公开(公告)号：US08141514B2

公开(公告)日：2012-03-27

申请号：US11686551

申请日：2007-03-15

申请人： Masanobu Honda ,  Naoki Matsumoto ,  Satoshi Tanaka ,  Yutaka Matsui

发明人： Masanobu Honda ,  Naoki Matsumoto ,  Satoshi Tanaka ,  Yutaka Matsui

IPC分类号： C23C16/00 ,  C23C16/50 ,  C23F1/00 ,  H01L21/306

CPC分类号： H01J37/32532 ,  H01J37/32082 ,  H01J37/32623 ,  H01L21/3065

摘要： A plasma processing apparatus having a substrate processing chamber, which enables leakage of plasma into an exhaust space to be prevented. The substrate processing chamber has therein a processing space in which plasma processing is carried out on a substrate, an exhaust space for exhausting gas out of the processing space, and an exhaust flow path that communicates the exhaust space and the processing space together. The plasma processing apparatus further has a grounding component that is electrically grounded and is disposed in the exhaust flow path. The grounding component has a conducting portion made of a conductive material, and the conducting portion has an exposed area exposed to the exhaust flow path in a range of 100 to 1000 cm2.

摘要翻译： 一种具有基板处理室的等离子体处理装置，能够防止等离子体泄漏到排气空间。 基板处理室具有处理空间，其中在基板上执行等离子体处理，将用于从处理空间排出气体的排气空间和将排气空间与处理空间连通在一起的排气流路。 等离子体处理装置还具有电接地并设置在排气流路中的接地部件。 接地部件具有由导电材料制成的导电部分，导电部分具有暴露于排气流路的暴露区域，范围为100至1000cm 2。

公开(公告)号：US20070224817A1

公开(公告)日：2007-09-27

申请号：US11686551

申请日：2007-03-15

申请人： Masanobu HONDA ,  Naoki Matsumoto ,  Satoshi Tanaka ,  Yutaka Matsui

发明人： Masanobu HONDA ,  Naoki Matsumoto ,  Satoshi Tanaka ,  Yutaka Matsui

IPC分类号： C23F1/00 ,  G06F19/00 ,  H01L21/302 ,  C23C16/00

CPC分类号： H01J37/32532 ,  H01J37/32082 ,  H01J37/32623 ,  H01L21/3065

摘要： A plasma processing apparatus having a substrate processing chamber, which enables leakage of plasma into an exhaust space to be prevented. The substrate processing chamber has therein a processing space in which plasma processing is carried out on a substrate, an exhaust space for exhausting gas out of the processing space, and an exhaust flow path that communicates the exhaust space and the processing space together. The plasma processing apparatus further has a grounding component that is electrically grounded and is disposed in the exhaust flow path. The grounding component has a conducting portion made of a conductive material, and the conducting portion has an exposed area exposed to the exhaust flow path in a range of 100 to 1000 cm2.

摘要翻译： 一种具有基板处理室的等离子体处理装置，能够防止等离子体泄漏到排气空间。 基板处理室具有处理空间，其中在基板上执行等离子体处理，将用于从处理空间排出气体的排气空间和将排气空间与处理空间连通在一起的排气流路。 等离子体处理装置还具有电接地并设置在排气流路中的接地部件。 接地部件具有由导电材料制成的导电部分，导电部分具有暴露于排气流路的暴露区域，范围为100-1000cm 2。

公开(公告)号：US08920596B2

公开(公告)日：2014-12-30

申请号：US12862915

申请日：2010-08-25

申请人： Naoki Mihara ,  Naoki Matsumoto ,  Jun Yoshikawa ,  Kazuo Murakami

发明人： Naoki Mihara ,  Naoki Matsumoto ,  Jun Yoshikawa ,  Kazuo Murakami

IPC分类号： H01L21/3065 ,  H01J37/32

CPC分类号： H01J37/32192 ,  C23C16/513 ,  H01J37/3244 ,  H01J37/32449

摘要： In a plasma processing apparatus for processing a substrate by plasmatizing a process gas introduced into a processing container, an introducing unit which introduces the process gas is formed on a ceiling surface of the processing container; a gas retention portion which gathers the process gas supplied from the outside of the processing container through a supply passage, and a plurality of gas ejection holes which allow communication between the gas retention portion and the inside of the processing container are formed in the introducing unit; a gas ejection hole is not formed in a location of the gas retention portion that faces an opening of the supply passage; and a cross section of each of the gas ejection holes has a flat shape.

摘要翻译： 在通过对引入到处理容器中的处理气体进行等离子体处理衬底的等离子体处理装置中，在处理容器的顶表面上形成引入处理气体的引入单元; 气体保持部，其通过供给通路收集从处理容器的外部供给的处理气体，并且在导入单元中形成有能够使气体保持部与处理容器内部连通的多个气体喷出孔 ; 在气体保持部的与供给通道的开口相对的位置处不形成气体喷出孔; 并且每个气体喷射孔的横截面具有扁平形状。

公开(公告)号：US08877004B2

公开(公告)日：2014-11-04

申请号：US12866545

申请日：2009-02-06

申请人： Naoki Matsumoto ,  Kazuyuki Kato ,  Masafumi Shikata ,  Masaru Sasaki

发明人： Naoki Matsumoto ,  Kazuyuki Kato ,  Masafumi Shikata ,  Masaru Sasaki

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01J37/32 ,  H05H1/46

CPC分类号： H05H1/46 ,  H01J37/32192 ,  H01J37/32238

摘要： A dielectric plate 20 is provided at a ceiling surface facing a susceptor 3 of a processing chamber 2, and a slot antenna 30 having a multiple number of microwave transmissive slots 33 is provided on a top surface of the dielectric plate 20. A protrusion member 21 configured as a separate member from the dielectric plate 20 is provided on a peripheral portion of a bottom surface of the dielectric plate 20 so as to prevent an abnormal electric discharge. Electric field intensity in the vicinity of the dielectric plate 20 is controlled by adjusting a gap between an outer peripheral surface 22 of a cylindrical part of the protrusion member 21 and an inner peripheral surface 5a of a sidewall of the processing chamber 2 or by adjusting a thickness of the cylindrical part of the protrusion member 21.

摘要翻译： 电介质板20设置在面向处理室2的基座3的顶面上，并且具有多个微波透射槽33的缝隙天线30设置在电介质板20的顶表面上。突起构件21 在电介质板20的底面的周边部设置有与电介质板20分离的部件，以防止异常放电。 通过调整突起部件21的圆筒部的外周面22与处理室2的侧壁的内周面5a之间的间隙，调整电介质板20附近的电场强度， 突出部件21的圆筒部的厚度。

公开(公告)号：US08617865B2

公开(公告)日：2013-12-31

申请号：US13124510

申请日：2009-10-02

申请人： Megumi Nakagawa ,  Naoki Matsumoto ,  Hitoshi Amano ,  Shotaro Yamaguchi

发明人： Megumi Nakagawa ,  Naoki Matsumoto ,  Hitoshi Amano ,  Shotaro Yamaguchi

IPC分类号： C12N9/14

CPC分类号： C12N9/18 ,  C12P7/42

摘要： Disclosed is a thermostable tannase derived from a microorganism. Specifically disclosed is a thermostable tannase derived from Aspergillus awamori or Aspergillus niger. A preferred embodiment of the tannase has the following chemoenzymatic properties: (1) activity: to act on a depside bond to thereby cause hydrolysis; (2) molecular weight: about 230,000 Da (as measured by gel filtration); and (3) thermal stability: stable at a temperature up to 65° C. (pH 5.0, 30 min.)

摘要翻译： 公开了一种衍生自微生物的热稳定性鞣酸酶。 具体公开了源自泡盛曲霉或黑曲霉的热稳定性鞣酸酶。 鞣酸酶的优选实施方案具有以下化学酶学性质：（1）活性：作用于脱附键从而引起水解; （2）分子量：约230,000Da（通过凝胶过滤测量）; 和（3）热稳定性：在高达65℃的温度下稳定（pH5.0,30分钟）

公开(公告)号：USD694791S1

公开(公告)日：2013-12-03

申请号：US29416088

申请日：2012-03-19

申请人： Naoki Matsumoto ,  Jun Yoshikawa

设计人： Naoki Matsumoto ,  Jun Yoshikawa

公开(公告)号：USD694790S1

公开(公告)日：2013-12-03

申请号：US29416082

申请日：2012-03-19

申请人： Naoki Matsumoto ,  Jun Yoshikawa

设计人： Naoki Matsumoto ,  Jun Yoshikawa

公开(公告)号：US20130134434A1

公开(公告)日：2013-05-30

申请号：US13307396

申请日：2011-11-30

申请人： Hidenori Mikami ,  Naoki Matsumoto ,  Hideki Osada ,  Yusuke Yoshizumi ,  Sayuri Yamaguchi

发明人： Hidenori Mikami ,  Naoki Matsumoto ,  Hideki Osada ,  Yusuke Yoshizumi ,  Sayuri Yamaguchi

IPC分类号： H01L29/15

CPC分类号： H01S5/3202 ,  B82Y20/00 ,  H01L29/045 ,  H01L29/2003 ,  H01L29/7787 ,  H01L29/808 ,  H01L29/812 ,  H01S5/2201 ,  H01S5/34333 ,  H01S2301/176

摘要： A nitride semiconductor device includes a main surface and an indicator portion. The main surface is a plane inclined by at least 71° and at most 79° in a [1-100] direction from a (0001) plane or a plane inclined by at least 71° and at most 79° in a [−1100] direction from a (000-1) plane. The indicator portion indicates a (−1017) plane, a (10-1-7) plane, or a plane inclined by at least −4° and at most 4° in the [1-100] direction from these planes and inclined by at least −0.5° and at most 0.5° in a direction orthogonal to the [1-100] direction.

摘要翻译： 氮化物半导体器件包括主表面和指示器部分。 主表面是在[0001]面或[-1100]中倾斜至少71°和最多79°的平面的[1-100]方向上倾斜至少71°和至多79°的平面 ]方向从（000-1）平面。 指示器部分表示（-1017）面，（10-1-7）面，或在这些平面沿[1-100]方向倾斜至少-4°至最多4°的平面，并且倾斜于 在与[1-100]方向正交的方向上至少为-0.5°且至多0.5°。

公开(公告)号：US08410817B2

公开(公告)日：2013-04-02

申请号：US12858295

申请日：2010-08-17

申请人： Yuji Kuwana ,  Naoki Matsumoto ,  Yasuhiro Urabe

发明人： Yuji Kuwana ,  Naoki Matsumoto ,  Yasuhiro Urabe

IPC分类号： H03K19/0175 ,  H03B1/00

CPC分类号： H03K19/001 ,  H03K17/04126 ,  H03K19/0136 ,  H03K2217/0036

摘要： A level switch circuit receives a digital input signal, and generates a level signal having a voltage level that corresponds to the value of the input signal thus received. A buffer circuit receives a level signal, and outputs the level signal via an output terminal thereof. A bias current generating circuit generates a bias current including a DC component having a constant level and a variable component that changes according to the input signal, and supplies the bias current thus generated to a buffer circuit. The bias current generating circuit detects an edge of the input signal, and raises the bias current by a predetermined amount for a predetermined period of time after the edge thus detected.

摘要翻译： 电平开关电路接收数字输入信号，并产生具有与所接收的输入信号的值对应的电压电平的电平信号。 缓冲电路接收电平信号，并通过其输出端输出电平信号。 偏置电流产生电路产生包括具有恒定电平的DC分量和根据输入信号而变化的可变分量的偏置电流，并将由此产生的偏置电流提供给缓冲电路。 偏置电流产生电路检测输入信号的边缘，并且在如此检测到的边缘之后的预定时间段内将偏置电流提高预定量。

公开(公告)号：US08268643B2

公开(公告)日：2012-09-18

申请号：US13062590

申请日：2009-09-04

申请人： Naoki Matsumoto

发明人： Naoki Matsumoto

IPC分类号： H01L21/66

CPC分类号： C30B29/406 ,  C30B25/20 ,  H01L21/02395 ,  H01L21/0243 ,  H01L21/02458 ,  H01L21/0254 ,  H01L21/02642 ,  H01L21/02647 ,  H01L21/02658

摘要： The present invention provides a substrate formed at a low cost and having a controlled plate shape, an epitaxial layer provided substrate obtained by forming an epitaxial layer on the substrate, and methods for producing them. The method for producing the substrate according to the present invention includes an ingot growing step serving as a step of preparing an ingot formed of gallium nitride (GaN); and a slicing step serving as a step of obtaining a substrate formed of gallium nitride, by slicing the ingot. In the slicing step, the substrate thus obtained by the slicing has a main surface with an arithmetic mean roughness Ra of not less than 0.05 μm and not more than 1 μm on a line of 10 mm.

摘要翻译： 本发明提供一种以低成本形成并具有受控板形状的基板，通过在基板上形成外延层而获得的外延层提供的基板及其制造方法。 根据本发明的基板的制造方法包括：铸锭生长步骤，用于制备由氮化镓（GaN）形成的铸锭的步骤; 以及作为通过切割锭来获得由氮化镓形成的衬底的步骤的切片步骤。 在切片工序中，通过切片得到的基板在10mm的线上具有算术平均粗糙度Ra为0.05μm以上且1μm以下的主面。