公开(公告)号：US07847566B2

公开(公告)日：2010-12-07

申请号：US11940432

申请日：2007-11-15

Applicant: Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

Inventor： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC: G01R31/26

CPC classification number: G09G3/006 ,  G01R31/2893 ,  G01R31/305

Abstract: A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.

Abstract translation: 描述了一种在基板上测试电子器件的方法。 该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。

公开(公告)号：US20100188666A1

公开(公告)日：2010-07-29

申请号：US11813334

申请日：2006-01-05

Applicant: Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

Inventor： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

IPC: G01B11/14

CPC classification number: G09G3/006 ,  G01R31/305 ,  G01R31/308 ,  G01R35/005 ,  H01J2237/2826

Abstract: The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period Ps in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period Ps, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections intentionally deviate either in the beam target period P1 from the structure period Ps and/or in the beam target position L1 from the position L.

Abstract translation: 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期Ps，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期Ps，由此基准校准用于偏转器的控制，并且其中光束目标偏转有意地在光束目标周期P1中与结构周期Ps和/或光束目标位置L1从位置L 。

公开(公告)号：US07353929B2

公开(公告)日：2008-04-08

申请号：US11241335

申请日：2005-09-30

Applicant: Matthias Brunner ,  Joachim Lindner

Inventor： Matthias Brunner ,  Joachim Lindner

IPC: F16D23/14

CPC classification number: F16D23/12 ,  F16D2023/141

Abstract: A clutch lever arrangement for a clutch, especially for a commercial motor vehicle clutch, having a clutch lever pivotably supported on a bearing point on a stationary component. The lever has a force-application section for introducing an actuating force by way of an actuating element and a force-transmission section for transmitting the actuating force to a clutch-release bearing, which is mounted with freedom to slide axially back and forth in the pivot plane of the clutch lever. To reduce undesirable vibrations of the clutch lever, the lever is guided in its pivot plane by a guide member.

Abstract translation: 一种用于离合器的离合器杆装置，特别是用于商用汽车离合器，其具有可枢转地支撑在固定部件上的支承点上的离合器杆。 杠杆具有用于通过致动元件引导致动力的力施加部分和用于将致动力传递到离合器释放轴承的力传递部分，该离合器释放轴承安装成可自由地沿轴向前后滑动 离合器杆的枢转平面。 为了减少离合器杆的不期望的振动，杆通过引导构件在其枢转平面中被引导。

公开(公告)号：US07075323B2

公开(公告)日：2006-07-11

申请号：US10901936

申请日：2004-07-29

Applicant: Matthias Brunner ,  Shinichi Kurita ,  Wendell T. Blonigan ,  Edgar Kehrberg

Inventor： Matthias Brunner ,  Shinichi Kurita ,  Wendell T. Blonigan ,  Edgar Kehrberg

IPC: G01R31/26

CPC classification number: H01J37/185 ,  G01R31/2886 ,  H01J2237/204

Abstract: A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.

公开(公告)号：US20050212545A1

公开(公告)日：2005-09-29

申请号：US10115685

申请日：2002-04-04

Applicant: Matthias Brunner ,  Ralf Schmid

Inventor： Matthias Brunner ,  Ralf Schmid

IPC: G01R31/302 ,  G01N23/225 ,  G01R1/06 ,  G01R31/26 ,  G01R31/307 ,  G01R31/311 ,  G02F1/13 ,  H01L21/66

CPC classification number: G01R31/311 ,  G01R31/307

Abstract: A method and an apparatus for testing the function of a plurality of microstructural elements by irradiation with particle radiation. All of the microstructural elements detected as malfunctioning are listed in a first error list in a first test sequence. The microstructural elements listed in the first error list are tested once more in at least one further test sequence and at least the result of the test sequence last carried out is evaluated to establish the overall test result. The first test sequence is designed so that, if possible, all of the microstructural elements which are actually malfunctioning are detected. The invention further relates to a method for producing microstructural elements which are constructed as a plurality on a substrate and are tested according to the above test method.

Abstract translation: 一种用于通过用粒子辐射照射来测试多个微结构元件的功能的方法和装置。 检测为故障的所有微结构元件都列在第一个测试序列的第一个错误列表中。 在第一个错误列表中列出的微结构元素在至少一个进一步的测试序列中再次被测试，并且至少对上次执行的测试序列的结果进行评估以建立整体测试结果。 第一测试序列被设计成使得如果可能的话，检测到所有实际故障的微结构元件。 本发明还涉及一种用于制造在基板上多个构造并根据上述测试方法测试的显微结构元件的方法。

公开(公告)号：US20050179451A1

公开(公告)日：2005-08-18

申请号：US10889695

申请日：2004-07-12

Applicant: Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

Inventor： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC: G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

CPC classification number: G09G3/006 ,  G01R31/2893 ,  G01R31/305

Abstract: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

Abstract translation: 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。

公开(公告)号：US06465795B1

公开(公告)日：2002-10-15

申请号：US09536897

申请日：2000-03-28

Applicant: Juan R. Madonado ,  Lee H. Veneklasen ,  Matthias Brunner ,  Ralf Schmid

Inventor： Juan R. Madonado ,  Lee H. Veneklasen ,  Matthias Brunner ,  Ralf Schmid

IPC: H01J4000

CPC classification number: H01J37/026 ,  G01N23/225 ,  H01J2237/0047 ,  H01J2237/3175

Abstract: In a charged particle or electron beam system, gas, such as argon or helium, is introduced over the surface of a substrate and ionized to neutralize charge accumulating on the surface from interactions caused by the impinging charged particles. The gas can be distributed throughout the gas chamber or confined to an area above the substrate. The radiation beam to ionize the gas can be directed across or towards the surface of the substrate. In the latter case, the gas pressure may be reduced to zero.

Abstract translation: 在带电粒子或电子束系统中，诸如氩或氦的气体被引入到衬底的表面上并电离以中和由撞击的带电粒子引起的相互作用累积在表面上的电荷。 气体可以分布在整个气体室中或限制在基板上方的区域中。 用于离子化气体的辐射束可以被引导穿过或朝向衬底的表面。 在后一种情况下，气体压力可以减小到零。

公开(公告)号：US5045783A

公开(公告)日：1991-09-03

申请号：US524850

申请日：1990-05-18

Applicant: Matthias Brunner ,  Hermann Wessely

Inventor： Matthias Brunner ,  Hermann Wessely

IPC: G01R31/302 ,  G01R31/306

CPC classification number: G01R31/2805 ,  G01R31/306

Abstract: Modified scanning electron microscopes are usually employed for the implementation of methods for testing the electrical properties of printed circuit boards with the electron probe. As a consequence of the deflection, chromatic aberration and of the aberrations of the objective lens increasing greatly with the deflection angle, however, their scanning field is limited. In order to be able to test larger printed circuit boards without involved improvement of electron optics, it is proposed that the printed circuit board be subdivided into a plurality of adjoining regions, whereby the size of the regions respectively approximately corresponds to the size of the scanning field. Each of the networks lying only within one of the regions is then tested in a known manner. In order to detect shorts between networks of different regions as well as interruptions between contact points of networks extending beyond regions, the known testing method is followed by a further test cycle.

Abstract translation: 通常使用改进的扫描电子显微镜来实现用电子探针测试印刷电路板的电性能的方法。 然而，由于偏转，色差和物镜的像差随着偏转角而大幅度增加的结果是它们的扫描场受到限制。 为了能够在不涉及电子光学改进的情况下测试较大的印刷电路板，建议将印刷电路板细分成多个相邻区域，由此区域的大小分别大约对应于扫描的尺寸 领域。 然后以已知的方式测试仅位于一个区域内的每个网络。 为了检测不同区域的网络之间的短路以及延伸到区域之外的网络的接触点之间的中断，已知的测试方法之后是进一步的测试周期。

公开(公告)号：US4983833A

公开(公告)日：1991-01-08

申请号：US393221

申请日：1989-08-14

Applicant: Matthias Brunner ,  Ralf Schmid ,  Michael Regula

Inventor： Matthias Brunner ,  Ralf Schmid ,  Michael Regula

IPC: H01J37/147 ,  G01Q30/02 ,  G01Q90/00 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/268 ,  H01J37/244 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507

Abstract: A device for the detection of secondary electrons triggered at a large-area specimen is composed of a tube electrode arranged concentrically relative to the primary beam axis of an electron beam measuring device and an electrostatic or magnetic octupole for the deflection of the secondary electrons in the direction of a detector. An opposing electrical field is formed by two hemispherically shaped electrodes. The tube electrode which is arranged immediately above the specimen, and preferably has a circular cross-sectional area, whereby the tube diameter is selected larger than the diagonal of the specimen. An electrical extraction field that is rotationally symmetric with respect to the primary beam axis is generated inside the device. The secondary particles will be accelerated in the direction of the deflection unit.In the electrical extraction field, the particles are detected independently of the location of the respective measuring point inside the scanned field that is 20.times.20 cm.sup.2 in size.

Abstract translation: 用于检测在大面积标本处触发的二次电子的装置由相对于电子束测量装置的主光束轴同心布置的管电极和用于二次电子的偏转的静电或磁八极 检测器的方向。 相反的电场由两个半球形电极形成。 管状电极配置在试样的正上方，优选具有圆形的横截面积，从而选择管径大于试样的对角线。 在器件内产生相对于主光束轴旋转对称的电提取场。 次级粒子将沿着偏转单元的方向被加速。 在电提取领域中，独立于扫描场内相应测量点的尺寸为20×20cm 2的位置来检测颗粒。

公开(公告)号：US20190256872A1

公开(公告)日：2019-08-22

申请号：US16402341

申请日：2019-05-03

Applicant: Matthias Brunner

Inventor： Matthias Brunner

IPC: C12P5/02 ,  C12M1/12 ,  C12M1/00 ,  C12M1/107 ,  C12M1/06

Abstract: The invention relates to means and methods for the biomethanation of H2 and CO2. In particular, the invention relates to devices for producing methane by means of methanogenic microorganisms by converting H2 and CO2, wherein the devices comprise at least one reactor, an aqueous medium, which is provided in the at least one reactor, wherein the methanogenic microorganisms are contained in the aqueous medium, a feeding apparatus, which is designed to introduce H2 and CO2 into the at least one reactor, wherein H2 and CO2 form a gaseous mixture therein, and a reaction-increasing device, which is designed to enlarge the contact surface between the aqueous medium having the methanogenic microorganisms and the gaseous mixture. The invention further relates to methods for producing methane in a reactor device by means of methanogenic microorganisms.