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41.
公开(公告)号:US20150179644A1
公开(公告)日:2015-06-25
申请号:US14615762
申请日:2015-02-06
Applicant: GLOBALFOUNDRIES, Inc.
Inventor: Murat Kerem Akarvardar , Xiuyu Cai , Ajey Poovannummoottil Jacob
IPC: H01L27/088 , H01L29/06
CPC classification number: H01L27/0886 , H01L21/76208 , H01L21/823431 , H01L21/823821 , H01L29/0653
Abstract: Fin field effect transistor integrated circuits and methods for producing the same are provided. A fin field effect transistor integrated circuit includes a plurality of fins extending from a semiconductor substrate. Each of the plurality of fins includes a fin sidewall, and each of the plurality of fins extends to a fin height such that a trough with a trough base is defined between adjacent fins. A second dielectric is positioned within the trough, where the second dielectric directly contacts the semiconductor substrate at the trough base. The second dielectric extends to a second dielectric height less than the fin height such that protruding fin portions extend above the second dielectric. A first dielectric is positioned between the fin sidewall and the second dielectric.
Abstract translation: 提供了Fin场效应晶体管集成电路及其制造方法。 翅片场效应晶体管集成电路包括从半导体衬底延伸的多个鳍。 多个翅片中的每一个包括翅片侧壁,并且多个翅片中的每一个延伸到翅片高度,使得具有槽底部的凹槽限定在相邻翅片之间。 第二电介质位于槽内,其中第二电介质在槽底部直接接触半导体衬底。 第二电介质延伸到小于翅片高度的第二介电高度,使得突出的翅片部分在第二电介质上方延伸。 第一电介质位于翅片侧壁和第二电介质之间。
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公开(公告)号:US10921526B2
公开(公告)日:2021-02-16
申请号:US16515779
申请日:2019-07-18
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Structures for a grating coupler and methods of fabricating a structure for a grating coupler. A silicide layer is formed on a patterned section of a semiconductor layer. The grating structures of a grating coupler are formed over the silicide layer and the section of the semiconductor layer.
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公开(公告)号:US20200381476A1
公开(公告)日:2020-12-03
申请号:US16425360
申请日:2019-05-29
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Ajey Poovannummoottil Jacob , Amogh Agrawal
IPC: H01L27/22 , H01L27/24 , H01L23/528 , H01L45/00 , G11C11/16 , H01L43/10 , H01F41/32 , H01F10/32 , H01L43/02 , G11C13/00
Abstract: Structures for a bitcell of a non-volatile memory and methods of fabricating and using such structures. Non-volatile memory elements are arranged in a Wheatstone bridge arrangement having a first terminal and a second terminal. A first field-effect transistor is coupled with the first terminal of the Wheatstone bridge arrangement, and a second field-effect transistor is coupled with the second terminal of the Wheatstone bridge arrangement.
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公开(公告)号:US10795082B1
公开(公告)日:2020-10-06
申请号:US16540452
申请日:2019-08-14
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Ajey Poovannummoottil Jacob , Yusheng Bian , Theodore Letavic , Kenneth J. Giewont , Steven M. Shank
Abstract: Structures that include a Bragg grating and methods of fabricating a structure that includes a Bragg grating. Bragg elements are positioned adjacent to a waveguide. The Bragg elements are separated by grooves that alternate with the Bragg elements. A dielectric layer includes portions positioned to close the grooves to define airgaps. The airgaps are respectively arranged between adjacent pairs of the Bragg elements. The Bragg elements may be used to form the Bragg grating.
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公开(公告)号:US10746907B2
公开(公告)日:2020-08-18
申请号:US15945347
申请日:2018-04-04
Applicant: GLOBALFOUNDRIES INC.
Inventor: Ajey Poovannummoottil Jacob , Yusheng Bian
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with structured cladding and methods of manufacture. A structure includes: a grating coupler in a dielectric material; a back end of line (BEOL) multilayer stack over the dielectric material; and a multi-layered cladding structure of alternating materials directly on the BEOL multilayer stack.
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公开(公告)号:US10684530B1
公开(公告)日:2020-06-16
申请号:US16288634
申请日:2019-02-28
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob , Abu Thomas
IPC: G02F1/29
Abstract: Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. An electro-optic modulator is arranged over a portion of a waveguide core. The electro-optic modulator includes an electrode, an active layer arranged adjacent to the electrode, and a dielectric layer including a portion that has a lateral arrangement between the electrode and the active layer. The active layer is composed of a material having a refractive index that is a function of a bias voltage applied to the electrode and the active layer.
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公开(公告)号:US20200012045A1
公开(公告)日:2020-01-09
申请号:US16026596
申请日:2018-07-03
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Waveguide bends and methods of fabricating waveguide bends. A first waveguide bend is contiguous with a waveguide. A second waveguide bend is spaced from a surface at an inner radius of the first waveguide bend by a gap. The second waveguide bend may have a substantially concentric arrangement with the first waveguide bend.
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48.
公开(公告)号:US10411069B1
公开(公告)日:2019-09-10
申请号:US15898547
申请日:2018-02-17
Applicant: GLOBALFOUNDRIES, Inc.
Inventor: Ajey Poovannummoottil Jacob , Jaiswal Akhilesh
Abstract: Integrated circuits and methods for fabricating integrated circuits are provided herein. The integrated circuit includes a first MTJ stack overlying a semiconductor substrate. The integrated circuit further includes a second lower MTJ stack spaced from the first lower MTJ stack and overlying the semiconductor substrate. The integrated circuit further includes a dielectric layer disposed between the first lower MTJ stack and the second lower MTJ stack. The dielectric layer is overlying the semiconductor substrate. The integrated circuit further includes a spin orbit torque coupling layer overlying the first lower MTJ stack, the dielectric layer, and the second lower MTJ stack. The integrated circuit further includes a first upper MTJ stack overlying the spin orbit torque coupling layer and the first lower MTJ stack. The integrated circuit further includes a second upper MTJ stack overlying the spin orbit torque coupling layer and the second lower MTJ stack.
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49.
公开(公告)号:US20190259808A1
公开(公告)日:2019-08-22
申请号:US15898547
申请日:2018-02-17
Applicant: GLOBALFOUNDRIES, Inc.
Inventor: Ajey Poovannummoottil Jacob , Jaiswal Akhilesh
Abstract: Integrated circuits and methods for fabricating integrated circuits are provided herein. The integrated circuit includes a first MTJ stack overlying a semiconductor substrate. The integrated circuit further includes a second lower MTJ stack spaced from the first lower MTJ stack and overlying the semiconductor substrate. The integrated circuit further includes a dielectric layer disposed between the first lower MTJ stack and the second lower MTJ stack. The dielectric layer is overlying the semiconductor substrate. The integrated circuit further includes a spin orbit torque coupling layer overlying the first lower MTJ stack, the dielectric layer, and the second lower MTJ stack. The integrated circuit further includes a first upper MTJ stack overlying the spin orbit torque coupling layer and the first lower MTJ stack. The integrated circuit further includes a second upper MTJ stack overlying the spin orbit torque coupling layer and the second lower MTJ stack.
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公开(公告)号:US10381406B1
公开(公告)日:2019-08-13
申请号:US15898555
申请日:2018-02-17
Applicant: GLOBALFOUNDRIES, Inc.
Inventor: Ajey Poovannummoottil Jacob , Jaiswal Akhilesh
CPC classification number: H01L27/228 , G11C11/161 , G11C11/1673 , G11C11/1675 , G11C11/18 , H01L43/04 , H01L43/065 , H01L43/10 , H01L43/14
Abstract: Integrated circuits and methods for fabricating integrated circuits are provided herein. The integrated circuit includes a plurality of MRAM structures. The integrated circuit further includes a first lower MTJ stack with the first lower MTJ stack including a first lower free layer. The integrated circuit further includes a spin orbit torque coupling layer overlying the first lower MTJ stack. The integrated circuit further includes a first upper MTJ stack overlying the spin orbit torque coupling layer and the first lower MTJ stack with the first upper MTJ stack including a first upper free layer. The switching energy barrier for each of the first lower free layer and the first upper free layer is reduced in the presence of an electrical voltage passing through each of the MTJ stacks. The first lower free layer and said first upper free layer are configured to have magnetizations independent of each other.
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