公开(公告)号：US08968055B2

公开(公告)日：2015-03-03

申请号：US13459177

申请日：2012-04-28

申请人： Hui Chen ,  Allen L. D'Ambra ,  Jim Atkinson ,  Hung Chen

发明人： Hui Chen ,  Allen L. D'Ambra ,  Jim Atkinson ,  Hung Chen

IPC分类号： B24B1/00

CPC分类号： B24B37/107 ,  B24B41/068

摘要： The present invention provides methods and apparatus for a pre-CMP semiconductor substrate buffing module. The invention includes a polishing pad assembly adapted to be rotated against a major surface of a substrate; a chuck adapted to hold the substrate and to rotate the substrate against the polishing pad assembly as the polishing pad assembly is rotated; and a lateral motion motor adapted to oscillate the polishing pad assembly laterally across the major surface of the substrate while the polishing pad assembly is rotated against the rotating substrate. Numerous additional features are disclosed.

摘要翻译： 本发明提供了用于CMP前半导体衬底抛光模块的方法和装置。 本发明包括适于相对于基底的主表面旋转的抛光垫组件; 当所述抛光垫组件旋转时，卡盘适于保持所述基底并且将所述基底旋转抵靠所述抛光垫组件; 以及横向运动电动机，其适于在抛光垫组件相对于旋转衬底旋转的同时横向穿过衬底的主表面振荡抛光垫组件。 公开了许多附加特征。

公开(公告)号：US08830561B2

公开(公告)日：2014-09-09

申请号：US13426464

申请日：2012-03-21

申请人： HongMei Zang ,  Hui Chen

发明人： HongMei Zang ,  Hui Chen

IPC分类号： G02B26/00 ,  G02F1/29 ,  G09G3/34 ,  C09K19/54 ,  G02F1/1333 ,  G02F1/1341 ,  G02F1/167

CPC分类号： G02F1/1341 ,  C09K19/544 ,  C09K2019/546 ,  G02F1/133377 ,  G02F1/167 ,  G02F2001/1672

摘要： The present invention is directed to an electrophoretic display comprising: (a) microcups comprising partition walls and top-openings; (b) an organic-based electrophoretic fluid filled in the microcups, wherein said fluid comprises charged pigment particles dispersed in a solvent; and (c) a top-sealing layer formed from a sealing composition to enclose the electrophoretic fluid within the microcups. The sealing composition comprises: (i) a water soluble polymer, (ii) a water-based suspension, a water-based dispersion, a water-based emulsion, or a water-based latex, each comprising a polymer; and (iii) water.

摘要翻译： 本发明涉及一种电泳显示器，其包括：（a）包含分隔壁和顶部开口的微杯; （b）填充在微杯中的基于有机的电泳液，其中所述流体包含分散在溶剂中的带电颜料颗粒; 和（c）由密封组合物形成的顶部密封层，以将电泳液包围在微型杯中。 密封组合物包括：（i）水溶性聚合物，（ii）各自包含聚合物的水基悬浮液，水基分散体，水基乳液或水基胶乳; 和（iii）水。

公开(公告)号：US08618241B2

公开(公告)日：2013-12-31

申请号：US12959898

申请日：2010-12-03

申请人： Baoquan Chen ,  Danliang Jin ,  Guomin Yu ,  Hui Chen ,  Diyun Huang

发明人： Baoquan Chen ,  Danliang Jin ,  Guomin Yu ,  Hui Chen ,  Diyun Huang

IPC分类号： C08G75/00

CPC分类号： G02F1/3558 ,  C09K9/02 ,  C09K2211/1022 ,  C09K2211/1088 ,  C09K2211/1092 ,  C09K2211/1096 ,  C09K2211/1416 ,  C09K2211/1425 ,  G02F1/3611 ,  G02F1/3614 ,  G02F1/3615 ,  G02F2202/022

摘要： According to an embodiment, an electro-optic polymer comprises a host polymer and a guest nonlinear optical chromophore having the structure D-π-A, wherein: D is a donor, π is a π-bridge, and A is an acceptor; a bulky substituent group is covalently attached to at least one of D, π, or A; and the bulky substituent group has at least one non-covalent interaction with part of the host polymer that impedes chromophore depoling.

摘要翻译： 根据一个实施方案，电光聚合物包含主体聚合物和具有结构D-pi-A的客体非线性光学发色团，其中：D是供体，pi是π桥，A是受体; 大体积取代基共价连接至D，pi或A中的至少一个; 并且体积大的取代基与主要聚合物的阻碍发色团脱溶剂的部分具有至少一种非共价相互作用。

公开(公告)号：US20130004137A1

公开(公告)日：2013-01-03

申请号：US13432973

申请日：2012-03-28

申请人： Danliang Jin ,  Guomin Yu ,  Hui Chen ,  Baoquan Chen

发明人： Danliang Jin ,  Guomin Yu ,  Hui Chen ,  Baoquan Chen

IPC分类号： C08G77/24 ,  B05D5/06 ,  G02B6/00

CPC分类号： G02B6/13 ,  C08G77/24 ,  G02B2006/121 ,  G02F1/065 ,  G02F2202/38

摘要： A low index of refraction hybrid optical cladding may be formed from a fluorinated sol-gel. An electro-optic device may include a poled organic chromophore-loaded modulation layer (electro-optic polymer) and at least one adjacent fluorinated hybrid sol-gel cladding layer.

摘要翻译： 低折射率混合光学包层可以由氟化溶胶 - 凝胶形成。 电光装置可以包括极化的有机发色团负载调制层（电光聚合物）和至少一个相邻的氟化杂化溶胶 - 凝胶包层。

公开(公告)号：US08226878B2

公开(公告)日：2012-07-24

申请号：US11774796

申请日：2007-07-09

申请人： Qun Huo ,  Hui Chen

发明人： Qun Huo ,  Hui Chen

IPC分类号： B29C35/08 ,  H05B6/00 ,  B05D3/06 ,  B05D3/00 ,  B29C65/00 ,  B23K26/00

CPC分类号： B23K26/16 ,  B23K26/0006 ,  B23K26/354 ,  B23K26/55 ,  B23K2103/16 ,  B23K2103/42 ,  B23K2103/50 ,  Y10T428/24479 ,  Y10T428/24612 ,  Y10T428/24744

摘要： A method of forming articles having closed microchannels includes the steps of providing a substrate including a composite material, the composite having metal nanoparticles dispersed in a polymer matrix. The substrate is irradiated with a laser beam at an intensity and time sufficient to selectively remove the polymer below a surface of said substrate to form at least one microchannel, wherein the intensity and time is low enough to avoid removing the polymer above the microchannel, wherein an article having at least one closed microchannel is formed. A metal nanoparticle/polymer composite composition can have functionality that can undergo addition reactions to seal or join pieces of polymers or composites upon irradiation of the composition placed on one or more pieces.

摘要翻译： 形成具有闭合微通道的制品的方法包括提供包括复合材料的基材的步骤，所述复合材料具有分散在聚合物基质中的金属纳米颗粒。 以足够的强度和时间照射激光束的衬底，以便选择性地去除所述衬底的表面下面的聚合物以形成至少一个微通道，其中强度和时间足够低以避免去除微通道上方的聚合物，其中 形成具有至少一个封闭微通道的制品。 金属纳米颗粒/聚合物复合组合物可以具有在放置在一个或多个片上的组合物照射时可以经历加成反应以密封或连接聚合物片或复合材料片的官能团。

公开(公告)号：US20120176663A1

公开(公告)日：2012-07-12

申请号：US13426464

申请日：2012-03-21

申请人： HongMei ZANG ,  Hui Chen

发明人： HongMei ZANG ,  Hui Chen

IPC分类号： G02F1/167

CPC分类号： G02F1/1341 ,  C09K19/544 ,  C09K2019/546 ,  G02F1/133377 ,  G02F1/167 ,  G02F2001/1672

摘要： The present invention is directed to an electrophoretic display comprising: (a) microcups comprising partition walls and top-openings; (b) an organic-based electrophoretic fluid filled in the microcups, wherein said fluid comprises charged pigment particles dispersed in a solvent; and (c) a top-sealing layer formed from a sealing composition to enclose the electrophoretic fluid within the microcups. The sealing composition comprises: (i) a water soluble polymer, (ii) a water-based suspension, a water-based dispersion, a water-based emulsion, or a water-based latex, each comprising a polymer; and (iii) water.

摘要翻译： 本发明涉及一种电泳显示器，其包括：（a）包含分隔壁和顶部开口的微杯; （b）填充在微杯中的基于有机的电泳液，其中所述流体包含分散在溶剂中的带电颜料颗粒; 和（c）由密封组合物形成的顶部密封层，以将电泳液包围在微型杯中。 密封组合物包括：（i）水溶性聚合物，（ii）各自包含聚合物的水基悬浮液，水基分散体，水基乳液或水基胶乳; 和（iii）水。

公开(公告)号：US08198196B1

公开(公告)日：2012-06-12

申请号：US13154228

申请日：2011-06-06

申请人： James J. Murphy ,  Hui Chen ,  Eileen Valdez

发明人： James J. Murphy ,  Hui Chen ,  Eileen Valdez

IPC分类号： H01L21/336

CPC分类号： H01L29/7813 ,  H01L29/407 ,  H01L29/41766 ,  H01L29/4236 ,  H01L29/42368 ,  H01L29/456 ,  H01L29/4925 ,  H01L29/4933 ,  H01L29/495 ,  H01L29/4975 ,  H01L29/66727 ,  H01L29/66734

摘要： A field effect transistor (FET) includes a trench extending into a semiconductor region. A conductive electrode is disposed in the trench, and the conductive electrode is insulated from the semiconductor region by a dielectric layer. The conductive electrode includes a conductive liner lining the dielectric layer along opposite sidewalls of the trench. The conductive liner has tapered edges such that a thickness of the conductive liner gradually increases from a top surface of the conductive electrode to a point in lower half of the conductive electrode. The conductive electrode further includes a conductive fill material sandwiched by the conductive liner. The FET further includes a drift region of a first conductivity type in the semiconductor region, and a body region of a second conductivity type extending over the drift region. Source regions of the first conductivity type extend in the body region adjacent the trench.

摘要翻译： 场效应晶体管（FET）包括延伸到半导体区域中的沟槽。 导电电极设置在沟槽中，导电电极通过电介质层与半导体区域绝缘​​。 导电电极包括沿着沟槽的相对侧壁衬在电介质层上的导电衬垫。 导电衬垫具有锥形边缘，使得导电衬垫的厚度从导电电极的顶表面逐渐增加到导电电极的下半部分。 导电电极还包括被导电衬垫夹住的导电填充材料。 FET还包括半导体区域中的第一导电类型的漂移区域和在漂移区域上延伸的第二导电类型的体区域。 第一导电类型的源区在与沟槽相邻的体区中延伸。

公开(公告)号：US08181302B2

公开(公告)日：2012-05-22

申请号：US12564254

申请日：2009-09-22

申请人： Hung Chih Chen ,  Hui Chen ,  Dan Zhang

发明人： Hung Chih Chen ,  Hui Chen ,  Dan Zhang

IPC分类号： A46B13/00

CPC分类号： A46B13/02 ,  A46B9/005 ,  A46B2200/3073 ,  A61C1/085

摘要： A method and apparatus for providing uniform pressure, friction and/or contact between a substrate and a cylindrical roller in a brush-type cleaning system is described. The apparatus includes an alignment member adapted to allow pivotal movement of the cylindrical roller based on the topography of a substrate and/or the outer surface of the cylindrical roller. The method includes positioning a substrate between two cylindrical rollers, moving each of the two cylindrical rollers to a position where at least a portion of an outer surface of each of the cylindrical rollers are in contact with the major surfaces of the substrate, and rotating one or both of the substrate and the two cylindrical rollers relative to each other while allowing a longitudinal axis of one or both of the two cylindrical rollers to pivot relative to a plane defined by one of the major surfaces of the substrate.

摘要翻译： 描述了一种用于在刷式清洁系统中在衬底和圆柱形辊之间提供均匀的压力，摩擦和/或接触的方法和装置。 该装置包括一个对准构件，该对准构件适于基于衬底的形状和/或圆柱形辊的外表面允许圆柱形辊的枢转运动。 该方法包括将基板定位在两个圆柱形辊之间，将两个圆柱滚子中的每一个移动到每个圆柱滚子的外表面的至少一部分与基板的主表面接触的位置，并且旋转一个 或两个圆柱形滚子中的两个相对于彼此同时允许两个圆柱滚子中的一个或两个的纵向轴线相对于由基板的主要表面之一限定的平面枢转。

公开(公告)号：US08101934B2

公开(公告)日：2012-01-24

申请号：US11683420

申请日：2007-03-07

申请人： Hui Chen ,  Haochuan Zhang ,  Noel A. Manto

发明人： Hui Chen ,  Haochuan Zhang ,  Noel A. Manto

IPC分类号： G01V8/00

CPC分类号： G01V8/12

摘要： In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.

摘要翻译： 在第一方面中，提供了一种第一装置。 第一装置包括耦合到洗涤器并适于在处理期间检测洗涤器中的基板的凹口或平面的通过光束传感器。 通过光束传感器具有（1）发射器面向洗涤器中的基板的第一主表面并且适于将光束传送到第一主表面的边缘; 和（2）接触器，其面对衬底的第二主表面，并且适于在衬底的边缘不阻挡光束时接收从发射器发射的光束。 提供了许多其他方面。

公开(公告)号：US08003522B2

公开(公告)日：2011-08-23

申请号：US12327425

申请日：2008-12-03

申请人： Hui Chen ,  Ihsiu Ho ,  Stacy W. Hall ,  Briant Harward ,  Hossein Paravi

发明人： Hui Chen ,  Ihsiu Ho ,  Stacy W. Hall ,  Briant Harward ,  Hossein Paravi

IPC分类号： H01L21/00

CPC分类号： H01L29/7813 ,  H01L21/3085 ,  H01L21/3086 ,  H01L29/41766 ,  H01L29/4236 ,  H01L29/66348 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7397

摘要： A method for forming a semiconductor structure includes the following steps. A hard mask layer is formed over a semiconductor region. The hard mask layer has inner portions that are thinner than its outer portions, and the inner portions define an exposed surface area of the semiconductor region. A portion of the semiconductor region is removed through the exposed surface area of the semiconductor region. The thinner portions of the hard mask layer are removed to expose surface areas of the semiconductor region underlying the thinner portions. An additional portion of the semiconductor region is removed through all exposed surface areas of the semiconductor region thereby forming a trench having an upper portion that is wider than its lower portion.

摘要翻译： 一种形成半导体结构的方法包括以下步骤。 在半导体区域上形成硬掩模层。 硬掩模层具有比其外部部分薄的内部部分，并且内部部分限定半导体区域的暴露的表面积。 通过半导体区域的暴露的表面区域去除半导体区域的一部分。 去除硬掩模层的较薄部分以暴露较薄部分下面的半导体区域的表面区域。 通过半导体区域的所有暴露的表面区域去除半导体区域的附加部分，从而形成具有比下部更宽的上部的沟槽。