Method of deposition DLC inclusive layer(s) using hydrocarbon and/or siloxane gas(es)

    公开(公告)号:US06416816B1

    公开(公告)日:2002-07-09

    申请号:US09877098

    申请日:2001-06-11

    IPC分类号: C23C1626

    摘要: A substrate is coated with a coating system including at least one diamond-like carbon (DLC) inclusive layer. In certain embodiments, the coating system includes an anti-reflective layer, a DLC inclusive layer provided for hardness/durability purposes, a primer layer, and an FAS inclusive hydrophobic layer provided over the primer layer. The anti-reflective layer is provided in order to reduce visible light reflections off of the resulting coated article and thus to improve visible transmission of the article. In certain embodiments, the primer layer may be provided in order to enable improved adhesion between the FAS inclusive layer and the DLC inclusive layer that is provided for hardness/durability. In certain embodiments, each of the anti-reflective layer, the DLC inclusive layer, and/or the primer layer may include DLC for purposes described herein. In certain alternative embodiments, the primer and FAS layers need not be provided.

    Highly wear-resistant thermal print heads with silicon-doped
diamond-like carbon protective coatings
    43.
    发明授权
    Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings 失效
    高耐磨热敏打印头,带有掺杂硅的金刚石碳保护涂层

    公开(公告)号:US6046758A

    公开(公告)日:2000-04-04

    申请号:US264753

    申请日:1999-03-09

    IPC分类号: B41J2/335

    摘要: The invention provides a thermal print head with a protective coating of silicon-doped diamond-like carbon (Si-DLC) which imparts superior wear resistance, and improved lifetime. The Si-DLC is comprised of the elements C, H, Si and possibly O, N and Ar. The highly wear and abrasion-resistant Si-DLC diamond-like carbon coating is deposited by ion-assisted plasma deposition including direct ion beam deposition and capacitive radio frequency plasma deposition, from carbon-containing and silicon-containing precursor gases consisting of hydrocarbon, silane, organosilane, organosilazane and organo-oxysilicon compounds, or mixtures thereof. The resulting Si-DLC coating has the properties of Nanoindentation hardness in the range of approximately 10 to 35 GPa, thickness in the range of approximately 0.5 to 20 micrometers, dynamic friction coefficient of less than approximately 0.2, and a silicon concentration in the range of approximately 5 atomic % to approximately 40 atomic %. Optimum performance is obtained when the Si-DLC coating hardness is in the range of approximately 15 to 35 GPa, preferably in the range of about 15 GPa to about 19 GPa, and the Si-DLC layer thickness is in the range of approximately 2 micrometers to approximately 10 micrometers, dynamic friction coefficient of less than approximately 0.15, and a silicon concentration in the range of approximately 10 atomic % to 30 atomic %, preferably in the range of about 15 atomic percent to about 24 atomic percent.

    摘要翻译: 本发明提供一种具有硅掺杂的类金刚石碳(Si-DLC)保护涂层的热打印头,其具有优异的耐磨性和改善的寿命。 Si-DLC由元素C,H,Si和可能的O,N和Ar组成。 通过离子辅助等离子体沉积(包括直接离子束沉积和电容射频等离子体沉积)沉积高耐磨和耐磨Si-DLC类金刚石碳涂层,由含碳和硅的前体气体,由烃,硅烷 ,有机硅烷,有机硅氮烷和有机硅氧烷化合物,或其混合物。 所得的Si-DLC涂层具有在约10至35GPa范围内的纳米压痕硬度,约0.5至20微米范围内的厚度,小于约0.2的动摩擦系数,以及硅浓度在 约5原子%至约40原子%。 当Si-DLC涂层硬度在约15至35GPa的范围内,优选在约15GPa至约19GPa的范围内时,获得最佳性能,并且Si-DLC层的厚度在约2微米的范围内 至约10微米,动摩擦系数小于约0.15,硅浓度在约10原子%至30原子%的范围内,优选在约15原子%至约24原子%的范围内。

    Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film
    48.
    发明授权
    Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film 有权
    使用类金刚石碳(DLC)涂层和保护膜制造热处理涂层制品的方法

    公开(公告)号:US08132426B2

    公开(公告)日:2012-03-13

    申请号:US11798920

    申请日:2007-05-17

    IPC分类号: C03C17/34

    摘要: There is provided a method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. For example, certain embodiments of this invention relate to a method of making a coated article including a step of heat treating a glass substrate coated with at least a layer of or including diamond-like carbon (DLC) and an overlying protective film thereon. In certain example embodiments, the protective film may be of or include both (a) an oxygen blocking or barrier layer, and (b) a release layer. Following and/or during heat treatment (e.g., thermal tempering, or the like) the protective film may be removed. Other embodiments of this invention relate to the pre-HT coated article, or the post-HT coated article.

    摘要翻译: 提供了一种制造用于淋浴门应用,窗户应用或需要透明涂层制品的任何其它合适应用的热处理(HT)涂覆制品的方法。 例如,本发明的某些实施方案涉及一种制备涂覆制品的方法,包括在其上涂覆至少一层或类金刚石碳(DLC)和其上的保护膜的玻璃基材的热处理步骤。 在某些示例性实施方案中,保护膜可以由(a)氧阻挡层或阻挡层或(b)释放层构成或包括两者。 继续和/或在热处理(例如热回火等)期间,可以去除保护膜。 本发明的其它实施方案涉及预HT涂覆制品或后HT涂覆制品。