Wafer polishing method and double-side polishing apparatus
    41.
    发明授权
    Wafer polishing method and double-side polishing apparatus 有权
    晶圆抛光法和双面抛光装置

    公开(公告)号:US08834230B2

    公开(公告)日:2014-09-16

    申请号:US13002449

    申请日:2009-06-30

    摘要: The present invention is a wafer polishing method including simultaneously polishing both surfaces of a wafer by pressing and rubbing the wafer, while holding the wafer with: a lower turn table having a flat polishing-upper-surface rotationally driven; an upper turn table having a flat polishing-lower-surface rotationally driven, the upper turn table being arranged with facing to the lower turn table; and a carrier having a wafer-holding hole for holding the wafer, wherein the polishing is performed while measuring a thickness of the wafer through a plurality of openings provided between a rotation center and an edge of the upper turn table or the lower turn table, and switching a polishing slurry with a polishing slurry having a different polishing rate during the polishing of the wafer. As a result, there is provided a wafer polishing method that can manufacture a wafer having a high flatness and a high smoothness at high productivity and high yield.

    摘要翻译: 本发明是一种晶片抛光方法,包括:通过按压和摩擦晶片同时抛光晶片的两个表面,同时用下面的转台来保持晶片:具有平坦的抛光上表面旋转驱动; 具有平面抛光下表面旋转驱动的上转台,所述上转台被布置成面向下转台; 以及具有用于保持晶片的晶片保持孔的载体,其中在通过设置在上转台或下转台的旋转中心和边缘之间的多个开口测量晶片的厚度的同时进行抛光, 以及在抛光晶片期间用抛光速率不同的抛光浆料切割抛光浆料。 结果,提供了可以以高生产率和高产率制造具有高平坦度和高平滑度的晶片的晶片抛光方法。

    Power steering apparatus for vehicle
    43.
    发明授权
    Power steering apparatus for vehicle 失效
    车辆动力转向装置

    公开(公告)号:US5513720A

    公开(公告)日:1996-05-07

    申请号:US429016

    申请日:1995-04-26

    CPC分类号: B62D6/02

    摘要: A power steering apparatus for a vehicle including a steering mechanism having a torsion bar, a rotary valve connected to an oil pump and disposed between an input shaft and an output shaft, a valve driving mechanism having a pressed portion projected on either the input shaft or the output shaft and a plunger on the one shaft of the input shaft or output shaft on which the pressed portion is not projected for pressing the pressed portion, setting a target assist force of an assist force of an assist force obtained by rotating the rotary valve in the torsion direction of the torsion bar and an assist force obtained by rotating the rotary valve in the reverse direction to the torsion direction, a plunger driving mechanism for driving the plunger so that the preset assist force is obtained, controlling the pressure itself of the rotary valve to the operation angle of the rotary valve, whereby varying the steering force of the steering wheel over a wide range of steering condition with a reduced burden to the driver.

    摘要翻译: 一种用于车辆的动力转向装置,其包括具有扭杆的转向机构,连接到油泵并设置在输入轴和输出轴之间的旋转阀,具有突出在输入轴上的按压部分的阀驱动机构或 所述输出轴和所述输入轴或输出轴的一个轴上的柱塞,所述按压部未在其上突出以挤压所述按压部,设定通过使所述旋转阀旋转而获得的辅助力的辅助力的目标辅助力 在扭杆的扭转方向和通过使旋转阀沿与扭转方向相反的方向旋转而获得的辅助力;柱塞驱动机构,用于驱动柱塞,使得获得预设的辅助力,控制压力本身 旋转阀旋转到旋转阀的操作角度,由此在一个宽的转向条件范围内改变方向盘的转向力 减轻了司机的负担。

    Suspension control system for automotive vehicle
    44.
    发明授权
    Suspension control system for automotive vehicle 失效
    汽车悬架控制系统

    公开(公告)号:US5450322A

    公开(公告)日:1995-09-12

    申请号:US228189

    申请日:1994-04-15

    摘要: A system is for controlling a suspension performance detecting the road surface condition in front of an automotive vehicle. A road surface sensor generates an output corresponding to the size of roughness on a road surface located at a predetermined distance in front of the vehicle. A suspension damping coefficient is changed to a smaller value upon lapse of a delay time. The delay time is calculated on the basis of the output of a speed sensor, the delay time being the time required for the wheel to reach the detected rough roads surface. The changing of the suspension damping coefficient occurs on condition that the output of the road surface sensor falls within a control region defined by a lower threshold value and an upper threshold value. Accordingly, the change of the suspension damping coefficient to a smaller value is inhibited when an extremely rough road surface is detected in front of the vehicle, whereby a bottoming out of the suspension which may occur is prevented when the vehicle runs over the extremely rough road surface. Further, the ride feeling is improved when the vehicle runs over a moderately rough road surface.

    摘要翻译: 一种系统用于控制检测机动车辆前方的路面状况的悬架性能。 路面传感器产生对应于位于车辆前方的预定距离的路面上的粗糙度的输出。 经过延迟时间后,悬架阻尼系数变为较小值。 基于速度传感器的输出计算延迟时间,延迟时间是车轮到达检测到的粗糙路面所需的时间。 在悬架阻尼系数的变化情况下,路面传感器的输出落在由下阈值和上阈值所限定的控制区域内。 因此,当在车辆前方检测到非常粗糙的路面时,可以防止悬架阻尼系数的变化到更小的值,从而当车辆在极其恶劣的道路上行驶时,可以防止可能发生的悬架的底部流出 表面。 此外,当车辆行驶在中等粗糙的路面上时,骑行感觉得到改善。

    Vehicle suspension apparatus
    45.
    发明授权
    Vehicle suspension apparatus 失效
    车辆悬挂装置

    公开(公告)号:US4852905A

    公开(公告)日:1989-08-01

    申请号:US238751

    申请日:1988-08-30

    摘要: A vehicle suspension apparatus having a fluid spring chamber provided for each wheel and inserted between the wheel and a vehicle body, a fluid supply unit for supplying a fluid to each fluid spring chamber through a supply valve, a fluid exhaust unit for exhausting the fluid from each fluid spring chamber through an exhaust valve, a roll amount sensor for detecting a roll amount of the vehicle body, and a roll controller for setting a control target corresponding to the roll amount detected by the roll amount sensor and executing roll control in which the supply valves corresponding to the fluid spring chambers at a contracting side with respect to a direction of roll generated in the vehicle body and the exhaust valves corresponding to the fluid spring chambers at an expanding side are opened in accordance with the control target, includes a pressure sensor for detecting an internal pressures in the fluid spring chamber at one of front and rear sides, and an internal pressure relationship memory for storing a mutual relationship between the internal pressure in the fluid spring chambers at the front and rear sides, wherein the control unit calculates control targets at the front and rear sides with reference to said mutual relationship of said internal pressure relationship memory on the basis of the internal pressure detected by the pressure sensor and executes roll control in accordance with the control targets, thereby supplying/exhausting the fluid in/from the fluid spring chambers at the front and rear sides.

    摘要翻译: 一种车辆悬架装置,具有为每个车轮提供并插入在车轮和车体之间的流体弹簧室,用于通过供给阀向每个流体弹簧室供应流体的流体供应单元,用于从流体排出流体的流体排出单元 通过排气阀的每个流体弹簧室,用于检测车体的滚动量的滚动量传感器,以及用于设定与由辊量传感器检测到的滚动量相对应的控制目标的滚动控制器,并执行滚动控制,其中 相对于在车体中产生的辊的收缩侧的流体弹簧室对应的供给阀和与膨胀侧的流体弹簧室对应的排气阀根据控制对象而打开,包括压力 传感器,用于检测前侧和后侧中的一个处的流体弹簧室中的内部压力,以及内部压力相关性 用于存储前侧和后侧的流体弹簧室中的内部压力之间的相互关系的存储器,其中控制单元参照所述内部压力关系存储器的所述相互关系来计算前侧和后侧的控制目标 基于由压力传感器检测到的内部压力,并根据控制目标执行辊控制,从而在前侧和后侧向流体弹簧室供应/排出流体。

    Vehicle suspension apparatus
    46.
    发明授权
    Vehicle suspension apparatus 失效
    车辆悬挂装置

    公开(公告)号:US4697237A

    公开(公告)日:1987-09-29

    申请号:US798232

    申请日:1985-11-14

    IPC分类号: B60G17/016 B60G21/06

    摘要: A microcomputer performs roll control and communication control. In roll control, when the steering state detecting means and vehicle velocity detecting means detect a factor which causes a roll state of the vehicle body, a second control signal is produced to open desired supply and exhaust control valve so as to supply a preset amount of fluid to the fluid spring chambers of contracted suspension units and to exhaust a preset amount of fluid from the fluid spring chambers of stretched suspension units. In communication control, a first control signal is supplied to the communicating means to open the communication control valve when the steering state sensor detects that the steering angle falls within a preset steering angle and to close the communication control valve otherwise. After generation of the first control signal, when the steering state sensor detects that the steering direction of the steering wheel is in a return direction toward the neutral position and the steering angular velocity is lower than a preset steering angular velocity, a third control signal is supplied to the communicating means so as to open the communication control valve. When the steering state sensor detects, a third preset time after a second preset time from the generation of the third control signal, that the steering angle has reached the preset neutral range, a fourth control signal is produced to close the communication control valve for a fourth preset time.

    摘要翻译: 微机执行滚动控制和通信控制。 在滚动控制中,当转向状态检测装置和车速检测装置检测到导致车体的滚动状态的因素时,产生第二控制信号以打开所需的排气控制阀,以便提供预设量的 流体到收缩悬挂单元的流体弹簧室,并且从拉伸的悬挂单元的流体弹簧室排出预设量的流体。 在通信控制中,当转向状态传感器检测到转向角落在预设转向角内并且关闭通信控制阀时,第一控制信号被提供给通信装置以打开通信控制阀。 在第一控制信号的生成之后,当转向状态传感器检测到方向盘的转向方向朝向中立位置的返回方向且转向角速度低于预设转向角速度时,第三控制信号为 提供给通信装置以打开通信控制阀。 当转向状态传感器检测到来自第三控制信号的生成的第二预设时间之后的第三预设时间,转向角已经达到预设中立范围时,产生第四控制信号,以关闭通信控制阀 第四预设时间。

    Vehicle suspension apparatus
    47.
    发明授权
    Vehicle suspension apparatus 失效
    车辆悬挂装置

    公开(公告)号:US4695074A

    公开(公告)日:1987-09-22

    申请号:US747651

    申请日:1985-06-21

    摘要: In a vehicle suspension apparatus having air spring chambers between the vehicle body and the respective wheels to perform height and position control modes by controlling supply control valve means for supplying air to the air spring chambers and exhaust control valve means for exhausting air from the air spring chambers, the vehicle suspension apparatus has a high-pressure reserve tank connected to the respective chambers through the supply control valves, a first compressor for supplying compressed air to the high-pressure reserve tank, a low-pressure reserve tank connected to the respective chambers through the corresponding exhaust control valves and the suction port of the first compressor, and a second compressor for supplying atmospheric air to the high-pressure reserve tank through a check valve and a drier arranged between the check valve and the second compressor. In the position control mode, the compressed air is exhausted from the chambers to the low-pressure reserve tank through the exhaust control valves. In the height control mode, the compressed air is slowly exhausted from the corresponding chambers through the exhaust control valve means via the drier, thereby regenerating the drier during height down control.

    摘要翻译: 在车辆悬架装置中,通过控制用于向空气弹簧室供给空气的供给控制阀装置和用于从空气弹簧排出空气的排气控制阀装置,在车体和各车轮之间具有空气弹簧室,以执行高度和位置控制模式 车辆悬架装置具有通过供给控制阀连接到各个室的高压备用箱,用于向高压备用箱供给压缩空气的第一压缩机,连接到各室的低压备用箱 通过相应的排气控制阀和第一压缩机的吸入口,以及第二压缩机,其通过设置在止回阀和第二压缩机之间的止回阀和干燥器向大气储存箱供给大气。 在位置控制模式中,压缩空气通过排气控制阀从室排出到低压备用箱。 在高度控制模式中,通过干燥器,压缩空气通过排气控制阀装置从相应的室缓慢排出,从而在高度降低控制期间再生干燥器。

    Vehicle suspension apparatus
    48.
    发明授权
    Vehicle suspension apparatus 失效
    车辆悬挂装置

    公开(公告)号:US4673193A

    公开(公告)日:1987-06-16

    申请号:US735447

    申请日:1985-05-17

    摘要: In a vehicle suspension apparatus, front and rear wheel suspension units respectively have air spring chambers. Air is supplied to predetermined air spring chambers from an air source through a supply control valve, and at the same time air is exhausted from remaining air spring chambers through an exhaust control valve. Three-directional valves are inserted between the respective air spring chambers and the exhaust control valve. One end of a front wheel communication path is connected to the front left wheel three-directional valve and the other end of the path is connected to the front right wheel three-directional valve. Similarly, one end of a rear wheel communication path is connected to the rear left wheel three-directional valve and the other end of the path is connected to the rear right wheel three-directional valve. The air passing through the supply control valve is supplied to the front wheel air spring chambers through the front wheel communication path or to the rear wheel air spring chambers through the rear wheel communication path. Each of the three-directional valves can take the first position where the air spring chambers communicate with the supply control valve or the second position where the air spring chambers communicate with the exhaust control valve, thereby decreasing the numbers of valves and paths so as to perform position control.

    摘要翻译: 在车辆悬架装置中,前轮和后轮悬挂单元分别具有空气弹簧室。 空气通过供给控制阀从空气源供给到规定的空气弹簧室,同时空气从剩余的空气弹簧室排出通过排气控制阀。 三相阀插入相应的空气弹簧室和排气控制阀之间。 前轮连通路的一端与左前轮三通阀连接,另一端与右前轮三通阀连接。 类似地,后轮连通路的一端连接到左后轮三通阀,另一端连接到右后轮三通阀。 通过供给控制阀的空气通过前轮连通路径或后轮空气弹簧室经由后轮连通路径被供给到前轮空气弹簧室。 每个三向阀都可以进入空气弹簧室与供应控制阀连通的第一位置或空气弹簧室与排气控制阀连通的第二位置,从而减少阀和通道的数量,从而 执行位置控制。

    Vehicle suspension apparatus
    49.
    发明授权
    Vehicle suspension apparatus 失效
    车辆悬挂装置

    公开(公告)号:US4669750A

    公开(公告)日:1987-06-02

    申请号:US765868

    申请日:1985-08-13

    摘要: A vehicle suspension apparatus has air spring chamber provided at a suspension unit for supporting a rear wheel, air supply means for supplying air to the air spring chamber of the suspension unit for supporting the rear wheel through supply opening and closing valve, air exhaust means for exhausting air from the air spring means of the suspension unit for supporting the rear wheel, a parking brake sensor for detecting the operated state of a parking brake, and a shift position detecting sensor for detecting the shift position of an automatic transmission having a fluid drive unit for transmitting drive power to wheels. The parking brake sensor detects whether or not the parking brake is engaged. The shift position detecting sensor detects whether or not the shift position of the automatic transmission is operated from any of parking position (P) and neutral position (N) to running position (D, L, 2) to raise the vehicle height of the rear wheel side to supply air to the air spring chamber of the rear wheel side. The fact that the shifting position of the automatic transmission is operated from either the parking position (P) or the neutral position (N) to the running position (R) is detected to exhaust air from the air spring chamber of the rear wheel side to lower the vehicle height of the rear wheel.

    摘要翻译: 车辆悬架装置具有设置在用于支撑后轮的悬架单元处的空气弹簧室,用于将空气供给到用于通过供给开闭阀支撑后轮的悬架单元的空气弹簧室的空气供给装置,用于 从用于支撑后轮的悬架单元的空气弹簧装置排出空气,用于检测驻车制动器的操作状态的驻车制动器传感器和用于检测具有流体驱动的自动变速器的换档位置的换档位置检测传感器 将驱动力发送到车轮的单元。 驻车制动器传感器检测驻车制动器是否接合。 换档位置检测传感器检测自动变速器的换档位置是否从停车位置(P)和空档位置(N)到行驶位置(D,L,2)中的任何一个操作,以提高后方的车辆高度 车轮侧向后轮侧的空气弹簧室供给空气。 检测到自动变速器的变速位置从停车位置(P)或空档位置(N)到行驶位置(R)的操作,将从后轮侧的空气弹簧室排出的空气排出到 降低后轮的车高。

    Vehicle suspension apparatus
    50.
    发明授权
    Vehicle suspension apparatus 失效
    车辆悬挂装置

    公开(公告)号:US4669749A

    公开(公告)日:1987-06-02

    申请号:US799430

    申请日:1985-11-19

    摘要: In a vehicle suspension apparatus comprising communication control means for producing a disabling control signal for disabling the communicating solenoid valves when conditions are satisfied that the velocity detected by the velocity sensor exceeds a preset velocity and the steering angle detected by the steering sensor exceeds a preset steering angle and for producing an enabling control signal when the conditions are not satisfied, and roll control means for producing a control command signal for opening desired ones of the supply and exhaust control valves for a preset control time in order to supply a preset amount of fluid to contracted fluid spring chambers along a roll direction and for exhausting a preset amount of fluid from stretched fluid spring chambers when the conditions are satisfied, the preset velocity as one of the conditions determined by the communication control means is set to have a first value when the communicating solenoid valves are enabled and to have a second value larger than the first value when the communicating solenoid valves are disabled. With this apparatus, passengers experience uniform centrifugal force sensations when roll control is started and cancelled. Discomfort experienced by passengers during and after roll control is reduced to a minimum.

    摘要翻译: 一种车辆悬架装置,包括通信控制装置,用于当满足速度传感器检测到的速度超过预设速度并且由转向传感器检测到的转向角超过预设转向时,产生用于禁用通信电磁阀的禁用控制信号 并且当不满足条件时产生使能控制信号;以及辊控制装置,用于产生用于在预设控制时间内打开所需供油和排气控制阀的控制命令信号,以便提供预设量的流体 沿着卷轴方向收缩流体弹簧室,并且当满足条件时,从拉伸的流体弹簧室排出预设量的流体,作为由通信控制装置确定的条件之一的预设速度被设置为具有第一值, 通信电磁阀被使能并且具有秒 当通信电磁阀禁用时,该值大于第一个值。 使用该装置,当滚动控制开始和取消时,乘客经历均匀的离心力感觉。 乘客在滚动控制期间和之后经历的不舒适度降至最低。