公开(公告)号：US07342218B2

公开(公告)日：2008-03-11

申请号：US10327534

申请日：2002-12-19

申请人： Gilad Almogy ,  Haim Feldman

发明人： Gilad Almogy ,  Haim Feldman

IPC分类号： H01J3/14 ,  G01N27/00

CPC分类号： G01N21/8806 ,  G02B26/10

摘要： A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.

摘要翻译： 一种用于成像和成像系统的方法，所述系统包括以下步骤：（i）沿着扫描轴在表面上扫描相干辐射束; （ii）将光束聚焦到表面上的光斑，使得光点沿扫描轴具有预定尺寸; （iii）在扫描光束的同时横向扩散光束，使得光束在横向于扫描轴线的方向上覆盖基本上比预定尺寸宽的区域; 和（iii）在扫描光束时捕获从表面散射的辐射，以便形成表面的图像。

公开(公告)号：US20060221331A1

公开(公告)日：2006-10-05

申请号：US11425101

申请日：2006-06-19

申请人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

发明人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/956

摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

摘要翻译： 用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。 根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。 反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。 根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

公开(公告)号：US20060048090A1

公开(公告)日：2006-03-02

申请号：US10928537

申请日：2004-08-27

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G06F17/50 ,  G21K5/00

CPC分类号： G03F1/84 ,  G03F1/36 ,  G03F7/705 ,  G03F7/706

摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

公开(公告)号：US08488117B2

公开(公告)日：2013-07-16

申请号：US13224096

申请日：2011-09-01

申请人： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

发明人： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

IPC分类号： G01N21/00

CPC分类号： G02F1/29 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/11 ,  G02F2001/294

摘要： An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.

摘要翻译： 检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。 移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。 行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。 检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。

公开(公告)号：US20080152212A1

公开(公告)日：2008-06-26

申请号：US11966630

申请日：2007-12-28

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G06K9/00

CPC分类号： G03F1/84 ,  G03F1/36 ,  G03F7/705 ,  G03F7/706

摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

公开(公告)号：US07379161B2

公开(公告)日：2008-05-27

申请号：US11361418

申请日：2006-02-24

申请人： Gilad Almogy ,  Haim Feldman ,  Meir Aloni

发明人： Gilad Almogy ,  Haim Feldman ,  Meir Aloni

IPC分类号： G03B27/54 ,  G03B27/42

CPC分类号： G03F7/70208 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70358

摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.

摘要翻译： 一种用于在基板上记录预定多重强度级图像的打印机和方法，所述方法包括以下步骤：将预定图像转换成多个强度级相关图像; 将光束转换成多个光束阵列; 调制每个光束阵列以响应于要记录在所述衬底上的对应的强度级相关图像来提供调制的光束阵列; 引导每个调制的光束阵列撞击在基底上; 并且重复在移动衬底的同时转换，调制和引导步骤，直到预定图像被成像在衬底上。 打印机包括可编程光辐射源，用于提供多个调制光束阵列并用于引导调制的光束阵列撞击衬底，每个被调制的光束阵列响应于对应于对应的亮度级相关图像的输入信号被调制 被记录在基板上; 而强度级相关图像的叠加在衬底上形成预定义的图像，以及用于移动衬底的可移动台，直到预定图像在衬底上成像为止。

公开(公告)号：US07286239B2

公开(公告)日：2007-10-23

申请号：US11002926

申请日：2004-12-01

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G01B9/02

CPC分类号： G01B9/02081 ,  G01B9/02003 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/95607

摘要： A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.

摘要翻译： 用于光学评估样品的方法包括扫描样品上的相干辐射束，由此辐射从样品中散射，同时将扫描光束的一部分朝向衍射光栅引导，使得光束的该部分被扫描 光栅，由此频移参考光束从光栅衍射。 散射辐射和频移参考光束在检测器处组合以产生光学外差信号。

公开(公告)号：US07187439B2

公开(公告)日：2007-03-06

申请号：US11127914

申请日：2005-05-11

申请人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

发明人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/956

摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

摘要翻译： 用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。 根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。 反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。 根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

公开(公告)号：US06943898B2

公开(公告)日：2005-09-13

申请号：US10353754

申请日：2003-01-28

申请人： Alexander Libinson ,  Haim Feldman ,  Daniel Some ,  Boris Goldberg

发明人： Alexander Libinson ,  Haim Feldman ,  Daniel Some ,  Boris Goldberg

IPC分类号： G01N15/14 ,  G01N21/956 ,  G02B21/14 ,  G01B9/02

CPC分类号： G02B21/14 ,  G01N21/95607

摘要： Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.

摘要翻译： 用于光学评估样本的装置包括适于产生相干辐射束的辐射源和适用于聚焦光束的行进透镜光学器件，以便在样品的表面上产生第一和第二斑点并扫描斑点 一起在表面。 第一和第二点之间的距离响应于样品的重复图案的间距。 收集光学器件被定位成收集从第一和第二点散射的辐射并聚焦所收集的辐射，以便产生干涉图案。 检测器检测干涉图案的变化。

公开(公告)号：US20050179907A1

公开(公告)日：2005-08-18

申请号：US11002926

申请日：2004-12-01

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G01B9/02 ,  G01N21/95 ,  G01N21/956

CPC分类号： G01B9/02081 ,  G01B9/02003 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/95607

摘要： A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.