Process For Producing a Quartz Glass Component For Use In Semiconductor Manufacture And Component Produced By This Process
    44.
    发明申请
    Process For Producing a Quartz Glass Component For Use In Semiconductor Manufacture And Component Produced By This Process 审中-公开
    用于生产用于半导体制造的石英玻璃组分的方法和由该方法制备的组分

    公开(公告)号:US20080193715A1

    公开(公告)日:2008-08-14

    申请号:US11883617

    申请日:2006-01-18

    IPC分类号: B32B3/00 B44C1/22

    摘要: Quartz glass components for use in semiconductor manufacture are produced by mechanically machining the surface of a quartz glass blank so as to produce an initial average surface roughness Ra,0. The thus machined component surface is then cleaned in an etching solution. The invention relates to the optimisation of particle formation on such components, during the first intended use already. It is proposed to produce an initial average surface roughness Ra,0 of at least 0.2 μm by mechanical machining, and to adjust etching intensity and duration so that an actual etching depth of at least 10 μm is achieved. A quartz glass component produced by this process for use in semiconductor manufacture is characterised in that it comprises, before its first intended use, a surface produced by mechanical machining and etching having an etched structure with an average surface roughness Ra,1 ranging from 0.6 μm to 8 μm, and in that a weight loss of less than 0.4 μg/(mm2×min) which is substantially constant in time is achieved when etching the component with a 10% solution of hydrofluoric acid.

    摘要翻译: 用于半导体制造的石英玻璃组件通过机械加工石英玻璃坯料的表面以产生初始平均表面粗糙度R a a 0而制造。 然后将这样加工的部件表面在蚀刻溶液中清洁。 本发明涉及在首次使用期间对这些组分上的颗粒形成的优化。 提出通过机械加工产生至少0.2μm的初始平均表面粗糙度R a a 0,并且调整蚀刻强度和持续时间,使得实现至少10μm的实际蚀刻深度 。 通过该方法制造的用于半导体制造的石英玻璃组分的特征在于,其在其首次使用之前包括通过机械加工和蚀刻制备的表面,其具有平均表面粗糙度R a a, 0.6μm至8μm之间,并且当用一个或多个元件蚀刻该组件时,实现了时间基本上恒定的小于0.4mug /(mm×2×min)的重量损失 10%氢氟酸溶液。

    PHOTOLUMINESCENCE IMAGING OF DOPING VARIATIONS IN SEMICONDUCTOR WAFERS
    46.
    发明申请
    PHOTOLUMINESCENCE IMAGING OF DOPING VARIATIONS IN SEMICONDUCTOR WAFERS 审中-公开
    在半导体波形中掺杂变化的光致成像

    公开(公告)号:US20140212020A1

    公开(公告)日:2014-07-31

    申请号:US14238213

    申请日:2012-08-10

    申请人: Juergen Weber

    发明人: Juergen Weber

    IPC分类号: G06T7/00

    摘要: Photoluminescence-based methods are presented for facilitating alignment of wafers during metallisation in the manufacture of photovoltaic cells with selective emitter structures, and in particular for visualising the selective emitter structure prior to metallisation. In preferred forms the method is performed in-line, with each wafer inspected after formation of the selective emitter structure to identify its location or orientation. The information gained can also be used to reject defective wafers from the process line or to identify a systematic fault or inaccuracy with the process used to form the patterned emitter structure. Each wafer can additionally be inspected via photoluminescence imaging after metallisation, to determine whether the metal contacts have been correctly positioned on the selective emitter structure. The information gained after metallisation can also be used to provide feedback to the upstream process steps.

    摘要翻译: 提出了基于光致发光的方法,用于在制造具有选择性发射极结构的光伏电池期间的金属化期间促进晶片的对准,并且特别地用于在金属化之前可视化选择性发射极结构。 在优选形式中,该方法在线进行,在形成选择性发射极结构之后检查每个晶片以识别其位置或取向。 所获得的信息也可以用于从工艺线路拒绝有缺陷的晶片,或者用于形成图案化发射极结构的工艺来识别系统故障或不精确。 在金属化之后,可另外通过光致发光成像检查每个晶片,以确定金属触点是否已被正确地定位在选择性发射极结构上。 金属化后获得的信息也可用于向上游工艺步骤提供反馈。

    CAMSHAFT ADJUSTER
    47.
    发明申请
    CAMSHAFT ADJUSTER 审中-公开
    CAMSHAFT调音台

    公开(公告)号:US20130269639A1

    公开(公告)日:2013-10-17

    申请号:US13994863

    申请日:2011-09-22

    申请人: Juergen Weber

    发明人: Juergen Weber

    IPC分类号: F01L1/344

    CPC分类号: F01L1/3442

    摘要: A configuration of a camshaft phaser (1), having a drive sprocket (2), a stator (3) and a rotor (4), the hydraulic channels (5) and (14) being formed by contact surfaces (7) of the axially contiguous components, such as the drive sprocket (2), the stator (3) and the rotor (4), as well as by recesses (6).

    摘要翻译: 具有驱动链轮(2),定子(3)和转子(4)的凸轮轴相位器(1)的构造,所述液压通道(5)和(14)由所述液压通道(5)和 轴向连续的部件,例如驱动链轮(2),定子(3)和转子(4)以及凹槽(6)。

    Camshaft adjuster
    48.
    发明授权
    Camshaft adjuster 有权
    凸轮轴调节器

    公开(公告)号:US08434438B2

    公开(公告)日:2013-05-07

    申请号:US13002803

    申请日:2009-06-05

    IPC分类号: F01L1/34

    CPC分类号: F01L1/3442 Y10T29/49293

    摘要: A camshaft adjuster for an internal combustion engine of a motor vehicle, including a stator which can be driven by a crankshaft of an internal combustion engine and is located radially on the outside, a rotor which is non-rotatably connected to a camshaft and located radially on the inside, working chambers which are disposed between the rotor and stator and can be subjected to a pressure such that the rotational position of the rotor relative to the stator can be varied, and at least one sealing cover which laterally delimits the working chambers and rests against the stator and/or rotor. The sealing cover, stator and/or rotor have a convex, concave or conical contact surface, and the sealing cover can be elastically deformed by the attachment via the contact surface such that it rests against the stator and/or rotor with an increased sealing force as a result of elastic deformation.

    摘要翻译: 一种用于机动车辆的内燃机的凸轮轴调节器,包括可由内燃机的曲轴驱动并且径向位于外部的定子的转子,该转子不可旋转地连接到凸轮轴并且位于径向 在内部,工作室设置在转子和定子之间并且可以受到使得转子相对于定子的旋转位置可以改变的压力,以及至少一个侧向限定工作室的密封盖和 靠在定子和/或转子上。 密封盖,定子和/或转子具有凸形,凹形或圆锥形的接触表面,并且密封盖可以通过接触表面的附件弹性变形,使得其以增加的密封力抵靠定子和/或转子 作为弹性变形的结果。

    Illumination Systems and Methods for Photoluminescence Imaging of Photovoltaic Cells and Wafers
    49.
    发明申请
    Illumination Systems and Methods for Photoluminescence Imaging of Photovoltaic Cells and Wafers 审中-公开
    光电池和晶片的光致发光照相系统和方法

    公开(公告)号:US20130062536A1

    公开(公告)日:2013-03-14

    申请号:US13520371

    申请日:2011-01-04

    IPC分类号: G01N21/956 G01N21/64

    摘要: Methods are presented for analysing semiconductor materials (8), and silicon photovoltaic cells and cell precursors in particular, using imaging of photoluminescence (12) generated with high intensity illumination (16). The high photoluminescence signal levels (16) obtained with such illumination (30) enable the acquisition of images from moving samples with minimal blurring. Certain material defects of interest to semiconductor device manufacturers, especially cracks, appear sharper under high intensity illumination. In certain embodiments images of photoluminescence generated with high and low intensity illumination are compared to highlight selected material properties or defects.

    摘要翻译: 提出了分析半导体材料(8)和硅光伏电池和电池前体的方法,使用高强度照明产生的光致发光成像(12)(16)。 用这种照明(30)获得的高光致发光信号电平(16)使得能够以最小的模糊从移动样品中获取图像。 半导体器件制造商感兴趣的某些材料缺陷,特别是裂纹,在高强度照明下显得更加尖锐。 在某些实施例中,将用高和低强度照明产生的光致发光图像进行比较以突出显示所选择的材料性质或缺陷。

    Device for variably adjusting the control times of gas-exchange valves of an internal combustion engine
    50.
    发明授权
    Device for variably adjusting the control times of gas-exchange valves of an internal combustion engine 有权
    用于可变地调节内燃机的气体交换阀的控制时间的装置

    公开(公告)号:US08276558B2

    公开(公告)日:2012-10-02

    申请号:US12425465

    申请日:2009-04-17

    IPC分类号: F01L1/34

    摘要: A device for variably adjusting the control times of gas-exchange valves of an internal combustion engine. The device has a drive input element and a drive output element, The drive input element is placed in driving connection with a crankshaft of the internal combustion engine, the drive output element is arranged so as to be pivotable with respect to the drive input element, and the device is fastened to a camshaft which has a hollow shaft and an inner shaft which is arranged concentrically with respect to the hollow shaft. An improved mounting arrangement of the concentrically arranged shafts with respect to one another is proposed.

    摘要翻译: 一种用于可变地调节内燃机的气体交换阀的控制时间的装置。 该装置具有驱动输入元件和驱动输出元件。该驱动输入元件与内燃机的曲轴配合地驱动连接,该驱动输出元件相对于该驱动输入元件枢转配置, 并且该装置被固定到具有中空轴和相对于中空轴同心设置的内轴的凸轮轴。 提出了相对于彼此同心布置的轴的改进的安装布置。