公开(公告)号：US08049134B2

公开(公告)日：2011-11-01

申请号：US12110916

申请日：2008-04-28

申请人： Keiji Nomaru ,  Hitoshi Hoshino ,  Koji Yamaguchi

发明人： Keiji Nomaru ,  Hitoshi Hoshino ,  Koji Yamaguchi

IPC分类号： B23K26/067 ,  H01L21/301

CPC分类号： B23K26/0604 ,  B23K26/042 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/0853 ,  B23K26/0884 ,  B23K26/38 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50

摘要： A laser processing machine having a laser beam irradiation unit is provided. The laser beam irradiation unit includes: a laser beam oscillation section; a beam splitter adapted to split the laser beam emitted from the laser beam oscillation section into a first laser beam and a second laser beam; a condenser lens adapted to condense the first and second laser beams; a prism adapted to lead the first and second laser beams split by the beam splitter to the condenser lens; a first angle-changing mirror disposed on a first optical path adapted to lead the first laser beam split by the beam splitter; a second angle-changing mirror disposed on a second optical path adapted to lead the second laser beam split by the beam splitter to the prism; and a half-wave plate disposed in the first or second optical path to allow one of respective directions of the first and second polarization planes to be aligned with the other.

摘要翻译： 提供具有激光束照射单元的激光加工机。 激光束照射单元包括：激光束振荡部; 分束器，适于将从激光束振荡部分发射的激光束分成第一激光束和第二激光束; 聚光透镜，适于冷凝第一和第二激光束; 棱镜，适于将由分束器分裂的第一和第二激光束引导到聚光透镜; 第一角度改变镜，设置在适于引导由分束器分裂的第一激光束的第一光路上; 第二角度改变镜，设置在第二光路上，适于将由分束器分裂的第二激光束引导到棱镜; 以及设置在第一或第二光路中的半波片，以允许第一和第二偏振面的各个方向之一与另一个对准。

公开(公告)号：US07978408B2

公开(公告)日：2011-07-12

申请号：US12616417

申请日：2009-11-11

申请人： Taiki Sawabe ,  Keiji Nomaru

发明人： Taiki Sawabe ,  Keiji Nomaru

IPC分类号： G02B5/30 ,  G02B27/28

CPC分类号： G02B5/3041 ,  G02B5/001 ,  H01S3/005

摘要： A polarizing device for converting a circularly polarized light beam into a radial polarized light beam, wherein the circularly polarized light beam is obtained by passing a linearly polarized light beam oscillated from a laser oscillator through a quarter-wave plate. The polarizing device includes an axicon lens having a conical surface and a dielectric film formed on the conical surface of the axicon lens.

摘要翻译： 一种用于将圆偏振光束转换成径向偏振光束的偏振装置，其中圆偏振光束通过使从激光振荡器振荡的线偏振光束通过四分之一波片而获得。 偏振装置包括具有锥形表面的旋转透镜和形成在轴向透镜的锥形表面上的电介质膜。

公开(公告)号：US07580136B2

公开(公告)日：2009-08-25

申请号：US12189910

申请日：2008-08-12

申请人： Taiki Sawabe ,  Keiji Nomaru

发明人： Taiki Sawabe ,  Keiji Nomaru

IPC分类号： G01B11/24

CPC分类号： G01B11/0608 ,  B23K26/048 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50

摘要： A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which the spot shape of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a first beam splitter by which the laser beam with the spot shape formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed to irradiate the work therewith; a second beam splitter for splitting the reflected light reflected by the work; a first light receiving element for receiving the reflected light transmitted through the second beam splitter; a second light receiving element for receiving the reflected light reflected by the second beam splitter; a light reception region restricting part for restricting the light reception region for the reflected light received by the second light receiving element; and a controller for determining the height position of the upper surface of the work on the basis of the ratio between the quantity of light received by the first light receiving element and the quantity of light received by the second light receiving element.

摘要翻译： 一种高度位置检测器，用于检测夹持在卡盘台上的工件的上表面的高度位置，该环形点形成部分由激光束振荡器振荡的激光束的光点形状形成为环形形状 ; 具有形成为环状的点状激光的第一分束器被引导到第一路径中; 引导到第一路径的激光束被聚光以照射工件的光聚光器; 用于分离由工件反射的反射光的第二分束器; 第一光接收元件，用于接收透射通过第二分束器的反射光; 第二光接收元件，用于接收由第二分束器反射的反射光; 用于限制由第二光接收元件接收的反射光的光接收区域的光接收区域限制部分; 以及控制器，用于根据由第一光接收元件接收的光量与由第二光接收元件接收的光量之比来确定工件的上表面的高度位置。

公开(公告)号：US07538048B2

公开(公告)日：2009-05-26

申请号：US11808384

申请日：2007-06-08

申请人： Satoshi Kobayashi ,  Keiji Nomaru ,  Yosuke Watanabe

发明人： Satoshi Kobayashi ,  Keiji Nomaru ,  Yosuke Watanabe

IPC分类号： H01L21/00

CPC分类号： B23K26/0613 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/0838 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/52

摘要： A laser beam processing machine comprising a path distribution means for distributing a pulse laser beam oscillated by pulse laser beam oscillation means to a first path and a second path alternately, and one laser beam that passes through one of the paths and is converged by one condensing lens and the other laser beam that passes through the other path and is converged by the condensing lens are applied at different focusing points which have been displaced from each other in the direction of the optical axis, alternately with a time lag between them.

摘要翻译： 一种激光束处理机，包括：路径分布装置，用于将由脉冲激光束振荡装置振荡的脉冲激光束交替地分配到第一路径和第二路径;以及一个激光束，其穿过一条路径并被一个会聚 透镜和通过另一路径并被聚光透镜会聚的另一激光束被施加在彼此沿着光轴方向相互偏移的不同聚焦点处，它们之间的时间间隔交替。

公开(公告)号：US07482553B2

公开(公告)日：2009-01-27

申请号：US11224066

申请日：2005-09-13

申请人： Satoshi Kobayashi ,  Keiji Nomaru

发明人： Satoshi Kobayashi ,  Keiji Nomaru

IPC分类号： B23K26/00 ,  B23K26/067

CPC分类号： B23K26/0604 ,  B23K26/0613 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/0838 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50

摘要： A laser beam processing machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a laser beam capable of passing through the workpiece to the workpiece held on the chuck table, and a processing-feed means for moving the chuck table and the laser beam application means relative to each other, the laser beam application means comprising a laser beam oscillation means, an optical transmission means for transmitting a laser beam oscillated by the laser beam oscillation means, and a transmitting/converging means having a single condenser lens for converging laser beams transmitted by the optical transmission means, wherein the transmitting/converging means converges a laser beam oscillated from the laser beam oscillation means at two or more focusing points which are displaced in the direction of the optical axis and the processing-feed direction through the single condenser lens.

摘要翻译： 一种激光束处理机，包括用于保持工件的卡盘台，用于将能够通过工件的激光束施加到保持在卡盘台上的工件的激光束施加装置，以及用于移动卡盘台的加工进给装置 和激光束施加装置相对于彼此，激光束施加装置包括激光束振荡装置，用于传输由激光束振荡装置振荡的激光束的光传输装置，以及具有单个冷凝器的发射/收敛装置 用于会聚由光传输装置传输的激光束的透镜，其中发射/会聚装置将从激光束振荡装置振荡的激光束会聚在两个或更多个在光轴方向上移位的聚焦点和加工进给 方向通过单个聚光透镜。

公开(公告)号：US07459655B2

公开(公告)日：2008-12-02

申请号：US11113156

申请日：2005-04-25

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/06 ,  B23K26/08

CPC分类号： B23K26/0853 ,  B23K26/042 ,  B23K2101/40 ,  H01L21/67092

摘要： A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means comprising a laser beam oscillation means and a condenser having an objective lens for converging a laser beam oscillated by the laser beam oscillation means to apply it to the workpiece held on the chuck table, wherein a first lens for transmitting a laser beam oscillated by the laser beam oscillation means, a second lens for transmitting a laser beam that has passed through the first lens, and an optical path length changing means for changing the length of the optical path between the first lens and the second lens are interposed between the laser beam oscillation means and the objective lens.

摘要翻译： 一种激光束处理机，包括用于保持工件的卡盘台和包括激光束振荡装置的激光束施加装置和具有用于会聚由激光束振荡装置振荡的激光束的物镜的冷凝器，以将其施加到工件 保持在卡盘台上，其中，用于透射由激光束振荡装置振荡的激光束的第一透镜，用于透射已经穿过第一透镜的激光束的第二透镜和用于改变长度的光路长度改变装置 在第一透镜和第二透镜之间的光路插入在激光束振荡装置和物镜之间。

公开(公告)号：US07307233B2

公开(公告)日：2007-12-11

申请号：US10548886

申请日：2003-12-19

申请人： Keiji Nomaru ,  Hideki Hattori ,  Yoshiaki Takatani

发明人： Keiji Nomaru ,  Hideki Hattori ,  Yoshiaki Takatani

IPC分类号： C07C1/00 ,  C07F7/02 ,  C07F7/00 ,  C07F7/12

CPC分类号： B01D59/34 ,  C07F7/12

摘要： The present invention is directed to the provision of an isotope separation method, which can effectively prevent, without the use of a second gas, a secondary reaction and the formation of a polymer involved in a multiphoton dissociation reaction in laser isotope separation and, at the same time, can efficiently separate a target isotope with low activation energy, and a working substance for use in the isotope separation. The isotope separation method comprises the step of irradiating a working substance for isotope separation comprising a compound represented by formula SiX3-CY2-CZ3 or SiX3-CY═CZ2, wherein X, Y, and Z, which may be the same or different, represent a halogen atom, H, or an alkyl group; and at least one of Z's represents a halogen atom with the remaining Z's being H or an alkyl group, with a laser beam to dissociate only a molecule containing a particular target isotope atom, whereby the dissociation product or the nondissociation molecule is enriched with the target Si isotope atom.

摘要翻译： 本发明涉及提供一种同位素分离方法，其可以在不使用第二气体的情况下有效地防止二次反应和在激光同位素分离中涉及多光子解离反应的聚合物的形成，并且在 同时可以有效地分离具有低活化能的目标同位素，以及用于同位素分离的工作物质。 同位素分离方法包括：照射同位素分离用的工作物质的步骤，包括由式SiX3-CY2-CZ3或SiX3-CY-CZ2表示的化合物，其中X，Y和Z可以相同或不同，表示 卤素原子，H或烷基; 并且Z中的至少一个表示卤素原子，其余的Z为H或烷基，激光束仅解离含有特定目标同位素原子的分子，由此解离产物或非解离分子富含靶 Si同位素原子。

公开(公告)号：US20070243696A1

公开(公告)日：2007-10-18

申请号：US11808384

申请日：2007-06-08

申请人： Satoshi Kobayashi ,  Keiji Nomaru ,  Yosuke Watanabe

发明人： Satoshi Kobayashi ,  Keiji Nomaru ,  Yosuke Watanabe

IPC分类号： H01L21/00

CPC分类号： B23K26/0613 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/0838 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/52

摘要： A laser beam processing machine comprising a path distribution means for distributing a pulse laser beam oscillated by pulse laser beam oscillation means to a first path and a second path alternately, and one laser beam that passes through one of the paths and is converged by one condensing lens and the other laser beam that passes through the other path and is converged by the condensing lens are applied at different focusing points which have been displaced from each other in the direction of the optical axis, alternately with a time lag between them.

摘要翻译： 一种激光束处理机，包括：路径分布装置，用于将由脉冲激光束振荡装置振荡的脉冲激光束交替地分配到第一路径和第二路径;以及一个激光束，其穿过一条路径并被一个会聚 透镜和通过另一路径并被聚光透镜会聚的另一激光束被施加在彼此沿着光轴方向相互偏移的不同聚焦点处，它们之间的时间间隔交替。

公开(公告)号：US20070164073A1

公开(公告)日：2007-07-19

申请号：US11650503

申请日：2007-01-08

申请人： Yosuke Watanabe ,  Keiji Nomaru ,  Nobumori Ogoshi ,  Koichi Mitani ,  Taizo Kise ,  Kohei Matsumoto ,  Tatsuya Inaoka ,  Masaru Nakamura

发明人： Yosuke Watanabe ,  Keiji Nomaru ,  Nobumori Ogoshi ,  Koichi Mitani ,  Taizo Kise ,  Kohei Matsumoto ,  Tatsuya Inaoka ,  Masaru Nakamura

IPC分类号： B26F3/00 ,  B26F3/02

CPC分类号： B26F3/002 ,  B23K26/40 ,  B23K2103/50 ,  B26D7/10 ,  B28D5/0011 ,  B28D5/0052 ,  Y10T225/325

摘要： A method of dividing, along lattice pattern-like dividing lines, a wafer which has the lattice pattern-like dividing lines and a polymer film on the front surface of a substrate and is processed to allow for division along the dividing lines, the method comprising a frame holding step for putting the wafer on the surface of an adhesive tape mounted on an annular frame; a wafer cooling step for cooling the wafer that is affixed to the surface of the adhesive tape mounted on the annular frame; and a diving step for dividing the wafer along the dividing lines by expanding the adhesive tape to which the cooled wafer is affixed.

摘要翻译： 沿着格子状分割线将具有格子状分割线的晶片和在基板的前表面上的聚合物膜分割的方法，其被处理以允许沿着分割线分割，所述方法包括 框架保持步骤，用于将晶片放置在安装在环形框架上的胶带的表面上; 用于冷却固定到安装在环形框架上的胶带的表面的晶片的晶片冷却步骤; 以及用于通过使粘附有冷却晶片的粘合带膨胀而沿着分割线分割晶片的潜水步骤。

公开(公告)号：US20050236381A1

公开(公告)日：2005-10-27

申请号：US11113156

申请日：2005-04-25

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/04 ,  B23K26/00 ,  B23K26/02 ,  B23K26/06 ,  B23K26/08 ,  H01L21/00 ,  H01L21/301

CPC分类号： B23K26/0853 ,  B23K26/042 ,  B23K2101/40 ,  H01L21/67092

摘要： A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means comprising a laser beam oscillation means and a condenser having an objective lens for converging a laser beam oscillated by the laser beam oscillation means to apply it to the workpiece held on the chuck table, wherein a first lens for transmitting a laser beam oscillated by the laser beam oscillation means, a second lens for transmitting a laser beam that has passed through the first lens, and an optical path length changing means for changing the length of the optical path between the first lens and the second lens are interposed between the laser beam oscillation means and the objective lens.

摘要翻译： 一种激光束处理机，包括用于保持工件的卡盘台和包括激光束振荡装置的激光束施加装置和具有用于会聚由激光束振荡装置振荡的激光束的物镜的冷凝器，以将其施加到工件 保持在卡盘台上，其中，用于透射由激光束振荡装置振荡的激光束的第一透镜，用于透射已经穿过第一透镜的激光束的第二透镜和用于改变长度的光路长度改变装置 在第一透镜和第二透镜之间的光路插入在激光束振荡装置和物镜之间。