/78 H01L21/8238

    摘要: A semiconductor device includes a first pMISFET region having an Si channel, a second pMISFET region having an Si channel and an nMISFET region having an Si channel. First SiGe layers which apply first compression strain to the Si channel are embedded and formed in the first pMISFET region to sandwich the Si channel thereof and second SiGe layers which apply second compression strain different from the first compression strain to the Si channel are embedded and formed in the second pMISFET region to sandwich the Si channel thereof.

    摘要翻译: 半导体器件包括具有Si沟道的第一pMISFET区,具有Si沟道的第二pMISFET区和具有Si沟道的nMISFET区。 将第一压缩应变施加到Si沟道的第一SiGe层嵌入并形成在第一pMISFET区域中以夹持其Si沟道,并且将施加与第一压缩应变不同的第二压缩应变的第二SiGe层嵌入并形成 在第二pMISFET区域夹持其Si通道。